CN208835018U - A kind of ICP equipment residual gas extractor fan - Google Patents
A kind of ICP equipment residual gas extractor fan Download PDFInfo
- Publication number
- CN208835018U CN208835018U CN201821770626.0U CN201821770626U CN208835018U CN 208835018 U CN208835018 U CN 208835018U CN 201821770626 U CN201821770626 U CN 201821770626U CN 208835018 U CN208835018 U CN 208835018U
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- China
- Prior art keywords
- air hose
- blower
- residual gas
- horizontal
- horizontal air
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of ICP equipment residual gas extractor fans, including founding air hose, horizontal air hose and blower, the vertical air hose lower end is connect with the gas outlet of ICP equipment, the upper end is connected in the horizontal air hose lower wall and inner cavity is connected to, the assembling starts the blower on the air inlet of the horizontal air hose, can will enter residual gas in the horizontal tube and take out of from the air outlet of the horizontal air hose.The problem of sour gas is corrosive to blower, reduces service life of fan when the utility model solves blower work in the prior art.
Description
Technical field
The utility model relates to produce the Dry etching equipment field of pss, and in particular to a kind of ICP equipment residual gas exhausting dress
It sets.
Technical background
PSS is exactly that exposure mask is carved figure with the photoetching process of standard in plain film Sapphire Substrate, etches skill using ICP
Art etches sapphire, and removes exposure mask, makes to generate many figures in plain film Sapphire Substrate, the luminous effect of LED is improved with this
Rate.
ICP equipment dry etch technique is in vacuum-tight PM Chamber, by electrode by BCL3 gas electricity
From the ion bombardment sapphire surface ionized out generates the figure of needs with this.In this way, with the progress of production, PM
BCL3 gas residue, necessary corrective maintenance or troubleshooting, when opening PM Chamber, BCL3 gas are just had in Chamber
Body overflows, and generates injury to operator.In order to reduce injury of the residual gas spilling to human body, currently, common practices is to pass through factory
The sour exhaust pipe and contact blower of business, can take a small amount of residual gas away.But sour gas is corrosive to blower, subtracts
Few service life of fan.
Utility model content
In view of above-mentioned deficiencies of the prior art, the utility model provides a kind of ICP equipment residual gas extractor fan, to solve
The problem of sour gas is corrosive to blower in the prior art, reduces service life of fan.
To solve the above problems, the utility model adopts the following technical scheme: a kind of ICP equipment residual gas extractor fan, packet
Vertical air hose, horizontal air hose and blower are included, the vertical air hose lower end is connect with the gas outlet of ICP equipment, and the upper end is connected to described
The connection of in horizontal air hose lower wall and inner cavity, the assembling start the blower on the air inlet of the horizontal air hose,
It can will enter residual gas in the horizontal tube and take out of from the air outlet of the horizontal air hose.
Further, the blower blowing end and the air inlet of the horizontal air hose are sealedly and fixedly connected.
Further, the air inlet of the blower blowing end and the horizontal air hose is connected by ring flange and bolt seal
It connects.
Further, the vertical air hose is connected to end with the horizontal air hose in the horizontal air hose air outlet and the blower
Between, and it is close to the blower.
Further, the vertical air hose is hose, and the horizontal air hose is stereoplasm tube.
Compared with prior art, the utility model has the following beneficial effects:
By the blowing end of blower being fixedly connected with the air inlet of horizontal air hose, contacts blower not by external fan
Sour gas also can blow out sour gas in vertical air hose and horizontal air hose from horizontal air hose air outlet, to reduce acidity
Injury of the gas to blower, extends service life；It is easy to operate there are also the utility model structure is simple, efficiency is improved, is dropped
Low cost.
Detailed description of the invention
Attached drawing is only used for showing the purpose of specific embodiment, and is not considered as limitations of the present invention.
Fig. 1 is the utility model structure chart.
In figure: 1- founds air hose, the horizontal air hose of 2-, 201- air inlet, 202- air outlet, 3- blower.
Specific embodiment
Further explanation is made to the utility model with reference to the accompanying drawing, the utility model embodiment includes but is not limited to
The following example.
As shown in Figure 1, the utility model provides a kind of ICP equipment residual gas extractor fan, including vertical air hose 1, horizontal air hose 2
With blower 3, vertical 1 lower end of air hose is connect with the gas outlet of the vacuum-tight PM Chamber of ICP equipment, stands the upper end of air hose 1
It being connect with the lower wall of horizontal air hose 2 and inner cavity is connected to, the sealing of blower 3 is fixedly mounted on the air inlet 201 of horizontal air hose 2,
Ring flange is set on circumferential surface by being separately positioned on air inlet 201 and blower blowing end, and fixation is bolted, may be used also
Sealing ring is arranged in contact surface again, increases leakproofness.Vertical 1 link position of air hose be located at horizontal 2 air outlet 202 of air hose and blower 3 it
Between, and close to the blowing of blower 3 end.It, can be by residual gas in vertical air hose 1 and horizontal air hose 2 from horizontal air hose when blower 3 starts
2 air outlet 202 is taken out of.
PM Chamber in Fig. 1 is the cavity that equipment ICP etching process carries out, this cavity is vacuum tightness, founds air hose 1
It is connected thereto, for convenience of mobile, the vertical selection of air hose 1 hose.But horizontal air hose 2 will select stereoplasm tube.
Working principle: in the closed intracavitary etching process of PM Chamber, in caused by gas cavity pressure,
Under the action of the stack effect and blower 3 of vertical air hose 1, residual gas enters in horizontal air hose 2 and is carried over horizontal air hose in vertical air hose 1
2 air outlet 202 realizes that blower 3 does not contact sour gas, can be realized sour gas discharge.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in
Change or replacement, should be covered within the scope of the utility model.
Claims (5)
1. a kind of ICP equipment residual gas extractor fan, it is characterised in that: including founding air hose, horizontal air hose and blower, the vertical air hose
Lower end is connect with the gas outlet of ICP equipment, and the upper end is connected in the horizontal air hose lower wall and inner cavity is connected to, the blower
It is mounted on the air inlet of the horizontal air hose, starts the blower, can will enter in the horizontal tube residual gas from described
The air outlet of horizontal air hose is taken out of.
2. a kind of ICP equipment residual gas extractor fan according to claim 1, it is characterised in that: blower blowing end with
The air inlet of the horizontal air hose is sealedly and fixedly connected.
3. a kind of ICP equipment residual gas extractor fan according to claim 2, it is characterised in that: blower blowing end and
The air inlet of the horizontal air hose is connected by ring flange with bolt seal.
4. a kind of ICP equipment residual gas extractor fan according to claim 1, it is characterised in that: the vertical air hose with it is described
Horizontal air hose connection end is between the horizontal air hose air outlet and the blower, and it is close to the blower.
5. according to claim 1 to any a kind of ICP equipment residual gas extractor fan in 4, it is characterised in that: the vertical wind
Pipe is hose, and the horizontal air hose is stereoplasm tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821770626.0U CN208835018U (en) | 2018-10-30 | 2018-10-30 | A kind of ICP equipment residual gas extractor fan |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821770626.0U CN208835018U (en) | 2018-10-30 | 2018-10-30 | A kind of ICP equipment residual gas extractor fan |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208835018U true CN208835018U (en) | 2019-05-07 |
Family
ID=66319726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821770626.0U Active CN208835018U (en) | 2018-10-30 | 2018-10-30 | A kind of ICP equipment residual gas extractor fan |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208835018U (en) |
-
2018
- 2018-10-30 CN CN201821770626.0U patent/CN208835018U/en active Active
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| GR01 | Patent grant |