CN208818643U - One kind being based on Echo Wall thin-walled column symmetry microcavity salinity sensor - Google Patents
One kind being based on Echo Wall thin-walled column symmetry microcavity salinity sensor Download PDFInfo
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- CN208818643U CN208818643U CN201820800438.1U CN201820800438U CN208818643U CN 208818643 U CN208818643 U CN 208818643U CN 201820800438 U CN201820800438 U CN 201820800438U CN 208818643 U CN208818643 U CN 208818643U
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Abstract
The utility model discloses a kind of based on Echo Wall thin-walled column symmetry microcavity salinity sensor, the liquid concentration sensor includes: tunable wave length narrow-band light source, micro-nano fiber, thin-walled column symmetry microcavity, photodetector and oscillograph, tunable wave length narrow-band light source, micro-nano fiber, photodetector is of coupled connections by fiber fuse between each other, oscillograph is electrically connected with photodetector and tunable wave length narrow-band light source respectively, micro-nano fiber is mutually perpendicular to be coupled and excites high q-factor Whispering-gallery-mode resonance spectrum with thin-walled column symmetry microcavity, micro-nano fiber keeps antarafacial vertical with the central axes of thin-walled column symmetry microcavity.The sensor uses high symmetry, high-cleanness, high, high coupling efficiency, heightQThe thin-walled column symmetry microcavity of value has the characteristics that highly sensitive, quickly detection as sensing unit.
Description
Technical field
The utility model relates to one kind to be based on Echo Wall thin-walled column symmetry microcavity salinity sensor, can be used for sensor technology
Field.
Background technique
Accurate detection to water salinity, sea fishery and other culture fisheries, the monitoring of natural environment and improvement,
The research and prediction of oceanography and terrestrial climate, the detection of mineral products, industrial production and Military Application etc. all have very
Important meaning.
Salimity measurement method common at present includes: electrical conductivity method, index method, microwave remote sensing technique and surface plasma
Resonance method etc..Wherein electrical conductivity method needs while measuring conductivity value, temperature and depth, to derive the salt angle value of seawater；
Index method needs to demarcate salinity with corresponding refractive index to calculate seawater salinity；Microwave remote sensing technique can only be to several millimeters of seawater
Surface measures；And structure is complicated, cost is higher for Surface Plasmon Resonance measuring system.With micro-nano technology technology
Development, optical microcavity becomes a kind of important photonic device, because of its high-quality-factor, high sensitivity, interaction time
Length responds the features such as fast, simple and compact for structure, at low cost, preparation is simple, high with existing microflow control technique compatibility, in Gao Ling
There is good application prospect in sensitivity sensory field and trace measurement field.Thin-walled column symmetry microcavity sensing unit is non-to ambient enviroment
Often sensitive, when salting liquid changes, ambient refractive index accordingly changes, and WGM resonance peak drifts about, and passes through detection resonance peak
Drift value can be to the precise measurement for realizing concentration of salt solution.
Summary of the invention
The utility model for it is existing to water salinity detection technology deficiency, propose a kind of structure it is relatively simple,
Thin-walled column symmetry microcavity salinity sensor based on Whispering-gallery-mode easy to manufacture with encapsulation.
The purpose of this utility model will be realized through the following technical scheme: one kind is micro- based on Echo Wall thin-walled column symmetry
Chamber salinity sensor, including tunable wave length narrow-band light source, micro-nano fiber, thin-walled column symmetry microcavity, photodetector and oscillography
Device, the tunable wave length narrow-band light source, micro-nano fiber, photodetector are of coupled connections by fiber fuse between each other, institute
It states oscillograph to be electrically connected with photodetector and tunable wave length narrow-band light source respectively, the micro-nano fiber and thin-walled column symmetry
Microcavity is mutually perpendicular to couple and high q-factor Whispering-gallery-mode is excited to resonate, and the central axes of micro-nano fiber and thin-walled column symmetry microcavity are protected
It is vertical to hold antarafacial.
Preferably, the wavelength of the narrow-band light source is tunable.
Preferably, the micro-nano fiber is by single mode optical fiber by drawing cone machine fused biconical taper to be made.
Preferably, the thin-walled column symmetry microcavity is high symmetrical hollow cylinder shape structure.
Preferably, the thin-walled column symmetry microcavity is bored by quartz capillary drawing.
Preferably, the thin-walled column symmetry microcavity is also one to have that all -fiber is closed, jamproof liquid solution channel, point
Analysis object channel is separated with detection channels, which is passed through analyte, realizes detection in the optical path.
The advantages of technical solutions of the utility model is mainly reflected in: the utility model is using thin-walled column symmetry microcavity as biography
Feel unit and micro liquid channel, in conjunction with Whispering-gallery-mode resonance effects and microflow control technique, reinforces light field and liquid phase sample
Interaction intensity and time realize the high sensibility to liquid concentration, quickly detection.Since thin-walled column symmetry microcavity has volume
Small, high symmetry, high-cleanness, high, high coupling efficiency, its liquid concentration sensor constructed have high sensitivity, milligram ammonia, inspection
The advantages that degree of testing the speed is fast, repeatability is high, environment immunity is strong.The utility model is in industrial production, medical, natural environment
Monitoring with administer, oceanography and the research and prediction of terrestrial climate, the detection of mineral products, the side such as industrial production and Military Application
Face all has a very important significance.
Detailed description of the invention
Fig. 1 is a kind of structural profile signal based on Echo Wall thin-walled column symmetry microcavity salinity sensor of the utility model
Figure.
Fig. 2 is a kind of structural schematic diagram based on Echo Wall thin-walled column symmetry microcavity salinity sensor of the utility model.
Fig. 3 is the measurement result of the Echo Wall transmission spectrum stability at any time of the utility model salinity sensor detection.
Fig. 4 is the measurement result of the Echo Wall transmission spectrum stability at any time of the utility model salinity sensor detection.
Fig. 5 is that the Whispering-gallery-mode transmission spectrum of the utility model salinity sensor is generated with intracavitary sample Salinity change
The measurement result of wave length shift.
Fig. 6 is that the Whispering-gallery-mode transmission spectrum of the utility model salinity sensor is generated with intracavitary sample Salinity change
The measurement result of wave length shift.
Fig. 7 is the wave length shift of the salinity sensor transmission spectrum of the utility model and the relational graph of salinity altercation amount.
Specific embodiment
The purpose of this utility model, advantage and feature will carry out figure by the non-limitative illustration of preferred embodiment below
Show and explains.These embodiments are only the prominent examples using technical solutions of the utility model, all to take equivalent replacement or wait
Effect transformation and formed technical solution, all fall within the requires of the utility model protection within the scope of.
The utility model discloses one kind based on Echo Wall thin-walled column symmetry microcavity salinity sensor, and micro-nano fiber is bored area
The evanscent field of middle leakage is coupled in the symmetrical cylindrical type thin-walled microcavity of high circularity, height, and resonance generates Whispering-gallery-mode, works as sensing
When device surface sample refractive index changes, the change of resonance wavelength can be caused.Different salt are passed through in thin-walled column symmetry microcavity
When the sample of degree, salinity is different, and refractive index is also different, and echo wall die resonance spectrum can be right because of the variation of microcavity inner refractive index
The sample of different salinity generates different degrees of spectral migration.For cylindrical cavity, since its light field is largely distributed in microcavity
Wick-containing channel in, and there is small model volume, therefore the interaction of light and substance is very strong, can obtain highly sensitive biography
Sensor.
As depicted in figs. 1 and 2, which includes tunable wave length narrow-band light source 1, micro-nano fiber 2, thin-walled
Column symmetry microcavity 3, photodetector 4 and oscillograph 5.The tunable wave length narrow-band light source 1, micro-nano fiber 2, photodetection
Device 4 is of coupled connections by fiber fuse between each other, the oscillograph 5 respectively with photodetector 4 and tunable wave length narrowband
Light source 1 is electrically connected, and the oscillograph receives the original signal of wavelength tunable narrowband optical source and simultaneously by after sensor
Signal, the wavelength of the narrow-band light source be it is tunable, the wavelength of the narrow-band light source is not fixed as a wavelength, wavelength instead of
It can change, the wavelength of the tunable wave length narrow-band light source is 1550nm, in the technical scheme, the tunable wave length
Narrow-band light source is tunable laser.Tunable wave length narrow-band light source issues laser and inputs micro-nano fiber, visits being output to photoelectricity
Device is surveyed, is finally detected by oscillograph.
The micro-nano fiber is mutually perpendicular to be coupled and high q-factor Whispering-gallery-mode is excited to resonate with thin-walled column symmetry microcavity
Spectrum, the thin-walled column symmetry microcavity are high symmetrical hollow cylinder shape structure, the thin-walled column symmetry microcavity have high symmetry,
The characteristics of high-cleanness, high.The central axes of the micro-nano fiber and thin-walled column symmetry microcavity keep antarafacial vertical, and incident light is from micro-nano
One end of optical fiber enters micro-nano fiber cone area, and the fibre diameter that micro-nano fiber bores area is smaller, and light field is leaked in a manner of evanscent field
It is coupled into microcavity in the position contacted with microcavity out.Light field is in microcavity since total reflection effect forms Whispering-gallery-mode
Resonance effects reinforces light field and liquid phase sample interaction strength and time, realizes highly sensitive, the quick inspection to liquid concentration
It surveys.The oscillograph controls the output wavelength λ and intensity I of tunable narrowband optical source by being electrically connected1, while also controlling photoelectricity
The luminous intensity I of another output end of micro-nano fiber after microcavity is passed through in detector detection2, Real-time Feedback and it is recorded in different wave length λ
Locate I1-I2Numerical values recited, i.e. Whispering-gallery-mode resonance spectrum, which can be dense with intracavitary liquid phase material
Degree drifts about, i.e. generation Δ λ.
For the micro-nano fiber by single mode optical fiber by drawing cone machine fused biconical taper to be made, micro-nano fiber bores area's diameter diameter size
It is mutually matched with the wall thickness of microcavity and meets Whispering-gallery-mode resonance condition and could excite Whispering-gallery-mode, in the technical scheme,
The micro-nano fiber is conical fiber, and the cone area radius of the conical fiber is preferably 2~3 μm.The thin-walled column symmetry microcavity
It is bored by quartz capillary drawing, the outer diameter of the thin-walled column symmetry microcavity is 80~100 μm, and wall thickness is 2~3 μm, in reality
Thinner using wall thickness, sensitivity is higher, and in the technical scheme, about 90 μm of cylinder coupling regime outer diameter, wall thickness is about 2 μ
m.By adjusting so that micro-nano fiber and thin-walled column symmetry microcavity are vertical coupled, reach state as shown in Figure 1, i.e. micro-nano fiber
It relies on thin-walled column symmetry microcavity, the two central axes keep antarafacial vertical, coupling efficiency can be made higher in this way, into intracavitary
Distribution of light intensity is bigger, and the transmission peaks of echo wall die resonance spectrum are deeper, become apparent from.
The thin-walled column symmetry microcavity sensing unit cross-sectional view that Fig. 1 is the technical program and the light field that suddenly dies are in microcavity
The coupled transfer schematic diagram between conical fiber, in which: 1 represents Whispering-gallery-mode light intensity distributions, and 2 is micro- for thin-walled column symmetry
Chamber, 3 be conical fiber, can intuitively be found out from figure, and light field is coupled to through evanscent field in micro-nano fiber cone area has height symmetrical
Property cylindrical type thin-walled column symmetry microcavity in, and most of Whispering-gallery-mode light distribution is in close to being connected with liquid phase testee
Microcavity inner wall surface.
The liquid phase measured object with certain salinity is passed through the thin-walled column with micron dimension internal diameter using microflow control technique
In symmetrical microcavity.The sample of different salinity, refractive index are also different.Include one or more optical modes in echo wall die resonance spectrum
The transmission peaks of formula can generate difference to the micro-example of different salinity because thin-walled column symmetry microcavity inner refractive index changes
The spectral migration of degree.Its resonance spectrum passes through changing relatively just the variation or multiple modes long between single mode transmission spike
Liquid phase sample salinity can be detected.Light field is largely distributed in microcavity and contacts with liquid phase sample in thin-walled column symmetry microcavity
Surface near, and there is small mode volume, therefore the interaction intensity of light and substance is high, interaction time is long and thin
Micro channel of the symmetrical microcavity of pilaster as carrying liquid phase sample, entirely senses interaction process and external environment completely cuts off, knot
High sensitivity, stability height, repeatability height, quick sensing measurement may be implemented in the optical detection mode for closing quick response.
The characteristic optical wavelength for only meeting condition of resonance can form Whispering-gallery-mode resonance on chamber surface, and in thin-walled column
It is repeatedly surround in symmetrical microcavity with certain time photon lifetime.Thin-walled column symmetry microcavity make light can not only it is intracavitary into
Row is repeatedly surround, and the energy to disappear on microcavity surface is more.Light wave forms Echo Wall resonant mode on chamber surface through evanscent field
(WGM).Not every light can be transmitted inside, and the specific wavelength of light for only meeting condition of resonance can be formed on chamber surface
Whispering-gallery-mode resonance, and repeatedly surround in thin-walled column symmetry microcavity with certain time photon lifetime.Meet echo
The resonance wavelength of wall mode resonance condition is given by:
The π of λ=2 rneff/m
Wherein r is thin-walled column symmetry microcavity radius, neffIt is the effective refractive index that resonant optical mode passes through, m is integer.
For thin-walled column symmetry microcavity compared with straight wave guide senses, it is long that the interaction between analyte is no longer limited by waveguide
Degree, but resonant cycle period of the light wave in microcavity, resonant cycle period of the light wave in thin-walled column symmetry microcavity is by thin-walled
The quality factor q decision of column symmetry microcavity, effective interaction length LeffIt is given by with quality factor q relationship:
Leff=Q the π of λ/2 neff,
By taking the thin-walled column symmetry microcavity and laser source wavelength that the technical program embodiment uses as an example, thin-walled column symmetry is micro-
The quality factor q of chamber is 106, effective refractive index neffIt is 1.45, when wavelength X is 1550nm, effective interaction length LeffFor
17cm, above formula illustrate the available cm rank of effective interaction length, this is one long for optical sensor device
Effective interaction length.
Fig. 3 and Fig. 4 is the stability test result schematic diagram of echo wall die resonance spectrum in 40min, and Fig. 3 abscissa is wave
Long, ordinate is efficiency of transmission, and abscissa is wavelength in Fig. 4, and ordinate is efficiency of transmission.In order to verify the stability of system,
The unstability bring error for avoiding sensor itself needs to have carried out stability test to system before salinity measurement.It is whole
A sensor has metastable mechanical structure, and is placed on air-flotation type optical platform and carries out sensing testing.It is molten to be passed through salt
After liquid, external disturbance is excluded, every 10min record first resonance spectrum, whether multilevel iudge WGM resonance spectrum is stable.It is anti-by Fig. 3
The measurement result reflected, it can be seen that WGM resonance spectrum essentially coincides, even if zoom comparison, referring to fig. 4, the fluctuation range of transmission peaks
It is also only 1pm, the offset of tens micromicrons is reached when compared to salinity measurement, can be ignored, illustrates the salinity sensor
Structure it is relatively stable.
Fig. 5 is the testing result using the technical program to the liquid phase sample of different salinity, and measurement sample size is 2 μ every time
L, Whispering-gallery-mode transmission spectrum can generate offset with intracavitary sample salinity altercation in microcavity, salinity is respectively 2.6%,
2.8%, 3.0%, 3.2% and 3.4%, corresponding salinity i.e. 26,28,30,32,34, from Fig. 6 we can see that with sample salt
The increase of degree, resonance peak meeting red shift, and Red Shift Phenomena is obvious.Fig. 6 is wherein one group of Whispering-gallery-mode resonance peak with salinity altercation
Drift, when salinity increases to 34 from 26, resonance peak has drifted about 35pm or so, it is estimated that the salinity sensor is micro- to this
The salinity measurement sensitivity of amount liquid phase sample can achieve 43.75 pm/%.
Fig. 7 is the salinity measurement sensitivity experiment of the technical program as a result, passing through the transmission to Whispering-gallery-mode resonance spectrum
The offset that peak changes with salinity altercation does linear fit, available, and it is not that salinity is 26 to 34 that the two is substantially linear
In the range of, the linear function being fitted is y=44.07x-2.26, i.e. the sensitivity of salinity sensor can reach
44.07pm/%.
The thin-walled column symmetry microcavity in sensing process other than Whispering-gallery-mode resonance effects is provided, the thin-walled
Column symmetry microcavity is also one with all -fiber closed, anti-interference, micro-scale volume liquid solution channel, analyte channel and detection
Channel separates, which is passed through analyte, realizes detection in the optical path.The liquid solution channel can hermetic section
The influence of extraneous uncertain factor, improves system stability and repeatability, realizes micro detection in conjunction with microflow control technique.
The sensor has compact-sized, and size is small, and stability is good, and detectivity is high, and detection limit is low, manufacture craft
It is relatively simple and the advantages that cost is relatively low.The sensor utilizes thin-walled column symmetry microcavity-conical fiber coupling unit realization pair
The Concentration Testing of liquid-phase inlet, incident light enter cone area from one end of conical fiber, are coupled into thin-walled column pair by evanscent field
Claim microcavity, reinforces light field and liquid phase sample interaction strength and time under the effect of Whispering-gallery-mode resonance effects, in conjunction with micro-
Fluidics realizes high sensitivity, trace detection to liquid concentration.The sensor uses high symmetry, high-cleanness, high, high coupling
Close efficiency, all -fiber thin-walled column symmetry microcavity be used as sensing unit, have high sensitivity, milligram ammonia, detection speed fastly, repetition
Property it is high, environment immunity is strong the features such as.
Still there are many embodiment, all technologies formed using equivalents or equivalent transformation for the utility model
Scheme is all fallen within the protection scope of the utility model.
Claims (6)
1. one kind is based on Echo Wall thin-walled column symmetry microcavity salinity sensor, it is characterised in that: including tunable wave length narrow band light
Source, micro-nano fiber, thin-walled column symmetry microcavity, photodetector and oscillograph, the tunable wave length narrow-band light source, micro-nano light
Fine, photodetector is of coupled connections by fiber fuse between each other, and the oscillograph respectively can with photodetector and wavelength
It tunes narrow-band light source to be electrically connected, the micro-nano fiber is mutually perpendicular to couple and excites high q-factor echo with thin-walled column symmetry microcavity
Wall mode resonance, micro-nano fiber keep antarafacial vertical with the central axes of thin-walled column symmetry microcavity.
2. according to claim 1 a kind of based on Echo Wall thin-walled column symmetry microcavity salinity sensor, it is characterised in that: institute
It is tunable for stating the wavelength of narrow-band light source.
3. according to claim 1 a kind of based on Echo Wall thin-walled column symmetry microcavity salinity sensor, it is characterised in that: institute
Micro-nano fiber is stated by single mode optical fiber by drawing cone machine fused biconical taper to be made.
4. according to claim 1 a kind of based on Echo Wall thin-walled column symmetry microcavity salinity sensor, it is characterised in that: institute
Thin-walled column symmetry microcavity is stated as high symmetrical hollow cylinder shape structure.
5. according to claim 1 a kind of based on Echo Wall thin-walled column symmetry microcavity salinity sensor, it is characterised in that: institute
Thin-walled column symmetry microcavity is stated to be bored by quartz capillary drawing.
6. according to claim 1 a kind of based on Echo Wall thin-walled column symmetry microcavity salinity sensor, it is characterised in that: institute
Stating thin-walled column symmetry microcavity is also one to have that all -fiber is closed, jamproof liquid solution channel, and analyte channel and detection are logical
Road separates, which is passed through analyte, realizes detection in the optical path.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554211A (en) * | 2019-08-06 | 2019-12-10 | 清华-伯克利深圳学院筹备办公室 | Flow meter based on optical microfluidic microcavity and measuring method |
| CN110907401A (en) * | 2019-05-28 | 2020-03-24 | 天津工业大学 | Seawater salinity measuring device based on multi-section conical quartz fiber mode interference structure |
| CN111077112A (en) * | 2020-01-13 | 2020-04-28 | 北京航空航天大学 | Echo wall mode spherical optical microcavity refractive index sensor based on surface plasma and measuring device |
| CN112014356A (en) * | 2020-08-21 | 2020-12-01 | 之江实验室 | pH/salinity sensor based on micro-nano optical fiber |
| CN112268636A (en) * | 2020-09-22 | 2021-01-26 | 北京航空航天大学 | Liquid temperature sensing system based on whispering gallery mode spherical optical microcavity |
| CN113418894A (en) * | 2021-06-21 | 2021-09-21 | 天津大学 | Optical microcavity resonance peak calibration method based on hydrogen cyanide gas cell |
-
2018
- 2018-05-25 CN CN201820800438.1U patent/CN208818643U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110907401A (en) * | 2019-05-28 | 2020-03-24 | 天津工业大学 | Seawater salinity measuring device based on multi-section conical quartz fiber mode interference structure |
| CN110554211A (en) * | 2019-08-06 | 2019-12-10 | 清华-伯克利深圳学院筹备办公室 | Flow meter based on optical microfluidic microcavity and measuring method |
| CN111077112A (en) * | 2020-01-13 | 2020-04-28 | 北京航空航天大学 | Echo wall mode spherical optical microcavity refractive index sensor based on surface plasma and measuring device |
| CN112014356A (en) * | 2020-08-21 | 2020-12-01 | 之江实验室 | pH/salinity sensor based on micro-nano optical fiber |
| CN112268636A (en) * | 2020-09-22 | 2021-01-26 | 北京航空航天大学 | Liquid temperature sensing system based on whispering gallery mode spherical optical microcavity |
| CN113418894A (en) * | 2021-06-21 | 2021-09-21 | 天津大学 | Optical microcavity resonance peak calibration method based on hydrogen cyanide gas cell |
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