CN208880438U - A kind of wafer burnishing device - Google Patents
A kind of wafer burnishing device Download PDFInfo
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- CN208880438U CN208880438U CN201821427516.4U CN201821427516U CN208880438U CN 208880438 U CN208880438 U CN 208880438U CN 201821427516 U CN201821427516 U CN 201821427516U CN 208880438 U CN208880438 U CN 208880438U
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Abstract
The utility model relates to the technical fields of wafer processing auxiliary equipment can be arranged the adjusting folder of adjustable size on placement plate top, so as to the wafer of fixed sizes more particularly to a kind of wafer burnishing device；Polishing machine is fixed on bracket simultaneously and is worked, influence of the human factor to polishing machining accuracy is reduced；Thick buff polishing machine can be improved simultaneously and thin buff polishing machine-cut changes the efficiency used；Including station, placement plate, wafer, thick buff polishing machine and thin buff polishing machine；It further include two groups of extruding folders, extension spring, two groups of teeth wheel item, two groups of driven rods and synchromesh gear, the upper inside region of placement plate is provided with elongated cavity；It further include screw thread adjusting rod, two groups of bearings, elevating lever, support rail and two groups of position-limited rails, two groups of position-limited rails are respectively arranged with two groups of sliding grooves；It further include slide plate, two groups of bolt rods, two groups of extruding springs, two groups of limit films and two groups of stretching buttons.
Description
Technical field
The utility model relates to the technical fields of wafer processing auxiliary equipment, polish more particularly to a kind of wafer
Device.
Background technique
It is well known that wafer burnishing device is a kind of during wafer processing, for wafer polishing piece
Device is widely used in a variety of applications in the field of wafer processing；Existing wafer burnishing device include station,
Placement plate, wafer, thick buff polishing machine and thin buff polishing machine, the bottom end of the placement plate and the top middle portion of station connect,
The top of the placement plate is provided with placing groove；Existing wafer burnishing device is in use, the wafer for first processing needs
Piece is installed in placing groove, and then staff first polishes wafer machined surface with thick buff polishing machine, after rough polishing finishes,
Staff uses thin buff polishing machine instead and polishes to wafer machined surface；It is found in existing wafer burnishing device use,
The placing groove size of placement plate first is fixed, because relatively high to the size requirement of the wafer of processing, so as to cause making
It is higher with limitation；And staff not can guarantee the machining accuracy of burnishing surface when operating polishing machine, so as to cause can
It is poor by property；Thick buff polishing machine and thin buff polishing machine toggle use and reduce processing efficiency simultaneously, so as to cause practicability
It is poor.
Utility model content
In order to solve the above technical problems, the utility model, which provides one kind, can be arranged adjustable size on placement plate top
Adjusting folder reduce so as to the wafer of fixed sizes and use limitation；Polishing machine is fixed on bracket simultaneously
Work reduces influence of the human factor to polishing machining accuracy, to enhance reliability；Thick buff polishing can be improved simultaneously
Machine and thin buff polishing machine-cut change the efficiency used, to enhance the wafer burnishing device of practicability.
A kind of wafer burnishing device of the utility model, including station, placement plate, wafer, thick buff polishing machine and
Thin buff polishing machine, the bottom end of the placement plate and the top middle portion of station connect, and the top of the placement plate is provided with placement
Slot；It further include two groups of extruding folders, extension spring, two groups of teeth wheel item, two groups of driven rods and synchromesh gear, the inside of the placement plate
Upper-side area is provided with elongated cavity, and the middle part rotation of the synchromesh gear is provided with support shaft, the bottom end of the support shaft and drawing
The center bottom connection of chamber is stretched, the top of the support shaft and the top middle portion of elongated cavity connect, and the top of the elongated cavity is left
Side and right side are provided with sliding mouth, are each passed through two groups of sliding mouths on the outside of two groups of driven rod self stretch chamber and extend into drawing
Stretch it is intracavitary, the top of two groups of driven rods respectively with two groups of extruding folder center bottom connect, the bottom of two groups of driven rods
End connect respectively with the fixing end of two groups of teeth wheel item, the teeth end of the two groups of teeth wheel item respectively with the front end of synchromesh gear and after
End occlusion, the left end of the extension spring and right end are connect in the middle part of the inner sidewall of two groups of driven rods respectively；It further include screw thread tune
Pole, two groups of bearings, elevating lever, support rail and two groups of position-limited rails, the bottom end of two groups of position-limited rails respectively with station
The left and right side on top connects, and two groups of position-limited rails are respectively arranged with two groups of sliding grooves, the both ends difference of the elevating lever
Two groups of slide plates are provided with, two groups of slide plates are slidably connected with two groups of sliding grooves respectively, the top difference of two groups of position-limited rails
It is connect with the left end of support rail and right end, is provided with and communicated with intercommunicating pore in the middle part of the top and bottom end of the support rail, institute
The left and right side on the top and bottom end of stating elevating lever is provided with and respectively communicated with two groups of rotation holes, the bottom end and top of the elevating lever
Threaded hole is provided with and communicated in the middle part of end, the upside of the end of thread self-supporting cross bar of the screw thread adjusting rod passes through intercommunicating pore and stretches
Out to the downside of support rail, and the end of thread of the screw thread adjusting rod is bolted through threaded hole from the top of elevating lever and stretches
Out to the downside of elevating lever, two groups of bearings are rotated with the upside of screw thread adjusting rod and are set with, and two groups of bearings include upper
Bearing and lower bearing, the bottom end of the upper bearing (metal) are close to the top middle portion of support rail, the top of the lower bearing and support
The center bottom of cross bar is close to, and the thick buff polishing machine and thin buff polishing machine are provided with both legs bracket, two groups of both legs branch
The support end of frame is connect with the left and right side on the top of elevating lever respectively, the output shaft and thin buff polishing of the thick buff polishing machine
The output shaft of machine passes through two groups of rotation holes from the top of elevating lever respectively and extend out to the downside of elevating lever, the thick buff polishing machine
Output shaft bottom end be provided with rough polishing halo, the output shaft bottom end of the thin buff polishing machine is provided with fine polishing halo；It further include sliding
In the middle part of plate, two groups of bolt rods, two groups of extruding springs, two groups of limit films and two groups of stretching buttons, the left end of the placement plate and right end
It is provided with and communicated with displacement aperture, the left end of the slide plate passes through displacement aperture from the right end of displacement aperture and extend out to the left side of displacement aperture,
The both ends of the slide plate are connect with the downside of the inner sidewall of two groups of position-limited rails respectively, the left and right side difference of the slide plate bottom end
Two groups of limit holes are provided with, the inner lower of the placement plate is provided with two groups of compression chambers, and the top of two groups of compression chambers is equal
It is provided with extending port, the bottom end of two groups of compression chambers is provided with adjusting mouth, and the top of two groups of bolt rods is respectively from two groups
The downside for adjusting mouth, which passes through, to be adjusted mouth and is respectively protruding into two groups of compression chambers, and then the top of two groups of bolt rods is respectively from two groups
Two groups of limit holes are passed through on the downside of limit hole and extend out to the upside of two groups of limit holes, the top of two groups of bolt rods and cunning respectively
The bottom end of plate is close to, and the bottom end of two groups of bolt rods is connect with the top of two groups of stretching buttons respectively, two groups of extruding springs
On two groups of bolt rods, the top of two groups of extruding springs is connect with the bottom end of two groups of limit films movable set respectively respectively,
Two groups of extruding spring bottom ends are connect with the bottom end of two groups of compression chambers respectively, two groups of limit films respectively with two groups of bolt rods
Middle part suit.
A kind of wafer burnishing device of the utility model, further include push handle, it is described push handle fixing end with
The left side of two groups of extruding folders squeezes connection in the middle part of the lateral wall of folder.
A kind of wafer burnishing device of the utility model further includes two groups of anti-skidding adhesive tape, two groups of anti-skidding adhesive tape point
It is not pasted onto the central region of the inner sidewall of two groups of extruding folder.
A kind of wafer burnishing device of the utility model, further includes regulation scale and pointer, and the regulation scale is pasted
In the front side wall middle and upper part of the right end position-limited rail of two groups of position-limited rails, the pointer is pasted onto the right side of elevating lever front side wall.
A kind of wafer burnishing device of the utility model further includes pallet and grinding and polishing liquid, the left end of the pallet
It is connect on the downside of the right side wall of the right side position-limited rail in two groups of position-limited rails, is provided in the pallet and holds chamber, it is described to hold chamber
Top be provided with placement mouth, the fixing end of the grinding and polishing liquid holds chamber from placing to pass through to place mouth and extend into above mouth
It is close to the bottom end for holding chamber the bottom end of inside, Suo Hu grinding and polishing liquid.
A kind of wafer burnishing device of the utility model, further includes protective plate, the inner sidewall bottom zone of the protective plate
Domain is provided with multiple groups connecting rod, and the fixing end of the multiple groups connecting rod is connect with the upper area of the circumferential side wall of placement plate,
And multiple groups connecting rod is uniformly distributed on the circumferential side wall of placement plate.
A kind of wafer burnishing device of the utility model further includes collecting disk, on the inside of the bottom end for collecting disk
Hanging rod is provided in the middle part of wall, the top of the hanging rod is connect with the bottom end of screw thread adjusting rod.
A kind of wafer burnishing device of the utility model, further includes limited block, the left side wall of the limited block and left side
The upside of the inner sidewall of position-limited rail connects.
Handle is pushed to drag the extruding folder in left side the utility model has the following beneficial effects: pulling first compared with prior art
Dynamic, left side squeezes the gear bar pressed from both sides and drives synchromesh gear rotation, and synchromesh gear equally drives right side to squeeze the synchronous gear pressed from both sides at this time
Wheel item moves outward, so that the distance between two groups of extruding folders increase, then the wafer processed will be needed to be put into two groups
Squeeze folder between, at this moment no longer to push handle apply pulling force, two groups of extruding be clipped under the pulling of extension spring draw close until will
Wafer is fixed, so as to realize folding up to the wafer of sizes, reduces using limitation；And by two
Group polishing machine is fixed on elevating lever, two groups of polishing machines can be made to follow elevating lever respectively along two by rotating screw thread adjusting rod
Group position-limited rail is moved up and down without sliding, to reduce the influence of human factor polishing machining accuracy, is enhanced
Reliability；There is placement plate to may be implemented to be switched fast rough polishing and fine polishing by sliding into the left and right side of slide plate again, and selects
After having selected polishing wheel, bolt rod can be inserted into limit hole under the extruding for squeezing spring and limit, and polish when needing to switch
When wheel, it is only necessary to pull stretching button to pull out bolt rod in limit hole, then slide placement plate, to increase thick
Buff polishing machine and the switching efficiency for washing buff polishing machine, to enhance practicability.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the position-limited rail of the utility model and the attachment structure schematic diagram of elevating lever；
Fig. 3 is the partial enlargement structural representation of the A of the utility model；
Fig. 4 is the attachment structure schematic diagram of two groups of extruding folders and placement plate of the utility model；
Fig. 5 is the two groups of teeth wheel item of the utility model and the attachment structure schematic diagram of synchromesh gear；
It is attached marked in the figure: 1, station；2, placement plate；3, wafer；4, thick buff polishing machine；5, thin buff polishing machine；6, two
Group squeezes folder；7, extension spring；8, two groups of teeth wheel item；9, two groups of driven rods；10, synchromesh gear；11, screw thread adjusting rod；12, two
Group bearing；13, elevating lever；14, support rail；15, two groups of position-limited rails；16, slide plate；17, two groups of bolt rods；18, two groups of extruding
Spring；19, two groups of limit films；20, two groups of stretching buttons；21, handle is pushed；22, two groups of anti-skidding adhesive tape；23, regulation scale；24,
Pointer；25, pallet；26, pallet；27, protective plate；28, disk is collected；29, limited block.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.
As shown in Figures 1 to 5, a kind of wafer burnishing device of the utility model, including station 1, placement plate 2, crystalline substance
Disk 3, thick buff polishing machine 4 and thin buff polishing machine 5, the bottom end of placement plate and the top middle portion of station connect, the top of placement plate
End is provided with placing groove；It further include that 6, extension spring 7, two groups of teeth wheel item 8, two groups of driven rods 9 and synchromesh gears are pressed from both sides in two groups of extruding
10, the upper inside region of placement plate is provided with elongated cavity, and the middle part rotation of synchromesh gear is provided with support shaft, the bottom of support shaft
End is connect with the center bottom of elongated cavity, and the top of support shaft and the top middle portion of elongated cavity connect, the top left hand of elongated cavity
It is provided with sliding mouth with right side, two groups of sliding mouths is each passed through on the outside of two groups of driven rod self stretch chambers and extend into elongated cavity
It is interior, the top of two groups of driven rods respectively with two groups of extruding folder center bottom connect, the bottom end of two groups of driven rods respectively with two groups
The fixing end of gear bar connects, and the teeth end of two groups of teeth wheel item is engaged with the front-end and back-end of synchromesh gear respectively, extension spring
Left end and right end connect respectively in the middle part of the inner sidewall of two groups of driven rods；Further include 11, two groups of bearings 12 of screw thread adjusting rod, rise
Bar 13, support rail 14 and two groups of position-limited rails 15 drop, the bottom end of the two groups of position-limited rails left side and the right side with the top of station respectively
Side connection, two groups of position-limited rails are respectively arranged with two groups of sliding grooves, and the both ends of elevating lever are respectively arranged with two groups of slide plates, two groups of slide plates
It is slidably connected respectively with two groups of sliding grooves, the top of two groups of position-limited rails is connect with the left end of support rail and right end respectively, support
Intercommunicating pore is provided with and communicated in the middle part of the top and bottom end of cross bar, the top of elevating lever and the left and right side of bottom end are respectively communicated with
Two groups of rotation holes are provided with, threaded hole, the end of thread of screw thread adjusting rod are provided with and communicated in the middle part of the bottom end and top of elevating lever
The upside of self-supporting cross bar passes through intercommunicating pore and extend out to the downside of support rail, and the end of thread of screw thread adjusting rod is gone up and down certainly
The top of bar is bolted through threaded hole and extend out to the downside of elevating lever, two groups of bearings with the upside turning set of screw thread adjusting rod
Dress, two groups of bearings include upper bearing (metal) and lower bearing, and the bottom end of upper bearing (metal) is close to the top middle portion of support rail, the top of lower bearing
End is close to the center bottom of support rail, and thick buff polishing machine and thin buff polishing machine are provided with both legs bracket, two groups of both legs branch
The support end of frame is connect with the left and right side on the top of elevating lever respectively, the output shaft of thick buff polishing machine and thin buff polishing machine
Output shaft passes through two groups of rotation holes from the top of elevating lever respectively and extend out to the downside of elevating lever, the output shaft of thick buff polishing machine
Bottom end is provided with rough polishing halo, and the output shaft bottom end of thin buff polishing machine is provided with fine polishing halo；It further include 16, two groups of bolts of slide plate
17, two groups of bar, 18, two groups of extruding spring limit film 19 and two groups of stretching buttons 20, the left end of placement plate and right end middle part are connected to setting
There is displacement aperture, the left end of slide plate passes through displacement aperture from the right end of displacement aperture and extend out to the left side of displacement aperture, the both ends point of slide plate
It is not connect with the downside of the inner sidewall of two groups of position-limited rails, the left and right side of slide plate bottom end is respectively arranged with two groups of limit holes, puts
The inner lower for setting plate is provided with two groups of compression chambers, and the top of two groups of compression chambers is provided with extending port, the bottom of two groups of compression chambers
End is provided with adjusting mouth, and the top of two groups of bolt rods passes through from the downside of two groups of adjusting mouths respectively and adjusts mouth and be respectively protruding into two
In group compression chamber, then the top of two groups of bolt rods passes through two groups of limit holes from the downside of two groups of limit holes respectively and extend out to respectively
The upside of two groups of limit holes, the top of two groups of bolt rods are close to the bottom end of slide plate, the bottom end of two groups of bolt rods respectively with two groups
The top connection of button is stretched, two groups of extruding spring difference movable sets are on two groups of bolt rods, the top point of two groups of extruding springs
It is not connect with the bottom end of two groups of limit films, two groups of extruding spring bottom ends are connect with the bottom end of two groups of compression chambers respectively, two groups of limits
Piece is set with the middle part of two groups of bolt rods respectively；It pulls first and handle is pushed to drop the extruding folder in left side, left side squeezes folder
Gear bar drives synchromesh gear rotation, and the synchromesh gear item that synchromesh gear equally drives right side to squeeze folder at this time moves outward,
To which the distance between two groups of extruding folders increase, the wafer processed then will be needed to be put between two groups of extruding folders, at this moment
No longer to pushing handle to apply pulling force, two groups of extruding, which are clipped under the pulling of extension spring, to be drawn close until wafer is fixed,
So as to realize folding up to the wafer of sizes, reduce using limitation；And two groups of polishing machines are fixed on
On elevating lever, two groups of polishing machines can be made to follow elevating lever respectively along moving down on two groups of position-limited rails by rotating screw thread adjusting rod
It moves without sliding, to reduce the influence of human factor polishing machining accuracy, enhances reliability；There is placement again
Plate may be implemented to be switched fast rough polishing and fine polishing by sliding into the left and right side of slide plate, and chosen polishing wheel it
Afterwards, bolt rod can be inserted into limit hole under the extruding for squeezing spring and limit, when needing to switch polishing wheel, it is only necessary to pull
Stretching button pulls out bolt rod in limit hole, then slides placement plate, to increase thick buff polishing machine and wash wheel
The switching efficiency of polishing machine, to enhance practicability.
A kind of wafer burnishing device of the utility model further includes pushing handle 21, pushes the fixing end and two of handle
The left side that group squeezes folder squeezes connection in the middle part of the lateral wall of folder；By pushing handle that can more easily pull two groups of extruding
Folder, improve wafer folds up efficiency, to enhance convenience.
A kind of wafer burnishing device of the utility model further includes two groups of anti-skidding adhesive tape 22, two groups of anti-skidding adhesive tape difference
It is pasted onto the central region of the inner sidewall of two groups of extruding folder；Two groups of extruding folders are contacted by two groups of anti-skidding adhesive tape with wafer respectively
Fixed firmness can be increased, and two groups of anti-skidding adhesive tape can reduce the damage to wafer, to increase practical
Property.
A kind of wafer burnishing device of the utility model, further includes regulation scale 23 and pointer 24, and regulation scale is pasted
In the front side wall middle and upper part of the right end position-limited rail of two groups of position-limited rails, pointer is pasted onto the right side of elevating lever front side wall；Pass through observation
Change in location of the pointer on regulation scale, can be accurately controlled the dropping distance of polishing machine, convenient for controlling to wafer
Intensity is polished, to increase practicability.
A kind of wafer burnishing device of the utility model further includes pallet 25 and grinding and polishing liquid 26, the left end of pallet
It is connect on the downside of the right side wall of the right side position-limited rail in two groups of position-limited rails, is provided in pallet and holds chamber, the top for holding chamber is set
It is equipped with placement mouth, the fixing end of grinding and polishing liquid, which passes through to place mouth and extend into from above placement mouth, holds intracavitary portion, Suo Huyan
It is close to the bottom end for holding chamber the bottom end of mill polishing fluid；Make the pick-and-place of grinding and polishing liquid more by the way that pallet is arranged on position-limited rail
It is convenient, the polishing effect of wafer can be improved in simultaneous grinding polishing fluid, to reduce using limitation.
A kind of wafer burnishing device of the utility model further includes protective plate 27, the inner sidewall bottom section of protective plate
It is provided with multiple groups connecting rod, the fixing end of multiple groups connecting rod is connect with the upper area of the circumferential side wall of placement plate, and more
Group connecting rod is uniformly distributed on the circumferential side wall of placement plate；Protective plate can prevent wafer from generating during polishing
The splashing of scrap and grinding and polishing liquid, to increase safety.
A kind of wafer burnishing device of the utility model further includes collecting disk 28, collects the bottom end inner sidewall of disk
Middle part be provided with hanging rod, the top of hanging rod is connect with the bottom end of screw thread adjusting rod；Elevating lever is being adjusted using screw thread adjusting rod
When, threaded rod and threaded hole friction can generate scrap, and in order to reduce the frictional force of threaded rod and threaded hole, threaded rod
On lubricating oil can be added dropwise, collecting disk by setting can effectively prevent scrap and lubricating oil drops on wafer, thus
Enhance practicability.
A kind of wafer burnishing device of the utility model, further includes limited block 29, and the left side wall of limited block and left side limit
The upside connection of the inner sidewall of position rail；It can prevent the motor of two groups of polishing wheels from hitting elevating lever limit by limited block and encounter branch
Cross bar is supportted, to increase safety.
A kind of wafer burnishing device of the utility model at work first clamps the wafer for needing to process
In placing groove, then staff first polishes wafer machined surface with thick buff polishing machine, and after rough polishing finishes, work people
Member uses thin buff polishing machine instead and polishes to wafer machined surface；Before completing above-mentioned movement, pulls push handle will first
The extruding folder in left side drops, and the gear bar that left side squeezes folder drives synchromesh gear rotation, and synchromesh gear equally drives right side at this time
The synchromesh gear item for squeezing folder moves outward, so that the distance between two groups of extruding folders increase, the crystalline substance for then processing needs
Disk is put between two groups of extruding folders, and at this moment no longer to pushing handle to apply pulling force, two groups of extruding are clipped in the drawing of extension spring
It draws close under dynamic until wafer is fixed；And two groups of polishing machines are fixed on elevating lever, are adjusted by rotation screw thread
Bar can make two groups of polishing machines that elevating lever be followed to move up and down respectively along two groups of position-limited rails without sliding；There is placement again
Plate may be implemented to be switched fast rough polishing and fine polishing by sliding into the left and right side of slide plate, and chosen polishing wheel it
Afterwards, bolt rod can be inserted into limit hole under the extruding for squeezing spring and limit, when needing to switch polishing wheel, it is only necessary to pull
Stretching button pulls out bolt rod in limit hole, then slides placement plate.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
It also should be regarded as the protection scope of the utility model into modification.
Claims (8)
1. a kind of wafer burnishing device, including station (1), placement plate (2), wafer (3), thick buff polishing machine (4) and thin
The bottom end of buff polishing machine (5), the placement plate (2) is connect with the top middle portion of station (1), the top of the placement plate (2)
It is provided with placing groove；It is characterized in that, further including two groups of extruding folders (6), extension spring (7), two groups of teeth wheel item (8), two groups of bands
The upper inside region of lever (9) and synchromesh gear (10), the placement plate (2) is provided with elongated cavity, the synchromesh gear
(10) middle part rotation is provided with support shaft, and the bottom end of the support shaft and the center bottom of elongated cavity connect, the support shaft
Top and the top middle portion of elongated cavity connect, the top left hand of the elongated cavity and right side are provided with sliding mouth, described two
It is each passed through two groups of sliding mouths on the outside of group driven rod (9) self stretch chamber and extend into elongated cavity, two groups of driven rods (9)
Top is connect with the center bottom of two groups of extruding folder (6) respectively, the bottom end of two groups of driven rods (9) respectively with two groups of teeth wheel item
(8) fixing end connection, the teeth end of the two groups of teeth wheel item (8) are engaged with the front-end and back-end of synchromesh gear (10) respectively,
The left end of the extension spring (7) and right end are connect in the middle part of the inner sidewall of two groups of driven rods (9) respectively；It further include that screw thread is adjusted
Bar (11), two groups of bearings (12), elevating lever (13), support rail (14) and two groups of position-limited rails (15), two groups of position-limited rails
(15) bottom end is connect with the left and right side on the top of station (1) respectively, and two groups of position-limited rails (15) are respectively arranged with
Two groups of sliding grooves, the both ends of the elevating lever (13) are respectively arranged with two groups of slide plates, two groups of slide plates respectively with two groups of slidings
Slot is slidably connected, and the top of two groups of position-limited rails (15) is connect with the left end of support rail (14) and right end respectively, the branch
It supports and is provided with and communicated with intercommunicating pore, the top of the elevating lever (13) and the left side of bottom end in the middle part of the top and bottom end of cross bar (14)
Two groups of rotation holes are provided with and respectively communicated with right side, are provided with and communicated with screw thread in the middle part of the bottom end and top of the elevating lever (13)
Hole, the upside of the end of thread self-supporting cross bar (14) of the screw thread adjusting rod (11) pass through intercommunicating pore and extend out to support rail
(14) downside, and the top of the end of thread of the screw thread adjusting rod (11) from elevating lever (13) is bolted through threaded hole and stretches
Out to the downside of elevating lever (13), two groups of bearings (12) rotate with the upside of screw thread adjusting rod (11) and are set with, and described two
Group bearing (12) includes upper bearing (metal) and lower bearing, and the bottom end of the upper bearing (metal) is close to the top middle portion of support rail (14), institute
The top for stating lower bearing is close to the center bottom of support rail (14), and the thick buff polishing machine (4) and thin buff polishing machine (5) are equal
It is provided with both legs bracket, the support end of two groups of both legs brackets connects with the left and right side on the top of elevating lever (13) respectively
It connects, the output shaft of the thick buff polishing machine (4) and the output shaft of thin buff polishing machine (5) are passed through from the top of elevating lever (13) respectively
The output shaft bottom end of two groups of rotation holes and the downside for extending out to elevating lever (13), the thick buff polishing machine (4) is provided with rough polishing
Wheel, the output shaft bottom end of the thin buff polishing machine (5) is provided with fine polishing halo；Further include slide plate (16), two groups of bolt rods (17),
In the middle part of two groups of extruding springs (18), two groups of limit films (19) and two groups of stretching buttons (20), the left end of the placement plate (2) and right end
It is provided with and communicated with displacement aperture, the left end of the slide plate (16) passes through displacement aperture from the right end of displacement aperture and extend out to a left side for displacement aperture
The both ends of side, the slide plate (16) are connect with the downside of the inner sidewall of two groups of position-limited rails (15) respectively, slide plate (16) bottom end
Left and right side be respectively arranged with two groups of limit holes, the inner lower of the placement plate (2) is provided with two groups of compression chambers, described
The top of two groups of compression chambers is provided with extending port, and the bottom end of two groups of compression chambers is provided with adjusting mouth, two groups of bolts
The top of bar (17) passes through from the downside of two groups of adjusting mouths respectively and adjusts mouth and be respectively protruding into two groups of compression chambers, then two groups
The top of bolt rod (17) passes through two groups of limit holes from the downside of two groups of limit holes respectively and extend out to the upper of two groups of limit holes respectively
The top of side, two groups of bolt rods (17) is close to the bottom end of slide plate (16), the bottom end difference of two groups of bolt rods (17)
It is connect with the top of two groups of stretching buttons (20), two groups of extruding springs (18) difference movable set is in two groups of bolt rods (17)
On, the top of two groups of extruding springs (18) is connect with the bottom end of two groups of limit films (19) respectively, two groups of extruding springs
(18) bottom end is connect with the bottom end of two groups of compression chambers respectively, and two groups of limit films (19) are respectively and in two groups of bolt rods (17)
Portion's suit.
2. a kind of wafer burnishing device as described in claim 1, which is characterized in that it further include pushing handle (21), it is described
The lateral wall middle part that the left side for pushing the fixing end of handle (21) to press from both sides (6) with two groups of extruding squeezes folder is connect.
3. a kind of wafer burnishing device as claimed in claim 2, which is characterized in that it further include two groups of anti-skidding adhesive tape (22),
Two groups of anti-skidding adhesive tape (22) are respectively adhered on the central region of the inner sidewall of two groups of extruding folders (6).
4. a kind of wafer burnishing device as claimed in claim 3, which is characterized in that further include regulation scale (23) and pointer
(24), the regulation scale (23) is pasted onto the front side wall middle and upper part of the right end position-limited rail of two groups of position-limited rails (15), the pointer
(24) it is pasted onto the right side of elevating lever (13) front side wall.
5. a kind of wafer burnishing device as claimed in claim 4, which is characterized in that further include pallet (25) and grinding and polishing
It is connect on the downside of liquid (26), the left end of the pallet (25) and the right side wall of the right side position-limited rail in two groups of position-limited rails (15), it is described
It is provided in pallet (25) and holds chamber, the top for holding chamber is provided with placement mouth, the fixation of the grinding and polishing liquid (26)
End places mouth and extend into the intracavitary portion that holds from placing to pass through above mouth, the bottom end of Suo Hu grinding and polishing liquid (26) and holds chamber
It is close to bottom end.
6. a kind of wafer burnishing device as claimed in claim 5, which is characterized in that it further include protective plate (27), it is described anti-
The inner sidewall bottom section of backplate (27) is provided with multiple groups connecting rod, the fixing end of the multiple groups connecting rod with placement plate (2)
Circumferential side wall upper area connection, and multiple groups connecting rod is uniformly distributed on the circumferential side wall of placement plate (2).
7. a kind of wafer burnishing device as claimed in claim 6, which is characterized in that it further include collecting disk (28), it is described
It collects and is provided with hanging rod in the middle part of the bottom end inner sidewall of disk (28), the top of the hanging rod and the bottom end of screw thread adjusting rod (11)
Connection.
8. a kind of wafer burnishing device as claimed in claim 7, which is characterized in that further include limited block (29), the limit
The left side wall of position block (29) is connect with the upside of the inner sidewall of left side position-limited rail.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821427516.4U CN208880438U (en) | 2018-08-31 | 2018-08-31 | A kind of wafer burnishing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821427516.4U CN208880438U (en) | 2018-08-31 | 2018-08-31 | A kind of wafer burnishing device |
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| CN208880438U true CN208880438U (en) | 2019-05-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108908074A (en) * | 2018-08-31 | 2018-11-30 | 江苏英锐半导体有限公司 | A kind of wafer burnishing device |
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2018
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108908074A (en) * | 2018-08-31 | 2018-11-30 | 江苏英锐半导体有限公司 | A kind of wafer burnishing device |
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