CN208898982U - Coating apparatus - Google Patents
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- CN208898982U CN208898982U CN201821393610.2U CN201821393610U CN208898982U CN 208898982 U CN208898982 U CN 208898982U CN 201821393610 U CN201821393610 U CN 201821393610U CN 208898982 U CN208898982 U CN 208898982U
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- shielding
- blocking parts
- thickness measure
- measure sensor
- sensor
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Abstract
The utility model discloses a kind of coating apparatus, including coating chamber, the film-coating mechanism being set in the coating chamber, the first shielding or blocking parts, secondary shielding or blocking parts, thickness measure sensor, first shielding or blocking parts are arranged along the plated film direction of the film-coating mechanism, the secondary shielding or blocking parts are horizontally installed on the opening of the coating chamber, and the thickness measure sensor is used to detect the thickness of first shielding or blocking parts and the film layer in secondary shielding or blocking parts.The coating apparatus thickness measure sensor measures the thicknesses of layers in shielding or blocking parts every preset measurement period, is monitored in real time with realizing to equipment cleaning time of beginning to speak, greatly improves the runing time of equipment.
Description
Technical field
The utility model relates to coating technique fields, particularly relate to a kind of coating apparatus.
Background technique
PVD (Physical Vapor Deposition, physical vapour deposition (PVD)), which refers to, realizes that substance turns using physical process
It moves, process atom or molecule being transferred to by source on substrate surface.Its effect is can to make certain have specific characteristics can (intensity
Height, wearability, thermal diffusivity, rotproofness etc.) particle be sprayed on the lower parent of performance so that parent have better property
Energy.
But the metallic part that pounds of PVD magnetron sputtering apparatus sputtering target in processing procedure can sputter and be plated to cathode
In the shielding or blocking parts of target, with the continuous elongated of activity time is produced, the thicknesses of layers in shielding or blocking parts is not
It is disconnected to increase, more than fall in flakes can be generated after critical value, the pollution of processing procedure material is caused, generates bad cause under process rate
Drop.
During realizing the utility model, at least there are the following problems in the prior art for inventor's discovery:
Existing PVD magnetron sputtering apparatus is prevention maintenance to the cleaning of shielding or blocking parts, in order to prevent PVD magnetic control
The event that the scaling-off, demoulding etc. that sputtering equipment longtime running necessarily will appear declines process rate occurs, by the period to PVD magnetic
Control sputtering equipment sputtering target shields accordingly or blocking parts is removed the cleaning of coating.But prevention is according to life maintenance period
Industry, which is tested, to be estimated, actually tend to occur maintenance in advance or hysteresis, decline process yields or process rate, cause cost
Waste.
Utility model content
In view of this, the purpose of this utility model is that a kind of coating apparatus is proposed, to solve accurately determine maintenance
The technical issues of period.
The utility model embodiment provides a kind of coating apparatus, including coating chamber, is set in the coating chamber
Film-coating mechanism, first shielding or blocking parts, secondary shielding or blocking parts, thickness measure sensor, it is described first shielding
Or blocking parts is arranged along the plated film direction of the film-coating mechanism, the secondary shielding or blocking parts are horizontally installed on described
The opening of coating chamber, the thickness measure sensor for detect first shielding or blocking parts and secondary shielding or
The thickness of film layer in blocking parts.
In some embodiments of the utility model, the thickness measure sensor is set to first shielding or blocks
The edge side of component, secondary shielding or blocking parts.
In some embodiments of the utility model, the thickness measure sensor is confocal displacement sensor.
In some embodiments of the utility model, the thickness measure sensor is confocal laser displacement sensor.
In some embodiments of the utility model, the thickness measure sensor is set to first shielding or blocks
The side towards the film-coating mechanism of component, secondary shielding or blocking parts.
In some embodiments of the utility model, the quantity of the thickness measure sensor is two, one of thick
Degree measurement sensor be set to first shielding or blocking parts, secondary shielding or blocking parts towards the film-coating mechanism
Side, another thickness measure sensor is set to first shielding or blocking parts, secondary shielding or blocking parts
Away from the side of the film-coating mechanism.
In some embodiments of the utility model, the thickness measure sensor is reflection distance measuring sensor or confocal
Displacement sensor.
In some embodiments of the utility model, the thickness measure sensor is laser range sensor.
In some embodiments of the utility model, the thickness measure sensor is set to first shielding or blocks
The side towards the film-coating mechanism of component, secondary shielding or blocking parts, and with first shielding or blocking parts, the
Two shieldings or blocking parts directly contact.
In some embodiments of the utility model, the thickness measure sensor is ranging probe, the coating apparatus
Further include mobile mechanism, the mobile mechanism for drive the thickness measure sensor towards close to or far from described first
The direction of shielding or blocking parts, secondary shielding or blocking parts moves back and forth, and the driving thickness measure sensing
Device moves in the plane for being parallel to first shielding or blocking parts, secondary shielding or blocking parts.
Coating apparatus thickness measure sensor provided by the embodiment of the utility model is measured every preset measurement period to be shielded
Cover or blocking parts on thicknesses of layers, equipment cleaning time of beginning to speak is monitored in real time with realizing, greatly improves and sets
Standby runing time.Cause processing procedure product bad because the film layer in shielding or blocking parts can fall off when blocked up, maintenance personnel
It is all the fixed cycle to begin to speak to clean, after the improvement of the utility model, thicknesses of layers can be monitored in real time, and the period is avoided to miss
Difference can carry out beginning to speak to clean before critical value, to protect the cleanliness of chamber, reduce cleaning maintenance intensity.Therefore, the plating
Film device can be pre- anti-lost by the modes such as man-machine interface intuitively real-time monitoring, so that maintenance period determination is more accurate
The generation of slag or demoulding, to improve process rate.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the coating apparatus of the utility model embodiment；
Fig. 2 is that the shielding of the utility model one embodiment or the installation of blocking parts and thickness measure sensor are illustrated
Figure；
Fig. 3 is that the shielding of another embodiment of the utility model or the installation of blocking parts and thickness measure sensor are illustrated
Figure；
Fig. 4 is that the shielding of another embodiment of the utility model or the installation of blocking parts and thickness measure sensor are illustrated
Figure.
Specific embodiment
In order to make those skilled in the art better understand the scheme of the utility model, below in conjunction with the utility model reality
The attached drawing in example is applied, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that described
Embodiment is only the embodiment of the utility model a part, instead of all the embodiments.Based on the reality in the utility model
Example is applied, every other embodiment obtained by those of ordinary skill in the art without making creative efforts is all answered
When the range for belonging to the utility model protection.
It should be noted that the specification and claims of the utility model and term " first " in above-mentioned attached drawing,
" second " etc. is to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that in this way
The data used are interchangeable under appropriate circumstances, so that the embodiments of the present invention described herein can be in addition at this
In illustrate or description those of other than sequence implement.In addition, term " includes " and " having " and their any deformation, meaning
Figure be to cover it is non-exclusive include, for example, containing the process, method, system, product or equipment of a series of steps or units
Those of be not necessarily limited to be clearly listed step or unit, but may include be not clearly listed or for these processes,
The intrinsic other step or units of method, product or equipment.It should be noted that the structural schematic diagram of coating apparatus shown in Fig. 1-4
It is only illustrative, and not restrictive.
At least one embodiment of the utility model provides a kind of coating apparatus, and the structural schematic diagram of the coating apparatus is such as
Shown in Fig. 1, the coating apparatus include coating chamber 7, the film-coating mechanism being set in the coating chamber 71, first shielding or
Blocking parts 2, secondary shielding or blocking parts 6, thickness measure sensor 3, first shielding or blocking parts 2 are along described
The plated film direction setting of film-coating mechanism 1, the secondary shielding or blocking parts 6 are horizontally installed on the opening of the coating chamber 7
Place, the thickness measure sensor 3 are used to detect the film in the shielding or blocking parts 2 and secondary shielding or blocking parts 6
The thickness of layer 4.In processing procedure, the metallic that film-coating mechanism 1 pounds largely is splashed to the surface of substrate 5, but part
It can sputter in the shielding for being plated to cathode target or blocking parts 2 and secondary shielding or blocking parts 6, not with the production activity time
Break elongated, the thickness of shielding or blocking parts 2 and the film layer 4 in secondary shielding or blocking parts 6 constantly increases, and the thickness is surveyed
Quantity sensor 3 is used to detect the thickness of the shielding or blocking parts 2 and the film layer 4 in secondary shielding or blocking parts 6, works as institute
When stating the thickness of film layer 4 more than preset thickness threshold value, then remind operator to the shielding or blocking parts 2 and the second screen
Cover or blocking parts 6 be removed the cleaning of film layer 4, therefore can accurately determine maintenance period, thus avoid process yields or
The problems such as process rate declines, cost is caused to waste.Moreover, because shielding or after blocking parts is scaling-off or demoulding, dust and residual
Slag can drift about in coating chamber, pollute other chambers or target etc., can be scaling-off or de- after the improvement of the utility model
It is replaced before mould, Pollution protection, ensure that chamber clean degree.
It should be pointed out that the measurement period of thickness measure sensor 3 can also be preset, so that the thickness measure
Sensor 3 detects the film in first shielding or blocking parts 2 and secondary shielding or blocking parts 6 every a measurement period
The thickness of layer 4, such as the thickness measure sensor 3 is every first shielding of detection in 3 days or blocking parts 2 and secondary shielding
Or the thickness of the film layer 4 in blocking parts 6, it can also be every first shielding of detection in 1 day or blocking parts 2 and secondary shielding
Or the thickness of the film layer 4 in blocking parts 6, it can also be every half a day, 6 hours, 1 hour, 1 minute or 1 second etc., this
With no restriction to this, those skilled in the art can set measurement period according to process requirement to utility model embodiment, with accurate
Ground detects the thickness of first shielding or blocking parts 2 and the film layer 4 in secondary shielding or blocking parts 6, and processing procedure is avoided to produce
Amount or process rate decline cause cost to waste.It should also be noted that, being merely able to exemplary since Fig. 1 is plan view
Ground shows the schematic diagram in a plane, in fact, when realizing the utility model, it can be along the plating of the film-coating mechanism 1
Multiple first shieldings of film direction setting or blocking parts 2,2 be not limited in Fig. 1 can also be in the coating chamber 7
Opening multiple secondary shieldings or blocking parts 6,2 be not limited in Fig. 1 are laterally set.
Optionally, the coating chamber 7 can be vacuum chamber, and the film-coating mechanism 1 can be sputtering target, and target atom splashes
It is mapped on the substrate 5 of 1 right opposite of film-coating mechanism.Optionally, first shielding or blocking parts 2 and secondary shielding or occlusion part
Part 6 can be shielding or shutter.Optionally, the thickness for the film layer 4 that the thickness measure sensor 3 measures can be on man-machine boundary
It is shown on face, in order to which operator is intuitive to see measurement result.
In another embodiment of the utility model, as shown in Fig. 2, the thickness measure sensor 3 be set to it is described
The edge side of first shielding or blocking parts 2, the thickness measure sensor 3 measure first shielding by confocal method or hide
The thickness of film layer 4 on stopper part 2.Optionally, the thickness measure sensor 3 is confocal displacement sensor, and therefore, this is practical
New embodiment can accurately measure the thickness of the film layer 4 sputtered in first shielding or blocking parts 2 using confocal principle,
It is not influenced by its material, color and angle.After replacing the first shielding or blocking parts 2 every time, thickness is surveyed in man-machine interface
Quantity sensor 3 is set to zero again, and with the progress of processing procedure, the film layer 4 in the first shielding or blocking parts 2 is constantly thickened, thickness
Measurement sensor 3 is to its real-time monitoring (measurement period is shorter) and feeds back, and close to before preset thickness threshold value, prompts operator
Member's reasonable arrangement service time, extends operation hours, avoids the product caused by scaling-off or demoulding bad.Optionally, institute
Stating thickness measure sensor 3 is confocal laser displacement sensor, to improve measurement accuracy, more accurately measures film layer 4
Thickness.The measuring principle phase of the measuring principle of the secondary shielding or blocking parts 6 and first shielding or blocking parts 2
Together, the utility model embodiment repeats no more.
In another embodiment of the utility model, as shown in figure 3, the thickness measure sensor 3 be set to it is described
The side towards the film-coating mechanism 1 of first shielding or blocking parts 2, the thickness measure sensor 3 pass through three corner reflections
Telemetry measures the thickness of first shielding or the film layer 4 in blocking parts 2.Optionally, the thickness measure sensor 3 is
Reflect distance measuring sensor.Therefore, the utility model embodiment can accurately measure first screen using three corner reflection telemetrys
Cover or blocking parts 2 on the thickness of film layer 4 that sputters, do not influenced by its material, color and angle.The first shielding of replacement every time
Or after blocking parts 2, thickness measure sensor 3 is set to zero again in man-machine interface, with the progress of processing procedure, the first shielding or
Film layer 4 in blocking parts 2 constantly thickens, and thickness measure sensor 3 is to its real-time monitoring (measurement period is shorter) and feeds back, and connects
Before nearly preset thickness threshold value, operator's reasonable arrangement service time is prompted, extends operation hours, avoids because scaling-off
Or the product that demoulding causes is bad.The thickness measure sensor 3 is laser range sensor, to improve measurement accuracy, more
Add the thickness for accurately measuring film layer 4.The measuring principle of the secondary shielding or blocking parts 6 is shielded or is blocked with described first
The measuring principle of component 2 is identical, and the utility model embodiment repeats no more.
In another embodiment of the utility model, as shown in figure 3, the thickness measure sensor 3 be set to it is described
The side towards the film-coating mechanism 1 of first shielding or blocking parts 2, the thickness measure sensor 3 are surveyed by confocal method
Measure the thickness of first shielding or the film layer 4 in blocking parts 2.Optionally, the thickness measure sensor 3 is confocal displacement
Sensor, therefore, the utility model embodiment can be accurately measured in first shielding or blocking parts 2 using confocal principle
The thickness of the film layer 4 of sputtering, is not influenced by its material, color and angle.After replacing the first shielding or blocking parts 2 every time,
Thickness measure sensor 3 is set to zero again in man-machine interface, with the progress of processing procedure, in the first shielding or blocking parts 2
Film layer 4 constantly thickens, and thickness measure sensor 3 is to its real-time monitoring (measurement period is shorter) and feeds back, close to preset thickness
Before threshold value, operator's reasonable arrangement service time is prompted, extends operation hours, is avoided because scaling-off or demoulding initiation
Product is bad.Optionally, the thickness measure sensor 3 is confocal laser displacement sensor, to improve measurement accuracy, more
Accurately measure the thickness of film layer 4.The measuring principle of the secondary shielding or blocking parts 6 and first shielding or occlusion part
The measuring principle of part 2 is identical, and the utility model embodiment repeats no more.
Optionally, the thickness measure sensor 3 faces first shielding or blocking parts 2.Target is former in order to prevent
Son is splashed on the thickness measure sensor 3, can also add hood for protecting rider (in figure not outside the thickness measure sensor 3
Show), it prevents the sputtering due to target atom and leads to the measurement for influencing the thickness measure sensor 3.The secondary shielding or
The measuring principle of blocking parts 6 is identical as the measuring principle of first shielding or blocking parts 2, and the utility model embodiment is not
It repeats again.
In the further embodiment of the utility model, as shown in figure 4, the quantity of the thickness measure sensor 3 is two
It is a, one of thickness measure sensor 3 be set to first shielding or blocking parts 2 towards the film-coating mechanism 1
Side, another thickness measure sensor 3 be set to first shielding or blocking parts 2 away from the film-coating mechanism 1
Side.That is, the embodiment is further added by a thickness measure sensor 3, one of thickness measure on the basis of Fig. 3
Sensor 3 is located at the front of the first shielding or blocking parts 2, another thickness measure sensor 3 is located at the first shielding or blocks
The back side of component 2, as shown in Figure 4.The measuring principle of the secondary shielding or blocking parts 6 and first shielding or occlusion part
The measuring principle of part 2 is identical, and the utility model embodiment repeats no more.
Optionally, the thickness measure sensor 3 is laser range sensor, can be and is measured based on confocal method, can also
To measure the thickness of the film layer 4 in first shielding or blocking parts 2 based on three corner reflection telemetrys.In this embodiment,
The value that two thickness measure sensors 3 measure is subtracted each other, the thickness of as described first shielding or the film layer 4 in blocking parts 2.
Therefore, in this embodiment, do not need two thickness measure sensors 3 being set to zero.When described two thickness measure sensors 3
Difference is measured close to before preset thickness threshold value, prompts operator's reasonable arrangement service time, extends operation hours,
Avoid the product caused by scaling-off or demoulding bad.Optionally, the thickness measure sensor 3 is laser range sensor, from
And measurement accuracy is improved, more accurately measure the thickness of film layer 4.The thickness measure sensor 3 is also possible to infrared distance measurement
Sensor.The measuring principle phase of the measuring principle of the secondary shielding or blocking parts 6 and first shielding or blocking parts 2
Together, the utility model embodiment repeats no more.
In another embodiment of the utility model, the thickness measure sensor 3 be set to it is described first shielding or
The side towards the film-coating mechanism 1 of blocking parts 2, and directly contacted with first shielding or blocking parts 2.In the reality
It applies in example, it can be straight by the thickness measure sensor 3 and first shielding or blocking parts 2 every a measurement period
Contact, and be inserted into the film layer 4 in first shielding or blocking parts 2, to pass through the change of resistance value or voltage value
Change, measures the thickness of first shielding or the film layer 4 in blocking parts 2.The measurement of the secondary shielding or blocking parts 6 is former
Reason is identical as the measuring principle of first shielding or blocking parts 2, and the utility model embodiment repeats no more.
The thickness measure sensor 3 is ranging probe, and the coating apparatus further includes mobile mechanism, the mobile mechanism
For driving the thickness measure sensor 3 to carry out towards the direction close to or far from first shielding or blocking parts 2
It moves back and forth, and the driving thickness measure sensor 3 moves in the plane for being parallel to first shielding or blocking parts 2
It is dynamic.Therefore, ranging probe insertion can be driven by the mobile mechanism or is extracted in first shielding or blocking parts 2
Film layer 4, can also be by the movement of mobile mechanism by the first shielding described in ranging probe or the film layer 4 in blocking parts 2
Different location, to obtain more accurate measurement result.The measuring principle of the secondary shielding or blocking parts 6 and described first
The measuring principle of shielding or blocking parts 2 is identical, and the utility model embodiment repeats no more.
It can be seen that coating apparatus provided by the embodiment of the utility model is by thickness measure sensor every preset survey
The thicknesses of layers in period measurement shielding or blocking parts is measured, equipment cleaning time of beginning to speak is monitored in real time with realizing, pole
The earth improves the runing time of equipment.Because the film layer in shielding or blocking parts can fall off when blocked up causes processing procedure product not
Good, maintenance personnel is the fixed cycle to begin to speak to clean, and after the improvement of the utility model, thicknesses of layers can supervise in real time
Control, avoids circular error that from can carrying out beginning to speak to clean before critical value, to protect the cleanliness of chamber, reduce cleaning maintenance by force
Degree.Therefore, the coating apparatus can be by the modes such as man-machine interface intuitively real-time monitoring, so that maintenance period determines more
It is accurate to add, the generation of pre- anti-slag-falling or demoulding, to improve process rate.
It should be understood by those ordinary skilled in the art that: the discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under the thinking of the utility model, the above reality
Applying can also be combined between the technical characteristic in example or different embodiments, and there are the utility model as described above
Many other variations of different aspect, for simplicity, they are not provided in details.Therefore, all spirit in the utility model
Within principle, any omission, modification, equivalent replacement, improvement for being made etc. should be included in the protection scope of the utility model
Within.
Claims (10)
1. a kind of coating apparatus, which is characterized in that including coating chamber (7), the coating machine being set in the coating chamber (7)
Structure (1), the first shielding or blocking parts (2), secondary shielding or blocking parts (6), thickness measure sensor (3), described first
Shielding or blocking parts (2) are arranged along the plated film direction of the film-coating mechanism (1), the secondary shielding or blocking parts (6)
Be horizontally installed on the opening of the coating chamber (7), the thickness measure sensor (3) for detect first shielding or
The thickness of film layer (4) on blocking parts (2) and secondary shielding or blocking parts (6).
2. coating apparatus according to claim 1, which is characterized in that the thickness measure sensor (3) is set to described
The edge side of first shielding or blocking parts (2), secondary shielding or blocking parts (6).
3. coating apparatus according to claim 2, which is characterized in that the thickness measure sensor (3) is confocal displacement
Sensor.
4. coating apparatus according to claim 3, which is characterized in that the thickness measure sensor (3) is confocal laser
Displacement sensor.
5. coating apparatus according to claim 1, which is characterized in that the thickness measure sensor (3) is set to described
The side towards the film-coating mechanism (1) of first shielding or blocking parts (2), secondary shielding or blocking parts (6).
6. coating apparatus according to claim 1, which is characterized in that the quantity of the thickness measure sensor (3) is two
A, one of thickness measure sensor (3) is set to first shielding or blocking parts (2), secondary shielding or occlusion part
The side towards the film-coating mechanism (1) of part (6), another thickness measure sensor (3) be set to it is described first shielding or
The side away from the film-coating mechanism (1) of blocking parts (2), secondary shielding or blocking parts (6).
7. coating apparatus according to claim 5 or 6, which is characterized in that the thickness measure sensor (3) is that reflection is surveyed
Away from sensor or confocal displacement sensor.
8. coating apparatus according to claim 7, which is characterized in that the thickness measure sensor (3) is laser ranging
Sensor.
9. coating apparatus according to claim 1, which is characterized in that the thickness measure sensor (3) is set to described
First shielding or blocking parts (2), secondary shielding or blocking parts (6) the side towards the film-coating mechanism (1), and with institute
It states the first shielding or blocking parts (2), secondary shielding or blocking parts (6) directly contacts.
10. coating apparatus according to claim 9, which is characterized in that the thickness measure sensor (3) is ranging spy
Needle, the coating apparatus further include mobile mechanism, and the mobile mechanism is for driving the thickness measure sensor (3) towards leaning on
Close or far from first shielding or blocking parts (2), secondary shielding or blocking parts (6) direction moves back and forth,
And the driving thickness measure sensor (3) is being parallel to first shielding or blocking parts (2), secondary shielding or is blocking
It is moved in the plane of component (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821393610.2U CN208898982U (en) | 2018-08-28 | 2018-08-28 | Coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821393610.2U CN208898982U (en) | 2018-08-28 | 2018-08-28 | Coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208898982U true CN208898982U (en) | 2019-05-24 |
Family
ID=66570565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821393610.2U Active CN208898982U (en) | 2018-08-28 | 2018-08-28 | Coating apparatus |
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| CN (1) | CN208898982U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111499215A (en) * | 2020-05-26 | 2020-08-07 | 深圳市锐欧光学电子有限公司 | Surface protection coating film vacuum coating film intelligent manufacturing device for optical glass |
-
2018
- 2018-08-28 CN CN201821393610.2U patent/CN208898982U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111499215A (en) * | 2020-05-26 | 2020-08-07 | 深圳市锐欧光学电子有限公司 | Surface protection coating film vacuum coating film intelligent manufacturing device for optical glass |
| CN111499215B (en) * | 2020-05-26 | 2021-06-18 | 深圳市锐欧光学电子有限公司 | Surface protection coating film vacuum coating film intelligent manufacturing device for optical glass |
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Effective date of registration: 20210108 Address after: 101102 102-lq307, 1-3 / F, building 26, 17 huanke Middle Road, Jinqiao Science and technology industrial base, Tongzhou Park, Zhongguancun Science and Technology Park, Tongzhou District, Beijing Patentee after: Deyun Chuangxin (Beijing) Technology Co.,Ltd. Address before: 100176 10th floor, building 2, yard 9, Ronghua South Road, Yizhuang Economic and Technological Development Zone, Daxing District, Beijing Patentee before: Juntai innovation (Beijing) Technology Co.,Ltd. |