CN208902762U - Atomic force microscope probe clamper and its needle changing device - Google Patents
Atomic force microscope probe clamper and its needle changing device Download PDFInfo
- Publication number
- CN208902762U CN208902762U CN201821625443.XU CN201821625443U CN208902762U CN 208902762 U CN208902762 U CN 208902762U CN 201821625443 U CN201821625443 U CN 201821625443U CN 208902762 U CN208902762 U CN 208902762U
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- probe
- changing device
- probe clamper
- needle changing
- atomic force
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Abstract
The utility model discloses a kind of atomic force microscope probe clamper and its needle changing devices, it include: probe clamper and needle changing device, probe clamper can be adsorbed in atomic force microscope or be packed on needle changing device, probe clamper includes: probe clamper main structure and piezoelectric ceramic piece, a groove is formed on the upper surface of probe clamper main structure, one pole plate of piezoelectric ceramic piece and the slot bottom of groove are fixedly mounted with, it is fixed with a probe base on another pole plate of piezoelectric ceramic piece, forms a probe mounting groove on the top surface of probe base；One reed is installed on the top surface of probe clamper main structure；Needle changing device includes: bottom plate, lifting platform and top plate, and for lifting platform between top plate and bottom plate, the top of lifting platform is fixed with the contact pilotage being vertically arranged；The utility model reduces the difficulty of replacement probe, while improving the versatility of probe clamper, can be readily integrated into the atomic force microscope of various structures, realize common scan pattern and function.
Description
Technical field
The utility model belongs to microscopy apparatus technical field, relates in particular to a kind of atomic force microscope probe clamper
And its needle changing device.
Background technique
Binning, Quate and Gerber utility model in 1986 atomic force microscope (AFM).Atomic force microscope quilt
The third generation microscope being known as after optical microscopy and electron microscope is research material micron order even atom level table
The most frequently used tool of region feature.Atomic force microscope is limited with spatial resolution height, not by sample electric conductivity, is supported in atmosphere
It is led with semi-conductor industry, new material, life science etc. the advantages that observing samples, has been widely used in liquid phase environment at present
Domain.
Atomic force microscope generally comprises socle beam probe, light path, piezoelectric scanner, data processing and feedback
The hardware cells such as control circuit realize high score by control and the interaction force between test sample and socle beam probe needle point
Distinguish imaging.When work, probe does the two-dimensional scanning campaign in X/Y plane, needle point and sample close to sample surfaces and relative to sample
Between active force can make micro-cantilever deformation occurs, these deformation can be obtained by light path, and feedback control circuit is constantly adjusted
Whole piezoelectric scanner maintains the active force of needle point and sample constant in the stroke of Z-direction.Therefore, Z-direction piezoelectricity is recorded
The surface topography of sample can be obtained in stroke of the ceramic scanner in X/Y plane at each point.
Socle beam probe is force sensitive element, is the core component of atomic force microscope.One end of socle beam probe has
One to the extremely sensitive micro-cantilever of faint power, containing probe, the radius of curvature of probe tip is in nanometer scale.Probe tip
Geometry physical characteristic restricts the sensibility of needle point and the spatial resolution of sample image.Probe can be worn after a period of use
Or polluted by sample, no longer meet requirement of experiment, furthermore different measurement parameters is also required to select different types of probe, institute
Can often replace probe in experiment.Replacement probe for convenience is developed various probe clampers.It is fixed according to it
The mode of probe can be divided into two major classes: one, directly probe being sticked in the probe slot of clamper using double-sided adhesive or glue etc.；
Two, probe is pressed in the probe slot of clamper using reed etc..Wherein, the holder structure of first kind method design it is simple,
Compact, when fitted with probes, is also easier, but while dismantling probe will overcome the adhesion of glue, also specially treated be needed (to add sometimes
Heat, acetone and other organic solvent immersion etc.), cause disassembly difficult, it is complicated for operation, it is easy that probe is caused to damage.Second class method
The holder structure of design is more complicated than the first kind, but probe is convenient for disassembly, therefore most of commercial atomic force microscopy
Mirror all uses this kind of clamper.It is popular that there are two types of project plan comparisons:
1, the structure of the first popular probe clamper is as shown in Figure 1, visited the first cantilever beam using the first reed 1-2
Needle 1-1 is pressed in the probe slot in the first clamper main structure 1-5, the both ends of the first reed 1-2 use respectively the first screw 1-3 and
Second screw 1-4 is fixed.When probe is installed, two screws only need to be unclamped, probe is carefully inserted into probe slot, is then twisted again
Tight screw, the process for dismantling probe are opposite with installation process.Holder structure used in this scheme is compact, probe peace
Dress is secured.To guarantee that probe tip is in minimum point, primary screw that head can only be selected very flat (such as the spiral shell of M1-M1.6
Silk), when needle exchange, will turn two primary screws every time, and bigger trouble is brought to operator.
2, the structure of second of popular probe clamper is as shown in Fig. 2, the second reed 2-2 is solid by third screw 2-3
It is scheduled on the second clamper main structure 2-5, one end is jacked up by spring 2-4, and the second socle beam probe 2-1 is pressed in probe by the other end
In slot.When probe is installed, tail end of second reed far from the second socle beam probe is pressed lightly on, the head end of the second reed will be micro-
Second socle beam probe is inserted into probe slot, then looses one's grip, the second reed will be under the action of the spring by second by micro- tilting
Socle beam probe compresses.When dismantling the second socle beam probe, the tail end of the second reed is pressed again, and the second socle beam probe is taken out
Out.Clamper used in the program is easy to use, the second socle beam probe firm grip, but structure is complex,
Cost of manufacture is high, needs one hand of operator by pressing spring when replacing probe, another hand loads and unloads probe, to operator's
Qualification requires high.
Summary of the invention
In view of the deficiencies of the prior art, the purpose of this utility model is to provide a kind of atomic force microscope probe clampers
And its needle changing device, the difficulty of replacement probe is reduced, while improving the versatility of probe clamper, can easily collected
At in the atomic force microscope to various structures, common scan pattern and function are realized.
The purpose of this utility model is achieved by following technical proposals.
A kind of atomic force microscope probe clamper and its needle changing device, comprising: probe clamper and be fixed on station
On needle changing device, the probe clamper can be adsorbed in atomic force microscope or be packed on the needle changing device,
In,
The probe clamper includes: probe clamper main structure and piezoelectric ceramic piece, in the main knot of probe clamper
A groove is formed on the upper surface of structure, the leading flank of the groove and top surface are opening, a pole of the piezoelectric ceramic piece
The slot bottom of plate and the groove is fixedly mounted with, and a probe base is fixed on another pole plate of the piezoelectric ceramic piece, described
The open probe mounting groove in a leading flank and top surface is formed on the top surface of probe base；In the probe clamper main structure
One reed is installed, wherein one end of the reed and the top surface for the probe clamper main structure for being located at groove rear are solid on top surface
Dress, the other end are used to the rear end of probe being compacted to probe mounting groove bottom downwards, and the front end of the probe is from the probe
The leading flank of mounting groove and groove stretches out；In the main knot of probe clamper for being located at the groove rear and being located at below the reed
A first through hole is formed on structure；
The needle changing device includes: bottom plate, lifting platform and top plate, and the top plate is packed in the bottom plate by more root posts
Surface, the lifting platform is between top plate and bottom plate and the bottom end of the lifting platform is fixedly mounted with the bottom plate, the lifting
The top of platform is fixed with the contact pilotage being vertically arranged, and one second through-hole is formed on the top plate, when the probe clamper is fixedly mounted with
When on the needle changing device, contact pilotage sequentially passes through the second through-hole and first through hole and upward after the top of the lifting platform increases
The reed is jacked up, contact pilotage is retracted in first through hole after the top decline of the lifting platform；
Form at least two third through-hole in the probe clamper main structure, the upper surface of the top plate with it is each
The opposite position of a third through-hole is equipped with a knurly screw, fills for the probe clamper to be packed in the needle exchange
It sets.
In the above-mentioned technical solutions, multiple counterbores are formed on the bottom plate, for by the needle changing device with it is described
Station is fixedly mounted with.
In the above-mentioned technical solutions, the top of the column and the bottom surface of the top plate are fixedly mounted with, the bottom end of the column with
The top surface of the bottom plate is fixedly mounted with.
In the above-mentioned technical solutions, a contact pilotage mounting base, the bottom end of the contact pilotage are fixed on the top of the lifting platform
It is fixedly mounted with the top surface of the contact pilotage mounting base.
In the above-mentioned technical solutions, multiple magnet are installed in the probe clamper main structure, are used for the probe
Clamper main structure is adsorbed in atomic force microscope.
In the above-mentioned technical solutions, the magnet is inlaid in the probe clamper main structure.
In the above-mentioned technical solutions, two pole plates of the piezoelectric ceramic piece are respectively electrically connected an electric wire, and 2 electric wires pass through
The probe clamper main structure simultaneously connects to power supply.
In the above-mentioned technical solutions, handle is installed in the probe clamper main structure.
In the above-mentioned technical solutions, the reed passes through a screw and the probe clamper main structure for being located at groove rear
Top surface is fixedly mounted with.
In the above-mentioned technical solutions, a limiting slot is formed in the lower surface of the reed, when contact pilotage jacks up the spring upwards
When piece, the top of the contact pilotage enters in the limiting slot.
The method that above-mentioned atomic force microscope probe clamper and its needle changing device carry out needle exchange, comprising the following steps:
Step 1, probe clamper is removed from atomic force microscope, by the probe clamper main structure of probe clamper
Third through-hole passes through the knurly screw on needle changing device, tightens the knurly screw, so that probe clamper is fastened on needle exchange dress
It sets；
Step 2, the top for increasing the lifting platform makes contact pilotage sequentially pass through the second through-hole and first through hole and jack up upwards
The reed；
Step 3, old probe is taken out out of probe mounting groove, then new probe is put into probe mounting groove；
Step 4, the top for reducing the lifting platform is worn the top of contact pilotage and is back in first through hole, and the front end of reed will
The rear end of new probe is compacted to downwards probe mounting groove bottom.
The atomic force microscope probe clamper of the utility model and its having the beneficial effect that for needle changing device:
1. probe clamper is compact-sized, probe can be firmly clamped.
2. probe clamper cooperates needle changing device to use, it is convenient to load and unload probe, effectively reduce operation difficulty.
3. probe clamper is adsorbed in atomic force microscope using magnet, it is easy to load and unload and adjust position.
4. it is versatile, it is applicable to the atomic force microscope of the various structures such as scanning, lower scanning and mixed sweep, energy
Realize common scan pattern (contact mode, tapping-mode, phase pattern etc.).
Detailed description of the invention
Fig. 1 is the popular probe clamper schematic diagram of the first in background technique；
Fig. 2 is second of popular probe clamper schematic diagram in background technique；
Fig. 3 a is the bottom view of the probe clamper of the utility model；
Fig. 3 b is the top view of the probe clamper of the utility model；
Fig. 4 is the structural schematic diagram of the utility model needle changing device；
Fig. 5 is the structural schematic diagram of the utility model atomic force microscope probe clamper and its needle changing device；
Fig. 6 is the cut-away view (A-A in Fig. 5 of the utility model atomic force microscope probe clamper and its needle changing device
Face).
Wherein, the 1-1: the first socle beam probe, the 1-2: the first reed, the 1-3: the first screw, the 1-4: the second screw, 1-5: the
One clamper main structure, the 2-1: the second socle beam probe, the 2-2: the second reed, 2-3: third screw, 2-4: spring, 2-5: the second
Clamper main structure, 3: probe clamper, 3-1: probe, 3-2: probe base, 3-3: piezoelectric ceramic piece, 3-4: the main knot of clamper
Structure, 3-5: magnet, 3-6: handle, 3-7: reed, 3-8: screw, 3-9: groove, 3-10: probe mounting groove, 3-11: the first is logical
Hole, 3-12: third through-hole, 4: needle changing device, 4-1: bottom plate, 4-2: column, 4-3: lifting platform, 4-4: contact pilotage mounting base, 4-5:
Top plate, 4-6: contact pilotage, 4-7: knurly screw, 4-8: counterbore, 4-9: differential head, the 4-10: the second through-hole, 6-1: tweezers.
Specific embodiment
The utility model probe clamper is compact-sized, versatile, can be used in the atomic force microscope of different structure,
It is used cooperatively with the needle changing device of the utility model, it is convenient to load and unload probe.
In the following embodiments, piezoelectric ceramic piece selects the rectangular piezoelectric ceramic piece of company's core tomorrow, model
NAC2003, length and width are 5mm, a height of 2mm, maximum drive voltage 60V, and 3 μm of stroke, resonance frequency 500KHz.
Reed selects elastomeric beryllium copper piece to be process, with a thickness of 0.2mm.
Magnet selects magnetic stronger neodymium iron boron cylindrical magnet, diameter 3mm, with a thickness of 1.5mm.
Lifting platform (accurate lifting platform) selects the Z axis plane TSD platform of Sigma Corporation, model TSD-403, table top ruler
Very little 40 × 40mm, stroke 6mm, 2.5 μm of mobile accuracy.
Common M4 hexagonal copper post, length 40mm can be used in column.
Knurly screw can twist M3 screw with the stainless steel height head annular knurl hand of selection standard.
The technical solution of the utility model is further illustrated combined with specific embodiments below.
Embodiment 1
As shown in a~6 Fig. 3, a kind of atomic force microscope probe clamper and its needle changing device, comprising: probe clamper 3
With the needle changing device 4 being fixed in station (not shown), probe clamper 3 can be adsorbed in atomic force microscope or
It is packed on needle changing device 4, wherein when atomic force microscope normal use, probe clamper 3 is adsorbed on atomic force microscope
On, and the cantilever beam of probe 3-1 is aligned at the laser spot of light path；When needing to the probe in probe clamper 3
When (socle beam probe) carries out needle exchange, probe clamper 3 is packed on needle changing device 4.
Probe clamper 3 includes: probe clamper main structure 3-4 and excitation probe generates vibration when for dynamic mode
Piezoelectric ceramic piece 3-3, forms a groove 3-9 on the upper surface of probe clamper main structure 3-4, the leading flank of groove 3-9 and
Top surface is opening, and a pole plate of piezoelectric ceramic piece 3-3 and the slot bottom of groove 3-9 are fixedly mounted with, piezoelectric ceramic piece 3-3 another
Pole plate and the bottom surface of a probe base 3-2 are fixedly mounted with, and a leading flank and top surface opening are formed on the top surface of probe base 3-2
Probe mounting groove 3-10；One reed 3-7 is installed on the top surface of probe clamper main structure 3-4, wherein one end of reed 3-7
It is fixedly mounted with the top surface for the probe clamper main structure 3-4 for being located at the rear groove 3-9, the other end is used for the rear end of probe 3-1 is (micro-
Cantilever) it is compacted to the bottom probe mounting groove 3-10 downwards, the front end (close to one end of needle point) of probe 3-1 is from probe mounting groove 3-10
It is stretched out with the leading flank of groove 3-9；In the probe clamper main structure 3-4 for being located at the rear groove 3-9 and being located at below reed 3-7
One first through hole 3-11 of upper formation；
Needle changing device 4 includes: bottom plate 4-1, lifting platform 4-3 and top plate 4-5, and top plate 4-5 is packed in by four columns 4-2
The surface of bottom plate 4-1, the top of column 4-2 and the bottom surface of top plate 4-5 are fixedly mounted with, the bottom end of column 4-2 and the top surface of bottom plate 4-1
It is fixedly mounted with.Lifting platform 4-3 is between top plate 4-5 and bottom plate 4-1 and the bottom end of lifting platform 4-3 is fixedly mounted with bottom plate 4-1, lifting platform
The top of 4-3 is fixed with the contact pilotage 4-6 being vertically arranged, and one second through-hole 4-10 is formed on top plate 4-5, when probe clamper 3
When being packed on needle changing device 4 (in probe clamper main structure 3-4 placement and top plate 4-5), after the top of lifting platform 4-3 increases
Contact pilotage 4-6 sequentially passes through the second through-hole 4-10 and first through hole 3-11 and jacks up reed 3-7 upwards, at this time can be below reed
Old probe 3-1 is removed in probe mounting groove 3-10；New probe 3-1 is placed in probe mounting groove 3-10 again, works as lifting platform
Contact pilotage 4-6 is retracted in first through hole 3-11 after the top decline of 4-3, and the rear end of new probe 3-1 is pressed downward by reed again
Tightly to the bottom probe mounting groove 3-10.
It is formed on probe clamper main structure 3-4 during 2 third through-holes 3-12,2 third through-hole 3-12 with groove are
The heart is symmetrical arranged, and the upper surface of top plate 4-5 is equipped with a knurly screw 4- in the position opposite with each third through-hole 3-12
7, for probe clamper 3 to be fastened on needle changing device 4.
The method that above-mentioned atomic force microscope probe clamper and its needle changing device carry out needle exchange, comprising the following steps:
Step 1, probe clamper 3 is removed from atomic force microscope, by the probe clamper main structure of probe clamper 3
The third through-hole 3-12 of 3-4 passes through the knurly screw 4-7 on needle changing device 4, knurly screw 4-7 is tightened, so that probe clamper 3
It is fastened on needle changing device 4；
Step 2, the differential head of rotary elevating platform increases the top of lifting platform 4-3, so that contact pilotage 4-6 is sequentially passed through second logical
Hole 4-10 and first through hole 3-11 simultaneously jacks up reed 3-7 upwards；
Step 3, old probe 3-1 is taken out with tweezers 6-1 out of probe mounting groove 3-10, is put back in probe box, then use
New probe 3-1 is put into probe mounting groove 3-10 by tweezers 6-1；
Step 4, the differential head of lifting platform is reversely rotated, the top of lifting platform 4-3 is reduced, wears go back to the top of contact pilotage 4-6
In (retraction) to first through hole 3-11, the rear end of new probe 3-1 is compacted to downwards probe mounting groove 3- by the front end of reed 3-7
10 bottoms.
Embodiment 2
On the basis of embodiment 1,2 counterbore 4-8 are formed on bottom plate 4-1, for passing through bolt for needle changing device 4
It is fixedly mounted with station.
There are four magnet 3-5 for installation on probe clamper main structure 3-4, are used for probe clamper main structure 3-4
It is adsorbed in atomic force microscope, wherein magnet 3-5 is to be inlaid in (the material of needle changing device in probe clamper main structure 3-4
It is not attracting with magnet, for example, stainless steel material).
Embodiment 3
On the basis of embodiment 2, a contact pilotage mounting base 4-4, the bottom of contact pilotage 4-6 are fixed on the top of lifting platform 4-3
It holds and is fixedly mounted with the top surface of contact pilotage mounting base 4-4.
A limiting slot, when contact pilotage 4-6 jacks up reed 3-7 upwards, the top of contact pilotage 4-6 are formed in the lower surface of reed 3-7
End enters in the limiting slot.
Two pole plates of piezoelectric ceramic piece 3-3 are respectively electrically connected an electric wire (not shown), and 2 electric wires pass through Probe clip
Holder main structure 3-4 is simultaneously connect with power supply (not shown).
Handle 3-6 is installed on probe clamper main structure 3-4, is moved easily.
Reed 3-7 is fixedly mounted with by the top surface of a screw 3-8 and probe clamper main structure 3-4 for being located at the rear groove 3-9.
Illustrative description has been done to the utility model above, it should explanation, in the core for not departing from the utility model
In the case where the heart, it is any it is simple deformation, modification or other skilled in the art can not spend creative work etc.
The protection scope of the utility model is each fallen with replacement.
Claims (9)
1. a kind of atomic force microscope probe clamper and its needle changing device characterized by comprising probe clamper (3) and
The needle changing device (4) being fixed on station, the probe clamper (3) can be adsorbed in atomic force microscope or be packed in
On the needle changing device (4), wherein
The probe clamper (3) includes: probe clamper main structure (3-4) and piezoelectric ceramic piece (3-3), in the Probe clip
It being formed on the upper surface of holder main structure (3-4) groove (3-9), the leading flank of the groove (3-9) and top surface are opening,
The slot bottom of the pole plate and the groove (3-9) of the piezoelectric ceramic piece (3-3) is fixedly mounted with, at the piezoelectric ceramic piece (3-3)
Another pole plate on be fixed with a probe base (3-2), formed on the top surface of the probe base (3-2) leading flank and
The open probe mounting groove (3-10) in top surface；A reed (3- is installed on the top surface of the probe clamper main structure (3-4)
7), wherein one end of the reed (3-7) and the top surface for the probe clamper main structure (3-4) for being located at the rear groove (3-9) are solid
Dress, the other end are used to the rear end of probe (3-1) being compacted to probe mounting groove (3-10) bottom, the probe (3-1) downwards
Front end from the leading flank of the probe mounting groove (3-10) and groove (3-9) stretch out；Be located at the groove rear (3-9) and
A first through hole (3-11) is formed in the probe clamper main structure (3-4) below the reed (3-7)；
The needle changing device (4) includes: bottom plate (4-1), lifting platform (4-3) and top plate (4-5), and the top plate (4-5) passes through more
Root post (4-2) is packed in the surface of the bottom plate (4-1), and the lifting platform (4-3) is located at top plate (4-5) and bottom plate (4-
1) between the and bottom end of the lifting platform (4-3) is fixedly mounted with the bottom plate (4-1), and the top of the lifting platform (4-3) is fixed with perpendicular
The contact pilotage (4-6) being directly arranged forms one second through-hole (4-10) on the top plate (4-5), when the probe clamper (3) is solid
When on the needle changing device (4), contact pilotage (4-6) sequentially passes through the second through-hole after the top of the lifting platform (4-3) increases
(4-10) and first through hole (3-11) simultaneously jack up the reed (3-7) upwards, contact pilotage after the top decline of the lifting platform (4-3)
(4-6) is retracted in first through hole (3-11)；
Formed at least two third through-hole (3-12) on the probe clamper main structure (3-4), the top plate (4-5) it is upper
Surface is equipped with a knurly screw (4-7) in the position opposite with third through-hole described in each (3-12), is used for the spy
Needle holder (3) is fastened on the needle changing device (4).
2. atomic force microscope probe clamper according to claim 1 and its needle changing device, which is characterized in that described
Multiple counterbores (4-8) is formed on bottom plate (4-1), for the needle changing device (4) to be fixedly mounted with the station.
3. atomic force microscope probe clamper according to claim 2 and its needle changing device, which is characterized in that described vertical
The top of column (4-2) and the bottom surface of the top plate (4-5) are fixedly mounted with, the bottom end of the column (4-2) and the top of the bottom plate (4-1)
Face is fixedly mounted with.
4. atomic force microscope probe clamper according to claim 3 and its needle changing device, which is characterized in that described
The top of lifting platform (4-3) is fixed with a contact pilotage mounting base (4-4), the bottom end of the contact pilotage (4-6) and the contact pilotage mounting base
The top surface of (4-4) is fixedly mounted with.
5. atomic force microscope probe clamper according to claim 4 and its needle changing device, which is characterized in that described
Multiple magnet (3-5) is installed, for adsorbing the probe clamper main structure (3-4) in probe clamper main structure (3-4)
In atomic force microscope, wherein the magnet (3-5) is inlaid in the probe clamper main structure (3-4).
6. atomic force microscope probe clamper according to claim 5 and its needle changing device, which is characterized in that described
The lower surface of reed (3-7) forms a limiting slot, when contact pilotage (4-6) jacks up the reed (3-7) upwards, the contact pilotage (4-
6) top enters in the limiting slot.
7. atomic force microscope probe clamper according to claim 6 and its needle changing device, which is characterized in that the pressure
Two pole plates of electroceramics piece (3-3) are respectively electrically connected an electric wire, and 2 electric wires pass through the probe clamper main structure (3-4)
And it connects to power supply.
8. atomic force microscope probe clamper according to claim 7 and its needle changing device, which is characterized in that described
Handle (3-6) is installed in probe clamper main structure (3-4).
9. atomic force microscope probe clamper according to claim 8 and its needle changing device, which is characterized in that the spring
Piece (3-7) is fixedly mounted with by a screw (3-8) and the top surface for the probe clamper main structure (3-4) for being located at the rear groove (3-9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821625443.XU CN208902762U (en) | 2018-09-30 | 2018-09-30 | Atomic force microscope probe clamper and its needle changing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821625443.XU CN208902762U (en) | 2018-09-30 | 2018-09-30 | Atomic force microscope probe clamper and its needle changing device |
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| CN208902762U true CN208902762U (en) | 2019-05-24 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077347A (en) * | 2019-12-25 | 2020-04-28 | 北京航空航天大学 | Atomic force microscopy probe clamping device |
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2018
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077347A (en) * | 2019-12-25 | 2020-04-28 | 北京航空航天大学 | Atomic force microscopy probe clamping device |
| CN111077347B (en) * | 2019-12-25 | 2022-05-03 | 北京航空航天大学 | Atomic force microscopy probe clamping device |
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