CN208848872U - A kind of small spacing quartz boat - Google Patents
A kind of small spacing quartz boat Download PDFInfo
- Publication number
- CN208848872U CN208848872U CN201821446270.5U CN201821446270U CN208848872U CN 208848872 U CN208848872 U CN 208848872U CN 201821446270 U CN201821446270 U CN 201821446270U CN 208848872 U CN208848872 U CN 208848872U
- Authority
- CN
- China
- Prior art keywords
- quartz boat
- fluting
- boat
- spacing
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Glass Melting And Manufacturing (AREA)
Abstract
The utility model discloses a kind of small spacing quartz boats, including side plate, the side of top inside described two side plates is equipped with upper support bar, inside on the upper support bar is equipped with quartz boat fluting, fluting spacing is installed below the middle position of described two upper quartz boat flutings, slot end chamfer is installed, the middle position of the top on the lower support bar is equipped with lower quartz boat fluting above the middle position of described two upper quartz boat flutings.The utility model provides a kind of high production capacity quartz boat of 2mm spacing, there are existing equipment transform measures for present most of producers, in the process, the raising of production capacity cannot be realized by lengthening flat-temperature zone, so reducing the spacing of quartz boat just at unique and optimal solution.The utility model quartz boat is at low cost for production capacity for improving, quick, and is easy to cooperate with existing equipment, is easy to be transformed.
Description
Technical field
The utility model relates to quartz boat technical field, specifically a kind of small spacing quartz boat.
Background technique
Quartz boat also known as quartz glass, quartz glass are to contain silica species, such as crystal, silica.Four silica are
Raw material high temperature melting forms.Its dioxide-containing silica is more much higher than simple glass, and general quartz glass dioxide-containing silica exists
99.999%.Quartz glass has excellent optical property, and not only visible light transmittance is especially good, but also ultraviolet-transmitting, infrared
Line.Quartz glass is good acid resisting material, and in addition to the hot phosphoric acid of hydrofluoric acid and 300 degree or more, at high temperature, it can resistant to sulfur
Acid, nitric acid, hydrochloric acid, chloroazotic acid, neutral salt, carbon and sulphur etc. corrode, and chemical stability is equivalent to 30 times of acid-proof ceramics, quite
In 150 times of nichrome and ceramics, its high temperature resistant, resistance to thermal shock, thermal expansion coefficient is especially small.Quartz glass electric property pole
Good, at normal temperature, its resistance is equivalent to 10 times of simple glass, very small to the dielectric absorption of whole frequencies, insulation pressure resistance
Intensity is big.Quartz glass also has the property of resistance to cosmic radiation and impermeable nuclear fission product.The quartz boat of current stage
There are many shortcomings, such as: it is inconvenient, production capacity is low, footprint is big.
Utility model content
The purpose of this utility model is to provide a kind of small spacing quartz boats, to solve inconvenient, production in the prior art
The problem that energy is low, footprint is big.
To achieve the above object, the utility model provides the following technical solutions: a kind of small spacing quartz boat, including side plate,
The side of top inside described two side plates is equipped with upper support bar, and the inside on the upper support bar is equipped with quartz boat
It slots, fluting spacing, described two upper quartz boats flutings is installed below the middle position of described two upper quartz boats flutings
Middle position above slot end chamfer is installed, the side of the lower section inside described two side plates is equipped with lower support bar, institute
The middle position for stating the top on lower support bar is equipped with lower quartz boat fluting, is equipped with boat above described two side plates and chooses
Bar, the side below described two side plates are equipped with fixed footing.
Preferably, the two sides in the middle position in the side plate are set as engraved structure, and two hollow-out layers settings is big
It is small identical.
Preferably, the upper quartz boat fluting is identical as the size of lower quartz boat fluting setting, and upper quartz boat fluting and
The direction of lower quartz boat fluting is different.
Preferably, the spacing of the fluting spacing is set as 2mm, and slot end chamfer is set as 45 °.
Preferably, the sideline total height of the upper quartz boat fluting and lower quartz boat fluting is set as 3mm, and upper quartz boat
The distance between the boat slot of fluting and lower quartz boat fluting becomes 0.34mm.
Compared with prior art, the utility model has the beneficial effects that the utility model provides a kind of 2mm spacing high yield
Energy quartz boat, there are existing equipment transform measures for present most of producers, and in the process, the raising of production capacity cannot pass through lengthening
Flat-temperature zone is realized, so reducing the spacing of quartz boat just at unique and optimal solution.The utility model quartz boat
It is at low cost for production capacity for improving, it is quick, and be easy to cooperate with existing equipment, it is easy to be transformed, when increasing yield,
The size that simple reduction separation can destroy boat slot will cause can not processing for quartz boat, institute because of the intersection between boat slot
The chamfer angle of boat slot is first had changed with the first step, i.e., 60 ° of original chamferings are changed to 45 °, and 0.2mm is cut into fluting sideline,
The load-bearing capacity of support rod will not be damaged in this way, and the distance between boat slot becomes 0.34mm, in this way adding for quartz boat
Any influence will not be generated for work, and because this approach avoid cracks, can also be increased in quartz boat use process
Bearing capacity.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the side view of the utility model.
Fig. 3 is the main view of the utility model.
Fig. 4 is the structural schematic diagram of quartz boat fluting on the utility model.
In figure: quartz boat under the upper quartz boat fluting of 1- boat rod, 2- side plate, 3- lower support bar, 4- upper support bar, 5-, 6-
The fixed footing of fluting, 7-, 8- fluting spacing, 9- slot end chamfer.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Please refer to Fig. 1~4, in the utility model embodiment, a kind of small spacing quartz boat, including side plate 2, in side plate 2
The two sides in middle position are set as engraved structure, and the size of two hollow-out layers setting is identical, the top inside two side plates 2
Side is equipped with upper support bar 4, and upper support bar 4 is used to install quartz boat fluting 5, and the inside on upper support bar 4 is equipped with
Upper quartz boat fluting 5, upper quartz boat fluting 5 are used to fixed wafer, upper quartz boat fluting 5 and 6 setting of lower quartz boat fluting
Size is identical, and upper quartz boat fluting 5 is different from the direction of lower quartz boat fluting 6, the middle position of two upper quartz boat flutings 5
Lower section fluting spacing 8 is installed, fluting spacing 8 is used to be spaced two upper quartz boats flutings 5, and the spacing of fluting spacing 8 is set
It is set to 2mm, and slot end chamfer 9 is set as 45 °, is equipped with slot end chamfer above the middle position of two upper quartz boat flutings 5
9, slot end chamfer 9 is used to facilitate processed wafer, and the side of the lower section inside two side plates 2 is equipped with lower support bar 3, lower support
Bar 3 is used to fixed wafer bottom, and the middle position of the top on lower support bar 3 is equipped with lower quartz boat fluting 6, lower quartz boat
Fluting 6 is used to buckle chip, and the sideline total height of upper quartz boat fluting 5 and lower quartz boat fluting 6 is set as 3mm, and upper stone
Ying Zhou fluting 5 and the distance between the boat slot of lower quartz boat fluting 6 become 0.34mm, and the top of two side plates 2 is equipped with boat and chooses
Bar 1, boat rod 1 are used to pick and place quartz boat, and the side of two 2 lower sections of side plate is equipped with fixed footing 7.
The working principle of the utility model is: the equipment is when in use, upper support bar 4 and lower support bar are placed the wafer at
3 inside, the inside for the fluting spacing 8 for inlaying chip between supreme quartz boat fluting 5 and lower quartz boat fluting 6, under
The bottom of chip is supported and is fixed by support rod 3, and man-hour manually hand-held takes in boat specific purpose tool insertion boat rod 1 and picks and places quartz boat i.e.
It can.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
Claims (5)
1. a kind of small spacing quartz boat, including side plate (2), it is characterised in that: the side of the internal top of described two side plates (2)
It is equipped with upper support bar (4), the inside on the upper support bar (4) is equipped with quartz boat fluting (5), described two upper quartz
Fluting spacing (8), the middle position of described two upper quartz boat flutings (5) are installed below the middle position of boat fluting (5)
Top be equipped with slot end chamfer (9), the side of the internal lower section of described two side plates (2) is equipped with lower support bar (3), described
The middle position of top on lower support bar (3) is equipped with lower quartz boat fluting (6), the top installation of described two side plates (2)
Have boat rod (1), the side below described two side plates (2) is equipped with fixed footing (7).
2. a kind of small spacing quartz boat according to claim 1, it is characterised in that: the middle position in the side plate (2)
Two sides be set as engraved structure, and the size of two hollow-out layers setting is identical.
3. a kind of small spacing quartz boat according to claim 1, it is characterised in that: the upper quartz boat fluting (5) is under
Quartz boat slot (6) setting size it is identical, and upper quartz boat fluting (5) and lower the quartz boat direction of (6) of slotting are different.
4. a kind of small spacing quartz boat according to claim 1, it is characterised in that: the spacing of fluting spacing (8) is set
It is set to 2mm, and slot end chamfer (9) is set as 45 °.
5. a kind of small spacing quartz boat according to claim 1, it is characterised in that: the upper quartz boat fluting (5) is under
The sideline total height of quartz boat fluting (6) is set as 3mm, and the boat slot of upper quartz boat fluting (5) and lower quartz boat fluting (6) it
Between distance become 0.34mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821446270.5U CN208848872U (en) | 2018-09-05 | 2018-09-05 | A kind of small spacing quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821446270.5U CN208848872U (en) | 2018-09-05 | 2018-09-05 | A kind of small spacing quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208848872U true CN208848872U (en) | 2019-05-10 |
Family
ID=66371529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821446270.5U Active CN208848872U (en) | 2018-09-05 | 2018-09-05 | A kind of small spacing quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208848872U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116393845A (en) * | 2023-06-08 | 2023-07-07 | 山东华美新材料科技股份有限公司 | Silicon carbide ceramic wafer boat cutting equipment |
-
2018
- 2018-09-05 CN CN201821446270.5U patent/CN208848872U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116393845A (en) * | 2023-06-08 | 2023-07-07 | 山东华美新材料科技股份有限公司 | Silicon carbide ceramic wafer boat cutting equipment |
| CN116393845B (en) * | 2023-06-08 | 2023-08-15 | 山东华美新材料科技股份有限公司 | Silicon carbide ceramic wafer boat cutting equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| NO921849D0 (en) | SILICO SOLAR, PROCEDURE FOR MANUFACTURING SILICO SOLAR AND USE OF IT | |
| CN208848872U (en) | A kind of small spacing quartz boat | |
| CN203277409U (en) | Triangular solar cell | |
| CN104230172A (en) | Method for Processing Surface of Light-Transmitting Glass and Light-Transmitting Glass Processed by said Method | |
| CN110981416A (en) | Windproof insulator | |
| CN103816973A (en) | Method for contactlessly breaking polycrystalline silicon | |
| CN202543391U (en) | Polysilicon ingot furnace | |
| CN104402030B (en) | A kind of method of sodium aluminum tetrafluoride synthetic cryolite | |
| CN207489881U (en) | A kind of photovoltaic glass with silicon dioxide film | |
| CN103872157B (en) | Monocrystal silicon cuts sheet and uses the solar battery sheet of this cutting sheet | |
| CN207732683U (en) | A kind of bracket component for installation photovoltaic component | |
| CN208668652U (en) | A kind of connection structure of load bearing heat preserving wallboard | |
| CN207883412U (en) | A kind of porcelain insulator that anti-day and night temperature is big | |
| CN208307313U (en) | A kind of novel glass storage bracket | |
| CN202809001U (en) | Square quartz crucible | |
| CN208202411U (en) | A kind of hexagon brick of wall outer wall | |
| CN214874959U (en) | Glass transport vehicle | |
| CN205892122U (en) | Conveying mechanism is placed to glass board | |
| CN209169159U (en) | A kind of monocrystalline silicon honeycomb back contacts photovoltaic module | |
| CN103481594A (en) | Toughened sandwich glass | |
| CN216685621U (en) | Anti-toppling storage rack for glass processing | |
| CN108357712A (en) | Device is guided in the export of quartz crystal shell press seal into | |
| CN208401482U (en) | A kind of casting bus with impact work energy | |
| CN108674983A (en) | A kind of Liftable type plate glass holder | |
| CN216858425U (en) | Double-ring fixing device in steel pipe cutting process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210609 Address after: Room 402, building 3, 3255 Sixian Road, Songjiang District, Shanghai Patentee after: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Address before: 214000 rooms 101 and 201, building 12 (B3), Wuxi Zhongguancun Software Park, Xinwu District, Wuxi City, Jiangsu Province Patentee before: WUXI HUAYUAN JIANDIAN TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A stone boat with small spacing Effective date of registration: 20230209 Granted publication date: 20190510 Pledgee: Agricultural Bank of China Limited Shanghai Songjiang Sub-branch Pledgor: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Registration number: Y2023310000023 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |