CN208865479U - A kind of preparation facilities of copper wiring stripper - Google Patents
A kind of preparation facilities of copper wiring stripper Download PDFInfo
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- CN208865479U CN208865479U CN201821066877.0U CN201821066877U CN208865479U CN 208865479 U CN208865479 U CN 208865479U CN 201821066877 U CN201821066877 U CN 201821066877U CN 208865479 U CN208865479 U CN 208865479U
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- tank
- blending tank
- liquid feeding
- feeding disc
- copper wiring
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Abstract
The utility model discloses a kind of preparation facilities of copper wiring stripper, including alcohol ether storage tank, organic solvent storage tank, corrosion inhibiter storage tank, surfactant storage tank, deionized water storage tank and sequentially connected blending tank, regulating valve, filter device and the finished pot connecting respectively with blending tank import；Deflector is additionally provided in the blending tank, the deflector include upper end liquid feeding disc corresponding with blending tank entrance location in blending tank and the diversion pipe that is connected with liquid feeding disc bottom surface, the mixing top tank structure is equipped with annular protrusion, the liquid feeding disc is placed on annular protrusion, and the basal diameter of the liquid feeding disc is greater than the internal diameter between annular protrusion.Deflector is equipped in the utility model blending tank to flow on liquid feeding disc after material liquid enters in tank body, raw material liq flows out diversion pipe under gravity, it is sufficiently mixed each component raw material, the time required to shortening production, production efficiency has raising by a relatively large margin.
Description
Technical field
The utility model relates to the preparation technical fields of stripper, and in particular to a kind of preparation dress of copper wiring stripper
It sets, is used for TFT industry.
Background technique
When IC chip continues to develop toward light, thin, short, small and high density direction, to the tolerance of defect also phase
To reduction, with the raising of integrated circuit device closeness, the area of unit chip is also smaller and smaller, will not influence yield originally
Defect but become the fatal killer of yield.In the manufacturing processes such as liquid crystal display panel, need to irradiate by multiple graphic mask
The processes such as exposure and etching form the microcircuit of multi-layer precise in Silicon Wafer or glass substrate, are formed after microcircuit, further
Use dedicated stripper that will be coated on microcircuit protection zone to remove as the photoresist of exposure mask.Stripping process is will to remove
To the product surface after etching, stripper can not will not dissolved by the photosensitive photoresist that ultraviolet light irradiates liquid spray, left and protected
Part, to form route.Tangible pollution present on all wafers with it is imperfect, be referred to as defect, generally comprise wafer
On physical foreign matter, chemically stain and wafer itself defect.Physical foreign matter refers generally to the mechanical micronic dust fallen, technique
The photoresist that left behind, abnormal reaction product etc.；It chemically stains, refers generally to residual chemicals, organic solvent
With photoresist residual etc..Therefore, in order to avoid wafer generates physics or chemical imperfection, need to prepare the stripping of higher quality higher purity
Chaotropic.
Utility model content
The purpose of this utility model is that overcome defect existing in the prior art, provide that a kind of impurity is less, and purity is more
Height, mixing more evenly, remove the preparation facilities more entirely without remaining copper wiring stripper.
To achieve the above object, the technical solution of the utility model is to design a kind of preparation dress of copper wiring stripper
Set, including connect respectively with blending tank import alcohol ether storage tank, organic solvent storage tank, corrosion inhibiter storage tank, surfactant storage tank,
Deionized water storage tank and sequentially connected blending tank, regulating valve, filter device and finished pot；Water conservancy diversion is additionally provided in the blending tank
Mechanism, the deflector include in blending tank upper end liquid feeding disc corresponding with blending tank entrance location and with liquid feeding disc bottom surface
The diversion pipe being connected, the mixing top tank structure are equipped with annular protrusion, and the liquid feeding disc is placed on annular protrusion, the feed liquor
The basal diameter of disk is greater than the internal diameter between annular protrusion.
Preferred technical solution is that there are two the imports of the blending tank, is respectively arranged on using blending tank axis as symmetry axis
The left and right sides at the top of blending tank.Raw material is added to liquid feeding disc from the import of left and right two, liquid feeding speed is fast, saves working hour.
Further preferred technical solution is that the diversion pipe is at least arranged three, and at least three diversion pipe is with mixed
The axis for closing tank is center line circumferentially shape, is distributed in blending tank vertically.During mixing liquid feeding, each component raw material is in gravity
Under the action of by liquid feeding disc flow out diversion pipe, with blending tank in other components be sufficiently mixed, improve the mixing of each raw material
The uniformity.
Further preferred technical solution is that several apertures are uniformly provided on the tube wall of the diversion pipe.
Further preferred technical solution is that blender is additionally provided in the blending tank, and the stirring rod of the blender is set
It is placed on the axis of blending tank, the stirring rod passes perpendicularly through liquid feeding disc bottom surface, and is fixedly connected with liquid feeding disc bottom surface.Stirring rod
It is fixedly connected with liquid feeding disc plane perpendicular, when mixed liquor needs to stir in tank body, starts blender, the stirring rod band of blender
Dynamic liquid feeding disc rotates together, and the agitating auger paddle of diversion pipe and blender can simultaneously be stirred in-tank mixing liquid, makes
In-tank mixing liquid mixes more evenly.
Further preferred technical solution is that the agitating auger paddle position of the stirring rod bottom is slightly below the bottom of diversion pipe
Portion.
Further preferred technical solution is that the liquid feeding disc is flat disk.
Further preferred technical solution is that the blending tank and finished product top tank structure are polytetrafluoroethylene ethylene layer.
Advantages and beneficial effects of the utility model lie in that the preparation facilities of the utility model copper wiring stripper, is mixed
It closes and is equipped with deflector in tank, two sides are set there are two import at the top of blending tank, and material liquid can enter in tank body from both direction
Afterwards, it flow on liquid feeding disc, the circumferentially vertical distribution in blending tank of material liquid diversion pipe, is uniformly provided on water conservancy diversion tube wall respectively
Several pores, make raw material liq flow out diversion pipe under gravity, are stirred by blender, keep each component raw material abundant
Mixing, the time required to shortening production, the raw material mixed dissolution mixing time of the original 3-4h in the production cycle foreshortens to half
The water conservancy diversion time of or so hour, production efficiency have raising by a relatively large margin.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model copper wiring stripper preparation facilities；
Fig. 2 is the structural schematic diagram of the utility model blending tank.
In figure: 1, alcohol ether storage tank；2, organic solvent storage tank；3, corrosion inhibiter storage tank；4, surfactant storage tank；5, deionization
Water storage tank；6, blending tank；7, regulating valve；8, filter device；9, finished pot；10, liquid feeding disc；11, diversion pipe；12, blender；
13, annular protrusion.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is further described.Implement below
Example is only used for clearly illustrating the technical solution of the utility model, and cannot be used as a limitation the protection model of limitation the utility model
It encloses.
As shown in Figure 1, 2, a kind of preparation facilities of copper wiring stripper, including what is connect respectively with 6 import of blending tank
Alcohol ether storage tank 1, organic solvent storage tank 2, corrosion inhibiter storage tank 3, surfactant storage tank 4, deionized water storage tank 5 and sequentially connected
Blending tank 6, regulating valve 7, filter device 8 and finished pot 9；Deflector, the deflector packet are additionally provided in the blending tank 6
The diversion pipe for including the liquid feeding disc 10 corresponding with blending tank entrance location of upper end in blending tank and being connected with 10 bottom surface of liquid feeding disc
11,6 inner wall of blending tank is equipped with annular protrusion 13, and the liquid feeding disc 10 is placed on annular protrusion 13, the liquid feeding disc 10
Basal diameter be greater than annular protrusion 13 between internal diameter.
Blender 12 is additionally provided in the blending tank 6, the stirring rod of the blender 12 is set to the axis of blending tank 6
On, the stirring rod passes perpendicularly through 10 bottom surface of liquid feeding disc, and is fixedly connected with 10 bottom surface of liquid feeding disc.
The liquid feeding disc 10 is flat disk.
The preparation of the copper wiring stripper of the utility model, includes the following steps:
Step 1: first injecting deionized water in blending tank, then alcohol ether, You Jirong is added according to the proportion into blending tank
Blending tank can be added in agent, corrosion inhibiter and surfactant, above four kinds of components one by one, can also be added in blending tank simultaneously two-by-two,
It is uniformly mixed；
It is filtered step 2: mixture in blending tank is passed through filter, obtains the copper wiring stripper finished product.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
It also should be regarded as the protection scope of the utility model into retouching.
Claims (8)
1. a kind of preparation facilities of copper wiring stripper, including alcohol ether storage tank, the You Jirong being connect respectively with blending tank import
Agent storage tank, corrosion inhibiter storage tank, surfactant storage tank, deionized water storage tank and sequentially connected blending tank, regulating valve, filtering dress
It sets and finished pot；It is characterized in that, being additionally provided with deflector in the blending tank, the deflector includes upper end in blending tank
Liquid feeding disc corresponding with blending tank entrance location and the diversion pipe being connected with liquid feeding disc bottom surface, the mixing top tank structure are equipped with
Annular protrusion, the liquid feeding disc are placed on annular protrusion, and the basal diameter of the liquid feeding disc is greater than interior between annular protrusion
Diameter.
2. the preparation facilities of copper wiring stripper according to claim 1, which is characterized in that the import of the blending tank
There are two, the left and right sides at the top of blending tank is respectively arranged on using blending tank axis as symmetry axis.
3. the preparation facilities of copper wiring stripper according to claim 2, which is characterized in that the diversion pipe is at least set
Set three, at least three diversion pipe is distributed in blending tank vertically using the axis of blending tank as center line circumferentially shape.
4. the preparation facilities of copper wiring stripper according to claim 3, which is characterized in that the tube wall of the diversion pipe
On be uniformly provided with several apertures.
5. the preparation facilities of copper wiring stripper according to claim 4, which is characterized in that also set in the blending tank
There is blender, the stirring rod of the blender is set on the axis of blending tank, and the stirring rod passes perpendicularly through liquid feeding disc bottom surface,
And it is fixedly connected with liquid feeding disc bottom surface.
6. the preparation facilities of copper wiring stripper according to claim 5, which is characterized in that the stirring rod bottom
Agitating auger paddle position is slightly below the bottom of diversion pipe.
7. the preparation facilities of copper wiring stripper according to claim 6, which is characterized in that the liquid feeding disc is flat
The disk of formula.
8. the preparation facilities of copper wiring stripper according to claim 1-7, which is characterized in that the mixing
Tank and finished product top tank structure are polytetrafluoroethylene ethylene layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821066877.0U CN208865479U (en) | 2018-07-06 | 2018-07-06 | A kind of preparation facilities of copper wiring stripper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821066877.0U CN208865479U (en) | 2018-07-06 | 2018-07-06 | A kind of preparation facilities of copper wiring stripper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208865479U true CN208865479U (en) | 2019-05-17 |
Family
ID=66462758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821066877.0U Active CN208865479U (en) | 2018-07-06 | 2018-07-06 | A kind of preparation facilities of copper wiring stripper |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208865479U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112058128A (en) * | 2020-08-25 | 2020-12-11 | 福建天甫电子材料有限公司 | Preparation device and preparation process for electronic-grade copper etching solution |
| CN113563888A (en) * | 2021-08-24 | 2021-10-29 | 信丰正天伟电子科技有限公司 | Stripping liquid and preparation method thereof |
-
2018
- 2018-07-06 CN CN201821066877.0U patent/CN208865479U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112058128A (en) * | 2020-08-25 | 2020-12-11 | 福建天甫电子材料有限公司 | Preparation device and preparation process for electronic-grade copper etching solution |
| CN113563888A (en) * | 2021-08-24 | 2021-10-29 | 信丰正天伟电子科技有限公司 | Stripping liquid and preparation method thereof |
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