CN208875425U - A kind of MEMS ultra micro liquid injection chip - Google Patents
A kind of MEMS ultra micro liquid injection chip Download PDFInfo
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- CN208875425U CN208875425U CN201821521287.2U CN201821521287U CN208875425U CN 208875425 U CN208875425 U CN 208875425U CN 201821521287 U CN201821521287 U CN 201821521287U CN 208875425 U CN208875425 U CN 208875425U
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Abstract
A kind of MEMS ultra micro liquid injection chip, comprising: fluid path has fixed liquid flow direction；Micropore atomization component, including flowing to the first micro-spraying hole plate, the second micro-spraying hole plate and the third micro-spraying hole plate that are successively set on the fluid path along liquid, microwell array is all had on the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate, its aperture is successively successively decreased, and micropore switch is also set up on microwell array；The first fluid chamber and second liquid chamber are respectively formed between the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate；The sucking and ejection of liquid are realized in circuit control module, the deformation by controlling micropore atomization component.It can be realized micron order even nanoscale ultra micro aperture using the micro-spraying hole plate that MEMS technology makes, the atomization layer by layer that liquid can be achieved in fluid path is set step by step, and it with simple, small in size, the low in energy consumption significant advantage of structure, is particularly suitable for requiring harsh operative scenario.
Description
Technical field
The utility model relates to atomization technique field, in particular to a kind of MEMS ultra micro liquid injection chip.
Background technique
With being on the rise for air pollution, the incidence of the respiratory diseases such as asthma, bronchitis, rhinitis also rises year by year
It is high.Relative to convenient administration mode, the medication of Inhalation in Treating unique advantage in terms of mitigating: 1, suck
Drug can go directly respiratory tract and lung, be directly entered blood through lung capillaries, therefore rapid-action, more effectively；2, due to
Drug is directly sucked in respiratory tract, avoids the first pass effect of liver, and dosage is few, reduces the toxic side effect of drug；3, humidifying airway, dilute
Sputum is released, various respiratory diseases can be widely used in, be particularly suitable for children and old man.
In clinical treatment field, atomizer is the major way for realizing Inhalation in Treating, current widely used mist
Changing device mainly has ultrasonic ultrasonic delay line memory and net formula atomizer, either ultrasonic ultrasonic delay line memory or net formula atomizer, can be real
Existing minimum drug granule is about 5 μm, and spray velocity is about 0.25 ml/min, such as Omron NE-U22 net formula atomizer.Mist
Change granular size and atomization speed is most important two parameters of atomizer, although above-mentioned particle size and atomization speed are industries
Leading numerical value, but still it is not able to satisfy the application demand in market, this is because for the application of health medical treatment grade, atomization
Particle reaches 0.5um and is precisely administered hereinafter, lung can be fully achieved, and does not generate side effect to human body；And in healthy living
Field, such as the application of electronic cigarette field, only generate enough atomization gas within the unit time, can meet user's
Demand for experience.
Utility model content
To solve the above-mentioned problems, the utility model provides a kind of MEMS ultra micro liquid injection chip, is designed by structure
Ultra micro atomizing particle and super large atomization flow are realized in improvement with manufacturing process.
The technical solution adopted in the utility model are as follows: a kind of MEMS ultra micro liquid injection chip, comprising: fluid path, tool
There is fixed liquid flow direction；Micropore atomization component, including flowing to be successively set on the fluid path first along liquid
Micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate, the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole
Microwell array is all had on plate, and micropore is set on microwell array and is switched；The first micro-spraying hole plate and the second micro-spraying hole plate it
Between form the first fluid chamber, between the second micro-spraying hole plate and third micro-spraying hole plate formed second liquid chamber, the first micro-spraying hole
Successively successively decrease in the aperture in the aperture of plate, the aperture of the second micro-spraying hole plate and third micro-spraying hole plate；Circuit control module passes through control
The sucking and ejection of liquid are realized in the deformation of micropore atomization component；The micropore atomization component and circuit control module use MEMS
Process integration is made.
Preferably, the second micro-spraying hole plate is made using piezoelectric material, and circuit control module is by applying voltage
The deformation of the second micro-spraying hole plate is controlled to realize the sucking and ejection of liquid.
Preferably, the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate are all made of piezoelectric material production
It forms, circuit control module controls the shape of the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate by applying voltage
Become the sucking and ejection to realize liquid.
Preferably, the micropore size of the first micro-spraying hole plate is 8 μm ~ 12 μm, and the micropore size of the second micro-spraying hole plate is
3 μm ~ 7 μm, the micropore size of third micro-spraying hole plate is 0.1 μm ~ 0.5 μm.
Preferably, the microwell array aperture difference of the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate
It is 10 μm, 5 μm and 0.3 μm.
Preferably, the liquid refers to medical fluid or tobacco tar.
Compared with prior art, there are following technical effects for the utility model:
1) technical bottleneck that conventional fabrication processes are overcome using the micro-spraying hole plate that MEMS technology makes, can be realized micron
Grade even nanoscale ultra micro aperture, the atomization layer by layer that liquid can be achieved in fluid path is arranged in step by step, is finally lower than
0.5 micron of atomizing particle；Meanwhile the deformation vibration frequency by controlling micro-spraying hole plate can accurately control atomization flow, it is real
The now super-flow of super 1ml/min is fully able to meet the lives application need such as medical grade atomization, targeted therapy and electronic cigarette
It asks, if chip multiple groups connected and in parallel, can also further promote the important parameters such as atomizing particle diameter and atomization flow, use
To meet more harsh application scenarios；
2) ultra micro liquid injection chip structure using MEMS technology integration production is simple, compact, without carrying out
The measures such as heating and ultrasound, operation power consumption are significantly reduced, and can be applied to various operative scenarios without barrier, are conducive to atomization dress
Further reducing for volume is set, finally realizes real portable design.
Detailed description of the invention
Fig. 1 is the utility model MEMS ultra micro liquid injection chip structure schematic diagram；
Fig. 2 is the overlooking structure diagram of the utility model the second micro-spraying hole plate；
Fig. 3 is that liquid sucking schematic diagram is realized in micro- atomization component deformation in embodiment 1；
Fig. 4 is that micro- atomization component deformation realizes that liquid sprays schematic diagram in embodiment 1；
Fig. 5 is that liquid sucking schematic diagram is realized in micro- atomization component deformation in embodiment 2；
Fig. 6 is that micro- atomization component deformation realizes that liquid sprays schematic diagram in embodiment 2.
Specific embodiment
The utility model is further described below in conjunction with attached drawing.
Embodiment 1: referring to Fig. 1 and Fig. 2, a kind of MEMS ultra micro liquid injection chip, comprising: fluid path has and fixes
Liquid flow direction, in the present embodiment, the fluid path since s water inlet 70 to water outlet 80 end, formed from bottom to top
Liquid flow direction.Here, the liquid can be medical fluid, tobacco tar or other function liquid.
Micropore atomization component, including flowing to the first micro-spraying hole plate being successively set on the fluid path along liquid
10, the second micro-spraying hole plate 20 and third micro-spraying hole plate 30, the first micro-spraying hole plate 10, the second micro-spraying hole plate 20 and the micro- spray of third
Microwell array 11,21,31 is all had on orifice plate 30, and micropore switch 12,22,32 is set on microwell array, is switched by micropore
Realize the circulation of liquid；Form the first fluid chamber 40 between the first micro-spraying hole plate 10 and the second micro-spraying hole plate 20, described
Second liquid chamber 50, the aperture of the first micro-spraying hole plate 10, the are formed between two micro-spraying hole plates 20 and third micro-spraying hole plate 30
The aperture of two micro-spraying hole plates 20 and the aperture of third micro-spraying hole plate 30 are successively successively decreased.Here, the micropore size of the first micro-spraying hole plate
Preferably 8 μm ~ 12 μm, the micropore size of the second micro-spraying hole plate is preferably 3 μm ~ 7 μm, and the micropore size of third micro-spraying hole plate is excellent
It is selected as 0.1 μm ~ 0.5 μm, it is highly preferred that the aperture of the first micro-spraying hole plate is 10 μm, the aperture of the second micro-spraying hole plate is 5 μ
M, the microwell array aperture of third micro-spraying hole plate are respectively 0.3 μm.
It further include circuit control module 60, the circuit control module is realized by controlling the deformation of micropore atomization component
The sucking and ejection of liquid.In the present embodiment, the micropore atomization component refers in particular to the second micro-spraying hole plate 20, second micro- spray
Orifice plate 20 is made using piezoelectric material, and circuit control module 60 controls the deformation of the second micro-spraying hole plate 20 by applying voltage
To realize the sucking and ejection of liquid.
Specific workflow is: a. is under non-working condition, the first micro-spraying hole plate 10, the second micro-spraying hole plate 20 and
Three micro-spraying hole plates 30 keep horizontality, and each micropore closes the switch；B. liquid, the first micro-spraying hole plate are passed through into fluid passage
Micropore switch stress open, liquid enter the first fluid chamber 40；C. circuit control module applies electricity to the second micro-spraying hole plate 20
22 stress of micropore switch of voltage-controlled its downward deformation of system, the second micro-spraying hole plate 20 is opened, and second liquid chamber 50 is drawn liquid into, this
When third micro-spraying hole plate 30 micropore switch 32 be kept closed；D. circuit control module applies the second micro-spraying hole plate 20
Voltage controls its upward deformation, the volume compression of second liquid chamber 50, and pressure increases, the micropore switch 22 of the second micro-spraying hole plate 20
Stress closure, while 32 stress of micropore switch of third micro-spraying hole plate 30 is opened, by the smallest microwell array of liquid passage aperture
31 project, and realize the injection of ultra micro liquid.
Here, the technical bottleneck that conventional fabrication processes are overcome using the micro-spraying hole plate that MEMS technology makes, can be realized
The atomization layer by layer that liquid can be achieved in fluid path is arranged in micron order even nanoscale ultra micro aperture step by step, final to obtain
Atomizing particle lower than 0.5 micron；Meanwhile the deformation vibration frequency by controlling micro-spraying hole plate can accurately control atomized flow
Amount realizes the super-flow of super 1ml/min, is fully able to meet that medical grade is atomized, the lives such as targeted therapy and electronic cigarette are answered
With demand, if chip multiple groups connected and in parallel, the important ginseng such as atomizing particle diameter and atomization flow can be also further promoted
Number, to meet more harsh application scenarios.
In addition, ultra micro liquid injection chip structure using MEMS technology integration production is simple, compact, without into
The measures such as row heating and ultrasound, operation power consumption are significantly reduced, can be applied to various operative scenarios without barrier, be conducive to be atomized
Device volume further reduces, and finally realizes real portable design.
Embodiment 2: referring to figs. 5 and 6, the present embodiment other parts are same as Example 1, and difference is: described first
Micro-spraying hole plate 10, the second micro-spraying hole plate 20 and third micro-spraying hole plate 30 are all made of piezoelectric material and are made, at this point, circuit control
Module 60 can control simultaneously the shape of the first micro-spraying hole plate 10, the second micro-spraying hole plate 20 and third micro-spraying hole plate 30 by applying voltage
Become the sucking and ejection to realize liquid.
Specific workflow is: a. is under non-working condition, the first micro-spraying hole plate 10, the second micro-spraying hole plate 20 and
Three micro-spraying hole plates 30 keep horizontality, and each micropore closes the switch；B. liquid, the first micro-spraying hole plate are passed through into fluid passage
10 12 stress of micropore switch is opened, and liquid enters the first fluid chamber 40；C. circuit control module applies the second micro-spraying hole plate 20
Making alive controls its downward deformation, while applying voltage to the first micro-spraying hole plate and third micro-spraying hole plate and controlling its upward deformation,
22 stress of micropore switch of second micro-spraying hole plate 20 is opened, and draws liquid into second liquid chamber 50, at this time third micro-spraying hole plate 30
Micropore switch 32 be kept closed；D. circuit control module controls its upward shape to the second micro-spraying hole plate 20 application voltage
Become, while voltage is applied to the first micro-spraying hole plate 10 and third micro-spraying hole plate 30 and controls its downward deformation, second liquid chamber 50
Volume is sharply compressed, and pressure significantly increases, 22 stress of the micropore switch closure of the second micro-spraying hole plate 20, while third micro-spraying hole plate
30 32 stress of micropore switch is opened, and the smallest microwell array 31 of liquid passage aperture is projected, and realizes the injection of ultra micro liquid.
As can be seen that for the scheme for only controlling the second micro-spraying hole plate deformation in embodiment 1, in the present embodiment
Control program be capable of the sucking and ejection of more rapidly strong realization liquid, further increase nebulization efficiency.
It should be noted that the utility model preferably uses Piezoelectric Driving mode, but circuit control module is for micro-spraying hole
The driving of plate, which can also change, adopts other modes, as long as can be realized the Electric control to micro-spraying hole plate.
In short, it is not intended to limit the protection scope of the utility model the above is only the utility model preferred embodiment,
Within the scope of the utility model, it is practical new that the equivalents or modification made to the utility model should be included in this
Within the protection scope of type.
Claims (6)
1. a kind of MEMS ultra micro liquid injection chip characterized by comprising
Fluid path has fixed liquid flow direction；
Micropore atomization component, including flowing to the first micro-spraying hole plate being successively set on the fluid path, second along liquid
Micro-spraying hole plate and third micro-spraying hole plate all have on the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate micro-
Hole array is arranged micropore on microwell array and switchs；The first liquid is formed between the first micro-spraying hole plate and the second micro-spraying hole plate
Body cavity forms second liquid chamber, the aperture of the first micro-spraying hole plate, second between the second micro-spraying hole plate and third micro-spraying hole plate
The aperture of micro-spraying hole plate and the aperture of third micro-spraying hole plate are successively successively decreased；
The sucking and ejection of liquid are realized in circuit control module, the deformation by controlling micropore atomization component；
The micropore atomization component and circuit control module are made using MEMS technology integration.
2. a kind of MEMS ultra micro liquid injection chip according to claim 1, it is characterised in that: the second micro-spraying hole plate
It is made using piezoelectric material, circuit control module realizes liquid by applying the deformation of voltage the second micro-spraying hole plate of control
Sucking and ejection.
3. a kind of MEMS ultra micro liquid injection chip according to claim 1, it is characterised in that: first micro-spraying hole
Plate, the second micro-spraying hole plate and third micro-spraying hole plate are all made of piezoelectric material and are made, and circuit control module is by applying voltage
The sucking and ejection of liquid are realized in the deformation for controlling the first micro-spraying hole plate, the second micro-spraying hole plate and third micro-spraying hole plate.
4. a kind of MEMS ultra micro liquid injection chip as claimed in any of claims 1 to 3, it is characterised in that: institute
The micropore size for stating the first micro-spraying hole plate is 8 μm ~ 12 μm, and the micropore size of the second micro-spraying hole plate is 3 μm ~ 7 μm, the micro- spray of third
The micropore size of orifice plate is 0.1 μm ~ 0.5 μm.
5. a kind of MEMS ultra micro liquid injection chip according to claim 4, it is characterised in that: the first micro-spraying hole plate
Micropore size be 10 μm, the micropore size of the second micro-spraying hole plate is 5 μm, and the micropore size of third micro-spraying hole plate is 0.3 μm.
6. a kind of MEMS ultra micro liquid injection chip as claimed in any of claims 1 to 3, it is characterised in that: institute
It states liquid and refers to medical fluid or tobacco tar.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821521287.2U CN208875425U (en) | 2018-09-18 | 2018-09-18 | A kind of MEMS ultra micro liquid injection chip |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821521287.2U CN208875425U (en) | 2018-09-18 | 2018-09-18 | A kind of MEMS ultra micro liquid injection chip |
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| CN208875425U true CN208875425U (en) | 2019-05-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115177822A (en) * | 2021-05-26 | 2022-10-14 | 杭州堃博生物科技有限公司 | Atomization catheter |
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2018
- 2018-09-18 CN CN201821521287.2U patent/CN208875425U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115177822A (en) * | 2021-05-26 | 2022-10-14 | 杭州堃博生物科技有限公司 | Atomization catheter |
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