CN208872951U - A kind of beam modulation element - Google Patents

Abstract

The utility model provides a kind of beam modulation element, and the first light beam and the second light beam for being issued a light-source structure are respectively formed the flood beam of optical power detection and can project the pattern beam of predetermined pattern.The beam modulation element includes substrate and the diffusion part being formed on substrate and patterning portion.The diffusion part is correspondingly arranged in the traveling optical path of the first light beam with the flood beam by the first beam spread at optical power detection.The patterning portion is correspondingly arranged in the traveling optical path of the second light beam so that the light field of the second light beam is carried out rearrangement to form the pattern beam that can project predetermined pattern.

Description

A kind of beam modulation element

Technical field

The utility model belongs to optical technical field more particularly to a kind of beam modulation element.

Background technique

Existing three-dimensional (Three Dimensional, 3D) sensing mould group usually require to be respectively set floodlight transmitter and Light pattern transmitter is cooperated by two different optical paths and realizes 3D sensing.However, the respectively arranged floodlight transmitter With light pattern transmitter, and two different projecting light paths is respectively adopted and not only will increase cost but also the larger also shadow of shared volume The Miniaturization Design using 3D sensing module device is rung.

Summary of the invention

The technical problem to be solved by the utility model is to provide a kind of beam modulation elements, can use the same light Floodlight and light pattern projection function are realized in road, reach miniaturization and reduce the beneficial effect of cost.

The utility model embodiment provides a kind of beam modulation element, the first light for being issued a light-source structure Beam and the second light beam are respectively formed the flood beam of optical power detection and can project the pattern beam of predetermined pattern.It is described Beam modulation element includes substrate and the diffusion part being formed on substrate and patterning portion.The diffusion part is correspondingly arranged at first With the flood beam by the first beam spread at optical power detection in the traveling optical path of light beam.The patterning portion is correspondingly arranged Default figure can be projected to be formed in the traveling optical path of the second light beam the light field of the second light beam is carried out rearrangement The pattern beam of case.

In some embodiments, the middle position of beam modulation element is arranged in the patterning portion.The diffusion part Around the periphery that patterning portion is arranged in.

In some embodiments, the middle position of beam modulation element is arranged in the diffusion part.The patterning portion Around the periphery that diffusion part is arranged in.

In some embodiments, the diffusion part has light diffusion by being formed in corresponding position on substrate Optical grains are spread to realize the diffusion to the first light beam.The drafting department can by being formed in corresponding position on substrate The patterned optical lines of rearrangement light field realizes the rearrangement to the second light beam light field.

In some embodiments, the patterned optical lines is selected from diffraction optics lines, optical micro lens array, light Grid and combinations thereof.

In some embodiments, the diffusion part and patterning portion are formed in the different zones on the same substrate.

In some embodiments, the diffusion part and patterned features are not formed on different substrates.The formation There is the substrate in patterning portion to be defined as patterned substrate.The substrate for being formed with diffusion part is defined as diffusion substrate.The figure Case substrate and diffusion substrate are layered on top of each other together.The patterned substrate corresponds to the position that diffusion part is formed on diffusion substrate It sets place and keeps light transmission.Holding light transmission at the position in patterning portion is formed on the diffusion substrate corresponding pattern substrate.

In some embodiments, the predetermined pattern that the pattern beam projects be selected from irregular distribution spot pattern, The striped design of regular array and along one of cross one another regular grid pattern of different directions and combinations thereof.

In some embodiments, the surface of the substrate is formed with detection route.The detection line routes conductive material It is made.The detection circuit be equipped with multiple test points, by any two of them test point carry out detection may know that this two Whether the substrate surface between a test point is complete.

In some embodiments, the conductive material can be selected from indium tin oxide or metal.

Beam modulation element provided by the utility model embodiment is by flood projection optical path and pattern light projection optical path Multiplexing, the not only smaller design for being conducive to equipment of occupied volume, but also also further reduce the cost of device.

The additional aspect and advantage of the utility model embodiment will be set forth in part in the description, partially will be under Become obvious in the description in face, or is recognized by the practice of the utility model embodiment.

Detailed description of the invention

Fig. 1 is the top view for the light-source structure that the utility model first embodiment provides.

Fig. 2 is the top view for the light-source structure that the utility model second embodiment provides.

Fig. 3 is the top view for the light-source structure that the utility model third embodiment provides.

Fig. 4 is that the light-source structure in Fig. 3 is tactic along the cross-sectional view of IV-IV line and the light-source structure and top The positional diagram of first optical element.

Fig. 5 is the top view for the light-source structure that the 4th embodiment of the utility model provides.

Fig. 6 is the top view for the light-source structure that the 5th embodiment of the utility model provides.

Fig. 7 is the top view for the light-source structure that the utility model sixth embodiment provides.

Fig. 8 is cross-sectional view of the light-source structure in Fig. 7 along VIII-VIII line.

Fig. 9 is the top view for the light-source structure that the 7th embodiment of the utility model provides.

Figure 10 is the top view for the light-source structure that the 8th embodiment of the utility model provides.

Figure 11 is the structural schematic diagram for the optical projection mould group that the 9th embodiment of the utility model provides.

Figure 12 is the schematic diagram that the beam modulation component structure of the group of optical projection mould described in Figure 11 changes with light-source structure.

Figure 13 is the signal of the detection route on the transparent substrate of the beam modulation element of the optical projection mould group in Figure 11 Figure.

Figure 14 is the structural schematic diagram for the optical projection mould group that the tenth embodiment of the utility model provides.

Figure 15 is the structural schematic diagram for the optical projection mould group that the 11st embodiment of the utility model provides.

Specific embodiment

The utility model patent application requires the applying date on July 30th, 2018, application No. is 201821217761.2, realities The country with the earlier application that New Name is " a kind of light-source structure, optical projection mould group, biological identification device and equipment " is excellent It first weighs, all the elements of the part application are described herein by reference.

The embodiments of the present invention is described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein Same or similar label indicates same or similar element or element with the same or similar functions from beginning to end.Lead to below It crosses the embodiment being described with reference to the drawings to be exemplary, is only used for explaining the utility model, and should not be understood as practical to this Novel limitation.In the description of the present invention, it should be understood that term " first ", " second " are only used for describing, without It can be interpreted as indication or suggestion relative importance or implicitly indicate the quantity of indicated technical characteristic or put in order.By This defines " first ", the technical characteristic of " second " can explicitly or implicitly include one or more technology Feature.The meaning of " plurality " is two or more in the description of the present invention, unless otherwise clearly specific limit It is fixed.

In the description of the present invention, it should be noted that unless otherwise specific regulation or limiting, term " peace Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integration Connection；It can be mechanical connection, be also possible to be electrically connected or be in communication with each other；It can be directly connected, intermediate matchmaker can also be passed through Jie is indirectly connected, and can be the connection inside two elements or the interaction relationship between two elements.For this field For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.

Following disclosure provides many different embodiments or example is used to realize the different structure of the utility model. In order to simplify the disclosure of the utility model, hereafter only to the component of specific examples and being set for describing.Certainly, they are only Example, and purpose does not lie in limitation the utility model.In addition, the utility model can reuse reference in different examples Number and/or reference letter, this reuse are to simplify and clearly state the utility model, itself does not indicate institute The particular kind of relationship between various embodiments and/or setting discussed.In addition, the utility model is provided in the following description Various specific techniques and material are only the example for realizing technical solutions of the utility model, but those of ordinary skill in the art answer This recognizes that the technical solution of the utility model can also be by other techniques for not describing hereafter and/or other materials come real It is existing.

Further, described feature, structure can be incorporated in one or more embodiment party in any suitable manner In formula.In the following description, many details are provided so as to fully understand the embodiments of the present invention.So And one of ordinary skill in the art would recognize that, even if without one or more in the specific detail, or using other knots Structure, constituent element etc. can also practice the technical solution of the utility model.In other cases, it is not shown in detail or describes known knot Structure or operation to avoid fuzzy the utility model emphasis.

It should be understood that embodiments described herein and/or method are exemplary in itself, it is not construed as pair The limitation of technical solutions of the utility model.Embodiment or method described herein are only the utility model the relevant technologies thought One of numerous technical solutions covered are a variety of, therefore each step of described method and technology scheme can be according to The order indicated executes, and can execute, may be performed simultaneously, or be omitted in some cases according to other order, on The change stated is regarded as the range that the utility model technical solution claimed is covered.

As shown in Figure 1, the utility model first embodiment provides a kind of light-source structure 1, for emitting light beam to one It is sensed on measured target object.The light beam can be the light beam with specific wavelength according to sensing principle and application scenarios. In the present embodiment, the light beam is used to sense the three-dimensional information of measured target object, can be infrared or near-infrared wavelength light Beam, wave-length coverage are 750 nanometers (Nanometer, nm) to 1650nm.

The light-source structure 1 includes the first emission part 10 and the second emission part 12.First emission part 10 issues first Light beam is used to form the flood beam of optical power detection.The flood beam is projected on measured target object tested for sensing The floodlight image of object.For example, the flood beam can be used for sensing whether the measured target object is face.Described second The second light beam that emission part 12 issues is used to form the pattern beam that predetermined pattern can be projected on measured target object.It is described Predetermined pattern can be used for the three-dimensional information for sensing the measured target object.

First emission part 10 is formed in the same substrate 14 with the second emission part 12 or is connected with each other to be integrated into Overall structure.The first light emitting region 122 in the middle part of semiconductor base 14 is defined on the semiconductor base 14 and is enclosed Around the second light emitting region 102 of first light emitting region 122 setting.

The integration mode of first emission part 10 and the second emission part 12 includes being directly connected to, be indirectly connected with or distinguishing shape At on the same substrate 14 etc..In the present embodiment, first light beam and the second light beam are the identical near-infrared of wavelength Light.

In the present embodiment, first emission part 10 includes multiple for emitting the first illuminator of the first light beam 100.Second emission part 12 includes multiple for emitting the second illuminator 120 of the second light beam.First illuminator 100 It is formed on the same semiconductor base 14 with the second illuminator 120.First illuminator 100 in semiconductor base 14 It is uniformly distributed in two light emitting regions 102 according to preset same intervals.Second illuminator 120 is in the semiconductor base 14 The first light emitting region 122 in irregular distribution.

First illuminator 100 and the second illuminator 120 can be semiconductor laser.Preferably, in this embodiment party In formula, first illuminator 100 and the second illuminator 120 are vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, VCSEL), it is made up on the semiconductor base 14 of the techniques such as photoetching and etching.Institute The pattern beam that the flood beam and the second illuminator 120 for stating the sending of the first illuminator 100 issue is that wavelength is identical infrared Or near infrared light, wave-length coverage are 750nm to 1650nm.

In the present embodiment, first light emitting region 122 positioned at 14 middle part of semiconductor base is rectangle.Described Two light emitting regions 102 are correspondingly arranged at four edges of the first light emitting region 122.First illuminator 100 is in the second hair It uniformly arranges along two sides of each corner in the second light emitting region 102 according to same intervals four corners in light region 102 Multilayer, first light emitting region 122 be dotted line described in Fig. 1 surround envelope the first light emitting region 102 each be straight Four right angle frame bar-shaped zones at angle.Second illuminator 102 is irregularly arranged in the first light emitting region 122, is used for Launch the second light beam with irregular distribution pattern when lighting.

It is provided on the semiconductor base 14 and connect with external circuit for controlling in first light emitting region 122 First pad 104 of light.It is provided with and connect with external circuit for controlling described on the semiconductor base 14 Second pad 124 of the light in two light emitting regions 102.So being located at the first light emitting region 122 in present embodiment The second interior illuminator 120 and the first illuminator 100 in the second light emitting region 102 can pass through different control signals Independently work.

As shown in Fig. 2, the second embodiment of the utility model provides a kind of light-source structure 2, with the first embodiment party Light-source structure 1 in formula is essentially identical, and difference is that first illuminator 200 equably divides according to preset same intervals Cloth is in the first light emitting region 222.The irregular distribution of second illuminator 220 is in the second light emitting region 202.

Also referring to shown in Fig. 3 and Fig. 4, the utility model third embodiment provides a kind of light-source structure 3, with Light-source structure 1 in first embodiment is essentially identical, and difference is that second light emitting region 302 is in first hair The blocked areas that first light emitting region 322 1 is enclosed is surrounded outside light region 322.Second light emitting region 302 and the first hair The size of minimum spacing D is it is ensured that the light beam sent out from the first light emitting region 322 and the second light emitting region between light region 322 302 light beams sent out reach be arranged light-source structure 3 above before tactic first optical element 31 it is mutual it Between do not cross.

Since manufacturing process is there are a degree of error, first illuminator 300 is issued with the second illuminator 320 The dispersion angle of light beam can not accomplish it is just the same, but can be within the scope of preset dispersion angle.Because of first illuminator 300 It is bigger with the dispersion angle of the issued light beam of the second illuminator 320, in light-source structure 3 and tactic first optics in top The spacing of element 31 is sent out under the premise of remaining unchanged in order to meet first light emitting region 322 with the second light emitting region 302 Light beam does not cross out, it is required that the distance between the first light emitting region 322 and the second light emitting region 302 D are bigger.Assuming that from first The maximum dispersion angle of the issued light beam in light emitting region 322 and the second light emitting region 302 is θ, the light-emitting surface of the light-source structure 3 It is H with the distance between tactic first optical element 31 is disposed there above, according to trigonometric function relationship, first Described first under the critical condition that the issued light beam in light emitting region 322 just intersects with the issued light beam in the second light emitting region 302 Minimum spacing D between light emitting region 322 and the second light emitting region 302 meets formula So in order to ensure the light beam that the light beam sent out from the first light emitting region 322 is sent out with the second light emitting region 302 reaches Setting does not cross mutually before tactic first optical element 31 above light-source structure 3, and described first shines Minimum spacing D between region 322 and the second light emitting region 302 should meet When because meeting above-mentioned condition, the light beam issued respectively from the first light emitting region 322 and the second light emitting region 302 exists in arrival setting It does not cross between each other before first optical element 31 of 3 top of light-source structure, so not needing in the first light emitting region 322 Or second light emitting region 302 light emission side be arranged again adjust beam direction other elements.

In the present embodiment, the irregular distribution of the second illuminator 320 is in the first luminous zone of semiconductor base 34 In domain 322.First illuminator 300 is equably arranged in the second light emitting region 302 according to identical preset interval.

As shown in figure 5, the 4th embodiment of the utility model provides a kind of light-source structure 4, with third embodiment party Light-source structure 3 in formula is essentially identical, and difference is that first illuminator 400 equably divides according to preset same intervals Cloth is in the first light emitting region 422.The irregular distribution of second illuminator 420 is in the second light emitting region 402.

As shown in fig. 6, the 5th embodiment of the utility model provides a kind of light-source structure 5, with first embodiment In light-source structure 1 it is essentially identical, difference be second light emitting region 502 be the semiconductor base 54 be formed with hair Other regions on the surface of body of light other than the first light emitting region 522.The setting of first illuminator 500 shines second In region 502.Second illuminator 520 is arranged in first light emitting region 522.First illuminator 500 and Two illuminators 520 are equably arranged all in accordance with preset same intervals.

In the present embodiment, the second light beam cooperation that the second illuminator 520 of first light emitting region 522 is issued The optical element that 5 top of light-source structure is arranged in can be formed can project irregular distribution hot spot figure on measured target object Case, the striped design of regular array or the pattern beam along the cross one another regular grid pattern of different directions.

It is understood that being arranged in second in the first light emitting region 522 in other embodiments out not shown Illuminator 520 can also be randomly distributed.

It is understood that first illuminator 500 can also be according to pre- in other embodiments out not shown If same intervals be evenly distributed in the first light emitting region 522.The irregular distribution of second illuminator 520 is in the second hair In light region 502.

Referring to Figure 7 together and Fig. 8, the utility model sixth embodiment provides a kind of light-source structure 6, for emitting It is sensed on light beam to a measured target object.The light beam can be for specific wavelength according to sensing principle and application scenarios Light beam.In the present embodiment, the light beam is used for recognition of face, can be infrared or near-infrared wavelength light beam, wavelength model It encloses for 750 nanometers (Nanometer, nm) to 1650nm.

The light-source structure 6 includes the first emission part 60 and the second emission part 62.First emission part 60 issues first Light beam is used to form the flood beam of optical power detection.The flood beam is projected on measured target object for sensing quilt Survey the floodlight image of object.For example, the flood beam can be used for sensing whether the measured target object is face.Described Two emission parts 62 issue the second light beam and are used to form the pattern beam that can project predetermined pattern on measured target object.It is described Predetermined pattern can be used for the three-dimensional information for sensing the measured target object.In the present embodiment, first light beam and Two light beams are the identical near infrared light of wavelength.

First emission part 60 includes the first illuminator 600 and the light guide plate being formed on the first semiconductor base 601 602.The light guide plate 602 includes incidence surface 6020 and light-emitting surface 6022.In the present embodiment, the light guide plate 602 is substantially In rectangular shape, the incidence surface 6020 is perpendicular to light-emitting surface 6022.The corresponding light guide plate 602 of first illuminator 600 Incidence surface 6020 is arranged, so that the first light beam that first illuminator 600 is issued injects light guide plate from incidence surface 6020 Flood beam is projected from light-emitting surface 6022 after evenly mixing in 602.

The middle position of 602 light-emitting surface 6022 of light guide plate is arranged in second emission part 62.Second transmitting Portion 62 includes the second illuminator of one or more 620 being formed on the second semiconductor base 621.In the present embodiment, institute It states multiple second illuminators 620 to be randomly distributed on the second semiconductor base 621, be used for and is arranged above light-source structure 6 Optical element cooperation the spot pattern irregularly arranged is projected on measured target object.It is understood that in other realities It applies in mode, the multiple second illuminator 620 can also arrange evenly and at intervals according to identical, can be used for and be arranged in light The optical element cooperation of 6 top of source structure projects the striped design of regular array on measured target object or along not Tongfang To cross one another regular grid pattern.

In the present embodiment, first illuminator 600 and the second illuminator 620 can be semiconductor laser, example Such as: VCSEL.Unlike, because first illuminator 600 is different from the position where the second illuminator 620, need shape respectively At on different the first semiconductor bases 601 and the second semiconductor base 621.The shape of first semiconductor base 601 It is corresponding with 6020 shape of incidence surface.

Also referring to Fig. 1 and Fig. 9, the 7th embodiment of the utility model provides a kind of light-source structure 7, with first Light-source structure 1 in embodiment is essentially identical, and difference is that first illumination region 70 includes each second luminous zone Single first illuminator 700 of setting is respectively corresponded in domain 702, first illuminator 700 is the wide face type VCSEL of single hole, with Instead of multiple according to preset same intervals evenly arranged first in the second light emitting region 102 described in first embodiment Illuminator 100.Described wide only one lightening hole of face type VCSEL of single hole, but the aperture that shines is larger, several times in the first embodiment party One of VCSEL in formula as the first illuminator 100.The illumination effect of the wide face type VCSEL of single hole is equal to luminous The area source of even intensity.The light-emitting surface shape of the wide face type VCSEL of single hole can be the shape of rule, such as rectangle；? It can be irregular shape, such as the light-emitting surface shape of the wide face type VCSEL of the single hole is described the in the present embodiment The right angle moulding shape of two light emitting regions 702.

Also referring to Fig. 1 and Figure 10, the 8th embodiment of the utility model provides a kind of light-source structure 8, with Light-source structure 1 in one embodiment is essentially identical, and difference is that second emission part 82 includes that setting shines first Single second illuminator 820 in region 822, second illuminator 820 is the wide face type VCSEL of single hole, real with replacement first Apply the second illuminator 120 being randomly distributed in the first light emitting region 122 described in mode.First emission part 80 includes every Single first illuminator 800 of setting is respectively corresponded in a first light emitting region 802, first illuminator 800 is that single hole is wide Face type VCSEL, it is multiple equal according to preset same intervals in the second light emitting region 102 described in first embodiment to replace First illuminator 100 of even arrangement.Described wide only one lightening hole of face type VCSEL of single hole, but the aperture that shines is larger, decades of times One of VCSEL in first embodiment as the first illuminator 100 and the second illuminator 120.The wide face of single hole The illumination effect of type VCSEL is similar to the uniform area source of luminous intensity.The light-emitting surface shape of the wide face type VCSEL of single hole can Think the shape of rule, such as rectangle；It may be irregular shape, such as second luminous zone in the present embodiment The right angle moulding shape in domain 802.

As shown in figure 11, the 9th embodiment of the utility model provides a kind of optical projection mould group 11, for projecting spy Determine to be sensed on light beam to measured target object.The optical projection mould group 11 includes beam modulation element 110 and above-mentioned first Light-source structure 1 into the 8th embodiment.

The different light beams that the beam modulation element 110 is used to be issued light-source structure 1 are respectively formed uniform intensity point The flood beam of cloth and the pattern beam that predetermined pattern can be projected.The beam modulation element 110 include diffusion part 111 and Patterning portion 112.First emission part 10 of the 111 corresponding light source structure 1 of diffusion part is arranged to be at the first light beam In optical path.The diffusion part 111 is used for the first beam spread shape for issuing first illuminator 100 of the first emission part 10 At the flood beam of optical power detection.Second emission part 12 of the 112 corresponding light source structure 1 of patterning portion is arranged so that its In optical path in the second light beam.The patterning portion 112 is for issuing second illuminator 120 of the second emission part 12 The formation of the second light beam the pattern beam of predetermined pattern can be projected on measured target object with for sensing measured target object Three-dimensional information.

It is arranged in the first light emitting region 122 corresponding to second illuminator 120 to issue and be used to form pattern beam The second light beam, first illuminator 100 is arranged in the second light emitting region 102 to issue be used to form flood light pattern the The middle position of beam modulation element 110 is arranged in shine with setting first in the case where one light beam, the patterning portion 112 The second illuminator 120 in region 122 is corresponding.The diffusion part 111 surround be arranged in patterning portion 112 periphery with setting The first illuminator 100 in the second light emitting region 102 is corresponding.

As shown in figure 12, correspond to second illuminator 220 to be arranged in the second light emitting region 202 to issue and be used for shape At the second light beam of pattern beam, the setting of the first illuminator 200 is used to form in the first light emitting region 222 with sending general The middle position of beam modulation element 110 is arranged in exist with setting in the case where first light beam of light pattern, the diffusion part 111 The first illuminator 200 in first light emitting region 222 is corresponding.The patterning portion 112 surrounds the periphery that diffusion part 111 is arranged in With corresponding with the second illuminator 220 being arranged in the second light emitting region 202.

The function of the patterning portion 112 and diffusion part 111 in the corresponding position of transparent substrate 113 by forming specifically Optical grains are realized.In the present embodiment, the patterning portion 112 of the beam modulation element 110 and diffusion part 111 are arranged On the same transparent substrate 113.That is, the middle position of the transparent substrate 113 is formed with the figure for rearrangement light field Case optical grains 1120 are used as the patterning portion 112, and the transparent substrate 113 is in the patterned optical lines 1120 Periphery position corresponding with 2 first light emitting region 222 of light-source structure has been formed with the diffusion optical grains 1100 of light diffusion As the diffusion part 111.The patterned optical lines 1120 includes but is not limited to diffraction optics lines, optical microlens battle array Column, grating and combinations thereof.

The case where corresponding to the second illuminator 120 irregular distribution for issuing the second light beam, the patterned optical lines Second beam replication of the 1120 light intensity irregular distributions for being issued the second illuminator 120 of irregular distribution is multiple and pre- If expanded- angle within the scope of expansion to form the spot pattern of irregular distribution being incident upon on measured target object.

The second illuminator 520 corresponding to the second light beam of sending is according to the evenly arranged situation of preset same intervals, institute Patterned optical lines 1120 is stated by the light field rearrangement of the optical power detection of second light beam, with formed can be in quilt Survey the pattern beam of projection irregular distribution spot pattern on object.

The second illuminator 520 corresponding to the second light beam of sending is according to the evenly arranged situation of preset same intervals, institute State what patterned optical lines 1120 can also issue respectively second illuminator 520 along the arrangement of the same preset direction Light beam is fused to the pattern beam with regular array candy strip.

The second illuminator 520 corresponding to the second light beam of sending is according to the evenly arranged situation of preset same intervals, institute Stating patterned optical lines 1120 can also be by 520 institute of the second illuminator along the arrangement of cross one another two preset directions The light of sending is fused the pattern beam to be formed and can project regular grid pattern.

The case where the second illuminator 820 corresponding to the second light beam of sending is the area source of uniformly light-emitting, the patterning The light field rearrangement of the optical power detection of second light beam can also can be tested by optical grains 1120 with being formed The pattern beam of projection irregular distribution spot pattern on object.

As shown in figure 13, detection route 134 can also be formed on the surface of the transparent substrate 113.The detection route 134 can be made of an electrically conducting material, such as: indium tin oxide (Indium Tin Oxide, ITO) film or metal etc..The inspection Slowdown monitoring circuit 134 is equipped with multiple test points 135, may know that the two o'clock by carrying out detection to any two of them test point 135 Between 113 surface of transparent substrate passed through of route whether have to burst apart etc. and influence the flaw of optical element integrality.

As shown in figure 14, the tenth embodiment of the utility model provides a kind of optical projection mould group 15, real with the 9th The optical projection mould group 11 applied in mode is essentially identical, and difference is that the optical projection mould group 15 further includes optical path director element 16。

The optical path director element 16 is arranged between light-source structure 1 and beam modulation element 110, and with the light source knot At the corresponding position of light-emitting surface of first emission part 10 of structure 1.The optical path director element 16 is used for the first emission part 10 The first light beam guidance of divergent shape outgoing is irradiated to the diffusion part 111 of the beam modulation element 110.The optical path director element 16 setting is the technical solution in order to avoid being closer in the first emission part 10 of light-source structure 1 and the second emission part 12 In, issued from the first emission part 10 be used to form floodlight irradiation the first light beam of a part light can by beam modulation member The patterning portion 112 of part 110 projects away the pattern beam for forming luminous intensity irregular distribution, to influence flood beam Uniformity.The optical path director element 16 includes but is not limited to prism, lenticule and grating.The optical path director element 16 is set Region is set to be consistent with the region where the first emission part 10 of light-source structure 1.

As shown in figure 15, the 11st embodiment of the utility model provides a kind of optical projection mould group 17, with the 9th Optical projection mould group 11 in embodiment is essentially identical, and difference is 171 He of diffusion part of the beam modulation element 170 Patterning portion 172 is respectively formed on different transparent substrates.

The transparent substrate for being formed with patterning portion 172 is defined as patterned substrate 1721.The patterned substrate It is formed at position corresponding with the second emission part 12 of light-source structure 1 on 1721 and the light field of light beam is subjected to rearrangement Patterned optical lines 1720.In the present embodiment, 1 middle part of light-source structure is set corresponding to second emission part 12 Situation, the patterned optical lines 1720 are formed in the middle position of patterned substrate 1721.

The transparent substrate for being formed with diffusion part 171 is defined as diffusion substrate 1710.On the diffusion substrate 1710 with The diffusion optical grains 1711 for playing light diffusion are formed at the corresponding position of the first emission part 10 of light-source structure 1. Complete light transmission is kept in the diffusion substrate 1710 region corresponding with patterned optical lines 1720 on patterned substrate 1721, It is defined as transmission region 1712.In the present embodiment, correspond to first emission part 10 to be arranged around the second emission part 12 Light-source structure 1, the diffusion substrate 1710 the transmission region 1712 periphery it is right with 1 first emission part 10 of light-source structure The diffusion optical grains 1711 are formed at the position answered.

The patterned substrate 1721 and diffusion substrate 1710 can be stacked together, and can also be thrown along the optics The projecting light path of shadow mould group 17 is respectively and independently arranged at the different location in optical path.It is understood that needing only assure that described It corresponds to optical grains position on diffusion substrate 1710 and patterned substrate 1721 to be mutually aligned, for diffusion substrate 1710 and pattern Change substrate 1721 not specially require along putting in order for the projecting light path.

Compared with existing sensing device needs to be respectively set the structure of floodlight transmitter and light pattern transmitter, this is practical Sensing device 18 provided by novel and the hair that flood beam and pattern beam will be projected using the equipment 19 of the sensing device 18 Emitter integrates, not only the smaller design for being conducive to equipment of volume, but also also further reduces the cost of device.

In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the utility model.In this explanation In book, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.

The foregoing is merely the better embodiments of the utility model, are not intended to limit the utility model, it is all It is practical new to should be included in this for made any modifications, equivalent replacements, and improvements etc. within the spirit and principles of the utility model Within the protection scope of type.

Claims (10)

1. a kind of beam modulation element, the first light beam and the second light beam for being issued a light-source structure are respectively formed light intensity Equally distributed flood beam and the pattern beam that can project predetermined pattern, the beam modulation element includes substrate and shape At on substrate diffusion part and patterning portion, the diffusion part be correspondingly arranged in the traveling optical path of the first light beam with by first Beam spread at optical power detection flood beam, the patterning portion be correspondingly arranged in the traveling optical path of the second light beam with The light field of second light beam is subjected to rearrangement to form the pattern beam that can project predetermined pattern.

2. beam modulation element as described in claim 1, which is characterized in that the patterning portion is arranged in beam modulation element Middle position, the diffusion part, which surrounds, is arranged in the periphery in patterning portion.

3. beam modulation element as described in claim 1, which is characterized in that beam modulation element is arranged in the diffusion part Middle position, the patterning portion surround the periphery that diffusion part is arranged in.

4. beam modulation element as described in claim 1, it is characterised in that: the diffusion part is corresponding by being formed on substrate There are the diffusion optical grains of light diffusion to realize the diffusion to the first light beam, the patterning portion passes through at position Be formed in corresponding position on substrate can the patterned optical lines of rearrangement light field realize the weight to the second light beam light field New arrangement.

5. beam modulation element as claimed in claim 4, which is characterized in that the patterned optical lines is selected from diffraction optics One of lines, optical micro lens array, grating and combinations thereof.

6. the beam modulation element as described in any one of claim 1 to 5, which is characterized in that the diffusion part and pattern Change portion is formed in the different zones on the same substrate.

7. the beam modulation element as described in any one of claim 1 to 5, which is characterized in that the diffusion part and figure Case portion is respectively formed on different substrates, and the substrate for being formed with patterning portion is defined as patterned substrate, the shape It is defined as diffusion substrate at the substrate for having diffusion part, the patterned substrate and diffusion substrate are layered on top of each other together, the figure Case substrate corresponds to holding light transmission, the diffusion substrate corresponding pattern substrate at the position for being formed with diffusion part on diffusion substrate On be formed at the position in patterning portion holding light transmission.

8. the beam modulation element as described in any one of claim 1 to 5, which is characterized in that the pattern beam is thrown The predetermined pattern of injection is selected from irregular distribution spot pattern, the striped design of regular array and mutual along different directions One of regular grid pattern of intersection and combinations thereof.

9. beam modulation element as described in claim 1, which is characterized in that the surface of the substrate is formed with detection route, The detection line road is made of an electrically conducting material, and the detection line road is equipped with multiple test points, by examining to any two of them Measuring point carries out detection may know that whether the substrate surface between two test points is complete.

10. beam modulation element as claimed in claim 9, which is characterized in that the conductive material can be selected from indium tin oxide Or metal.