CN208869724U - Semiconductor monocrystal furnace large scale thermal field - Google Patents
Semiconductor monocrystal furnace large scale thermal field Download PDFInfo
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- CN208869724U CN208869724U CN201820981578.3U CN201820981578U CN208869724U CN 208869724 U CN208869724 U CN 208869724U CN 201820981578 U CN201820981578 U CN 201820981578U CN 208869724 U CN208869724 U CN 208869724U
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- insulation layer
- thermal insulation
- crucible
- side thermal
- sleeve
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Abstract
The utility model provides semiconductor monocrystal furnace large scale thermal field, including a furnace chamber, a crucible is equipped in furnace chamber, the outer wall of crucible is equipped with side heater, lower heater is additionally provided with below crucible, furnace chamber further includes side thermal insulation layer, and side thermal insulation layer is respectively outer side thermal insulation layer, private side thermal insulation layer, upper side thermal insulation layer and lower side thermal insulation layer, lower side thermal insulation layer is connect with outer side thermal insulation layer, and upper side thermal insulation layer is connect with private side thermal insulation layer；Heat shielding elevating mechanism is equipped with above crucible; heat shielding elevating mechanism includes outer heat shielding, internal heat shield, heat shielding protective layer, lifting ring and upper thermal insulation layer, and graphite shaft and plug are equipped with below crucible, and graphite shaft is equipped with outer cone mouth; plug is equipped with interior cone mouth, graphite shaft and plug plug connection.
Description
Technical field
The utility model relates to semiconductor equipment manufacturing fields, and in particular to semiconductor monocrystal furnace large scale thermal field.
Background technique
Rapidly rise recently as the demand of integrated circuit and semiconductor chip, the demand of large scale semiconductor chip is got over
Come it is bigger, originally 2 ", 4 ", 6 ", 8 " semiconductor chips can no longer meet industry use demand, small-sized crystals growth furnace also without
Method meets development, and more large size chip demands are come into being, and corresponding large-size crystals growth furnace apparatus, which is also badly in need of updating, to be changed
Generation.
Originally small size thermal field only has side heater and can not go up and down to adjust its height, also without bottom-heated
Device, so that temperature distribution is non-uniform for entire thermal field, temperature gradient is big, air turbulence, causes material fusing in crucible incomplete.
Utility model content
In view of the problems of the existing technology, the utility model provides semiconductor monocrystal furnace large scale thermal field, to solve to pass
The problem of temperature distribution is non-uniform for thermal field of uniting, temperature gradient big air turbulence.
The technical solution of the utility model is: semiconductor monocrystal furnace large scale thermal field, including a furnace chamber, the furnace chamber
It is inside equipped with a crucible, the outer wall of the crucible is equipped with side heater, is additionally provided with lower heater, the furnace below the crucible
Chamber further includes side thermal insulation layer, the side thermal insulation layer be respectively outer side thermal insulation layer, private side thermal insulation layer, upper side thermal insulation layer and
Lower side thermal insulation layer, the lower side thermal insulation layer are connect with the outer side thermal insulation layer, the upper side thermal insulation layer with it is described interior
The connection of portion side thermal insulation layer；
Heat shielding elevating mechanism is equipped with above the crucible, the heat shielding elevating mechanism includes outer heat shielding, internal heat shield, heat shielding guarantor
Sheath, lifting ring and upper thermal insulation layer,
Graphite shaft and plug are equipped with below the crucible, the graphite shaft is equipped with outer cone mouth, and the plug is equipped with interior
Cone mouth, the graphite shaft and the plug plug connection.
The utility model devises liftable heat shielding, and height lifting is adjusted, and the material for meeting large scale crucible is different
Temperature gradient demand；Bottom heater is increased, keeps the silicon material sufficiently melted by heat of crucible bottom complete, adds entire thermal field
It is hot uniform.Graphite shaft is changed to cone mouth connection by original thread connecting mode, solves under room temperature and high temperature repeated action
Thread biting locking phenomenon, the outer cone mouth of graphite shaft are designed with cone mouth in plug, are connected firmly, automatic centering facilitates installation.
The side heater is also connected with side heater electrode, and the side heater electrode passes through one lid of electrode nut connection
Son, the side heater electrode are fixed on the lower end of the furnace chamber.
The furnace chamber further includes a bottom plate, and the side heater electrode passes through the bottom plate, the side heater electrode
On be successively arranged with quartz sleeve and electrode sleeve, the quartz sleeve and the electrode sleeve are between bottom plate and side heater electrode.
To play a protective role to motor.
The graphite shaft passes through the bottom plate, is arranged with sleeve in the graphite shaft, the sleeve is located at the graphite shaft
Between the bottom plate.The utility model protects graphite shaft by sleeve.
The top of the sleeve is equipped with a socket cover.To play position-limiting action.
The inner wall of the furnace chamber is equipped with top inside holding screen and lower part inside holding screen.To play insulation effect.
Upper heat-preservation cylinder is equipped with above the outer heat shielding.Insulation effect can be played.
The lifting ring includes middle ring, lower ring and reflection protection ring.The utility model is needed by the way that middle ring and lower ring are fixed
The component of promotion, reflection protection ring can play buffer function, avoid damage thermal field component.
The lower heater connects heater electrode.It is lower heater energy supply by lower heater electrode.
It is heat-insulated that the lower section of the lower side thermal insulation layer is equipped with bottom.To play heat-insulated effect.
The top of the upper side thermal insulation layer is equipped with upper side insulating layer.To play insulation effect.
Sealing ring is equipped with above the upper side insulating layer.To play sealing function.
The bottom of the furnace chamber is equipped with vent cap, and the inside of the vent cap is equipped with exhaust pipe adjusting sleeve.Pass through
Adjusting sleeve adjusts exhaust size.
The crucible is C/C crucible, and a crucible pallet is equipped between the crucible and the graphite shaft.
Detailed description of the invention
Fig. 1 is the main view of the utility model；
Fig. 2 is the side view of the utility model；
Fig. 3 is the partial enlarged view in Fig. 1 at A；
Fig. 4 is the partial enlarged view in Fig. 1 at B；
Fig. 5 is the partial enlarged view in Fig. 1 at C；
Fig. 6 is the partial structure diagram of the utility model.
In figure: 1, crucible；2, crucible pallet；3, graphite shaft；4, side heater；5, side heater electrode；6, electrode nut；
7, lid；8, lower heater；9, lower heater electrode；10, bottom plate；11, lower part inside holding screen；12, lower middle ring；13, in top
Heat protection screen；14, upper middle ring；15, upper heat-preservation cylinder；16, reflection protection ring；17, outer heat shielding；18, internal heat shield；19, Di Xiahuan；20,
Sleeve；21, socket cover；22, electrode sleeve；23, quartz sleeve；24, vent cap；25, bottom is heat-insulated；26, lower side thermal insulation layer；27,
Outer side thermal insulation layer；28, upper side thermal insulation layer；29, heat shielding protective layer；30, lifting ring；31, upper thermal insulation layer；32, upper side is protected
Warm layer；33, sealing ring；34, exhaust pipe adjusting sleeve；35, ring under side；36, private side thermal insulation layer；37, plug.
Specific embodiment
The utility model is described further with reference to the accompanying drawing.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5 and Fig. 6, semiconductor monocrystal furnace large scale thermal field, including a furnace chamber, furnace
A crucible 1 is equipped in chamber, the outer wall of crucible is equipped with side heater 4, is additionally provided with lower heater 8, furnace chamber below crucible
It further include side thermal insulation layer, side thermal insulation layer is respectively outer side thermal insulation layer 27, private side thermal insulation layer 36,28 and of upper side thermal insulation layer
Lower side thermal insulation layer 26, lower side thermal insulation layer are connect with outer side thermal insulation layer, and upper side thermal insulation layer is connect with private side thermal insulation layer；
Heat shielding elevating mechanism is equipped with above crucible, heat shielding elevating mechanism includes outer heat shielding 17, internal heat shield 18, heat shielding protective layer 29, lifting
Ring 30 and upper thermal insulation layer 31, crucible lower section are equipped with graphite shaft 3 and plug 37, and graphite shaft is equipped with outer cone mouth, and plug is equipped with interior
Cone mouth, graphite shaft and plug plug connection.The utility model devises liftable heat shielding, and height lifting is adjusted, and meets big
The material different temperatures gradient demand of size crucible；Bottom heater is increased, the silicon material of crucible bottom is enable sufficiently to be heated
Change completely, makes entire thermal field homogeneous heating.Graphite shaft is changed to cone mouth connection by original thread connecting mode, solves in room temperature
With the thread biting locking phenomenon under high temperature repeated action, the outer cone mouth of graphite shaft is designed with cone mouth in plug, is connected firmly, automatic centering
Facilitate installation.
Side heater is also connected with side heater electrode, and side heater electrode connects a lid 7 by electrode nut 6, and side adds
Hot device electrode is fixed on the lower end of furnace chamber.Furnace chamber further includes a bottom plate 10, and side heater electrode passes through bottom plate, side heating
Successively be arranged with quartz sleeve 23 and electrode sleeve 22 on device electrode, quartz sleeve and electrode sleeve be located at bottom plate and side heater electrode 5 it
Between.To play a protective role to motor.Graphite shaft passes through bottom plate, is arranged with sleeve 20 in graphite shaft, sleeve is located at graphite shaft
Between bottom plate.The utility model protects graphite shaft by sleeve.The top of sleeve is equipped with a socket cover 21.To rise
To position-limiting action.The inner wall of furnace chamber is equipped with top inside holding screen 13 and lower part inside holding screen 11.To play insulation effect.Outside
Upper heat-preservation cylinder 15 is equipped with above heat shielding.Insulation effect can be played.Lifting ring includes middle ring, lower ring and reflection protection ring 16.This
Utility model can play buffer function, avoid damaging by middle ring and the fixed component for needing to be promoted of lower ring, reflection protection ring
Thermal field component.Lower heater connects heater electrode 9.It is lower heater energy supply by lower heater electrode.Lower side every
The lower section of thermosphere is equipped with bottom heat-insulated 25.To play heat-insulated effect.The top of upper side thermal insulation layer is equipped with upper side insulating layer
32.To play insulation effect.Sealing ring 33 is equipped with above upper side insulating layer.To play sealing function.The bottom of furnace chamber
Portion is equipped with vent cap 24, and the inside of vent cap is equipped with exhaust pipe adjusting sleeve 34.Exhaust size is adjusted by adjusting set.Middle ring
Including upper middle ring 14 and lower middle ring 12, lower ring includes ring 35 and beneath ring 19 under side.Crucible is C/C crucible, crucible and graphite shaft
Between be equipped with a crucible pallet 2.
Above are merely preferred embodiments of the utility model, it is noted that for the ordinary skill people of the art
For member, without departing from the principle of this utility model, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (6)
1. semiconductor monocrystal furnace large scale thermal field, it is characterised in that: including a furnace chamber, a crucible is equipped in the furnace chamber,
The outer wall of the crucible is equipped with side heater, is additionally provided with lower heater below the crucible, the furnace chamber further includes side
Thermal insulation layer, the side thermal insulation layer are respectively that outer side thermal insulation layer, private side thermal insulation layer, upper side thermal insulation layer and lower side are heat-insulated
Layer, the lower side thermal insulation layer are connect with the outer side thermal insulation layer, the upper side thermal insulation layer and the private side thermal insulation layer
Connection；
Heat shielding elevating mechanism is equipped with above the crucible, the heat shielding elevating mechanism includes outer heat shielding, internal heat shield, heat shielding protection
Layer, lifting ring and upper thermal insulation layer,
Graphite shaft and plug are equipped with below the crucible, the graphite shaft is equipped with outer cone mouth, and the plug is equipped with interior cone mouth,
The graphite shaft and the plug plug connection.
2. semiconductor monocrystal furnace large scale thermal field according to claim 1, it is characterised in that: the side heater is also connected with
Side heater electrode, the side heater electrode connect a lid by electrode nut, and the side heater electrode is fixed on institute
State the lower end of furnace chamber.
3. semiconductor monocrystal furnace large scale thermal field according to claim 2, it is characterised in that: the furnace chamber further includes one
Bottom plate, the side heater electrode pass through the bottom plate, are successively arranged with quartz sleeve and electrode sleeve on the side heater electrode,
The quartz sleeve and the electrode sleeve are between bottom plate and side heater electrode.
4. semiconductor monocrystal furnace large scale thermal field according to claim 3, it is characterised in that: the graphite shaft passes through described
Bottom plate is arranged with sleeve in the graphite shaft, and the sleeve is between the graphite shaft and the bottom plate.
5. semiconductor monocrystal furnace large scale thermal field according to claim 4, it is characterised in that: the top of the sleeve is equipped with
One socket cover.
6. semiconductor monocrystal furnace large scale thermal field according to claim 1, it is characterised in that: the bottom of the furnace chamber is set
There is vent cap, the inside of the vent cap is equipped with exhaust pipe adjusting sleeve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820981578.3U CN208869724U (en) | 2018-06-25 | 2018-06-25 | Semiconductor monocrystal furnace large scale thermal field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820981578.3U CN208869724U (en) | 2018-06-25 | 2018-06-25 | Semiconductor monocrystal furnace large scale thermal field |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208869724U true CN208869724U (en) | 2019-05-17 |
Family
ID=66462529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820981578.3U Active CN208869724U (en) | 2018-06-25 | 2018-06-25 | Semiconductor monocrystal furnace large scale thermal field |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208869724U (en) |
-
2018
- 2018-06-25 CN CN201820981578.3U patent/CN208869724U/en active Active
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