CN208829755U - A kind of sputter for automatically switching to prevent plate - Google Patents
A kind of sputter for automatically switching to prevent plate Download PDFInfo
- Publication number
- CN208829755U CN208829755U CN201821229013.6U CN201821229013U CN208829755U CN 208829755 U CN208829755 U CN 208829755U CN 201821229013 U CN201821229013 U CN 201821229013U CN 208829755 U CN208829755 U CN 208829755U
- Authority
- CN
- China
- Prior art keywords
- plate
- prevent
- drive mechanism
- bending part
- support frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a kind of sputters for automatically switching to prevent plate, include rack, are equipped with sputter source, transport platform and workbench in rack, the two sides of transport platform, which are provided with, prevents plate automatic position-changing component；Prevent that plate automatic position-changing component includes to prevent plate, support frame, rotary drive mechanism, moving drive mechanism, supporting plate and lifting driver part；Prevent that the two sides up and down of plate are provided with bending part, the bending part of two sides is symmetrical；Rotary drive mechanism drive prevents that plate rotates, and moving drive mechanism drives support frame traversing；Lifting driver part drives supporting plate lifting, cooperates the bending part of itself and downside；The middle and lower part of plate is prevented since the target sputtered is deposited on mostly, after long-time use, rotary drive mechanism can control support frame rotation transposition, make to prevent that plate more can uniformly receive target up and down, reduction prevents that plate changes the frequency of cleaning, to reduce costs, manpower is saved.
Description
Technical field
The utility model relates to a kind of sputters for automatically switching to prevent plate.
Background technique
Vacuum splashing and plating be under vacuum conditions, using physics mode by material source gasify for gaseous molecular, atom or from
Son is deposited in matrix surface by low-pressure gas or gas ions process, makes it have the technology of certain specific function film；Because splashing
During plating, sputter source meeting random direction sputtering, around other than the attachment of target substrate surface, some can be attached to
The surface at other positions, for protection other structures part avoid attachment, depositional coating, need using prevent plate carry out covered protection；
Existing to prevent that plate passes through mostly angularly disposed, or is processed into cambered surface to increase coverage area, but since the target sputtered is big
It is deposited on the middle and lower part for preventing plate more, can not be uniformly distributed in the entirety for preventing plate, so that preventing that plate needs replacing cleaning
Frequency is higher, and the period is shorter, increases cost, wastes manpower.
Utility model content
For the above technical problems, the purpose of this utility model is: propose it is a kind of automatic switchover prevent plate
Sputter.
The technical solution of the utility model is achieved in that a kind of sputter for automatically switching to prevent plate, includes
Rack, rack is interior to be equipped with sputter source, transport platform and workbench, and workbench is arranged in transport platform, and sputter source is arranged in workbench
Top, the two sides of transport platform, which are provided with, prevents plate automatic position-changing component；It is described to prevent that plate automatic position-changing component includes to prevent
Plate, support frame, rotary drive mechanism, moving drive mechanism, supporting plate and lifting driver part；It is described to prevent that plate is vertically arranged,
Prevent that the two sides up and down of plate are provided with bending part, the bending part of two sides is symmetrical；It is described to prevent that plate is rotatably arranged on support
On frame, support frame is slidably arranged on moving drive mechanism, and rotary drive mechanism drive prevents that plate rotates, moving drive mechanism band
Dynamic support frame is traversing；The downside for preventing plate is arranged in the supporting plate, and lifting driver part drives supporting plate lifting, makes itself and downside
Bending part cooperation.
Preferably, it is provided with lock hole on the bending part, the positioning pin with lock hole cooperation is provided on supporting plate.
Preferably, described to prevent that plate has equally distributed particle bulge-structure together with the working surface of bending part.
Preferably, the cross sectional shape of the particle bulge-structure is trapezoidal.
Due to the application of the above technical scheme, the utility model has the advantage that compared with prior art
The sputter of plate is prevented in the automatic switchover of the utility model, prevents plate automatic position-changing component by preventing plate, support
It is mutual to prevent that the two sides up and down of plate have for frame, rotary drive mechanism, moving drive mechanism, supporting plate and lifting driver part composition
Symmetrical bending structure prevents the middle and lower part of plate since the target sputtered is deposited on mostly, after long-time use, rotation
Turning driving mechanism can control support frame rotation transposition, make to prevent that plate more can uniformly receive target up and down, reduction is prevented
Plate changes the frequency of cleaning, to reduce costs, saves manpower.
Detailed description of the invention
Technical solutions of the utility model are described further with reference to the accompanying drawing:
Attached drawing 1 is the schematic diagram that the sputter of plate is prevented in a kind of automatic switchover of the utility model；
Attached drawing 2 is the schematic diagram of the particle bulge-structure of the utility model.
Specific embodiment
Illustrate the utility model with reference to the accompanying drawing.
As shown in attached drawing 1-2, it includes rack, in rack that one kind described in the utility model, which prevents that plate switches sputter mechanism,
Equipped with sputter source 1, transport platform 2 and workbench 3, workbench 3 is arranged in transport platform 2, and transport platform 2 drives the movement of workbench 3 to cut
Station is changed, the top of work at present platform 3 is arranged in sputter source 1, and the two sides of transport platform 2, which are provided with, prevents board group part.
It is described to prevent that plate automatic position-changing component includes to prevent plate 11, support frame 12, rotary drive mechanism 15, mobile driving machine
Structure 16, supporting plate 13 and lifting driver part 17；It is described to prevent that plate 11 is vertically arranged, prevent that the two sides up and down of plate 11 are provided with
Bending part 14, bending part 14 make the upper and lower inward facing surface for preventing plate 11 form folding face or arcwall face to receive target, up and down
The bending part 14 of two sides is symmetrical；Described to prevent that plate 11 is rotatably arranged on support frame 12, support frame 12 is slidably arranged in shifting
In dynamic driving mechanism 16, the drive of rotary drive mechanism 15 prevents that plate 11 rotates, and moving drive mechanism 16 drives support frame 12 traversing；
The downside for preventing plate 11 is arranged in the supporting plate 13, and lifting driver part 17 drives supporting plate 13 to go up and down, makes its bending with downside
Portion 14 cooperates, and is provided with lock hole on bending part 14, and the positioning pin with lock hole cooperation is provided on supporting plate 13.
Wherein, the rotary drive mechanism 15 can be decelerating motor, and moving drive mechanism 16 can be motor lead screw component,
Lifting driver part 17 can be cylinder；The vertical portion for preventing plate 11 has together with the working surface of bending part 14 uniformly divides
The particle bulge-structure 21 of cloth, the cross sectional shape of particle bulge-structure 21 can be set to trapezoidal.
After the middle and lower part position for preventing plate 11 covers certain target, lifting driver part 17 declines, and makes on supporting plate 13
Positioning pin be detached from bending part 14, the drive of rotary drive mechanism 15 prevents that plate 11 rotates 180 °, makes its upper and lower two sides transposition, then rise
It drops driving part 17 and rises locking, make to prevent that plate 11 can additionally increase the one action period.
When preventing that 11 entirety of plate needs dismounting and change, after lifting driver part 17 unlocks, moving drive mechanism 16 is driven
The laterally moved out body of support frame 12, is dismantled convenient for staff.
The above is only the specific application examples of the utility model, do not constitute any limit to the protection scope of the utility model
System.Any technical scheme formed by adopting equivalent transformation or equivalent replacement, all fall within the utility model rights protection scope it
It is interior.
Claims (4)
1. a kind of sputter for automatically switching to prevent plate includes rack, sputter source (1), transport platform (2) and work is equipped in rack
Platform (3), workbench (3) are arranged on transport platform (2), and sputter source (1) setting is in the top of workbench (3), and the two of transport platform (2)
Side, which is provided with, prevents plate automatic position-changing component；It is characterized by: it is described prevent plate automatic position-changing component include prevent plate (11),
Support frame (12), rotary drive mechanism (15), moving drive mechanism (16), supporting plate (13) and lifting driver part (17)；It is described
Prevent that plate (11) is vertically arranged, prevents that the two sides up and down of plate (11) are provided with bending part (14), the bending part (14) of two sides
Symmetrically；Described to prevent that plate (11) is rotatably arranged on support frame (12), support frame (12) is slidably arranged in mobile driving machine
On structure (16), rotary drive mechanism (15) drive prevents that plate (11) rotate, and moving drive mechanism (16) drives support frame (12) horizontal
It moves；In the downside for preventing plate (11), lifting driver part (17) drives supporting plate (13) lifting for the supporting plate (13) setting, make its with
The bending part (14) of downside cooperates.
2. the sputter according to claim 1 for automatically switching to prevent plate, it is characterised in that: set on the bending part (14)
It is equipped with lock hole, the positioning pin with lock hole cooperation is provided on supporting plate (13).
3. according to claim 1 automatically switch to prevent the sputter of plate, it is characterised in that: it is described prevent plate (11) together with
The working surface of bending part (14) has equally distributed particle bulge-structure (21).
4. the sputter according to claim 3 for automatically switching to prevent plate, it is characterised in that: the particle bulge-structure
(21) cross sectional shape is trapezoidal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821229013.6U CN208829755U (en) | 2018-08-01 | 2018-08-01 | A kind of sputter for automatically switching to prevent plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821229013.6U CN208829755U (en) | 2018-08-01 | 2018-08-01 | A kind of sputter for automatically switching to prevent plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208829755U true CN208829755U (en) | 2019-05-07 |
Family
ID=66307868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821229013.6U Expired - Fee Related CN208829755U (en) | 2018-08-01 | 2018-08-01 | A kind of sputter for automatically switching to prevent plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208829755U (en) |
-
2018
- 2018-08-01 CN CN201821229013.6U patent/CN208829755U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190507 Termination date: 20200801 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |