CN208903968U - A kind of hollow cathode for ion source - Google Patents
A kind of hollow cathode for ion source Download PDFInfo
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- CN208903968U CN208903968U CN201821582003.0U CN201821582003U CN208903968U CN 208903968 U CN208903968 U CN 208903968U CN 201821582003 U CN201821582003 U CN 201821582003U CN 208903968 U CN208903968 U CN 208903968U
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- hollow cathode
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- power supply
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Abstract
The utility model relates to a kind of hollow cathodes for ion source; including cathodic body and the hollow cathode pipe being arranged in cathodic body; front cover is arranged in one end of the cathodic body; the other end is correspondingly arranged on rear cover; a maintenance pole is provided in the front cover; it is provided with the inert gas conveyance conduit being connected with hollow cathode pipe at the rear cover, is arranged with separator on the hollow cathode pipe and inert gas conveyance conduit, is also arranged with protective case on the hollow cathode pipe；This is practical newly by being arranged with ceramic protective sleeve in cathode tube; to guarantee that build-up of luminance position concentrates on effective build-up of luminance position; position i.e. between hollow cathode tube head and maintenance pole; so that the working time of hollow cathode pipe is longer; there is the service life of a raising hollow cathode, effect is more stable, avoids electron stream from exempting to sputter at cathode pipe outer wall by protective case; in addition also limit ionization region is generated in cathode tube head, improves starting success rate.
Description
Technical field
The utility model relates to technology of ion source field, especially a kind of hollow cathode for ion source.
Background technique
Important component of the cathode averager as ion source, effect are generated largely by high-temperature metal surface
Free electron, then electronic beam current is formed by electric field action, electronic beam current plays auxiliary group of ionization during ion source works
With the effect for neutralizing ionic charge.
Existing cathode is mainly filament averager, and this cathode averager makes filament generate height by high current heating
Temperature, to realize the generation of free electron, but since burn-out life is limited, general only 3~5 continuous throughout the twenty-four hour24 times,
And it is relatively high to environmental requirement, it cannot achieve complex environment use.
In addition existing some simple cathode averagers are to be produced by high electrical breakdown cathode material by electric power gas
Raw high current, stream time can be more than 100 hours, while cathode has an inert gas shielding, external operating environment not shadow
Ring cathode using effect, but this averager start-up course needs to be added a high voltage, if for a long time without starting at
Function, the ionized gas meeting bombarding cathode averager that high pressure generates, causes cathode averager to damage, in addition, high voltage bombardment neutralizes
Device itself will lead to the separators such as insulating ceramics surface and plate conductive material, lead to component failure, can seriously burn out working power,
If furthermore be exactly that cannot start for a long time, it will lead to consumptive material life-span and greatly shorten, greatly shorten cathode averager uses the longevity
Life.
Summary of the invention
In view of the deficiencies of the prior art, the utility model provides a kind of hollow cathode for ion source.
The technical solution of the utility model are as follows: a kind of hollow cathode for ion source, including cathodic body and setting
Front cover is arranged in one end of hollow cathode pipe in cathodic body, the cathodic body, and the other end is correspondingly arranged on rear cover, institute
A maintenance pole is provided in the front cover stated, by maintain pole guarantee hollow cathode pipe and maintain pole between maintain one 500~
The electric current of 1500mA is provided with the inertia being connected with hollow cathode pipe to maintain continuing for build-up of luminance state at the rear cover
Separator, the hollow yin are arranged on gas transmission pipeline, the hollow cathode pipe and inert gas conveyance conduit
It is also arranged with protective case in pole pipe, guarantees that build-up of luminance position concentrates on effective build-up of luminance position, i.e. hollow cathode tube head by protective case
Position between portion and maintenance pole.
Further, the hollow cathode pipe is arranged in cathodic body by a connection piece.
Further, the separator and protective case are all made of ceramic material and are made.
Further, the direct current startup power supply of a 1500V is also connected with outside the cathodic body, the startup power supply is just
Pole is connect with cathodic body, and cathode is connect with hollow cathode pipe, punctures hollow cathode tube head by the direct current startup power supply of 1500V
The inert gas in portion generates current loop.
Further, the direct current that a 2A is also connected with outside the cathodic body maintains power supply, the maintenance power supply
Anode is connect with cathodic body, and cathode is connect with hollow cathode pipe, after startup power supply breakdown forming circuit, by maintaining power supply to protect
Card electric current can maintain always, and then guarantee a stable electric current output, at this time, it may be necessary to which startup power supply is closed.
Further, the DC cathode power supply of a 10A, the cathode power are also connected with outside the hollow cathode pipe
Cathode connect with cathode tube, the plus earth of the cathode power, by cathode power guarantee electron stream from cathode tube
Constantly draw.
The utility model has the following beneficial effects: structure is simple, design is reasonable, by being arranged with ceramic protection in cathode tube
Set, thus guarantee that build-up of luminance position concentrates on effective build-up of luminance position, i.e. position between hollow cathode tube head and maintenance pole, so that
The working time of hollow cathode pipe is longer, has the service life of a raising hollow cathode, effect is more stable, keeps away by protective case
Exempt from electron stream to exempt to sputter at cathode pipe outer wall, in addition also limit ionization region is generated in cathode tube head, starting success rate is improved,
And since protective case is made of ceramic material, and the ceramic spacer by the way that cathode bottom of the tube is arranged in, it avoids pollution
Lead to short circuit.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the schematic cross-section of the utility model；
Fig. 3 is the structural schematic diagram that the utility model is not provided with protective case；
Fig. 4 is the structural schematic diagram that the utility model connects external power supply；
In figure, 1- cathodic body, 2- hollow cathode pipe, 3- front cover, 4- rear cover, 5- maintenance pole, 6- inert gas delivery pipe
Road, 7- separator, 8- protective case, 9- connector.
Specific embodiment
Specific embodiment of the present utility model is described further with reference to the accompanying drawing:
As depicted in figs. 1 and 2, a kind of hollow cathode for ion source, including cathodic body 1 and setting are in cathode
Hollow cathode pipe 2 in ontology 1, the hollow cathode pipe 2 are arranged in cathodic body 1 by a connection piece 9, the yin
Front cover 3 is arranged in one end of pole ontology 1, and the other end is correspondingly arranged on rear cover 4, a maintenance pole 5 is provided in the front cover 3, leads to
It crosses and maintains pole 5 to guarantee hollow cathode pipe 2 and maintain the electric current for maintaining a 500~1500mA between pole 5, to maintain build-up of luminance shape
State continues, and the inert gas conveyance conduit 6 for being connected with hollow cathode pipe 2 is provided at the rear cover 5, passes through inertia
Gas transmission pipeline 6 inputs inert gas, the hollow cathode pipe 2 and inert gas conveyance conduit 6 into hollow cathode pipe 2
On be arranged with using ceramic spacer 7 made of ceramic material, avoid electron stream pollution from causing by ceramic spacer 7 short
Road is also arranged with using ceramic protective sleeve 8 made of ceramic material on the hollow cathode pipe 2, is protected by ceramic protective sleeve 8
Card build-up of luminance position concentrates on effective build-up of luminance position, i.e. position between 2 head of hollow cathode pipe and maintenance pole 5, and ceramics are protected
The spatial position in 8 outside of set is invalid build-up of luminance position, as shown in figure 3, since gas breakdown is often because some external
Part influences such as temperature, air pressure etc., causes starting to delay to realize, 2 long-time of hollow cathode pipe is caused to be in improper sputtering
State, if build-up of luminance fails, hollow cathode pipe 2 persistently has high voltage, and it is biggish that build-up of luminance position is just concentrated in surface area
Invalid build-up of luminance position, if build-up of luminance will lead to the damage of hollow cathode pipe 2 in cathode pipe surface, by hollow cathode pipe 2
It is arranged with ceramic protective sleeve 8, active position is strictly controlled at effective build-up of luminance position, so that the working time of hollow cathode pipe 2
Longer, effect is more stable, further increases the service life of hollow cathode pipe 2.
As shown in figure 4, in order to start hollow cathode, the cathodic body outer 1 is also connected with the direct current starting of a 1500V
The anode of power supply, the startup power supply is connect with cathodic body 1, and cathode is connect with hollow cathode pipe 2, is opened by the direct current of 1500V
The inert gas on dynamic power supply breakdown 2 head of hollow cathode pipe generates current loop, after the completion of breakdown, in order to guarantee that circuit is tieed up always
It holds, the direct current for needing to connect a 2A outside the cathodic body 1 maintains power supply, the anode and cathode sheet of the maintenance power supply
Body connection, cathode are connect with hollow cathode pipe 2, after startup power supply breakdown forming circuit, by maintaining guarantee of power electric current always
It can maintain, and then guarantee a stable electric current output, at this time, it may be necessary to which startup power supply is closed；And then pass through a 10A's
A voltage appropriate is added in DC cathode power supply, and the cathode of the cathode power is connect with hollow cathode pipe 2, the cathode
The plus earth of power supply guarantees that electron stream is constantly drawn from cathode tube by cathode power.
The description of the embodiments and the specification only illustrate the principle of the present utility model and most preferred embodiment, is not taking off
Under the premise of from the spirit and scope of the utility model, the utility model also has various changes and improvements, these changes and improvements
It falls within the scope of the claimed invention.
Claims (6)
1. a kind of hollow cathode for ion source, it is characterised in that: including cathodic body and be arranged in cathodic body
Front cover is arranged in hollow cathode pipe, one end of the cathodic body, and the other end is correspondingly arranged on rear cover, setting in the front cover
There is a maintenance pole, by maintaining pole to guarantee hollow cathode pipe and maintaining the electric current for maintaining a 500~1500mA between pole, thus
Continuing for build-up of luminance state is maintained, the inert gas conveyance conduit being connected with hollow cathode pipe is provided at the rear cover, it is described
Hollow cathode pipe and inert gas conveyance conduit on be arranged with separator, be also arranged with protection on the hollow cathode pipe
Set guarantees that build-up of luminance position concentrates on effective build-up of luminance position, i.e. position between hollow cathode tube head and maintenance pole by protective case
It sets.
2. a kind of hollow cathode for ion source according to claim 1, it is characterised in that: the hollow cathode pipe
It is arranged in cathodic body by a connection piece.
3. a kind of hollow cathode for ion source according to claim 1, it is characterised in that: the separator and guarantor
Sheath is all made of ceramic material and is made.
4. a kind of hollow cathode for ion source according to claim 1, it is characterised in that: outside the cathodic body
It is also connected with the direct current startup power supply of a 1500V, the anode of the startup power supply is connect with cathodic body, cathode and hollow cathode pipe
Connection generates current loop by the inert gas that the direct current startup power supply of 1500V punctures hollow cathode tube head.
5. a kind of hollow cathode for ion source according to claim 1, it is characterised in that: outside the cathodic body
The direct current for being also connected with a 2A maintains power supply, and the anode of the maintenance power supply is connect with cathodic body, cathode and hollow cathode
Pipe connection after startup power supply breakdown is formed into a loop, by maintaining guarantee of power electric current that can maintain always, and then guarantees a stabilization
Electric current output, at this time, it may be necessary to which startup power supply is closed.
6. a kind of hollow cathode for ion source according to claim 1, it is characterised in that: the hollow cathode pipe
It is also connected with the DC cathode power supply of a 10A outside, the cathode of the cathode power is connect with cathode tube, the cathode power
Plus earth, by cathode power guarantee electron stream constantly drawn from cathode tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821582003.0U CN208903968U (en) | 2018-09-27 | 2018-09-27 | A kind of hollow cathode for ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821582003.0U CN208903968U (en) | 2018-09-27 | 2018-09-27 | A kind of hollow cathode for ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208903968U true CN208903968U (en) | 2019-05-24 |
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ID=66573933
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821582003.0U Active CN208903968U (en) | 2018-09-27 | 2018-09-27 | A kind of hollow cathode for ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208903968U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112908816A (en) * | 2021-01-22 | 2021-06-04 | 中山市博顿光电科技有限公司 | Hollow cathode tube starting method and device and hollow cathode neutralizer |
-
2018
- 2018-09-27 CN CN201821582003.0U patent/CN208903968U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112908816A (en) * | 2021-01-22 | 2021-06-04 | 中山市博顿光电科技有限公司 | Hollow cathode tube starting method and device and hollow cathode neutralizer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Liu Weiji Inventor after: Ji Ming Inventor after: Zhao Gang Inventor after: Chen Beili Inventor before: Liu Weiji |
|
| CB03 | Change of inventor or designer information |