CN205831080U - A kind of MEMS for electronic cigarette is atomized chip - Google Patents

A kind of MEMS for electronic cigarette is atomized chip Download PDF

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Publication number
CN205831080U
CN205831080U CN201620757342.2U CN201620757342U CN205831080U CN 205831080 U CN205831080 U CN 205831080U CN 201620757342 U CN201620757342 U CN 201620757342U CN 205831080 U CN205831080 U CN 205831080U
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China
Prior art keywords
micro
electronic cigarette
mems
oil
atomization
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CN201620757342.2U
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Chinese (zh)
Inventor
韩熠
李廷华
徐溢
陈李
朱东来
陈永宽
李寿波
吴俊�
巩效伟
张霞
洪鎏
缪明明
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China Tobacco Yunnan Industrial Co Ltd
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China Tobacco Yunnan Industrial Co Ltd
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Abstract

The utility model discloses a kind of MEMS for electronic cigarette and be atomized chip (11), including: seal micro-loop (19), micro-spraying hole plate (17) and vibrating diaphragm (21) and the liquid chambers (22) surrounded thereof;Wherein said vibrating diaphragm (21) outside is disposed with driver (18), and described micro-spraying hole plate (17) has microwell array (13), inlet (15) and micro-valve (20);The inlet diameter of the micropore of described microwell array (13) is more than outlet diameter, and described outlet diameter is micron or nanoscale.

Description

A kind of MEMS for electronic cigarette is atomized chip
Technical field
This utility model relates to electronic cigarette technical field, is atomized chip particularly to a kind of MEMS for electronic cigarette.
Background technology:
Electronic cigarette is liquid ree-oil to become vaporific aerosol and device that the person of being sucked sucks.Existing commercially available electronic cigarette master If liquid ree-oil is become vaporific aerosol, a lot of ultrasonic electronic cigarette patents by electricity consumption heating atomization mode (CN201410151376.2 " has electronic cigarette and the tobacco juice of ultrasonic atomization function ", CN201410522444.1 " ultrasonic fog The electronic cigarette aspirator of change type ", CN201520096477.4 " ultrasonic type electronic cigarette ", CN201610007620.7 is " ultrasonic Ripple vibration type electronic cigarette atomization device and electronic cigarette ") it is then to use ultrasonic atomizatio mode to be atomized ree-oil.Wherein, ree-oil atomization It is to occur in electronic smoke atomizer.
At present, mainstream electronic tobacco atomizer many employings Electric heating atomization ree-oil, need heating to convert electrical energy into For heat energy and transfer heat to ree-oil and make it be atomized.Although Electric heating can quickly heating atomization ree-oil formed gas molten Glue, but due to the reason such as structure and material of main flow nebulizer itself, following defect can be brought: one is conventional heating wire itself Structure and the even dry combustion method of heating wire hot-spot may be caused to produce abnormal flavour and potential harmful with the position relationship of Oil Guide element Material, causes organoleptic quality degradation and brings healthy hidden danger;Two is high temperature exothermic silk can with the direct long term contact of ree-oil Metallic element in heating wire can be made to be inhaled into ree-oil atomizing steam, and this can bring healthy hidden danger equally;Three is direct with ree-oil The glass of contact or organic cotton do not only have the risk of paste core makes sense organ be deteriorated, and is likely to because of its contained substance Come off, be pyrolyzed or carbonization etc. and cause health problem;Four is due to passive type Oil Guide so that ree-oil is first to heating from Oil Guide element The direction of part conveying and the ree-oil amount of conveying are uncontrollable, and the atomization quantity of ree-oil is uncontrollable, cause the inconsistent of every mouthful of suction sense organ; Five to be that ree-oil atomization produces aerocolloidal particle diameter uncontrollable, if particle diameter is excessive, can in oral cavity, throat and pulmonary adhere to for a long time And produce soapy feeling, dry sensation or other senses of discomfort;If particle diameter is too small, the stop at positions such as oral cavities of the electronic cigarette smog can be caused Time is too short and causes oral cavity plumpness and physiology gratification not enough.
And, electric heating type great-power electronic cigarette (particularly lung suction electronic cigarette) is to ensure big amount of smoke, generally needs Wanting low resistance and high-power nebulizer, not only power consumption is relatively big, and there is smog and scald the defect of mouth.
If cigarette the to be realized oil atomization of ultrasonic atomization electronic cigarette, it is generally required to the higher-order of oscillation of MHz level is by ree-oil Fragmentation is tiny mist particles, and structure is complicated, volume is relatively big, power consumption is higher, and aerosol particle diameter is wayward, and suction is experienced relatively Difference.
Utility model content
The purpose of this utility model is to solve the problem that prior art exists, and uses advanced MEMS (MEMS) Technology, invents a kind of electronic cigarette based on MEMS atomization chip.MEMS (MEMS) is that microcircuit and micromechanics are by function Requiring integrated on chip, size is generally at millimeter or micron order.Have that volume is little, lightweight, low in energy consumption, ruggedness is good, Cheap, steady performance.It is widely used in fields such as automobile, consumer electronics and medical treatment.
This utility model provides a kind of MEMS for electronic cigarette to be atomized chip 11, including:
Seal micro-loop 19, micro-spraying hole plate 17 and vibrating diaphragm 21 and the liquid chambers 22 surrounded thereof;
It is disposed with driver 18 outside wherein said vibrating diaphragm 21, described micro-spraying hole plate 17 has microwell array 13, feed liquor Mouth 15 and micro-valve 20.
Preferably, the inlet diameter of the micropore of described microwell array 13 is more than outlet diameter, and described outlet diameter is micron Or nanoscale.
Preferably, described inlet 15 connects with the liquid outlet of oil storage cabin 10.
Preferably, described microwell array 13 connects with the central passage 14 of suction nozzle 3;
Preferably, described MEMS atomization chip 11 is installed with oil storage cabin 10 integrative packaging or combination type.
Beneficial outcomes of the present utility model:
This utility model does not use heating to heat ree-oil, not use the tradition Oil Guide material such as glass or organic cotton Oil Guide, thus avoid the problem such as dry combustion method and healthy hidden danger;Use active pressure-driven Oil Guide mode and different pore size size The design of array micro spray hole, it is achieved orient quantitative Oil Guide and atomization, accurately control the gentle aerosol particle size of atomization quantity thus effectively change It is apt to organoleptic quality;Without high-temperature components, power consumption is relatively low, improves Consumer's Experience;Utilizing MEMS technology manufacture to be atomized chip can It is substantially reduced nebulizer weight, volume and improves integrated level;It addition, MEMS technology is advantageously implemented the batch of electronic smoke atomizer Change, standardized production, thus reduce in existing electronic smoke atomizer manufacture process and cause because there is nonstandardized technique manufacture link Product quality differentiation defect, simultaneously production cost can be greatly reduced.
Compared with patent CN200410048792.6 (electronic cigarette), this patent has a following difference:
Electronic cigarette in patent CN200410048792.6 is under carrier gas effect after shower nozzle sprays big drop, then warp Big drop is transformed into droplet by heating atomization or ultrasonic atomizatio, then after being mixed into aerosol with carrier gas, is sucked by people.Actual inspection Surveying and find, the nozzle diameter of this shower nozzle is grade.
This patent, uses the micro-spraying hole array of MEMS atomization chip to replace traditional shower nozzle, and its micro-spraying hole is a diameter of micro- Meter level or nanoscale, regulate aerosol particle diameter jointly by controlling driving pressure and micro-spraying hole array sizes, settles at one go straight Connect atomization ree-oil and form the most nano level droplet of a size of micron order, and formation aerosol after mix with air, it is not necessary to volume Outer heating, vibration, the atomising device such as ultrasonic, structure is simpler, saves space simultaneously, reduces power consumption.
Compared with existing ultrasonic atomization electronic cigarette patent, MEMS jet atomization chip structure is simple, significantly reduces mist Change power consumption (MHz level is reduced to KHz level needed for ultrasound wave) so that nebulizer can mate existing lithium battery power supply completely, Also solve the problem that aerosol particle diameter in ultrasonic atomization is inconsistent and atomising device volume is bigger simultaneously.And, this practicality Novel atomization chip volume is little, integrated level is high, be prone to batch machining
Accompanying drawing explanation
Fig. 1 is electronic cigarette schematic diagram based on MEMS atomization chip of the present utility model
Fig. 2 be of the present utility model for electronic cigarette MEMS atomization chip be in the schematic diagram of the state of pumping out
Fig. 3 be of the present utility model for electronic cigarette MEMS atomization chip be in the schematic diagram of suction condition
Reference is: battery rod 1, nebulizer 2, suction nozzle 3, battery 4, controller 5, on and off switch 6, and atomization drives switch 7, battery charging port 8, housing 9, oil storage cabin 10, MEMS is atomized chip 11, air inflow openings 12, microwell array 13, central passage 14, inlet 15, ree-oil 16, micro-spraying hole plate 17, driver 18, seal micro-loop 19, micro-valve 20, vibrating diaphragm 21, liquid chambers 22;
Detailed description of the invention
During suction this utility model electronic cigarette based on MEMS atomization chip, first will note oil foggers 2, battery rod 1 Connecting with suction nozzle 3 end, the on and off switch 6 being arranged on electronic cigarette housing in pressing is taken out while atomization driving switch 7 Inhaling, the driver 18 in MEMS atomization chip works immediately, and the ree-oil 16 in oil storage cabin 10 immediately wicks into liquid chambers 22, then stands I.e. form aerosol by the direct jet atomization of microwell array 13 on micro-spraying hole plate 17, be opened on electronic cigarette housing 9 meanwhile Air inflow openings 12 suck air load aerosol together suck in smoker's mouth.
When chip is in and pumps out spray pattern, vibrating diaphragm 21 is driven the driving force effect deformation of device 18, liquid chambers 22 volume-diminished, pressure increases, and the kinetic energy that the ree-oil in cavity obtains enough overcomes ree-oil surface tension, and ree-oil is through array micropore 13 scatterings, it is achieved be directly atomized, will not open owing to micro-valve 15 is architectural limitation, do not have ree-oil supply (figure when pumping out state 2);
When chip is in the state sucking ree-oil, vibrating diaphragm is replied and is made liquid chambers 22 volume expand, under internal pressure Fall, inlet 15 external pressure is more than internal pressure, and micro-valve 15 is washed open by pressure, and ree-oil enters in liquid chambers 22, due in pressure The direction that difference declines is limited by micro-spraying hole structure, and ree-oil will not spray (Fig. 3) when suction condition.
Driver 18 can use various ways, such as Piezoelectric Driving, wriggle driving, hydraulic-driven, electrothermal drive, pneumatic driving Dynamic and static electric drive, Electromagnetic Drive etc., chip rely primarily on driver 18 displacement produce pressure, its advantage be plastic deformation relatively Little, can accurately control flow, it addition, pressure-actuated microfluid is affected less by fluid and pipe characteristic.Drive ree-oil Occur quantitatively to orient atomization, it is achieved electronic cigarette tobacco tar high-quality atomizing effect.
Described typical pores array uses MEMS technology to be processed on monocrystal silicon, glass, and will by bonding technology Chip each several part carries out micro-group dress.
The inlet diameter of micropore is more than outlet diameter, and aerosol diameters is equal to outlet diameter.This is beneficially formed The ejection that aerosol is quick and strong.
Nebulizer oil storage cabin can be changed and clean and be used for different ree-oil, it is possible to oil storage cabin and MEMS are atomized chip The non-exchange nebulizer of the formula that becomes one.

Claims (2)

1. MEMS atomization chip (11) for electronic cigarette, it is characterised in that including:
Seal micro-loop (19), micro-spraying hole plate (17) and vibrating diaphragm (21) and the liquid chambers (22) surrounded thereof;
Wherein said vibrating diaphragm (21) outside be disposed with driver (18), described micro-spraying hole plate (17) has microwell array (13), Inlet (15) and micro-valve (20).
MEMS for electronic cigarette the most according to claim 1 is atomized chip (11), it is characterised in that described microwell array (13) inlet diameter of micropore is more than outlet diameter, and described outlet diameter is micron or nanoscale.
CN201620757342.2U 2016-07-19 2016-07-19 A kind of MEMS for electronic cigarette is atomized chip Active CN205831080U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620757342.2U CN205831080U (en) 2016-07-19 2016-07-19 A kind of MEMS for electronic cigarette is atomized chip

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Application Number Priority Date Filing Date Title
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CN205831080U true CN205831080U (en) 2016-12-28

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105962424A (en) * 2016-07-19 2016-09-28 云南中烟工业有限责任公司 MEMS atomization chip for electronic cigarette
CN108158040A (en) * 2018-01-03 2018-06-15 云南中烟工业有限责任公司 The MEMS electronic cigarettes chip and its manufacturing method of a kind of consistent heat generation
CN108185526A (en) * 2018-01-03 2018-06-22 云南中烟工业有限责任公司 The MEMS euthermic chips and its manufacturing method of a kind of integrated diode temperature sensor
WO2019218312A1 (en) * 2018-05-17 2019-11-21 Fontem Holdings 1 B.V. Atomization system for electronic cigarette
WO2020191985A1 (en) * 2019-03-25 2020-10-01 云南中烟工业有限责任公司 Coated silicon-based atomization chip of electronic cigarette and method for preparing same
WO2023045664A1 (en) * 2021-09-22 2023-03-30 深圳市克莱鹏科技有限公司 Heating sheet and electronic cigarette

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105962424A (en) * 2016-07-19 2016-09-28 云南中烟工业有限责任公司 MEMS atomization chip for electronic cigarette
CN108158040A (en) * 2018-01-03 2018-06-15 云南中烟工业有限责任公司 The MEMS electronic cigarettes chip and its manufacturing method of a kind of consistent heat generation
CN108185526A (en) * 2018-01-03 2018-06-22 云南中烟工业有限责任公司 The MEMS euthermic chips and its manufacturing method of a kind of integrated diode temperature sensor
CN108185526B (en) * 2018-01-03 2023-09-01 云南中烟工业有限责任公司 MEMS heating chip integrated with diode temperature sensor and manufacturing method thereof
CN108158040B (en) * 2018-01-03 2023-11-21 云南中烟工业有限责任公司 MEMS electronic cigarette chip capable of uniformly heating and manufacturing method thereof
WO2019218312A1 (en) * 2018-05-17 2019-11-21 Fontem Holdings 1 B.V. Atomization system for electronic cigarette
WO2020191985A1 (en) * 2019-03-25 2020-10-01 云南中烟工业有限责任公司 Coated silicon-based atomization chip of electronic cigarette and method for preparing same
US10945459B1 (en) 2019-03-25 2021-03-16 China Tobacco Yunnan Industrial Co., Ltd Plated silicon-based electronic cigarette atomizing chip and preparation method thereof
WO2023045664A1 (en) * 2021-09-22 2023-03-30 深圳市克莱鹏科技有限公司 Heating sheet and electronic cigarette

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