CN208917299U - Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber - Google Patents
Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber Download PDFInfo
- Publication number
- CN208917299U CN208917299U CN201821223547.8U CN201821223547U CN208917299U CN 208917299 U CN208917299 U CN 208917299U CN 201821223547 U CN201821223547 U CN 201821223547U CN 208917299 U CN208917299 U CN 208917299U
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- China
- Prior art keywords
- vacuum chamber
- translation
- magnetic steering
- fixed
- mounting plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- 230000007246 mechanism Effects 0.000 title claims abstract description 14
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 abstract description 13
- 230000033001 locomotion Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses magnetic steering translation mechanisms in a kind of vacuum coating equipment vacuum chamber, including vacuum chamber, magnetic steering device, it further include the more connecting rods for being horizontally through vacuum chamber two sides side plate, a plurality of magnetic steering device is vertically fixed in connecting rod, one end of connecting rod is fixed on a mounting board, bellows is cased with outside connecting rod between mounting plate and vacuum chamber, another end cap of connecting rod is in seal sleeve, the drive rod for being horizontally through vacuum chamber two sides side plate is also respectively provided at the both ends of vacuum chamber, fixture is fixed on drive rod, drive rod one end is connect with fixed rotation motor on a mounting board, another end cap is in seal sleeve, the mounting plate is connect with translation driving device, translation driving device can drive mounting plate to move back and forth.Left and right translation of multiple substrate frames under single cabinet vacuum environment may be implemented in the utility model, makes held stationary of the substrate frame in translation motion, not will cause the variation of vacuum degree in whole work process.
Description
Technical field
The utility model relates to technical field of vacuum plating, are magnetic steerings in a kind of vacuum coating equipment vacuum chamber specifically
Translation mechanism.
Background technique
Vacuum coating production line is that multiple vacuum chambers are distributed in same level plane, by glass plating in transmission device
Conveying under, handled by each vacuum chamber, realize surface coating.The substrate frame of vertical vacuum coating film production line passes
When sending, substrate frame is driven perpendicular to vacuum chamber bottom plate, bottom by mechanical transmission mechanism, and top uses magnetic steering device guiding,
The magnetic steering device is then substrate frame top to be made to be installed on two sides in the substrate frame top of bearing glass setting magnet steel
It is provided on wall in the U-lag of multiple groups magnetic steering unit, the effect repelled using magnet steel homopolarity, it is contactless to substrate frame fixed to realize
Position, guiding purpose.The magnetic steering device under vacuum environment is using fixed at present.
Summary of the invention
For above-mentioned the technical problems existing in the prior art, the utility model is provided in a kind of vacuum coating equipment vacuum chamber
Left and right translation of multiple substrate frames under single cabinet vacuum environment may be implemented in magnetic steering translation mechanism.
The technical solution adopted in the utility model is as follows: magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber, packet
Vacuum chamber, magnetic steering device are included, further includes the more connecting rods for being horizontally through vacuum chamber two sides side plate, a plurality of magnetic steering device is vertical
To being fixed in connecting rod, one end of connecting rod is fixed on a mounting board, the connecting rod housing between mounting plate and vacuum chamber
There is bellows, bellows both ends are respectively with mounting plate and vacuum chamber side plate airtight connection, and another end cap of connecting rod is in sealing shroud
In cylinder, seal sleeve is fixed on vacuum chamber side plate, is also respectively provided with one at the both ends of vacuum chamber and is horizontally through vacuum chamber two sides
The drive rod of side plate, be fixed on drive rod with the one-to-one fixture of magnetic steering device, drive rod one end and be fixed on peace
Rotation motor in loading board connects, and bellows, bellows both ends difference are cased with outside the drive rod between mounting plate and vacuum chamber
In mounting plate and vacuum chamber side plate airtight connection, for another end cap of drive rod in seal sleeve, seal sleeve is fixed on vacuum
On the side plate of room, the mounting plate is connect with translation driving device, and the translation driving device can drive mounting plate to move back and forth.
Further, the translation driving device includes that translation motor, the lead screw connecting with translation motor and lead screw cooperate
Feed screw nut, the feed screw nut connect with mounting plate.
It further, further include guided in translation device, the guided in translation device includes line slide rail, is fixed on mounting plate
The sliding block of upper and line slide rail cooperation.
Further, it is connected between the connecting rod, drive rod and vacuum chamber side plate by linear bearing.
The beneficial effects of the utility model are: multiple substrate frames may be implemented under single cabinet vacuum environment in the utility model
Left and right translation, solve the problems, such as the substrate frame swing of upper end and shaking of entire frame during moving horizontally, make base
Held stationary of the horse in translation motion, entire translation mechanism is all to carry out under vacuum conditions, in whole work process
The variation of vacuum degree is not will cause.
Detailed description of the invention
Fig. 1 is the schematic perspective view of the utility model.
Fig. 2 is the longitdinal cross-section diagram of the utility model use state.
Fig. 3 is the view in transverse section of the utility model use state.
Specific embodiment
For the ease of understanding the utility model, below in conjunction with Figure of description and preferred embodiment to the utility model
Work more comprehensively, meticulously describes, but the protection scope of the utility model is not limited to embodiment in detail below.
As shown in Fig. 1-Fig. 3, magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber of the present embodiment, including it is true
Empty room, magnetic steering device 1 further include the more connecting rods 2 for being horizontally through vacuum chamber two sides side plate 15, a plurality of magnetic steering device 1
It is vertically fixed in connecting rod 2, one end of connecting rod 2 is fixed on mounting plate 8, the connection between mounting plate 8 and vacuum chamber
Be cased with bellows 6 outside bar, 6 both ends of bellows respectively at 15 airtight connection of mounting plate 8 and vacuum chamber side plate, connecting rod 2 it is another
In seal sleeve 3, seal sleeve 3 is fixed on vacuum chamber side plate end cap, is also respectively provided with a transverse direction at the both ends of vacuum chamber
Across the drive rod 4 of vacuum chamber two sides side plate, it is fixed on drive rod 4 and the one-to-one fixture 5 of magnetic steering device 1, biography
4 one end of lever is connect with the rotation motor 7 being fixed on mounting plate 8, is cased with outside the drive rod between mounting plate and vacuum chamber
Bellows, bellows both ends are respectively at mounting plate and vacuum chamber side plate airtight connection, and another end cap of drive rod 4 is in seal sleeve
Interior, seal sleeve is fixed on vacuum chamber side plate, and the mounting plate 8 is connect with translation driving device, the translation driving device
Including translating horse, 9, the lead screw 10 connecting with translation motor 9, the feed screw nut 11 cooperated with lead screw 10, the feed screw nut 11
It is connect with mounting plate 8, the translation driving device can drive mounting plate to move back and forth.
It further, further include guided in translation device, the guided in translation device includes line slide rail 12, is fixed on installation
The sliding block 13 cooperated on plate 8 with line slide rail 12.
Further, it is connected between the connecting rod 2, drive rod 4 and vacuum chamber side plate 15 by linear bearing 16.
When magnetic steering translation mechanism works in a kind of vacuum coating equipment vacuum chamber of the utility model, driven by translation motor 9
Dynamic lead screw 10 drives mounting plate 8 to move left and right, so as to drive magnetic steering device 1 and substrate frame 14 to translate, when mobile, and rotation
Turning motor 7 drives drive rod 4 to rotate, so that the fixture being fixed on drive rod 45 be made to put down the folder realized to 14 both ends of substrate frame
It holds, after movement in place, rotation motor driving drive rod is rotated backward, so that fixture be made to be detached from the clamping to substrate frame both ends.
With the help of the introduction present in aforementioned specification and relevant drawings, the technology people of the utility model fields
Member will be appreciated that many modifications and other embodiments of the utility model.It will consequently be understood that the utility model is not limited to
Disclosed specific embodiment, modification and other embodiments are to be considered as included in scope of the appended claims.Although this
Specific term is used in text, they are only used with generic and descriptive sense, rather than limitation.
Claims (4)
1. magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber, including vacuum chamber, magnetic steering device, it is characterised in that:
It further include the more connecting rods for being horizontally through vacuum chamber two sides side plate, a plurality of magnetic steering device is vertically fixed in connecting rod, even
One end of extension bar is fixed on a mounting board, and bellows, bellows both ends are cased with outside the connecting rod between mounting plate and vacuum chamber
Respectively with mounting plate and vacuum chamber side plate airtight connection, in seal sleeve, seal sleeve is fixed on another end cap of connecting rod
On vacuum chamber side plate, it is also respectively provided with the drive rod for being horizontally through vacuum chamber two sides side plate at the both ends of vacuum chamber, is being driven
It is fixed on bar and connects with the one-to-one fixture of magnetic steering device, drive rod one end and fixed rotation motor on a mounting board
It connects, bellows is cased with outside the drive rod between mounting plate and vacuum chamber, bellows both ends are respectively at mounting plate and vacuum chamber side
Plate airtight connection, in seal sleeve, seal sleeve is fixed on vacuum chamber side plate another end cap of drive rod, the mounting plate
It is connect with translation driving device, the translation driving device can drive mounting plate to move back and forth.
2. magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber as described in claim 1, it is characterised in that: described flat
Moving driving device includes translation motor, the lead screw connecting with translation motor, the feed screw nut with lead screw cooperation, the feed screw nut
It is connect with mounting plate.
3. magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber as described in claim 1, it is characterised in that: further include
Guided in translation device, the guided in translation device include line slide rail, the fixed sliding block with line slide rail cooperation on a mounting board.
4. magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber as described in claim 1, it is characterised in that: the company
It is connected between extension bar, drive rod and vacuum chamber side plate by linear bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821223547.8U CN208917299U (en) | 2018-07-31 | 2018-07-31 | Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821223547.8U CN208917299U (en) | 2018-07-31 | 2018-07-31 | Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208917299U true CN208917299U (en) | 2019-05-31 |
Family
ID=66701522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821223547.8U Withdrawn - After Issue CN208917299U (en) | 2018-07-31 | 2018-07-31 | Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208917299U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108774732A (en) * | 2018-07-31 | 2018-11-09 | 湖南玉丰真空科学技术有限公司 | Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber |
| CN114318267A (en) * | 2021-12-31 | 2022-04-12 | 湘潭宏大真空技术股份有限公司 | Vacuum sputtering coating device |
-
2018
- 2018-07-31 CN CN201821223547.8U patent/CN208917299U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108774732A (en) * | 2018-07-31 | 2018-11-09 | 湖南玉丰真空科学技术有限公司 | Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber |
| CN108774732B (en) * | 2018-07-31 | 2024-01-30 | 湖南玉丰真空科学技术有限公司 | Magnetic guiding translation mechanism in vacuum chamber of vacuum coating machine |
| CN114318267A (en) * | 2021-12-31 | 2022-04-12 | 湘潭宏大真空技术股份有限公司 | Vacuum sputtering coating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20190531 Effective date of abandoning: 20240130 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20190531 Effective date of abandoning: 20240130 |