CN208815068U - A kind of nickel foil production continuity annealing furnace - Google Patents
A kind of nickel foil production continuity annealing furnace Download PDFInfo
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- CN208815068U CN208815068U CN201821557846.5U CN201821557846U CN208815068U CN 208815068 U CN208815068 U CN 208815068U CN 201821557846 U CN201821557846 U CN 201821557846U CN 208815068 U CN208815068 U CN 208815068U
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- fixedly connected
- shell
- nickel foil
- annealing furnace
- elevating lever
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Abstract
The utility model discloses a kind of nickel foil production continuity annealing furnaces, including feed inlet and shell, the right side fixation of the feed inlet is connected with shell surely, water inlet is fixedly connected among the side of the shell, the side lower of the shell is connected with fuel tank, the top right side of the shell is fixedly connected with cooling cartridge, and discharge port is fixedly connected on the right side of shell, the bottom of the discharge port is provided with transmission belt, the bottom of the transmission belt is connected with pedestal, the bottom of the pedestal is fixedly connected with supporting leg, cooling cartridge is fixedly connected on the top of heating room by the connecting plate and fastening screw of lower part, when heating chamber when the temperature is excessively high, elevating lever can be lifted, and card column is stuck in inside the limiting slot of card slot side, it can be by the heat derives of heating chamber, the height that control elevating lever rises can be controlled The rate that heating capacity sheds uses more convenient.
Description
Technical field
The utility model belongs to nickel foil processing correlative technology field, and in particular to a kind of nickel foil production is annealed with continuity
Furnace.
Background technique
Annealing furnace is a kind of technique used in semiconductor devices manufacture comprising heats multiple semiconductor wafers with shadow
Ring its electrical property.Heat treatment is designed for different effects.Chip can be heated to activate dopant, film is converted
It is converted into wafer substrates interface at film or by film, makes the film of compact deposits, changes the state of the film of growth, repairs note
The damage entered moves dopant or dopant is transferred to another film from a film or enters wafer substrate from film.
Annealing furnace is desirably integrated into other stove processing steps, such as is aoxidized, or can oneself processing.Annealing furnace is
It is completed by the equipment designed exclusively for heating semiconductor wafer.Annealing furnace is energy-saving periodical furnace, super energy saving knot
Structure, using fibre structure, economize on electricity 60%.
Existing technology has the following problems: the nickel foil for needing to process is sent by existing annealing furnace from feeding inlet, then by
Nickel foil to be processed is sent into hurricane drier and air-dried by transmission belt, is sent into cooling chamber cooling, is finally entered back into oven heats, it will be able to
Change its physical property, but during heating, it may be excessively high because of temperature, and be difficult to be discharged and lead to nickel foil high temperature
It is damaged because of high temperature.
Utility model content
The purpose of this utility model is to provide a kind of nickel foil production continuity annealing furnaces, to solve above-mentioned background technique
The nickel foil of middle proposition damages problem because of high temperature.
To achieve the above object, the utility model provides the following technical solutions:
The right side fixation of a kind of nickel foil production continuity annealing furnace, including feed inlet and shell, the feed inlet connects surely
Be connected to shell, water inlet be fixedly connected among the side of the shell, there are four the water inlet is arranged altogether, described in two into
The mouth of a river is fixedly connected on the middle position of shell left upper portion in parastate, and two water inlets are fixed in parastate
It is connected to the middle position that shell has upper lateral part, the side lower of the shell is connected with fuel tank, and the fuel tank is arranged altogether
There are two, and two fuel tanks are connected on the right side of the lower part of shell two sides, the top right side of the shell is fixed to be connected
It is connected to cooling cartridge, and is fixedly connected with discharge port on the right side of shell, the left-hand face of the discharge port is provided with maintenance door, and goes out
The lower right side of material mouth is provided with thermal insulation board, and the bottom of the discharge port is provided with transmission belt, the bottom connection of the transmission belt
There is pedestal, the bottom of the pedestal is fixedly connected with supporting leg.
Preferably, the shell includes hurricane drier, blower, cooling chamber, nozzle, heats room and burner, the hurricane drier
Top is connected with blower, and cooling chamber is fixedly connected on the right side of hurricane drier, and nozzle is connected at the top of the cooling chamber, described
Nozzle is connected to water inlet, and heating room is fixedly connected on the right side of the cooling chamber, and the inner side of the heating room is provided with
Burner, the burner are connected to fuel tank, and the cooling cartridge is located at the top of heating room.
Preferably, the cooling cartridge includes top cover, elevating lever, thermal insulation cylinder, card slot, gasket, connecting plate and fastening screw,
The bottom of the top cover is fixedly connected with elevating lever, and the bottom of the elevating lever is provided with thermal insulation cylinder, the bottom of the thermal insulation cylinder
It is fixedly connected with gasket, and is provided with card slot on the left of the surface of thermal insulation cylinder, the bottom of the gasket is fixedly connected with connection
Plate, the surface of the connecting plate are provided with fastening screw, there are four the fastening screw is arranged altogether, and four fastening screws
It is respectively fixedly connected in the quadrangle of connecting plate top surface.
Preferably, the elevating lever includes the body of rod and card column, and the lower right-hand side of the body of rod is fixedly connected with card column, and bar
Body and card column are manufactured using tin alloy.
Preferably, the left end of the transmission belt is located at the bottom of feed inlet, and the right end of the transmission belt is located at discharge port
Bottom, the transmission belt passes through the inside of shell, and the middle section of transmission belt is located at the bottom of interior of shell.
Preferably, the supporting leg is provided with ten altogether, and five supporting legs are fixedly connected on base bottom in parastate
Left side, and other five supporting legs are fixedly connected on the right side of base bottom in parastate.
Preferably, there are four the nozzle is arranged altogether, two nozzles are connected to the left side at the top of cooling chamber, and two
The nozzle is connected to the right side at the top of cooling chamber, and there are four the burner is arranged altogether, two burners are connected to heating room
The surface of left side, and two burners are connected to the surface of heating room right side.
Preferably, the elevating lever is stuck in the inside of card slot, and there are three the limits of vertical direction for the side setting of the card slot
Position slot, the top cover are fixed on the top of thermal insulation cylinder by elevating lever.
Compared with prior art, the utility model provides a kind of nickel foil production continuity annealing furnace, and having following has
Beneficial effect:
The utility model annealing furnace has been fixedly connected with a cooling cartridge, the company that cooling cartridge passes through lower part at the top of heating room
Fishplate bar and fastening screw be fixedly connected on heating room top, when heating chamber when the temperature is excessively high, so that it may by elevating lever
It lifts, and card column is stuck in inside the limiting slot of card slot side, it will be able to by the heat derives of heating chamber, control elevating lever
The height of rise can control the rate that heat sheds, and use more convenient.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this
Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention, in the accompanying drawings:
Fig. 1 be the utility model proposes a kind of nickel foil production continuity annealing furnace structure schematic diagram；
Fig. 2 be the utility model proposes interior of shell structural schematic diagram；
Fig. 3 be the utility model proposes cooling cartridge structural schematic diagram；
Fig. 4 be the utility model proposes lifting rod structure schematic diagram；
In figure: 1, feed inlet；2, shell；21, hurricane drier；22, blower；23, cooling chamber；24, nozzle；25, room is heated；
26, burner；3, water inlet；4, fuel tank；5, cooling cartridge；51, top cover；52, elevating lever；521, the body of rod；522, card column；53, every
Warm cylinder；54, card slot；55, gasket；56, connecting plate；57, fastening screw；6, discharge port；7, maintenance door；8, thermal insulation board；9, it passes
Dynamic band；10, pedestal；11, supporting leg.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-4 is please referred to, the utility model provides a kind of technical solution:
A kind of nickel foil production continuity annealing furnace, including feed inlet 1 and shell 2, the fixed fixed connection in the right side of feed inlet 1
There is shell 2, water inlet 3 is fixedly connected among the side of shell 2, water inlet 3 is altogether there are four settings, and two water inlets 3 are in flat
Row state is fixedly connected on the middle position of 2 left upper portion of shell, and two water inlets 3 are fixedly connected on shell in parastate
2 have the middle position of upper lateral part, and the side lower of shell 2 is connected with fuel tank 4, and there are two the total settings of fuel tank 4, and two combustions
Batch can 4 is connected on the right side of the lower parts of 2 two sides of shell, and the top right side of shell 2 is fixedly connected with cooling cartridge 5, and shell 2
Right side is fixedly connected with discharge port 6, and the left-hand face of discharge port 6 is provided with maintenance door 7, and the lower right side setting of discharge port 6
There is thermal insulation board 8, the bottom of discharge port 6 is provided with transmission belt 9, and the bottom of transmission belt 9 is connected with pedestal 10, and the bottom of pedestal 10 is solid
Surely it is connected with supporting leg 11.
Further, shell 2 includes hurricane drier 21, blower 22, cooling chamber 23, nozzle 24, heating room 25 and burner 26, is air-dried
The top of room 21 is connected with blower 22, and nickel foil can be dried up and be air-dried by blower 22, it is easier to the cooling of lower part, and hurricane drier 21
Right side is fixedly connected with cooling chamber 23, and the top of cooling chamber 23 is connected with nozzle 24, and nozzle 24 is connected to water inlet 3, water inlet 3
Cold water is sent to the inside of nozzle 24, so that nozzle 24 sprays cold water, the right side of cooling chamber 23 is fixedly connected with heating room
25, the inner side of heating room 25 is provided with burner 26, and burner 26 is connected to fuel tank 4, and fuel tank 4 directs fuel to burner 26
Inside, so that burner 26 burns and releases heat, cooling cartridge 5 is located at the top of heating room 25.
Further, cooling cartridge 5 includes top cover 51, elevating lever 52, thermal insulation cylinder 53, card slot 54, gasket 55,56 and of connecting plate
Fastening screw 57, the bottom of top cover 51 are fixedly connected with elevating lever 52, and the bottom of elevating lever 52 is provided with thermal insulation cylinder 53, thermal insulation cylinder
53 enable to heat to pass through, to cool down to heating room 25, the bottom of thermal insulation cylinder 53 is fixedly connected with gasket 55, and
It is provided with card slot 54 on the left of the surface of thermal insulation cylinder 53, the bottom of gasket 55 is fixedly connected with connecting plate 56, the table of connecting plate 56
Face is provided with fastening screw 57, and connecting plate 56 can be fixed on the top of heating room 25 by fastening screw 57, and fastening screw 57 is total
There are four settings, and four fastening screws 57 are respectively fixedly connected in the quadrangle of 56 top surface of connecting plate.
Further, elevating lever 52 includes the body of rod 521 and card column 522, and the lower right-hand side of the body of rod 521 is fixedly connected with card column
522, and the body of rod 521 and card column 522 are manufactured using tin alloy, tin alloy has very poor thermal conductivity, and operator is touching
When touching card column 522, it will not be burned.
Further, the left end of transmission belt 9 is located at the bottom of feed inlet 1, and the right end of transmission belt 9 is located at the bottom of discharge port 6,
Transmission belt 9 passes through the inside of shell 2, and the middle section of transmission belt 9 is located at the bottom inside shell 2, and transmission belt 9 can incite somebody to action
Nickel foil is sent into inside shell 2 from feed inlet 1, to send out again from discharge port 6 by a series of processing.
Further, supporting leg 11 is provided with ten altogether, and five supporting legs 11 are fixedly connected on 10 bottom of pedestal in parastate
Left side, and other five supporting legs 11 are fixedly connected on the right side of 10 bottom of pedestal in parastate, ten supporting legs 11 can be stablized
Machine is supported and fixed.
Further, there are four nozzle 24 is arranged altogether, two nozzles 24 are connected to the left side at 23 top of cooling chamber, and two sprays
Mouth 24 is connected to the right side at 23 top of cooling chamber, and four nozzles 24 can preferably cool down to nickel foil, and burner 26 is arranged altogether
There are four, two burners 26 are connected to the surface of heating 25 left side of room, and two burners 26 are connected to heating 25 right side of room
Surface, four burners 26 distribute amount of heat, can preferably heat to nickel foil.
Further, elevating lever 52 is stuck in the inside of card slot 54, and there are three the limits of vertical direction for the side setting of card slot 54
Slot, card column 522, which is stuck in inside limiting slot, can control the height of top cover 51, so that the rate that heat sheds is controlled, top cover
51 are fixed on the top of thermal insulation cylinder 53 by elevating lever 52.
The working principle and process for using of the utility model: after the utility model installs, first detection blower fan 22, spray
The integrality of mouth 24 and burner 26 prevents blower 22, nozzle 24 and burner 26 from occurring damaging and leading to nickel foil processing not exclusively, makes
It is second-rate at the nickel foil processed, external power supply is connected to the electric elements inside pedestal 10 using electric wire and cable, is made
Obtaining machine can be powered, and be then turned on switch, and the motor inside pedestal 10 is received by the current signal that switch transmits, motor
Model Y355L4-8, this motor speed is slower, and motor rotates but also the movement of transmission belt 9 slowly, it will be able to make
Obtain nickel foil has time enough to be processed inside shell 2, to machine idle running a few minutes and observes that transmission belt 9 is existing without Caton
As can normal use, nickel foil to be processed is put into 9 top of transmission belt of the lower section of feed inlet 1, then transmission belt 9 is by nickel foil band
The inside of shell 2 is moved and is sent into, nickel foil is dried up in the inside of hurricane drier 21 by blower 22, is then entered again by transmission belt 9 cold
But room 23, the nozzle 24 inside cooling chamber 23 spray the cold water imported from water inlet 3, thus nickel foil is cooling, then it is driven
Nickel foil after cooling is sent into heating room 25 and heated by band 9, when burner 26 works, needs to carry out the temperature inside heating room 25
Detection, just pulls card column 522 when the temperature is excessively high, the body of rod 521 is ramped up, and be stuck in inside the limiting slot of 54 side of card slot, pushes up
Lid 51 is also raised simultaneously, and just faster, nickel foil can be heated preferably the rate that high temperature sheds, the nickel foil finished of annealing
Quality just can be more preferable.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (8)
1. a kind of nickel foil production continuity annealing furnace, including feed inlet (1) and shell (2), it is characterised in that: the feed inlet
(1) right side fixation is connected with surely shell (2), be fixedly connected with water inlet (3) among the side of the shell (2), it is described into
Altogether there are four settings, two water inlets (3) are fixedly connected in shell (2) left upper portion in parastate at the mouth of a river (3)
Between position, and two water inlets (3) are fixedly connected on the middle position that shell (2) has upper lateral part in parastate, described
The side lower of shell (2) is connected with fuel tank (4), and there are two the total settings of the fuel tank (4), and two fuel tanks
(4) it being connected on the right side of the lower part of shell (2) two sides, the top right side of the shell (2) is fixedly connected with cooling cartridge (5),
And discharge port (6) are fixedly connected on the right side of shell (2), the left-hand face of the discharge port (6) is provided with maintenance door (7), and
The lower right side of discharge port (6) is provided with thermal insulation board (8), and the bottom of the discharge port (6) is provided with transmission belt (9), the biography
The bottom of dynamic band (9) is connected with pedestal (10), and the bottom of the pedestal (10) is fixedly connected with supporting leg (11).
2. a kind of nickel foil production continuity annealing furnace according to claim 1, it is characterised in that: shell (2) packet
Include hurricane drier (21), blower (22), cooling chamber (23), nozzle (24), heating room (25) and burner (26), the hurricane drier (21)
Top be connected with blower (22), and cooling chamber (23) are fixedly connected on the right side of hurricane drier (21), the cooling chamber (23)
Top is connected with nozzle (24), and the nozzle (24) is connected to water inlet (3), is fixedly connected on the right side of the cooling chamber (23)
It heats room (25), the inner side of heating room (25) is provided with burner (26), and the burner (26) and fuel tank (4) are even
Logical, the cooling cartridge (5) is located at the top of heating room (25).
3. a kind of nickel foil production continuity annealing furnace according to claim 1, it is characterised in that: the cooling cartridge (5)
Including top cover (51), elevating lever (52), thermal insulation cylinder (53), card slot (54), gasket (55), connecting plate (56) and fastening screw
(57), the bottom of the top cover (51) is fixedly connected with elevating lever (52), and the bottom of the elevating lever (52) is provided with thermal insulation cylinder
(53), the bottom of the thermal insulation cylinder (53) is fixedly connected with gasket (55), and is provided with card on the left of the surface of thermal insulation cylinder (53)
The bottom of slot (54), the gasket (55) is fixedly connected with connecting plate (56), and the surface of the connecting plate (56) is provided with tightly
Gu screw (57), there are four the total settings of the fastening screw (57), and four fastening screws (57) are respectively fixedly connected with
The quadrangle of connecting plate (56) top surface.
4. a kind of nickel foil production continuity annealing furnace according to claim 3, it is characterised in that: the elevating lever (52)
Including the body of rod (521) and card column (522), the lower right-hand side of the body of rod (521) is fixedly connected with card column (522), and the body of rod
(521) and card column (522) is manufactured using tin alloy.
5. a kind of nickel foil production continuity annealing furnace according to claim 1, it is characterised in that: the transmission belt (9)
Left end be located at the bottom of feed inlet (1), the right end of the transmission belt (9) is located at the bottom of discharge port (6), the transmission belt
(9) inside of shell (2) is passed through, and the middle section of transmission belt (9) is located at the internal bottom of shell (2).
6. a kind of nickel foil production continuity annealing furnace according to claim 1, it is characterised in that: the supporting leg (11) is altogether
Ten are provided with, five supporting legs (11) are fixedly connected on the left side of pedestal (10) bottom, and other five in parastate
The supporting leg (11) is fixedly connected on the right side of pedestal (10) bottom in parastate.
7. a kind of nickel foil production continuity annealing furnace according to claim 2, it is characterised in that: the nozzle (24) is altogether
There are four settings, and two nozzles (24) are connected to the left side at the top of cooling chamber (23), and two nozzle (24) connections
Right side at the top of cooling chamber (23), for the burner (26) altogether there are four settings, two burners (26) are connected to heating room
(25) surface of left side, and two burners (26) are connected to the surface of heating room (25) right side.
8. a kind of nickel foil production continuity annealing furnace according to claim 3, it is characterised in that: the elevating lever (52)
It is stuck in the inside of card slot (54), there are three the limiting slot of vertical direction, the top covers (51) for the side setting of the card slot (54)
The top of thermal insulation cylinder (53) is fixed on by elevating lever (52).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821557846.5U CN208815068U (en) | 2018-09-25 | 2018-09-25 | A kind of nickel foil production continuity annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821557846.5U CN208815068U (en) | 2018-09-25 | 2018-09-25 | A kind of nickel foil production continuity annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208815068U true CN208815068U (en) | 2019-05-03 |
Family
ID=66278171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821557846.5U Active CN208815068U (en) | 2018-09-25 | 2018-09-25 | A kind of nickel foil production continuity annealing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208815068U (en) |
-
2018
- 2018-09-25 CN CN201821557846.5U patent/CN208815068U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A continuous annealing furnace for nickel foil production Effective date of registration: 20210827 Granted publication date: 20190503 Pledgee: Wuxi rural commercial bank Limited by Share Ltd. Yixing branch Pledgor: JIANGSU YUANXIANG ALLOY MATERIAL TECHNOLOGY Co.,Ltd. Registration number: Y2021320010332 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230109 Granted publication date: 20190503 Pledgee: Wuxi rural commercial bank Limited by Share Ltd. Yixing branch Pledgor: JIANGSU YUANXIANG ALLOY MATERIAL TECHNOLOGY Co.,Ltd. Registration number: Y2021320010332 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |