CN110500878A - Vacuum oxygen-free curing oven - Google Patents
Vacuum oxygen-free curing oven Download PDFInfo
- Publication number
- CN110500878A CN110500878A CN201910844264.8A CN201910844264A CN110500878A CN 110500878 A CN110500878 A CN 110500878A CN 201910844264 A CN201910844264 A CN 201910844264A CN 110500878 A CN110500878 A CN 110500878A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- burner hearth
- curing oven
- temperature
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000001301 oxygen Substances 0.000 claims abstract description 22
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 22
- 238000001816 cooling Methods 0.000 claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims abstract description 5
- 238000005259 measurement Methods 0.000 claims description 16
- 230000009467 reduction Effects 0.000 claims description 8
- 238000010276 construction Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 3
- 239000004945 silicone rubber Substances 0.000 claims description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 2
- 101100190621 Arabidopsis thaliana PLC4 gene Proteins 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 230000006870 function Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- DBUTVDSHVUGWOZ-UHFFFAOYSA-N [Si].[Ni].[Cr].[Ni] Chemical compound [Si].[Ni].[Cr].[Ni] DBUTVDSHVUGWOZ-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000011897 real-time detection Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/14—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/18—Arrangement of controlling, monitoring, alarm or like devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B2005/062—Cooling elements
- F27B2005/066—Cooling elements disposed around the fan
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27M—INDEXING SCHEME RELATING TO ASPECTS OF THE CHARGES OR FURNACES, KILNS, OVENS OR RETORTS
- F27M2003/00—Type of treatment of the charge
- F27M2003/08—Curing; Baking
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
Abstract
The invention discloses a vacuum anaerobic curing furnace, which comprises a furnace body, a furnace door, a hearth, a controller, a vacuum system, an air cooling system, a temperature control system, an air passing channel, a plurality of air inlets, an air outlet, a supporting plate, a temperature measuring element, a heater, a touch screen, a buzzer and an indicator light, wherein the furnace door is arranged on the furnace body; the vacuum system comprises a vacuum pump, an inflator pump, a vacuum degree detection element, an oxygen content analyzer and an electromagnetic valve; the air cooling system comprises an air amplifier; the temperature control system comprises a temperature controller. The automatic control device has the advantages of simple structure and low cost, realizes the automatic control of the curing oven, avoids the problems of over-temperature, hearth deformation, uneven heating, insufficient atmosphere and the like, and ensures the normal work and the working efficiency of the curing oven.
Description
Technical field
The present invention relates to electronic technology field, specifically a kind of vacuum anaerobic curing oven.
Background technique
In electronic semi-conductor's production field, curing oven is common one of manufacturing and processing equipment.It is currently used for partly leading
Body disk PR glue, the cured curing oven of dumping, there are following relatively distinct issues:
1, the operating temperature of curing oven needs to be maintained at 400 DEG C -450 DEG C, once the phenomenon that overtemperature occurs in use process,
On the one hand the workpiece in it can be damaged, to influence product quality, generates substandard products, even waste product；On the other hand it can damage
Burner hearth causes burner hearth to deform, to cause security risk, influences the normal work of curing oven.
2, generally the surrounding of hearth outer wall installs heating by the way of multiple spot arrangement to existing curing oven inside it
Pipe so that inside burner hearth can thermally equivalent, to reach uniformly heated purpose；But the mode of this multiple spot arrangement heating tube
So that burner hearth internal temperature rise is slower, to influence the working efficiency of curing oven.
3, curing oven operate normally when firstly the need of to its inside burner hearth carry out vacuumize process so that inside burner hearth at
For " vacuum ", to build the atmosphere of anaerobic；However, " vacuum " is not absolute vacuum here, need to guarantee the inside pressure of burner hearth
Power maintains in a reasonable range, therefore, it is necessary to need to backfill the gas of non-oxygen, generally nitrogen after evacuation,
This just needs to design reasonable vacuum system.
4, curing oven cools down after power cut-off, and existing curing oven or is not equipped with effective drop
Warm measure or use water-cooled cooling mode, but structure is relative complex, higher cost.
Summary of the invention
The object of the present invention is to provide a kind of vacuum anaerobic curing ovens, and structure is simple, at low cost, Lai Shixian curing oven from
Dynamicization control, to avoid there is the problems such as overtemperature, burner hearth deformation, heating is uneven, atmosphere is insufficient, to guarantee the normal work of curing oven
Work and working efficiency.
Technical scheme is as follows:
A kind of vacuum anaerobic curing oven includes furnace body, fire door, burner hearth, controller, vacuum system, wind cooling temperature lowering system
And temperature control system, it is characterised in that: the burner hearth is set in the furnace body, and the upper and lower side of burner hearth and rear side with
Gap is all had between the inner wall of the furnace body and forms wind passage, and the upper and lower side of the furnace body, which is equipped with, crosses wind with described
The rear side of multiple air inlets that channel communicates, furnace body is equipped with air outlet；
The inside of the burner hearth is separately installed with supporting plate and temperature element, and the outside of burner hearth, which is equipped with, is looped around its surrounding
Heater, the side of burner hearth, which is respectively equipped with, vacuumizes interface, inflatable interface, vacuum degree measurement interface and oxygen content detection interface；
The vacuum system includes vacuum pump, inflator pump, vacuum degree measurement element and oxygen conten analyser, described
Vacuum pump and inflator pump are respectively corresponded by pipeline and vacuumize interface and inflatable interface is connected, the inflator pump and institute with described
It states and solenoid valve is installed on the pipeline that inflatable interface is connected, the vacuum degree measurement element and the vacuum degree measurement interface
It is connected, probe extends to the inside of the burner hearth, and the probe of the oxygen conten analyser and the oxygen content detect interface
It is connected；On the one hand the controller is connected with the vacuum degree measurement element and oxygen conten analyser respectively, another party
Face is connected with the solenoid valve, and is connected respectively by the first and second solid-state relay correspondence with the vacuum pump and inflator pump
It connects；
The wind cooling temperature lowering system includes the air amplifier being connected with the air outlet, and the controller is logical
Third solid-state relay is crossed to be connected with the air amplifier；
The temperature control system includes the temperature controller being connected with the controller, and the temperature controller is on the one hand
It is connected with the temperature element, is on the other hand connected by the 4th solid-state relay with the heater；
The side of the furnace body is equipped with operation panel, and touch screen, buzzer are separately installed on the operation panel
And indicator light, the touch screen are connected with the controller, the alarm signal output ends of the temperature controller respectively with it is described
Buzzer be connected with indicator light.
The vacuum anaerobic curing oven, it is characterised in that: the furnace body is the master of SUS310S stainless steel by material
Body frame and hanging plate are formed using mirror surface welding manner assembly welding.
The vacuum anaerobic curing oven, it is characterised in that: the front side of the furnace body is equipped with opening, and the fire door passes through
For hinge with a side of the opening along being connected, the other side edge of the opening is equipped with the door for locking the fire door
It locks, the surrounding on the inside of the fire door is equipped with silicone rubber O-ring.
The vacuum anaerobic curing oven, it is characterised in that: the burner hearth and heater is front side opening, rear side envelope
The tubular construction closed, the material of the burner hearth are SUS316S stainless steel.
The vacuum anaerobic curing oven, it is characterised in that: the surrounding outside the inside of the fire door and the burner hearth is equal
Ceramic beaverboard for insulation is installed.
The vacuum anaerobic curing oven, it is characterised in that: the controller uses PLC.
The vacuum anaerobic curing oven, it is characterised in that: the temperature element uses nickel chromium-nickel silicon thermocouple, institute
The vacuum degree measurement element stated uses resistance vacuum gauge.
The vacuum anaerobic curing oven, it is characterised in that: the connection between the inflator pump and the inflatable interface
Speed governing valve and pressure gauge are separately installed on pipeline.
The vacuum anaerobic curing oven, it is characterised in that: be separately installed on the operation panel " power supply " button,
" emergency stop " button and " noise reduction " button, described " noise reduction " button be connected to the alarm signal output ends of the temperature controller with it is described
Between buzzer.
Beneficial effects of the present invention:
1, temperature control system of the present invention, reachable ± 1 DEG C of temperature-controlled precision, once there is the phenomenon that overtemperature,
The current supply circuit of heater is automatically cut off, and issues sound and light alarm signal, the workpiece in it on the one hand will not be damaged, to guarantee
Product quality；On the other hand burner hearth will not be damaged, has prevented burner hearth and deformed, avoided security risk, to ensure that
The normal work of curing oven.
2, heater of the present invention is centered around the tubular construction of surrounding outside burner hearth in a ring, can be to burner hearth
Under the premise of being evenly heated, the temperature rise efficiency inside burner hearth, maximum temperature rise rate≤8 DEG C/min are effectively increased, and make
Temperature uniformity≤2%MFS inside burner hearth is obtained, to ensure that the working efficiency of curing oven.
3, vacuum system of the present invention carries out vacuumize process to burner hearth first, reaches in burner hearth internal vacuum
After mark, it is filled with nitrogen (20L/min) into burner hearth and backfilled, replaced, after oxygen content is up to standard inside the burner hearth, adjusts nitrogen
Charge carries out the maintenance of small flow nitrogen (4L/min), maintains in a zone of reasonableness in the internal pressure for guaranteeing burner hearth
Under the premise of, reliable oxygen-free environment can be built.
4, wind cooling temperature lowering system of the present invention, 400 DEG C -80 DEG C of rate of temperature fall ,≤2.5h, can rapidly and efficiently
Cool down to the inside of curing oven, cooling effect is obvious, and structure is simple, at low cost.
Detailed description of the invention
Fig. 1 is structure of the invention main view.
Fig. 2 is structure of the invention side view.
Fig. 3 is external perspective structural representation of the present invention.
Fig. 4 is the structural schematic diagram of burner hearth in the present invention.
Fig. 5 is the schematic perspective view of heater in the present invention.
Fig. 6 is the structural schematic diagram of air-cooled cooling system in the present invention.
Fig. 7 is electric control theory figure of the present invention.
Specific embodiment
Referring to attached drawing, a kind of vacuum anaerobic curing oven includes furnace body 1, fire door 2, burner hearth 3, PLC4, vacuum system, wind
Cold cooling system and temperature control system, burner hearth 3 are set in furnace body 1, and the upper and lower side of burner hearth 3 and rear side and furnace body 1 is interior
Gap is all had between wall and forms wind passage 5, and the upper and lower side of furnace body 1 is equipped with the multiple air inlets communicated with wind passage 5
The rear side of mouth 6, furnace body 1 is equipped with air outlet 7；
The inside of burner hearth 3 is separately installed with supporting plate 8 and nickel chromium-nickel silicon thermocouple 9, and the outside of burner hearth 3, which is equipped with, to be looped around
The heater 10 of its surrounding, the side of burner hearth 3, which is respectively equipped with, vacuumizes interface 29, inflatable interface 30, vacuum degree measurement interface 31
Interface 32 is detected with oxygen content；
Vacuum system includes vacuum pump 11, inflator pump 12, resistance vacuum gauge 13 and oxygen conten analyser 14, vacuum pump 11
It is respectively corresponded with inflator pump 12 by pipeline and vacuumizes interface 29 and inflatable interface 30 is connected, inflator pump 12 and inflatable interface
Solenoid valve 34 is installed, resistance vacuum gauge 13 is connected with vacuum degree measurement interface 31, and probe prolongs on 30 pipelines being connected
The inside of burner hearth 3 is reached, the probe of oxygen conten analyser 14 is connected with oxygen content detection interface 32；PLC4 on the one hand respectively with
Resistance vacuum gauge 13 is connected with oxygen conten analyser 14, is on the other hand connected with solenoid valve 34, and passes through first and second respectively
The correspondence of solid-state relay 15,16 is connected with vacuum pump 11 and inflator pump 12；
Wind cooling temperature lowering system includes the air amplifier 17 being connected with air outlet 7, and PLC4 passes through third solid-state relay
Device 33 is connected with air amplifier 17；
Temperature control system includes the temperature controller 18 being connected with PLC4,18 one side of temperature controller and nickel chromium triangle-nisiloy heat
Galvanic couple 9 is connected, and is on the other hand connected by the 4th solid-state relay 19 with heater 10；
The side of furnace body 1 is equipped with operation panel 20, and touch screen 21,22 and of buzzer are separately installed on operation panel 20
Indicator light 23, touch screen 21 are connected with PLC4, the alarm signal output ends of temperature controller 18 respectively with buzzer 22 and indicator light
23 are connected.
In the present invention, the main body frame and hanging plate that furnace body 1 is SUS310S stainless steel by material are using mirror surface welding manner
Assembly welding forms, and has the characteristics that sound construction, is unlikely to deform, lighter in weight.
The front side of furnace body 1 is equipped with opening, and fire door 2 is connected by hinge 24 with a side of opening edge, the other side of opening
Edge is equipped with the door lock 25 for locking fire door 2, and the surrounding of 2 inside of fire door is equipped with silicone rubber O-ring, can play very
Good sealing function.
Burner hearth 3 and heater 10 are that front side is open, the closed tubular construction of rear side, the material of burner hearth be SUS316S not
Become rusty steel.
The inside of fire door 2 and the surrounding outside burner hearth 3 are mounted on the ceramic beaverboard for insulation, have fine
Function of heat insulation.
It is separately installed with speed governing valve and pressure gauge on connecting line between inflator pump 11 and inflatable interface, is adjusted by adjusting
The adjustable gas flow being currently passed through in burner hearth 3 of fast valve.
" power supply " button 26, " emergency stop " button 27 and " noise reduction " button 28, " noise reduction " are separately installed on operation panel 20
Button 28 is connected between the alarm signal output ends of temperature controller 18 and buzzer 22.
Below in conjunction with attached drawing, the present invention is further illustrated:
Fire door 2 is opened, workpiece is placed on the supporting plate 8 in burner hearth 3, can need according to actual use, be drawn on supporting plate 8
Divide multiple regions for being used to place workpiece, the bracket for placing workpiece can also be set on supporting plate 8, then shut fire door 2 simultaneously
It is locked by door lock 25.
PLC4 outputs level signals are to the first solid-state relay 15, so that the first solid-state relay 15 is closed, vacuum at this time
Pump 11 obtains electric start-up operation, carries out vacuumize process to burner hearth 3, the vacuum degree in 13 real-time detection burner hearth 3 of resistance vacuum gauge
Value, and fed back to PLC4；After vacuum degree is up to standard in burner hearth 3, PLC4 is solid to the first solid-state relay 15 and second respectively
State relay 16 exports two different level signals respectively, so that the first solid-state relay 15 disconnects, the second solid-state relay
16 closures, the power-off of vacuum pump 11 stop working, and inflator pump 12 obtains electric start-up operation, and nitrogen (20L/min) is filled with into burner hearth 3,
It backfilled, replaced；In above process, the oxygen content numerical value in 14 real-time detection burner hearth 3 of oxygen conten analyser, and it is anti-
It is fed to PLC4；After oxygen content is up to standard in burner hearth 3, the opening size of PLC4 electromagnetic valve for adjusting 34, and then adjust being filled with for nitrogen
Amount, carries out the maintenance of small flow nitrogen (4L/min), before guaranteeing that the internal pressure of burner hearth 3 maintains in a zone of reasonableness
It puts, builds reliable oxygen-free environment.
18 outputs level signals of temperature controller are to the 4th solid-state relay 19, so that the 4th solid-state relay 19 is closed, at this time
Heater 10 electric start-up operation, since heater 10 is centered around the tubular construction of 3 outside surrounding of burner hearth in a ring, can be right
Under the premise of burner hearth 3 is evenly heated, the temperature rise efficiency inside burner hearth 3 is effectively increased, maximum temperature rise rate≤8 DEG C/
Min, and make temperature uniformity≤2%MFS inside burner hearth 3；Temperature in 9 real-time detection burner hearth 3 of nickel chromium-nickel silicon thermocouple
Numerical value, and fed back to PLC4；When the temperature in burner hearth 3 is more than the temperature value upper limit of setting, that is, when there is the phenomenon that overtemperature,
PLC4 is to 19 outputs level signals of the 4th solid-state relay, so that the 4th solid-state relay 19 disconnects, the power-off of heater 10 stops
Work automatically cuts off the current supply circuit of heater, while outputs level signals issue acousto-optic to buzzer 22 and indicator light 23
Alarm signal prompts operator to intervene or safeguard.
Entire curing oven is after power cut-off, PLC4 outputs level signals to third solid-state relay 33, so that third is solid
State relay 33 is closed, and air amplifier 17 obtains electric start-up operation at this time, carries out wind cooling temperature lowering processing, detailed process to burner hearth 3
Are as follows: under the pressure pump drainage effect of air amplifier 17, outside air constantly enters through the multiple air inlets 6 in the upper and lower side of furnace body 1
Wind passage 5 constantly purges the outer wall of burner hearth 3, is cooled down, and 400 DEG C -80 DEG C of rate of temperature fall ,≤2.5h.
Burner hearth 3 carries out insulation by being outside it the ceramic beaverboard of surrounding, and outside lead all uses
Kiln and the dedicated sealing material sealing of vacuum equipment.
What the connection type of all pipelines of vacuum system was all made of is the dedicated quick-release type connector of vacuum equipment, is conveniently torn open
It unloads, good seal performance.
Temperature control system uses DCS Distributed Control System, and upper is touch screen 21, and bottom is PLC4.Two kinds of control phases
It is mutually independent but can communicate each other, increase the operability of equipment operation.Temperature controller 18 has self-setting function, deviation report
The functions such as the multinomial alarm and protection such as alert, P.I.D. parameter setting and locking, high temperature upper limit alarm.Temperature controller 18 is by the temperature of actual measurement
It is compared, handles with set temperature, outputs level signals to the 4th solid-state relay 19, the 4th solid-state relay 19 of control
On-off to achieve the purpose that temperature control, realizes balance heating to control the energization and power-off of heater 10, and reduces pair
The interference of power grid and peripheral equipment extends the service life of control device.Temperature controller 18 is defeated by the temperature of actual measurement by PLC4 simultaneously
It send to touch screen 21 and is shown, realize tracking, the monitoring of temperature.
Touch screen 21 realizes the functions such as data acquisition, record, state analysis, parameter regulation and curve memory, and can be real
The unified management of existing temperature control etc..
Operator can be according to design requirement, and the operating temperature by the reasonable setting curing oven of touch screen 21 is (including upper
Limit value), vacuum degree value up to standard, oxygen content value up to standard, duty cycle (working time) and wind cooling temperature lowering processing time etc..
Touch screen 21 can be implemented function such as mainly:
(1), temperature acquisition and record: convenient for quality management and solidification situation tracking；
(2), curve is stored and recalled automatically: client can be for different product, and setting is a variety of to use curve, and can adjust at any time
It uses out；
(3), parameter adjusts: including the slave computers such as temperature, control parameter (PLC) adjustable parameter, (can touch in host computer
Screen) realize control.
Temperature control system of the invention also has a characteristic that
(1), multiple functional: the present invention issues alarm signal to failures such as overtemperatures in the course of work, and is automatically performed
Protection act.Operator can be determined in alarm by two kinds of forms of audible alarm and signal lamp indicating operating status
Hold.
(2), easy to operate: directly after set-up function is completed at touch screen operation interface, later work is automatically performed.
(3), all touch screen operation monitoring, working condition are very clear.
The present invention combines type of alarm using acousto-optic, and when temperature is more than setting value, indicator light 23 is lighted, while buzzer
22 sound the alarm, and maintenance personnel can press " noise reduction " button 28 and temporarily eliminate alarm, only completely after debugging, bee
Ring device 22 can just be automatically closed.
Each button is described as follows:
" power supply " button 26: device power or power-off.
" emergency stop " button 27: all electric appliances on off device.
" noise reduction " button 28: the sound of pass hull closure buzzer.
Above embodiment is only that the preferred embodiments of the invention are described, not to protection model of the invention
It encloses and is defined, without departing from the spirit of the design of the present invention, those of ordinary skill in the art are to technical side of the invention
The modification and improvement that case is made should all be fallen within the scope of protection of the present invention.
Claims (9)
1. a kind of vacuum anaerobic curing oven, include furnace body, fire door, burner hearth, controller, vacuum system, wind cooling temperature lowering system and
Temperature control system, it is characterised in that: the burner hearth is set in the furnace body, and the upper and lower side of burner hearth and rear side and institute
It states and all has gap between the inner wall of furnace body and form wind passage, the upper and lower side of the furnace body is equipped with to be led to the wind of crossing
The rear side of multiple air inlets that road communicates, furnace body is equipped with air outlet；
The inside of the burner hearth is separately installed with supporting plate and temperature element, and the outside of burner hearth is equipped with the heating for being looped around its surrounding
Device, the side of burner hearth, which is respectively equipped with, vacuumizes interface, inflatable interface, vacuum degree measurement interface and oxygen content detection interface；
The vacuum system includes vacuum pump, inflator pump, vacuum degree measurement element and oxygen conten analyser, the vacuum
Pump and inflator pump are respectively corresponded by pipeline vacuumizes interface and inflatable interface is connected with described, and the inflator pump is filled with described
Solenoid valve is installed, the vacuum degree measurement element is connected with the vacuum degree measurement interface on the pipeline that gas interface is connected
It connects, probe extends to the inside of the burner hearth, and the probe of the oxygen conten analyser is connected with oxygen content detection interface
It connects；On the one hand the controller is connected with the vacuum degree measurement element and oxygen conten analyser respectively, on the other hand with
The solenoid valve is connected, and is connected respectively by the way that the first and second solid-state relay is corresponding with the vacuum pump and inflator pump；
The wind cooling temperature lowering system includes the air amplifier being connected with the air outlet, and the controller passes through the
Three solid-state relays are connected with the air amplifier；
The temperature control system includes the temperature controller being connected with the controller, the temperature controller one side and institute
It states temperature element to be connected, be on the other hand connected by the 4th solid-state relay with the heater；
The side of the furnace body is equipped with operation panel, and touch screen, buzzer are separately installed on the operation panel and is referred to
Show that lamp, the touch screen are connected with the controller, the alarm signal output ends of the temperature controller respectively with the bee
Ring device is connected with indicator light.
2. vacuum anaerobic curing oven according to claim 1, it is characterised in that: the furnace body is by material
The main body frame and hanging plate of SUS310S stainless steel are formed using mirror surface welding manner assembly welding.
3. vacuum anaerobic curing oven according to claim 1, it is characterised in that: the front side of the furnace body is equipped with opening, institute
The fire door stated is connected by hinge with a side of opening edge, and the other side edge of the opening is equipped with for locking
The door lock of fire door is stated, the surrounding on the inside of the fire door is equipped with silicone rubber O-ring.
4. vacuum anaerobic curing oven according to claim 1, it is characterised in that: the burner hearth and heater is front side
Open, the closed tubular construction of rear side, the material of the burner hearth are SUS316S stainless steel.
5. vacuum anaerobic curing oven according to claim 1, it is characterised in that: outside the inside of the fire door and the burner hearth
The surrounding in portion is mounted on the ceramic beaverboard for insulation.
6. vacuum anaerobic curing oven according to claim 1, it is characterised in that: the controller uses PLC.
7. vacuum anaerobic curing oven according to claim 1, it is characterised in that: the temperature element uses nickel chromium triangle-nickel
Silicon thermocouple, the vacuum degree measurement element use resistance vacuum gauge.
8. vacuum anaerobic curing oven according to claim 1, it is characterised in that: the inflator pump and the inflatable interface
Between connecting line on be separately installed with speed governing valve and pressure gauge.
9. vacuum anaerobic curing oven according to claim 1, it is characterised in that: be separately installed on the operation panel
" power supply " button, " emergency stop " button and " noise reduction " button, described " noise reduction " button are connected to the alarm signal of the temperature controller
Between output end and the buzzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910844264.8A CN110500878A (en) | 2019-09-06 | 2019-09-06 | Vacuum oxygen-free curing oven |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910844264.8A CN110500878A (en) | 2019-09-06 | 2019-09-06 | Vacuum oxygen-free curing oven |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110500878A true CN110500878A (en) | 2019-11-26 |
Family
ID=68591414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910844264.8A Pending CN110500878A (en) | 2019-09-06 | 2019-09-06 | Vacuum oxygen-free curing oven |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110500878A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114216869A (en) * | 2021-10-19 | 2022-03-22 | 华灿光电（浙江）有限公司 | Wafer doping detection system and detection method |
| CN117704786A (en) * | 2024-02-04 | 2024-03-15 | 弗恩森(天津)科技有限公司 | Positive electrode material sintering equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202928343U (en) * | 2012-11-05 | 2013-05-08 | 四川省眉山市力达电子有限责任公司 | Negative pressure sintering device of bell-type furnace |
| CN103398577A (en) * | 2013-08-02 | 2013-11-20 | 宁波宁港永磁材料有限公司 | Samarium cobalt permanent magnet vacuum sintering furnace |
| CN203443322U (en) * | 2013-09-09 | 2014-02-19 | 刘川铭 | Microwave sintering furnace |
| KR20150055343A (en) * | 2013-11-13 | 2015-05-21 | (주)우리정도 | Chemical Vapor Deposition System for High Speed Deposition and Method Thereof |
| CN109014191A (en) * | 2018-07-23 | 2018-12-18 | 沈阳中北真空技术有限公司 | A kind of rare earth permanent magnet vacuum heat treatment furnace and rare earth permanent magnet heat treatment method |
| CN210718597U (en) * | 2019-09-06 | 2020-06-09 | 合肥真萍电子科技有限公司 | Vacuum oxygen-free curing oven |
-
2019
- 2019-09-06 CN CN201910844264.8A patent/CN110500878A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202928343U (en) * | 2012-11-05 | 2013-05-08 | 四川省眉山市力达电子有限责任公司 | Negative pressure sintering device of bell-type furnace |
| CN103398577A (en) * | 2013-08-02 | 2013-11-20 | 宁波宁港永磁材料有限公司 | Samarium cobalt permanent magnet vacuum sintering furnace |
| CN203443322U (en) * | 2013-09-09 | 2014-02-19 | 刘川铭 | Microwave sintering furnace |
| KR20150055343A (en) * | 2013-11-13 | 2015-05-21 | (주)우리정도 | Chemical Vapor Deposition System for High Speed Deposition and Method Thereof |
| CN109014191A (en) * | 2018-07-23 | 2018-12-18 | 沈阳中北真空技术有限公司 | A kind of rare earth permanent magnet vacuum heat treatment furnace and rare earth permanent magnet heat treatment method |
| CN210718597U (en) * | 2019-09-06 | 2020-06-09 | 合肥真萍电子科技有限公司 | Vacuum oxygen-free curing oven |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114216869A (en) * | 2021-10-19 | 2022-03-22 | 华灿光电（浙江）有限公司 | Wafer doping detection system and detection method |
| CN117704786A (en) * | 2024-02-04 | 2024-03-15 | 弗恩森(天津)科技有限公司 | Positive electrode material sintering equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105376997B (en) | Control method of positive pressure explosion-proof control cabinet | |
| CN110500878A (en) | Vacuum oxygen-free curing oven | |
| CN206536799U (en) | A kind of injection mold monitoring system | |
| CN113797870B (en) | Open-close type microwave catalytic reaction device | |
| CN107202495A (en) | Flash burning structure and flash burning stove | |
| CN102353261A (en) | Microwave multifunctional high-temperature experimental furnace | |
| CN106042630A (en) | Electrical control system suitable for photogravure press drying system and control method | |
| CN207602525U (en) | A kind of temperature control device for power device ageing | |
| CN210718597U (en) | Vacuum oxygen-free curing oven | |
| CN207669672U (en) | A kind of auto parts and components production temperature alarming mold | |
| CN205373377U (en) | Oven with duplicate protection function | |
| CN202216534U (en) | Multifunctional microwave high-temperature experimental furnace | |
| CN204458660U (en) | Petroleum logging winch | |
| CN207894024U (en) | Intelligent heat gun device | |
| CN110594749A (en) | Hazardous waste plasma gasification process control system | |
| CN204329589U (en) | A kind of continuous-type microwave electricity Hybrid Heating household china calcining kiln | |
| CN204524157U (en) | Forge hot blank intelligent temperature measurement pay-off | |
| CN115289843A (en) | Furnace body cooling system and cooling process of electric melting furnace | |
| CN107971045A (en) | A kind of general-purpose vertical activates furnace system | |
| CN113547110A (en) | Automatic control system of baking oven | |
| CN208794810U (en) | A kind of high-temperature service reducing temperature of heatstroke prevention automatic control device | |
| CN108050695A (en) | A kind of hot-blast stove of automatic temperature controlling | |
| CN217131537U (en) | Explosion-proof electric heater for air pipeline of ship | |
| CN205020049U (en) | Production potassium permanganate's dedicated far infrared radiation electric heater unit of autoclave | |
| CN219161023U (en) | Electric stove cooling water pressure flow monitoring alarm device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |