CN208917297U - A kind of adjustable numerical control vacuum coating equipment - Google Patents
A kind of adjustable numerical control vacuum coating equipment Download PDFInfo
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- CN208917297U CN208917297U CN201821739749.8U CN201821739749U CN208917297U CN 208917297 U CN208917297 U CN 208917297U CN 201821739749 U CN201821739749 U CN 201821739749U CN 208917297 U CN208917297 U CN 208917297U
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- numerical control
- coating chamber
- thread spindle
- control vacuum
- vacuum coating
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Abstract
The utility model discloses a kind of adjustable numerical control vacuum coating equipments, belong to vacuum coating equipment field, a kind of adjustable numerical control vacuum coating equipment includes coating chamber, the top center of coating chamber is fixed with motor, the bottom end of motor is fixedly connected with thread spindle, thread spindle is located at the inside of coating chamber, several work rests are bolted in the middle part of thread spindle, two walls up and down inside coating chamber are respectively and fixedly provided with adjusting component, component is adjusted to be threadedly engaged with thread spindle, heater is respectively and fixedly provided with positioned on the adjusting component of work rest side, work rest and adjusting component can threadingly axis movements.The adjustable numerical control vacuum coating equipment of the utility model can drive work rest to rotate, and the position of adjustable work rest and heater.
Description
Technical field
The utility model belongs to vacuum coating equipment field more particularly to a kind of adjustable numerical control vacuum coating equipment.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
Include vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxy and PLD pulsed laser deposition etc..Numerical control is numerically controlled
Referred to as, Numeric Control Technology is a kind of method controlled using digital information mechanical movement and process.
In coating process, the placement of workpiece and the indoor temperature of plated film influence particularly important, current Vacuum Deposition on finished product
The work rest and heater of film machine are fixedly installed mostly, on the one hand the fixed setting of work rest is easy to cause plated film incomplete, separately
On the one hand, the adjusting of position can not be carried out according to different size workpiece demand, and the fixed setting of heater be easy to cause heating
Non-uniform temperature, local temperature is excessively high, influences final product quality.
Utility model content
In order to overcome the drawbacks of the prior art, a kind of adjustable the technical problem to be solved by the utility model is to propose
Numerical control vacuum coating equipment can drive work rest to rotate, and the position of adjustable work rest and heater.
For this purpose, the utility model uses following technical scheme:
A kind of adjustable numerical control vacuum coating equipment provided by the utility model, including coating chamber, the top center of coating chamber
It is fixed with motor, the bottom end of motor is fixedly connected with thread spindle, and thread spindle is located at the inside of coating chamber, is spirally connected in the middle part of thread spindle
There are several work rests, two walls up and down inside coating chamber are respectively and fixedly provided with adjusting component, and it adjusts component and is threadedly engaged with thread spindle,
Positioned at heater is respectively and fixedly provided on the adjusting component of work rest side, work rest and adjusting component can be moved threadingly axis
It is dynamic.
The utility model preferably technical solution is that work rest includes the mounting portion being threadedly engaged with thread spindle and is used for
The placement section of workpiece is placed, placement section is set on the lateral wall of mounting portion.
The utility model preferably technical solution is, further includes two baffle rings, and two baffle rings are separately fixed at thread spindle
Two sides up and down, two baffle rings, which are respectively positioned on, to be adjusted between component and work rest.
The utility model preferably technical solution is, adjusting component includes nut, two connecting rods and two sliding parts,
Nut is threadedly engaged with thread spindle, and one end of two connecting rods is fixedly connected with nut, the other end difference of two connecting rods
Be fixedly connected with two sliding parts, the outer surface of thread spindle from top to bottom successively have the first external screw thread, the second external screw thread and
Third external screw thread, the nut being located above are threadedly engaged with the first external screw thread, and mounting portion is threadedly engaged with the second external screw thread, are located at
The nut of lower section is threadedly engaged with third external screw thread, and the first external screw thread is opposite with the externally threaded hand of spiral of third.
The utility model preferably technical solution is that sliding part includes sliding block and sliding rail, and one end of sliding block is inserted in sliding rail
Interior, sliding block is slided up and down along sliding rail, and the other end of sliding block is fixedly connected with the connecting rod.
The utility model preferably technical solution is, motor be can positive and negative rotation servo motor.
The utility model preferably technical solution is, further includes PLC controller, PLC controller is fixed on coating chamber
Top, PLC controller are electrically connected with motor and heater respectively.
The utility model preferably technical solution is, further includes photoelectric sensor, photoelectric sensor is fixed on coating chamber
Inner sidewall, and be located at the side of thread spindle, photoelectric sensor and PLC controller are electrically connected.
The utility model preferably technical solution is, further includes temperature thermocouple, temperature thermocouple is fixed on coating chamber
Top, and the inside of coating chamber is protruded into bottom end, and temperature thermocouple and PLC controller are electrically connected.
The utility model preferably technical solution is, further includes multi sphere target assembly and vacuumizing assembly, the side of coating chamber
Several multi sphere target assemblies are fixed on wall, vacuumizing assembly is connected to the fixation of the top of coating chamber.
The utility model has the following beneficial effects:
Adjustable numerical control vacuum coating equipment provided by the utility model drives work rest rotation by thread spindle, so that plating
Film is more uniform and comprehensive, and thread spindle drives heater while driving work rest rotation, also by with adjusting component cooperation
Movement, local temperature caused by avoiding heater from being heated in fixed position is excessively high, by heat while heating
Device movement improves coating quality, and heating efficiency is high so that even heat is distributed in the inside of coating chamber.Placement section
It can remove, be convenient for repairing and clean from mounting portion.Sliding part is connected by connecting rod, limitation is played to the movement of nut
Effect, so that nut can only move up and down without rotating.Thread spindle is controlled by photoelectric sensor combination PLC controller
Positive and negative rotation, and then control the move distance of heater or more.Made in coating chamber by temperature thermocouple combination PLC controller
Temperature maintain specific range.
Detailed description of the invention
Fig. 1 is the schematic view of the front view of the utility model；
Fig. 2 is the enlarged diagram of A in Fig. 1；
Fig. 3 is the system structure diagram of the utility model.
In figure:
1, coating chamber；2, motor；3, thread spindle；31, the first external screw thread；32, the second external screw thread；33, third external screw thread；4,
Work rest；41, mounting portion；42, placement section；5, component is adjusted；51, nut；52, connecting rod；53, sliding part；531, sliding block；
532, sliding rail；6, heater；7, baffle ring；8, PLC controller；9, photoelectric sensor；10, temperature thermocouple；11, multiple arc target group
Part；12, vacuumizing assembly.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
As shown in Figure 1-Figure 3, a kind of adjustable numerical control vacuum coating equipment provided in the present embodiment, including coating chamber 1, plating
The top center of film room 1 is fixed with motor 2, and the bottom end of motor 2 is fixedly connected with thread spindle 3, and thread spindle 3 is located at coating chamber 1
Inside, the middle part of thread spindle 3 are bolted with 3 work rests 4, and two walls up and down inside coating chamber 1, which are respectively and fixedly provided with, adjusts component 5, adjust
Section component 5 is threadedly engaged with thread spindle 3, is respectively and fixedly provided with heater 6, work positioned on the adjusting component 5 of 4 side of work rest
Part frame 4 and adjusting component 5 can threadingly axis 3 move up and down, and before plated film, can be rotated work rest 4, according to plated film demand or not
The workpiece of same specification adjusts the position of each work rest 4, and drives thread spindle 3 to rotate by motor 2, and then drive work rest
4 rotations so that plated film is more uniform and comprehensive, thread spindle 3 while driving work rest 4 to rotate, also by with adjust component 5
Cooperation drives heater 6 to move, and local temperature caused by avoiding heater 6 from being heated in fixed position is excessively high, by adding
Heater 6 is moved, so that even heat is distributed in the inside of coating chamber 1, improves coating quality, and
Heating efficiency is high.Several multi sphere target assemblies 11, the top of vacuumizing assembly 12 and coating chamber 1 are fixed on the side wall of coating chamber 1
Fixed connection carries out plated film by multi sphere target assembly 11, and vacuumizing assembly 12 is vacuumized.
For the ease of placing workpiece and maintenance cleaning, further, work rest 4 includes the peace being threadedly engaged with thread spindle 3
Dress portion 41 and placement section 42 for placing workpiece, placement section 42 are set on the lateral wall of mounting portion 41, and placement section 42 is used for
Workpiece is placed, and placement section 42 can be removed from mounting portion 41, be convenient for repairing and cleaned.
It further include two baffle rings 7 further, two baffle rings 7 are solid respectively in order to avoid 6 up and down adjustment of heater is excessive
The two sides up and down of thread spindle 3 are scheduled on, two baffle rings 7, which are respectively positioned on, to be adjusted between component 5 and work rest 4, for limiting heater 6
The range of lower adjusting.
In order to effectively be adjusted with the cooperation of thread spindle 3, further, adjusting component 5 includes 51, two connecting rods of nut
52 and two sliding parts 53, nut 51 be threadedly engaged with thread spindle 3, two sliding parts 53 are located at the left and right two of thread spindle 3
The sliding part 53 of side, the adjusting component 5 of top is fixed on the upper wall inside coating chamber 1, the sliding part of the adjusting component 5 of lower section
53 are fixed on the lower wall inside coating chamber 1, and the inner end of two connecting rods 52 is fixedly connected with nut 51, two connecting rods 52
Outer end be fixedly connected respectively with two sliding parts 53, the outer surface of thread spindle 3 from top to bottom successively have the first external screw thread 31,
Second external screw thread 32 and third external screw thread 33, the nut 51 being located above are threadedly engaged with the first external screw thread 31, mounting portion 41
It is threadedly engaged with the second external screw thread 32, underlying nut 51 is threadedly engaged with third external screw thread 33, and sliding part 53 includes sliding
Block 531 and sliding rail 532, the outer end of sliding block 531 are inserted in sliding rail 532, and sliding block 531 is slided up and down along sliding rail 532, sliding block 531
Inner end is fixedly connected with connecting rod 52, and the rotation of thread spindle 3 drives nut 51 to move up and down, and then heater 6 is driven to move up and down,
By connecting rod 52 connect sliding part 53, restriction effect is played to the movement of nut 51 so that nut 51 can only move up and down and
It will not rotate, since the hand of spiral of the first external screw thread 31 and third external screw thread 33 is on the contrary, make thread spindle 3 same when rotation
When drive up and down two sides nut 51 simultaneously draw close or be located remotely from each other in, improve the uniformity of heating.
For the ease of precisely adjusting, further, motor 2 be can positive and negative rotation servo motor, servo motor model number is
6IK180RGU-CFM, servo motor are adjusted precisely, and drive 3 positive and negative rotation of thread spindle, and then band by the positive and negative rotation of motor 2
Dynamic nut 51 moves up and down, and heater 6 is moved up and down adjusting.
It further include PLC controller 8 further, PLC controller 8 is fixed on plating for the ease of controlling the operation of this equipment
The top of film room 1, the output end of PLC controller 8 are electrically connected with the input terminal of motor 2 and heater 6 respectively, PLC controller 8
Model Siemens S-1200 controls the start and stop and operation of motor 2 and heater 6 by PLC controller 8, more convenient, liberation
Labour.
It further include photoelectric sensor 9, photoelectric sensing further to be precisely controlled the up and down motion process of heater 6
9 model of device is set as PZ-M31P, and photoelectric sensor 9 is fixed on the inner sidewall of coating chamber 1, and is located at the side of thread spindle 3, light
9 output end of electric transducer and the input terminal of PLC controller 8 are electrically connected, and are controlled by photoelectric sensor 9 in conjunction with PLC controller 8
The positive and negative rotation of thread spindle 3 processed, and then control the move distance of about 6 heater.
In order to enable the temperature in coating chamber 1 maintains specific range, it further include temperature thermocouple 10 further,
The model WRN-010/K type of temperature thermocouple 10, temperature thermocouple 10 is fixed on the top of coating chamber 1, and plating is protruded into bottom end
The inside of film room 1, the output end of temperature thermocouple 10 and the input terminal of PLC controller 8 are electrically connected, and pass through temperature thermocouple 10
Temperature inside real-time detection coating chamber 1, when the temperature in coating chamber 1 reaches preset value, temperature thermocouple 10 passes signal
PLC controller 8 is passed, heater 6 is controlled by PLC controller 8 and stops heating, when temperature thermocouple 10 detects in coating chamber 1
Temperature be lower than preset value when, signal is passed to PLC controller 8 by temperature thermocouple 10, by PLC controller 8 control heater 6
Heating, maintains stable state for the temperature in coating chamber 1.
The content being not described in detail in this specification belongs to the prior art well known to professional and technical personnel in the field.This reality
It is described with reference to the preferred embodiments with novel, those skilled in the art know, in the spirit for not departing from the utility model
In the case where range, various changes or equivalence replacement can be carried out to these features and embodiment.The utility model is not by this
The limitation of specific embodiment disclosed in place, other embodiments fallen into claims hereof belong to the utility model
The range of protection.
Claims (10)
1. a kind of adjustable numerical control vacuum coating equipment, including coating chamber (1), it is characterised in that:
The top center of the coating chamber (1) is fixed with motor (2)；
The bottom end of the motor (2) is fixedly connected with thread spindle (3), and the thread spindle (3) is located at the interior of the coating chamber (1)
Portion；
Several work rests (4) are bolted in the middle part of the thread spindle (3)；
Internal two walls up and down of the coating chamber (1), which are respectively and fixedly provided with, adjusts component (5), the adjusting component (5) and the described spiral shell
Line axis (3) is threadedly engaged；
Heater (6) are respectively and fixedly provided with positioned on the adjusting component (5) of the work rest (4) side；
The work rest (4) and the adjusting component (5) can be mobile along the thread spindle (3).
2. adjustable numerical control vacuum coating equipment according to claim 1, it is characterised in that:
The work rest (4) includes the mounting portion (41) being threadedly engaged with the thread spindle (3) and the placement for placing workpiece
Portion (42)；
The placement section (42) is set on the lateral wall of the mounting portion (41).
3. adjustable numerical control vacuum coating equipment according to claim 2, it is characterised in that:
It further include two baffle rings (7)；
Two baffle rings (7) are separately fixed at the two sides up and down of the thread spindle (3), and two baffle rings (7) are respectively positioned on institute
It states and adjusts between component (5) and the work rest (4).
4. adjustable numerical control vacuum coating equipment according to claim 3, it is characterised in that:
The adjusting component (5) includes nut (51), two connecting rods (52) and two sliding parts (53)；
The nut (51) is threadedly engaged with the thread spindle (3)；
One end of two connecting rods (52) is fixedly connected with the nut (51), two connecting rods (52) it is another
End is fixedly connected with two sliding parts (53) respectively；
The outer surface of the thread spindle (3) successively has the first external screw thread (31), the second external screw thread (32), Yi Ji from top to bottom
Three external screw threads (33)；
The nut (51) being located above is threadedly engaged with first external screw thread (31)；
The mounting portion (41) is threadedly engaged with second external screw thread (32)；
The underlying nut (51) is threadedly engaged with the third external screw thread (33)；
First external screw thread (31) is opposite with the hand of spiral of the third external screw thread (33).
5. adjustable numerical control vacuum coating equipment according to claim 4, it is characterised in that:
The sliding part (53) includes sliding block (531) and sliding rail (532)；
One end of the sliding block (531) is inserted in the sliding rail (532), and the sliding block (531) is glided along the sliding rail (532)
Dynamic, the other end of the sliding block (531) is fixedly connected with the connecting rod (52).
6. adjustable numerical control vacuum coating equipment according to claim 1, it is characterised in that:
The motor (2) be can positive and negative rotation servo motor.
7. adjustable numerical control vacuum coating equipment according to claim 6, it is characterised in that:
It further include PLC controller (8)；
The PLC controller (8) is fixed on the top of the coating chamber (1)；
The PLC controller (8) is electrically connected with the motor (2) and the heater (6) respectively.
8. adjustable numerical control vacuum coating equipment according to claim 7, it is characterised in that:
It further include photoelectric sensor (9)；
The photoelectric sensor (9) is fixed on the inner sidewall of the coating chamber (1), and is located at the side of the thread spindle (3)；
The photoelectric sensor (9) and the PLC controller (8) are electrically connected.
9. adjustable numerical control vacuum coating equipment according to claim 7, it is characterised in that:
It further include temperature thermocouple (10)；
The temperature thermocouple (10) is fixed on the top of the coating chamber (1), and the interior of the coating chamber (1) is protruded into bottom end
Portion；
The temperature thermocouple (10) and the PLC controller (8) are electrically connected.
10. adjustable numerical control vacuum coating equipment according to claim 1, it is characterised in that:
It further include multi sphere target assembly (11) and vacuumizing assembly (12)；
Several multi sphere target assemblies (11) are fixed on the side wall of the coating chamber (1)；
The vacuumizing assembly (12) is connected to the fixation of the top of the coating chamber (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821739749.8U CN208917297U (en) | 2018-10-25 | 2018-10-25 | A kind of adjustable numerical control vacuum coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821739749.8U CN208917297U (en) | 2018-10-25 | 2018-10-25 | A kind of adjustable numerical control vacuum coating equipment |
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| Publication Number | Publication Date |
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| CN208917297U true CN208917297U (en) | 2019-05-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821739749.8U Active CN208917297U (en) | 2018-10-25 | 2018-10-25 | A kind of adjustable numerical control vacuum coating equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116334536A (en) * | 2023-03-29 | 2023-06-27 | 东北大学 | High-toughness transition metal nitride TiAl (Ni) N X Hard coating and preparation method thereof |
-
2018
- 2018-10-25 CN CN201821739749.8U patent/CN208917297U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116334536A (en) * | 2023-03-29 | 2023-06-27 | 东北大学 | High-toughness transition metal nitride TiAl (Ni) N X Hard coating and preparation method thereof |
| CN116334536B (en) * | 2023-03-29 | 2024-07-26 | 东北大学 | High-toughness transition metal nitride TiAl (Ni) NXHard coating and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220106 Address after: 362000 Jiumu Industrial Park, Nanan Economic Development Zone, Quanzhou City, Fujian Province Patentee after: JOMOO KITCHEN & BATH Co.,Ltd. Address before: 361021 401-4, No. 598, Guankou South Road, Jimei District, Xiamen City, Fujian Province Patentee before: JINSHAN LAIBAO (XIAMEN) TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |