CN208916877U - Filtering film component - Google Patents
Filtering film component Download PDFInfo
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- CN208916877U CN208916877U CN201721620864.9U CN201721620864U CN208916877U CN 208916877 U CN208916877 U CN 208916877U CN 201721620864 U CN201721620864 U CN 201721620864U CN 208916877 U CN208916877 U CN 208916877U
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Abstract
The purpose of this utility model is to provide keep the strainability of filter membrane, inhibit microorganism breeding and will not be to using the filtering film component that impacts of water quality and its manufacturing method after starting.Thus, the utility model relates to a kind of filtering film components, its filter membrane for having the filtering for liquid, the shell for accommodating the filter membrane and the preservation liquid for keeping the strainability of filter membrane in the shell, wherein, the filtering film component has filtering side ports and raw water side ports, the filtering side ports and the raw water side ports are closed using containment member, described to save the pure water that liquid is bactericidal nature.
Description
Technical field
The utility model relates to fit in ultrapure water manufacturing process as the final filter for removing the particle in treated water
The setting method of suitable filtering film component and its manufacturing method and filtering film component.
Background technique
In the production line of manufacture ultrapure water used in the manufacture of the electronic/electrics such as semiconductor, display element
In, as will to point of use supply using microfiltration membranes, ion exchange resin, osmosis filtration film manufacture ultrapure water it
The preceding final filter that particle is removed from ultrapure water, has used filtering film component.As the filtering film component of the purposes, due to tool
There is the advantages of filtering traffic that can increase every 1 component, therefore, mainly uses and supply raw water to hollow-fibre membrane
Outside and the hollow fiber film assembly of external pressure filtering type being filtered.
The property pursued as the filtering film component to the purposes, it is desirable that make to make within the short time after beginning to use
For the water quality of ultrapure water, i.e., particle number in drainage, cross drainage conductivity and TOC (total organic carbon) etc. reach requirement water
It is flat.Therefore, it usually in the filtering film component of the purposes, was come from the last set of manufacturing process of product for reducing
The washing procedure of the dissolution of the particle dusting, ion component and organic matter of filter, thus to wash until reaching clean conditions
State put goods on the market.
On the other hand, for filtering film component, in order to keep its strainability and inhibit the numerous of the microorganism in product
It grows, needs to be taken care of after fabrication using the preservation liquid with sterilization, bacteriostasis with moisture state, in conventional film group
In part, it can be used glycerine water solution, alcohol solution or aqueous sodium hypochlorite solution etc. as preservation liquid (for example, see patent document
1).But the filtering film component used in the production line of ultrapure water has the following problems: in order to pursue as described above
Meet the water quality as ultrapure water in short time after since use and uses comprising metals such as the organic matters such as glycerol, alcohol, sodium
When the preservation liquid of ion component, the washing needs time.Therefore, as the preservation liquid of the purposes, it is used be even if
Can also inhibit under low concentration the breeding of microorganism formalin, will not residual organic matter, ion component and have sterilization effect
The aqueous hydrogen peroxide solution of fruit.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 6-296838 bulletin
Utility model content
Utility model will solve the problems, such as
However, using formalin, although the numerous of microorganism can be inhibited with the low concentration lower than 1%
It grows, but the reduction of TOC can be impacted.On the other hand, although aqueous hydrogen peroxide solution can inhibit the breeding of microorganism and
TOC will not be impacted, but since the oxidability of hydrogen peroxide is stronger, existing causes to be often used as the purposes
The polymeric membrane of material of filter membrane deteriorate bit by bit, occur reduction, breakage of the separating property of film etc. can
It can property.
Utility model aims to solve the above project, and it is an object of the present invention to provide keeping the strainability of filter membrane, suppression
The breeding of microorganism processed and will not to use the filtering film component that impacts of water quality after starting and its manufacturing method, with
And the setting method of filtering film component.
Solution to the problem
The utility model is artificial to be met above-mentioned multinomial requirement and has made intensive studies, and is investigated.As a result confirm
It arrives, the water that have passed through the state sterilized under high temperature is enclosed and as preservation liquid, whole requirement items can be met, and find
Its manufacturing method, to contemplate the utility model.
That is, the filtering film component of the utility model is that have the filter membrane of the filtering for liquid and accommodate the filter membrane
Shell filtering film component, wherein in shell, be filled with as the preservation liquid for keeping the strainability of filter membrane
It has passed through the pure water of sterilization.
In addition, the content of organics saved in liquid is preferably (total with TOC in the filtering film component of above-mentioned the utility model
Organic carbon) 5ppm is calculated as more than or lower than 50ppm.
In addition, the concentration for saving the metal ion for including in liquid is preferred in the filtering film component of above-mentioned the utility model
It is 10ppb more than or lower than 100ppb.
In addition, the concentration for saving the chloride ion for including in liquid is excellent in the filtering film component of above-mentioned the utility model
25ppb is selected as more than or lower than 250ppb.
The manufacturing method of the filtering film component of the utility model is the method for manufacturing following filtering film components, the filter membrane
Component has the filter membrane of the filtering for liquid and accommodates the shell of the filter membrane, in shell, also, in shell, makees
For the strainability for keeping filter membrane preservation liquid and filled with have passed through the pure water of sterilization, wherein the manufacturing method packet
It includes: will be enclosed in the shell for accommodating filter membrane by the pure water after filtering degerming, and right more than or lower than 100 DEG C in 80 DEG C
The shell for being sealed with pure water is heated, and is thus sterilized to the pure water in filtering film component and preservation liquid is made.
In addition, in the manufacturing method of the filtering film component of above-mentioned the utility model, to be sealed with the shell of pure water into
In the process of row heat treatment, in order to mitigate the pressure rise caused by thermally expanding of enclosed pure water, preferably in filtration module
Pressure buffer mechanism is arranged in the raw water side of part.
In addition, in the manufacturing method of the filtering film component of above-mentioned the utility model, to be sealed with the shell of pure water into
Row heat treatment process in, in order to absorb enclosed pure water by thermally-induced volume expansion, preferably in filtering film component
Volume expansion absorbing mechanism is arranged in raw water side.
In addition, in the manufacturing method of the filtering film component of above-mentioned the utility model, preferably by filtering degerming after
Pure water be using the water after ultrafiltration membrane or reverse osmosis membrane filtration, and the particle for the 50nm or more for including in pure water be 10/L with
Upper and 200/L or less.
In addition, the content of organics in the manufacturing method of the filtering film component of above-mentioned the utility model, preferably in pure water
5ppm is calculated as more than or lower than 50ppm with TOC (total organic carbon).
In addition, in the manufacturing method of the filtering film component of above-mentioned the utility model, the metal that preferably includes in pure water from
The concentration of son is 10ppb more than or lower than 100ppb.
In addition, in the manufacturing method of the filtering film component of above-mentioned the utility model, the chloride that preferably includes in pure water
The concentration of ion is 25ppb more than or lower than 250ppb.
In addition, in the process heated to the shell for being sealed with pure water, preferred to enclosed pure water is mitigated
By thermally expand caused by pressure rise, filtering film component raw water side be arranged pressure buffer mechanism, and in order to absorb envelope
The pure water entered is made to filter by thermally-induced volume expansion in the raw water side of filtering film component setting volume expansion absorbing mechanism
The filtering side of membrane module is air-tight state.
In addition, preferably filtering film component is in shell in the manufacturing method of the filtering film component of above-mentioned the utility model
The interior hollow fiber film assembly that hollow-fibre membrane is accommodated as filter membrane can have the hollow portion with hollow-fibre membrane
The filtering side ports of connection and the raw water side ports being connected to the outside of hollow-fibre membrane, to be sealed with the shell of pure water into
In the process of row heat treatment, volume expansion absorbing mechanism is set in raw water side ports, and by pressure buffer mechanism at this
State setting in pressure buffer mechanism containing containment member, and make to filter side ports air-tight state, in the work of heat treatment
After sequence, in pressure buffer mechanism, volume expansion absorbing mechanism is changed to containment member, later remove pressure buffer mechanism and
Volume expansion absorbing mechanism.
In addition, preferably filtering film component is in shell in the manufacturing method of the filtering film component of above-mentioned the utility model
The interior hollow fiber film assembly that hollow-fibre membrane is accommodated as filter membrane can have and connect with the hollow portion of hollow-fibre membrane
Logical filtering side ports and the raw water side ports being connected to the outside of hollow-fibre membrane are carried out to the shell for being sealed with pure water
In the process of heat treatment, volume expansion absorbing mechanism is set in raw water side ports, and absorb machine relative to the volume expansion
The pressure buffer mechanism that structure setting can be such that gas penetrates and penetrate thallus, further in raw water side ports to prevent outside
The gas inflow that gas flows into, which prevents the interior state containing containment member of component that gas inflow is arranged, prevents component, and makes to filter
Side ports are air-tight state, after the process of heat treatment, are prevented in component in gas inflow, more by volume expansion absorbing mechanism
It is changed to containment member, later, removing the volume expansion absorbing mechanism for being provided with pressure buffer mechanism and gas inflow prevents component.
The setting method of the filtering film component of the utility model is that above-mentioned filtering film component is installed on water treatment facilities
The method of piping, wherein this method comprises: removing the filtering side ports of closed filtering film component and the sealing structure of raw water side ports
Part installs matching for water treatment facilities after discarding the pure water in enclosed filtering film component to other than the piping of water treatment facilities
Pipe.
The effect of utility model
Filtering film component according to the present utility model, due to as the preservation for keeping the filtering film component of strainability
Liquid and be sealed with the pure water that have passed through sterilization, therefore can keep film strainability while inhibit component in microorganism
Breeding.That is, can be realized the long-term keeping of filter assemblies not using drug class, and use can be greatly decreased and start
When wash time.
In addition, making to save the content of organics in liquid in terms of TOC in the filtering film component of above-mentioned the utility model
In the case that 5ppm is more than or lower than 50ppm, by being set as the less water of organic components like this, can be greatly decreased makes
With the wash time of organic matter when starting.
It further, can be big in the case where making to save the metal ion 10ppb for including in liquid more than or lower than 100ppb
Width reduces the wash time using metal component when starting.
In addition, passing through in the case where making to save the chloride ion 25ppb for including in liquid more than or lower than 250ppb
Include microly like this chloride ion, sufficient bactericidal properties can be obtained not applying excessively high temperature.
The manufacturing method of filtering film component according to the present utility model, by will be enclosed by the pure water after filtering degerming
In shell, and the shell for being sealed with pure water is heated in 80 DEG C more than or lower than 100 DEG C, is realized filter membrane
Preservation liquid is made in pure water in component after being sterilized, therefore can inhibit in component while keeping the strainability of film
The breeding of microorganism.
Further, in the process heated to the shell for being sealed with pure water, in order to mitigate enclosed pure water
The pressure rise caused by thermally expanding and in the case where the raw water side of filtering film component is provided with pressure buffer mechanism, can be with
It prevents the expansion due to water caused by heating and leads to pressure rise in filter assemblies, shell, hollow-fibre membrane occur damaged.Separately
Outside, it in the case where filtering side is fully sealed, can prevent from external pollution.
In addition, in the process heated to the shell for being sealed with pure water, in order to absorb enclosed pure water
By thermally-induced volume expansion in the case where volume expansion absorbing mechanism is arranged in the raw water side of filtering film component, it can pass through
It absorbs volume expansion when heating and shrinks dilation by cooling, to realize from filtration module
Flowing into the lateral component of the raw water of part again can make to become full liquid status in filter assemblies.
Detailed description of the invention
[Fig. 1] cross-sectional view shows the doughnut of an embodiment of the filtering film component using the utility model
The composition of membrane module.
The exploded perspective view of [Fig. 2] hollow fiber film assembly.
[Fig. 3] shows the figure of the specific example of pressure buffer mechanism and volume expansion absorbing mechanism.
[Fig. 4] shows the figure of other examples of pressure buffer mechanism and volume expansion absorbing mechanism.
[Fig. 5] shows constituting in detail for each section of the filter device using hollow fiber film assembly shown in FIG. 1
Figure.
Symbol description
1 hollow fiber film assembly
3 hollow fiber membrane bundles
3a hollow-fibre membrane
5 shells
The upper side nozzle of 5a
Side nozzle under 5b
5c reservoir
10,11 top covers
10a, 11a pipeline
10b containment member
12 O-rings
13 nuts
14 adhesive portions
20 volume expansion absorbing mechanisms
21 pressure buffer mechanisms
22 containment members
23 containment members
24 polypropylene (PP) bottle processed
25 pipes
26 venthole filters
The bag of 27 polyethylene
100 water treatment facilities
101 supplying tubings
The various valves of 101a, 102a
102 circulation pipings
103 the 1st cross drainage collector pipe
104 the 2nd cross drainage collector pipe
105 collecting pipes
The various valves of 105a
Specific embodiment
Hereinafter, in conjunction with attached drawing to the hollow-fibre membrane of an embodiment of the filtering film component for using the utility model
Component is illustrated.
The hollow fiber film assembly of present embodiment can be used for the filter device of ultrapure water manufacture.Present embodiment
Hollow fiber film assembly can be used for that microfiltration membranes, ion exchange resin or osmosis filtration film will be being utilized to point of use supply
The external-compression type filtering carried out before the ultrapure water of manufacture, can be used as final filter and undertakes the function that particle removes.In addition, conduct
Hollow fiber film assembly has required high filtration performance to realize the miniaturization of equipment, and the doughnut of present embodiment
Membrane module can be used as the hollow fiber film assembly that can increase the filtering traffic of per unit volume.
Fig. 1 is to show the cross-sectional view of the hollow fiber film assembly 1 of present embodiment briefly constituted.In addition, Fig. 2 is will
Perspective view made of hollow fiber film assembly 1 shown in FIG. 1 decomposes.
The hollow fiber film assembly 1 of present embodiment is as shown in Figure 1, have made of multiple hollow-fibre membrane 3a boundlings
The shell of the tubular of hollow fiber membrane bundle 3 and receiving hollow fiber membrane bundle 3.
At the both ends open of shell 5, it is provided with and is formed with and the piping connection of the pipeline 10a, 11a of piping connection
The top cover 10,11 of top cover 10,11, piping connection is fixedly installed in shell 5 by nut 13.Nut 13 and it is formed in shell
The external screw thread of the side at 5 both ends is screwed, and by tightening nut 13, is configured in top between shell both ends and top cover 10,11
O-ring 12 in the slot of lid 10,11 seals.
In addition, being respectively formed with the upper side nozzle 5a that fluid flows through and lower side nozzle 5b at the both ends of shell 5.Upper side spray
Mouth 5a and lower side nozzle 5b is arranged to prominent towards the direction orthogonal with the length direction of shell 5.
In the both ends of the surface of hollow fiber membrane bundle 3, each hollow-fibre membrane 3a is opening, and leads between each hollow-fibre membrane 3a
It crosses Embedding Material bonding and forms adhesive portion 14.
In external-compression type filtering, such as liquid is flowed into from lower side nozzle 5b, and the liquid is between the adhesive portion 14 at both ends
The outer surface of each hollow-fibre membrane 3a penetrate into, by the liquid after the hollow portion of each hollow-fibre membrane 3a from top cover 10,11
Pipeline 10a, 11a outflow.
As hollow-fibre membrane 3a, microfiltration membranes, ultrafiltration membrane etc. can be used.The material of hollow-fibre membrane is not limited especially
It is fixed, polysulfones can be enumerated, polyether sulfone, polyacrylonitrile, polyimides, polyetherimide, polyamide, polyether-ketone, polyether-ether-ketone, gathered
Ethylene, polypropylene, poly- (4- methylpentene), ethylene-vinyl alcohol copolymer, cellulose, cellulose acetate, Kynoar, second
Alkene-TFE copolymer, polytetrafluoroethylene (PTFE) etc., alternatively, it is also possible to use their composite material.
The internal diameter of hollow-fibre membrane 3a is 50 μm~3000 μm, preferably 500 μm~2000 μm.Due to the feelings small in internal diameter
Under condition, the pressure loss becomes larger, and can cause adverse effect to filtering, thus preferably make 50 μm of the internal diameter of hollow-fibre membrane 3a with
On.In addition, will lead to the shape for being difficult to keep film when spinning, therefore preferably 3000 μm or less in the case where internal diameter becomes larger.
As Embedding Material, preferably epoxy resin, vinylester resin, polyurethane resin, unsaturated polyester resin, alkene
The high molecular materials such as quasi polymer, organic siliconresin, fluorine resin, can be any one of these high molecular materials, can also
A variety of high molecular materials to be applied in combination.
It should be noted that in ultrapure water manufacturing process, it is desirable that member of formation has to the heat resistance of hot water and low molten
Property out.Therefore, as hollow-fibre membrane 3a, the material of shell 5, the less material of the dissolution of preferably polysulfones.In addition, for phase
Same reason, it is preferable to use epoxy resin for Embedding Material.
In addition, as liquid is saved, can be used have passed through the pure of sterilization in the hollow fiber film assembly 1 of present embodiment
Water.Save liquid refer to the strainability for keeping hollow-fibre membrane 3a, both ends in shell 5 adhesive portion 14 it
Between formed reservoir 5c, the hollow portion in the space between top cover 10,11 and adhesive portion 14 and hollow-fibre membrane 3a and more
The liquid of hole portion filling.
Here, the pure water of the utility model indicates: making ion component reduction, the 1 μ S/cm of conductivity or less of water and benefit
With the filtered water such as reverse osmosis membrane or ultrafiltration membrane.
In addition, the content of organics preferably in preservation liquid is (total with TOC in the hollow fiber film assembly 1 of present embodiment
Organic carbon) 1ppm is calculated as more than or lower than 50ppm.If TOC is 1ppm or more, in the heating sterilization of aftermentioned pure water,
Organic matter in pure water can be aoxidized preferentially, therefore can inhibit the oxidative degradation of hollow-fibre membrane 3a caused by heating.It needs
It is noted that further preferred TOC is 5ppm or more.
In addition, can promptly reduce the guarantor when the use of hollow fiber film assembly 1 starts if being lower than 50ppm
Organic concentration in liquid storage, and even if using heating sterilization without completely kill bacterium in the case where, due to that can subtract
Its few carbon source, therefore also it is able to suppress the breeding of bacterium.
Further, in the hollow fiber film assembly of present embodiment 1, the dense of the metal ion for including in liquid is preferably saved
Degree is 10ppb more than or lower than 100ppb.In ultrapure water manufacturing process, should be avoided can cause adverse effect to semiconductors manufacture
Metal ion be mixed into, the fewer content the better.On the other hand, it is contemplated that in the case where sterilization, it is known that metal ion is shown
Bactericidal effect out can be improved base by including metal ion in the range of will not cause adverse effect to semiconductors manufacture
In the bactericidal effect of heating.
Similarly, in the hollow fiber film assembly of present embodiment 1, the chloride ion for including in liquid is preferably saved
Concentration is 25ppb more than or lower than 250ppb.Due to chloride ion also can open circuit potential in semiconductor fabrication, therefore it is required that
It controls in ultrapure water to extremely low concentration.On the other hand, since chloride ion shows bactericidal effect, preferably it is being used as
Saving in the pure water of liquid includes chloride ion in the range of will not cause adverse effect to semiconductors manufacture.
If it is the hollow fiber film assembly 1 of above-mentioned present embodiment, then mushroom can be inhibited to breed in preservation, and
The ultrapure water for meeting water quality requirement when for semiconductors manufacture can be easily manufactured.
In the following, being illustrated to the manufacturing method of the hollow fiber film assembly 1 of present embodiment.
In the manufacturing method of the hollow fiber film assembly 1 of present embodiment, firstly, filling the state before saving liquid
In the shell 5 of hollow fiber film assembly 1 shown in FIG. 1, enclose through the pure water after filtering degerming.
As pure water, the filtered water such as reverse osmosis membrane or ultrafiltration membrane are utilized as described above, can be used.It is preferred that being wrapped in pure water
The particle of the 50nm or more contained is 10/L or more and 200/L or less.
In addition, it is preferable to use water of the 1ppm in terms of TOC more than or lower than 50ppm for the content of organics in pure water.
It should be noted that further preferably TOC is 5ppm or more.
Further, the concentration for the metal ion for including in pure water is preferably 10ppb more than or lower than 100ppb, in pure water
The concentration for the chloride ion for including is preferably 25ppb more than or lower than 250ppb.
Then, it in the manufacturing method of the hollow fiber film assembly of present embodiment 1, will enclose by filtering degerming
The hollow fiber film assembly 1 (shell 5) of pure water afterwards is heated in 80 DEG C more than or lower than 100 DEG C.So, lead to
It crosses and the pure water further progress heating by filtering sterilizing is sterilized, the preservation liquid of hollow fiber film assembly 1 can be made
Reach the state without bacterium.
It should be noted that the method for disinfection as water, also includes addition drug etc., but in ultrapure water manufacturing process
Used in hollow fiber film assembly the case where for, it is necessary to be not add the sterilization based on heating of added ingredient.
In addition, in the case where passing through heating as present embodiment to pure water sterilization, it is numerous even below 80 DEG C
Viable bacteria also in view of long-term keeping in 3 months or more, can be preferably heated to 80 DEG C by spending the time to kill
Kill bacterium in advance above and fully.In addition, there are following possibilities heating temperature to be set as to 100 DEG C or more of situation:
Cause hollow-fibre membrane 3a to wave in hollow fiber film assembly 1 since pure water boils, thus causes breakage, or because of component
The difference of thermal expansion coefficient and cause breakage.From these viewpoints, as the temperature of heat treatment, preferably such as present embodiment
Like that for 80 DEG C more than or lower than 100 DEG C, more preferably 85 DEG C or more and 95 DEG C or less.
Here, it when heating as described above to hollow fiber film assembly 1, is hardly sent out if it is utilizing
The upright and outspoken component of the raw deformation as caused by pressure is closed, then there is the pressure due to thermal expansion of pure water inside generating assembly
It increases, damaged risk occurs for hollow-fibre membrane 3a, shell 5.As the method for avoiding the pressure rise, including reach
The method for the state that component internal is communicated with outside, but in this case, it can lead to that volume expansion has occurred because of heat treatment
Water overflowed to outside, and further as it is cooled when volume contraction and suck extraneous gas, therefore there is mushroom at this time
From a possibility that being imported in component in atmosphere.In order to avoid such case, it is contemplated that implement heat treatment work in desinfection chamber
Sequence, but for for biggish hollow fiber film assembly as ultrapure water manufacturing process, it is manufactured in desinfection chamber
It is difficult.
Therefore, in the manufacturing method of the hollow fiber film assembly of present embodiment 1, in the process heated
In, in order to mitigate the pressure rise caused by thermally expanding of enclosed pure water, set in the lower side nozzle 5b of hollow fiber film assembly 1
Set pressure buffer mechanism.It should be noted that the hollow fiber film assembly 1 due to present embodiment is filtered for external-compression type, because
This lower side nozzle 5b is equivalent to the raw water side ports of the utility model.
As the pressure buffer mechanism for the inflow for preventing extraneous gas while buffering pressure caused by expanding, such as
It as shown in Figure 3, include rubber balloon or the modeling of withered flat state relative to the lower side nozzle 5b connection of hollow fiber film assembly 1
The method of the pressure buffer mechanism 21 of material bag etc. is easy, therefore it is preferred that.It should be noted that the in general soft object of rubber-like
The patience verified in heating is poor, in order to which the substance for adding it with flexibility can be dissolved in contacted pure water, exists
A possibility that causing the purity for saving liquid to reduce, thus it is more preferably such using the polybag made of polyethylene and polypropylene etc.
To heat treatment, also the bag of the few material of additive with heat resistance is covered.
In addition, as described above, can also absorb volume expansion by the way that the polybag of withered flat state is set to nozzle, but if
A large amount of water is overflowed into bag, then the amount that will lead to the preservation liquid that should be enclosed originally in component is reduced, as enclosed purpose it
The drying of one film prevents function from can become to be not enough.
In order to avoid such case is heating in the manufacturing method of the hollow fiber film assembly 1 of present embodiment
In process, in order to absorb the volume expansion caused by heating of enclosed pure water, preferably in the lower side spray of hollow fiber film assembly 1
Volume expansion absorbing mechanism is arranged in mouth 5b.
As volume expansion absorbing mechanism, preferably as illustrated in fig. 3, by hidden danger strong to the patience of heating, dissolution also compared with
The volume expansion of the liquid receiver comprising Kynoar system or polypropylene of few piping for ultrapure water apparatus is inhaled
Mechanism 20 is received to connect with lower side nozzle 5b.In turn, connection can be with compensator or trimmer pressure more preferably in the form of covering the liquid receiver
Component, the pressure buffer mechanism 21 such as the bag comprising polyethylene or polypropylene.By being combined like this with pressure
Buffer gear 21 and volume expansion absorbing mechanism 20 can inhibit the influence thermally expanded caused by heating, and will not be due to
It cools down and sucks extraneous gas, it is possible to implement the sterilization based on heat treatment.
It should be noted that in above-mentioned heat treatment, as shown in figure 3, the pipeline 10a of upside, downside pipeline 11a and
Upper side nozzle 5a is closed by containment member 10b, 11b, 23 respectively and is become air-tight state.The pipeline 10a of upside and the pipe of downside
Road 11a is equivalent to the filtering side ports in the utility model.
Further, in the manufacturing method of the hollow fiber film assembly of present embodiment 1, preferably as shown in Fig. 3,
It include containment member 22 in pressure buffer mechanism 21.Also, it is preferred that after the process of heat treatment, in pressure buffer mechanism 21
It is interior, volume expansion absorbing mechanism 20 is changed to containment member 22, pressure buffer mechanism 21 is removed later and volume expansion absorbs
Mechanism 20.
By using such method, can in the case where keeping closed system closed lower side nozzle 5b.In addition, at this
In the manufacturing method of the hollow fiber film assembly 1 of embodiment, due to making volume expansion absorbing mechanism 20 and pressure buffer machine
The lower side nozzle 5b of the setting of structure 21 and the replacement of containment member 22 all in raw water side is carried out, therefore, even if just in case occurring
The pollution of mushroom, also only there are the raw water side of the replacement of containment member 22 generation, as passing through the area hollow-fibre membrane 3a
The filtering side for being completely closed system separated, can prevent the pollution of mushroom.
In addition, in the process of heat treatment, as the pressure liter caused by thermally expanding for mitigating enclosed pure water
The composition of volume expansion that is high and absorbing enclosed pure water, however it is not limited to which composition shown in Fig. 3 can also use shown in Fig. 4
Such composition.In hollow fiber film assembly 1 shown in Fig. 4, as volume expansion absorbing mechanism, it is provided with polypropylene (PP)
Bottle 24 and pipe 25 processed.Polypropylene bottle 24 is installed on the lower side nozzle 5b of raw water side with the state via pipe 25, for this poly- third
The top of alkene bottle 24 is provided with the venthole of polytetrafluoroethylene (PTFE) (PTFE) system in 0.2 μm of the aperture as pressure buffer mechanism
With filter 26.Venthole filter 26 can penetrate gas, and penetrate thallus.
Further, in hollow fiber film assembly 1 shown in Fig. 4, as side nozzle 5b under preventing extraneous gas from flowing into
Gas inflow prevents component, is provided with the bag 27 of polyethylene.The bag 27 of polyethylene is with the shape wherein containing containment member 22
The mode that state covers lower side nozzle 5b is arranged.It should be noted that pipe 25 is by the part of the bag 27 of polyethylene (in Fig. 4
The part indicated with dotted ellipse) it is sealed with closed state.
In turn, preferably after the process of heat treatment, in the bag 27 of polyethylene, pipe 25 is changed to containment member
22, the bag of polyethylene 27, pipe 25, polypropylene (PP) bottle 24 processed and venthole are torn open with filter 26 from lower side nozzle 5b later
It removes.
In the following, to the water treatment facilities 100 that the hollow fiber film assembly 1 of present embodiment is set to ultrapure water manufacture
Embodiment an example, be illustrated referring to Fig. 5, further, the mistake to the hollow fiber film assembly 1 for using present embodiment
Filtering method is illustrated.It should be noted that in the water treatment facilities 100 of the ultrapure water manufacture, it is contemplated that utilize external pressure
The cross-flow filtration mode of filtering.
As shown in figure 5, water treatment facilities 100 is the final filter purposes of such as ultrapure water, from lower side nozzle 5b to as in
The reservoir 5c in the outside of empty fiber membrane 3a supplies treated water, filters to inside (hollow portion) side of hollow-fibre membrane 3a, from
Drainage (ultrapure water) was discharged in the pipeline 10a, 11a at the both ends of hollow fiber membrane bundle 3.In addition, recirculated water (condensed water) is by upper
Side nozzle 5a and be discharged.
Water treatment facilities 100 has the confession for connecting and supplying treated water with the lower side nozzle 5b of hollow fiber film assembly 1
102 are piped to piping 101 and the circulation for connecting with upper side nozzle 5a and sending out recirculated water.Further, in supplying tubing 101, follow
Pressure gauge, various valve 101a, 102a etc. are configured in the way of ring piping 102.In addition, water treatment facilities 100, which has, becomes filtering
The 1st of the flow path of water crosses drainage collector pipe 103 and the 2nd and crosses drainage collector pipe 104.1st, which crosses drainage collector pipe the 103, the 2nd, crosses drainage
Collector pipe 104 is connect with the collecting pipe 105 for crossing drainage, and collecting pipe 105 is connect with external piping (not shown).It needs to illustrate
, in collecting pipe 105 configured with pressure gauge, various valve 105a etc..
Then, when hollow fiber film assembly 1 is arranged relative to above-mentioned water treatment facilities 100, firstly, removing closed hollow
Containment member 10b, 11b, 22,23 of fiber film component 1, the pure water (saving liquid) in enclosed hollow fiber film assembly 1 is discarded
To other than the piping of water treatment facilities 100.In turn, hollow membrane module 1 is installed to the piping of water treatment facilities 100 later.
In general, when the hollow fiber film assembly of sterilizing is set to water treatment facilities, the pollution etc. of mushroom in order to prevent,
It is installed on piping with closing form, or the preservation liquid that do not abandon in hollow fiber film assembly is installed, and is set on one side with supply water
Change the preservation liquid discarded in hollow fiber film assembly on one side.However, for the ultrapure water used in semiconductor device etc.
For the case where water treatment facilities, if the preservation liquid stream in hollow fiber film assembly enters in system, ultrapure water will lead to
The cleannes of water decline, in order to make to need to spend the time as clean conditions in system.Therefore, in the present embodiment, adopt
Take the side that water treatment facilities 100 is installed on after the preservation liquid in hollow fiber film assembly 1 being discarded in active to outside system
Formula.
Hollow fiber film assembly 1 by make the side upper side nozzle 5a above in a manner of longitudinally configure, upper side nozzle 5a with follow
102 connection of ring piping, connect in addition, the pipeline 10a of top cover 10 crosses drainage collector pipe 103 with the 1st.In addition, lower side nozzle 5b with
Supplying tubing 101 connects, and the pipeline 11a of top cover 11 crosses drainage collector pipe 104 with the 2nd and connect.
Treated water is from supplying tubing 101 by being imported into hollow fiber film assembly after lower side nozzle 5b with given pressure
1 reservoir 5c.In shell 5, the major part of the treated water of importing is filtered by hollow-fibre membrane 3a and reaches hollow portion, makees
It is moved upwards or downwards to cross drainage.Above or below being moved to cross drainage therefrom the end of empty fiber membrane 3a opening to
Discharge in top cover 10 or top cover 11, by each pipeline 10a, 11a, the 1st cross drainage collector pipe 103 or the 2nd and cross drainage collector pipe 104
After be expelled to collecting pipe 105, by after outside pipe arrangement be collected.On the other hand, not through hollow-fibre membrane 3a in shell 5
The interior raised treated water of reservoir 5c is discharged from upper side nozzle 5a as recirculated water and is sent to circulation piping
102。
Embodiment
Hereinafter, in conjunction with the embodiments and comparative example carries out more specific detail to present embodiment, but present embodiment is not
It is only limitted to these embodiments.
In following Examples and Comparative Examples, hollow fiber film assembly has been used.By its characteristic and various water analyses
Method is shown in following.
[about hollow-fibre membrane]
Material: polysulfones
It is classified molecular weight: 6000Da (ultrafiltration membrane)
Inner/outer diameter: 0.6mm/1.0mm
[shell for hollow fiber film assembly production]
Material: polysulfones
Shape: cylindric
Size: the cylindrical portion inner/outer diameter of filtering area: 154mm/170mm
The cylindrical portion inner/outer diameter of spray nozzle part: 162mm/183mm
The internal diameter of nozzle: 58mm
Length/nozzle distance between centers of tubular shell: 1050mm/872mm
[confirmation method of bactericidal effect]
The water of enclosed hollow fiber film assembly is sampled, Millipore corporation HPC Total Count is used
Sampler (model: MHPC10025) determines whether viable bacteria.In addition, using Particle Measuring Systems corporation
UltraDI-50 has been carried out really to when using as hollow fiber film assembly with the state of the bacterium for the counting micro particles crossed in drainage
Recognize.
[saving analyzing containing object for liquid]
The analysis for saving the various composition concentration in liquid (pure water) is carried out using following instrument.
Particle: Particle Measuring Systems corporation UltraDI-50
TOC: Shimadzu Seisakusho Ltd. TOC5000A
The concentration of metal ion: Agilent Technologies corporation 7500cs
The concentration of chloride ion: Metrohm corporation 881CompactIC
[embodiment 1]
The pure water of ultrafiltration membrance filter will be used to enclose hollow fiber film assembly, which is put into baking oven,
The heat treatment for implementing 16 hours at 90 DEG C realizes the state that the pure water after sterilization is enclosed in component.It needs to illustrate
, in the heat treatment, absorbed by the bag made as the polyethylene of pressure buffer mechanism (PE) and as volume expansion
The cup of polypropylene (PP) system of mechanism is installed on the nozzle of raw water side.It is close with given containment member after heat treatment
Nozzle is sealed, has been taken care of 3 months in the storeroom that temperature is adjusted to 20 DEG C~25 DEG C.
After keeping 3 months, the pure water entered as preservation fluid-tight is sampled, the viable count saved in liquid has been counted.In addition, same
When determine save liquid in TOC, metal ion and chloride ion respective concentration.The results are shown in table 1.
When implementing the manufacture of ultrapure water using the hollow fiber film assembly, being instantly available from after operation start being capable of conduct
The water quality that ultrapure water uses crosses drainage.
[embodiment 2,3]
Heating temperature and heating time are changed to the condition recorded in 1, carried out similarly to Example 1 in addition to this,
Viable bacteria counting number after determining heat treatment and keeping, save TOC in liquid, metal ion and chloride ion it is respective
Concentration.The results are shown in table 1.In embodiment 3, count plate is 3 after keeping 3 months, but uses the present embodiment
When each hollow fiber film assembly implements the manufacture of ultrapure water, being instantly available from after operation start can use as ultrapure water
Water quality cross drainage.
[embodiment 4,5,6]
Carry out similarly to Example 1, determine heat treatment and keeping after viable bacteria counting number, save liquid in TOC,
The respective concentration of metal ion and chloride ion.The results are shown in table 1.Use each doughnut of the present embodiment
When membrane module implements the manufacture of ultrapure water, being instantly available from after operation start can be as the filtering for the water quality that ultrapure water uses
Water.
[embodiment 7]
It is not provided with pressure buffer mechanism and keeps the nozzle of raw water side open, implemented with the state of not set volume-absorption mechanism
Heat treatment, carries out similarly to Example 1 in addition to this, viable bacteria counting number after determining heat treatment and keeping, pure
The respective concentration of TOC, metal ion and chloride ion in water.The results are shown in table 1.Due in heat treatment
A large amount of water has been overflowed from nozzle, therefore when being cooled to room temperature, air accumulation is produced in component.In addition, due to protecting
Count plate is 29 after pipe 3 months, therefore the manufacture of the ultrapure water without implementing the hollow fiber film assembly using the present embodiment
Test.
[embodiment 8]
The polypropylene cup as volume expansion absorbing mechanism is not used, carries out similarly to Example 1 in addition to this, surveys
The respective dense of the viable bacteria counting number after heating and taking care of, the TOC in pure water, metal ion and chloride ion is determined
Degree.The results are shown in table 1.It has confirmed in heat treatment into the bag of the polyethylene as pressure buffer mechanism
Leak.When implementing the manufacture of ultrapure water using the hollow fiber film assembly of the present embodiment, energy has been instantly available from after operation start
The water quality enough used as ultrapure water crosses drainage.
[embodiment 9]
The pure water of ultrafiltration membrance filter will be used to enclose hollow fiber film assembly, which is put into baking oven
In, implement heat treatment in 16 hours at 90 DEG C, realizes the state that the pure water after sterilization is enclosed in component.It needs
It is bright, it,, will as volume expansion absorbing mechanism when being heated using composition shown in Fig. 4 in embodiment 9
Polypropylene (PP) bottle processed is installed on the nozzle of raw water side with the state via pipe, is mounted with conduct on the top of the polypropylene bottle
The venthole of polytetrafluoroethylene (PTFE) (PTFE) system in 0.2 μm of the aperture of pressure buffer mechanism is with filter (PTFE filter).Adding
After heat treatment, the given containment member sealing spray being placed into the bag for being installed on the polyethylene of nozzle in advance is utilized
Mouth has been taken care of 3 months in the storeroom that temperature is adjusted to 20 DEG C~25 DEG C.
After keeping 3 months, the pure water entered as preservation fluid-tight is sampled, the viable count saved in liquid has been counted.In addition, same
When determine save liquid in TOC, metal ion and chloride ion respective concentration.
When implementing the manufacture of ultrapure water using the hollow fiber film assembly of embodiment 9, it is instantly available from after operation start
Drainage can be crossed as the water quality that ultrapure water uses.
[comparative example 1]
With 1 same time of embodiment, hollow-fibre membrane group will be enclosed using the pure water after ultrafiltration membrance filter as preservation liquid
Part simultaneously carries out closed.The component has been taken care of 3 months in the storeroom that temperature is adjusted to 20 DEG C~25 DEG C.After keeping 3 months,
Pure water sampling to entering as preservation fluid-tight, has counted the viable count saved in liquid.It is saved in liquid in addition, determining simultaneously
The respective concentration of TOC, metal ion and chloride ion.The results are shown in table 1.In this comparative example, from as guarantor
A large amount of (100 or more, be difficult to count) viable bacterias have been confirmed in the pure water of liquid storage.
When implementing the manufacture of ultrapure water using the hollow fiber film assembly, it observed in crossing drainage from the big of viable bacteria
Particle is measured, compared with Example 1, reduction takes 14 times of time.
[table 1]
Claims (5)
1. a kind of filtering film component has the filter membrane of the filtering for liquid, accommodates the shell of the filter membrane and be used for
The preservation liquid of the strainability of filter membrane is kept in the shell,
Wherein, the filtering film component has filtering side ports and raw water side ports, the filtering side ports and the raw water side
Port is closed using containment member,
It is described to save the pure water that liquid is bactericidal nature.
2. filtering film component according to claim 1, wherein the content of organics saved in liquid is in terms of total organic carbon
It is 5ppm more than or lower than 50ppm.
3. filtering film component according to claim 1, wherein the concentration of chloride ion for including in liquid that saves is
25ppb is more than or lower than 250ppb.
4. a kind of filtering film component has the filter membrane of the filtering for liquid, accommodates the shell of the filter membrane and be used for
The preservation liquid of the strainability of filter membrane is kept in the shell,
Wherein, the filtering film component has filtering side ports and raw water side ports, the filtering side ports and the raw water side
Port is closed using containment member,
It is described to save the pure water that liquid is bactericidal nature,
The concentration for the metal ion for including in the preservation liquid is 10ppb more than or lower than 100ppb.
5. a kind of filtering film component has the filter membrane of the filtering for liquid, accommodates the shell of the filter membrane and be used for
The preservation liquid of the strainability of filter membrane is kept in the shell,
Wherein, the filtering film component has filtering side ports and raw water side ports, the filtering side ports and the raw water side
Port is closed using containment member,
It is described to save the pure water that liquid is bactericidal nature,
Content of organics in the preservation liquid is calculated as 5ppm more than or lower than 50ppm with total organic carbon,
The concentration for the metal ion for including in the preservation liquid is 10ppb more than or lower than 100ppb.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
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| JP2016229824 | 2016-11-28 | ||
| JP2016-229824 | 2016-11-28 | ||
| JP2017-162138 | 2017-08-25 | ||
| JP2017162138A JP6910889B2 (en) | 2016-11-28 | 2017-08-25 | Filtration membrane module and its manufacturing method and installation method of filtration membrane module |
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| Publication Number | Publication Date |
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| CN208916877U true CN208916877U (en) | 2019-05-31 |
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| CN201721620864.9U Active CN208916877U (en) | 2016-11-28 | 2017-11-28 | Filtering film component |
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| JP (1) | JP6910889B2 (en) |
| CN (1) | CN208916877U (en) |
| TW (1) | TWI644720B (en) |
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| JP7269850B2 (en) * | 2019-09-13 | 2023-05-09 | 株式会社放電精密加工研究所 | Recycling method of nitric acid aqueous solution, electrolytic processing method using the same, recycling liquid of nitric acid aqueous solution, and recycling system |
| CN111238884B (en) * | 2020-01-21 | 2022-09-20 | 力合科技（湖南）股份有限公司 | Filter membrane fixed knot constructs, sample stove and OCEC analysis appearance |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58143804A (en) * | 1982-02-16 | 1983-08-26 | Nitto Electric Ind Co Ltd | Removal of preservative liquid of membrane separation module |
| JPH0824826B2 (en) * | 1987-03-31 | 1996-03-13 | 日東電工株式会社 | Membrane module preservation method |
| JP2784656B2 (en) * | 1989-02-28 | 1998-08-06 | 日東電工株式会社 | Sterilization method of membrane module |
| NL1009457C2 (en) * | 1998-06-19 | 1999-12-21 | Sepeq B V | Apparatus and method for filtering a liquid. |
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2017
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| TW201819034A (en) | 2018-06-01 |
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