CN208803143U - The making-up air device of tubular reactor - Google Patents
The making-up air device of tubular reactor Download PDFInfo
- Publication number
- CN208803143U CN208803143U CN201821341961.9U CN201821341961U CN208803143U CN 208803143 U CN208803143 U CN 208803143U CN 201821341961 U CN201821341961 U CN 201821341961U CN 208803143 U CN208803143 U CN 208803143U
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- pipe
- blowdown
- furnace
- blowdown pipe
- lpcvd
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model gives a kind of making-up air device of tubular reactor；Including at least one blowdown pipe, process gas needed for the blowdown pipe rear end is passed through plated film, blowdown pipe front end is protruded into LPCVD pipe furnace through furnace tail-hood plate, and blowdown pipe front end face is provided with the venthole for process gas discharge.Process gas is conveyed into LPCVD pipe furnace by blowdown pipe, supplement the amount for the process gas that main air inlet pipe sprays, improve in certain region film thickness uniformity between the piece of LPCVD plated film, boiler tube length can be increased using the making-up air device of this tubular reactor, to increase constant temperature section length, achieve the purpose that increase production capacity.
Description
Technical field
The utility model relates to the coating technique in a kind of manufacture of solar battery, especially relate to improve hot wall
The making-up air device of the uniformity between the piece of LPCVD pipe furnace.
Background technique
In solar battery sheet production process, need in surface coating, such as polysilicon, silicon nitride etc., need using
LPCVD technique carries out plated film.To improve production capacity, the useful load of single tube LPCVD pipe furnace (tubular reactor) is improved by several hundred
To 1200, the length of boiler tube, the length of technique flat-temperature zone and process gas Spreading requirements are caused to greatly promote, especially work
In skill flat-temperature zone, back zone greatly promotes uniformity technical requirements piece.
Only the uniform circular on the fire door cover board of furnace tail is distributed with multiple main air inlet pipes to existing boiler tube, main air inlet pipe to
Process gas needed for LPCVD pipe furnace injection plated film, but after boiler tube lengthens, be only unable to satisfy raising by main air inlet pipe and produced
The coating film thickness uniformity requirement of back zone in LPCVD after energy, causes the uniformity between piece poor.
Utility model content
The tubular reactor that the technical problem to be solved by the utility model is to provide a kind of structures simply, tonifying Qi effect is good
Making-up air device.
In order to solve the above technical problems, the utility model provides a kind of making-up air device of tubular reactor；
Including at least one blowdown pipe, process gas needed for the blowdown pipe rear end is passed through plated film, blowdown pipe front end is passed through
It wears furnace tail-hood plate to protrude into LPCVD pipe furnace, blowdown pipe front end face is provided with the venthole for process gas discharge.
With such a structure, process gas is conveyed into LPCVD pipe furnace by blowdown pipe, supplement main air inlet pipe sprays
Process gas amount, improve in certain region film thickness uniformity between the piece of LPCVD plated film, use the benefit of this tubular reactor
Device of air can increase boiler tube length, to increase constant temperature section length, achieve the purpose that increase production capacity.
For the clearer technology contents for understanding the utility model, below referred to as by the making-up air device of this tubular reactor
For this making-up air device.
This making-up air device includes several blowdown pipes, and it is all different that all blowdown pipes protrude into distance in LPCVD pipe furnace；Using in this way
Structure after, several blowdown pipes can convey process gas for multiple regions, improve in certain region film between the piece of LPCVD plated film
Layer thickness homogeneity.
This making-up air device includes four blowdown pipes, is the first blowdown pipe, the second blowdown pipe, third blowdown pipe and the 4th respectively
Blowdown pipe, the first blowdown pipe front end are the first venthole, and length of first venthole apart from furnace tail-hood plate is equal in LPCVD pipe furnace
The 60% of hole axle line length；Second blowdown pipe front end is the second venthole, and length of second venthole apart from furnace tail-hood plate is equal to
The 50% of LPCVD pipe furnace inner hole axial length；Third blowdown pipe front end is third venthole, and third venthole is apart from furnace tail-hood plate
Length be equal to LPCVD pipe furnace inner hole axial length 40%；4th blowdown pipe front end be the 4th venthole, the 4th venthole away from
Length from furnace tail-hood plate is equal to the 30% of LPCVD pipe furnace inner hole axial length.
By the experiment in practice, the quantity and position condition of obtained optimal blowdown pipe are advanced optimized
The coating effects of LPCVD pipe furnace.
Four blowdown pipe rear ends of this making-up air device are connected to supervisor respectively, technique needed for being responsible for end and being passed through plated film
Gas passes through supervisor's Xiang Sigen blowdown pipe gas supply；With such a structure, supervisor facilitates connection gas source and four blowdown pipes.
Four blowdown pipe rear portions of this making-up air device are respectively equipped with flow control valve；With such a structure, flow control
Each road blowdown pipe, which may be implemented, in valve processed both can be used alone and can also be used together, and can flexibly control every road blowdown pipe
Ventilatory capacity.
Detailed description of the invention
Fig. 1 is the structure rearview of this making-up air device embodiment.
Fig. 2 is Fig. 1 along sectional view along A-A.
Specific embodiment
As illustrated in fig. 1 and 2
This making-up air device includes four blowdown pipes, supervisor 3 and four flow control valves 2.
Four blowdown pipes are the first blowdown pipe 11, the second blowdown pipe 12, third blowdown pipe 13 and the 4th blowdown pipe 14 respectively,
Four blowdown pipe structures are identical, and by taking the first blowdown pipe 11 as an example, LPCVD pipe furnace 4 is protruded into through furnace tail-hood plate 43 in blowdown pipe front end
Interior, 4 rear side of LPCVD pipe furnace is stretched out in blowdown pipe rear end.
It is all different that four blowdown pipes protrude into distance in LPCVD pipe furnace 4, and 11 front end of the first blowdown pipe is the first venthole 11a,
Length of the first venthole 11a apart from furnace tail-hood plate 43 is equal to the 60% of 4 inner hole axial length of LPCVD pipe furnace；Second blowdown pipe
12 front ends are that the second venthole length of 12a, the second venthole 12a apart from furnace tail-hood plate 43 is equal to axially bored line in LPCVD pipe furnace 4
The 50% of length；13 front end of third blowdown pipe is third venthole 13a, length of the third venthole 13a apart from furnace tail-hood plate 43
Equal to the 40% of 4 inner hole axial length of LPCVD pipe furnace；4th blowdown pipe, 14 front end is the 4th venthole 14a, the 4th venthole
Length of the 14a apart from furnace tail-hood plate 43 is equal to the 30% of 4 inner hole axial length of LPCVD pipe furnace, nicely rounded on fire door cover board 41
12 main air inlet pipes 42 are distributed with week.
Four flow control valves 2 and four blowdown pipes are one-to-one relationship, and four flow control valves 2 are separately positioned on four
Root blowdown pipe rear portion, flow control valve 2 (can select needle-valve, MFC etc.) are in 4 outside of LPCVD pipe furnace.
Four blowdown pipe rear ends are connected to supervisor 3 respectively, and process gas needed for being responsible for 3 ends and being passed through plated film passes through
It is responsible for 3 Xiang Sigen blowdown pipes gas supply.
Process gas needed for this making-up air device supplies plated film by 3 Xiang Sigen blowdown pipes of supervisor, tail portion tonifying Qi is passed through
Main tracheae introducing is divided into parallel 4 tunnel together, and every road blowdown pipe passes through gas flow, No. 4 blowdown pipes by the control of flow control valve 2
Parallel tonifying Qi can be closed all or respectively independently use or be used cooperatively, and the parallel tonifying Qi in 4 tunnels each by gas
Body flow can control.
Above-described is only a kind of embodiment of the utility model, it is noted that for the ordinary skill of this field
For personnel, without departing from the principle of this utility model, several variations and modifications can also be made, these also should be regarded as
Belong to the protection scope of the utility model.
Claims (5)
1. a kind of making-up air device of tubular reactor, it is characterized in that:
Including at least one blowdown pipe, furnace is run through in process gas needed for the blowdown pipe rear end is passed through plated film, blowdown pipe front end
Tail-hood plate protrudes into LPCVD pipe furnace, and blowdown pipe front end face is provided with the venthole for process gas discharge.
2. the making-up air device of tubular reactor according to claim 1, it is characterized in that:
Including several blowdown pipes, it is all different that all blowdown pipes protrude into distance in LPCVD pipe furnace.
3. the making-up air device of tubular reactor according to claim 2, it is characterized in that:
It is the first blowdown pipe, the second blowdown pipe, third blowdown pipe and the 4th blowdown pipe respectively including four blowdown pipes, first mends
Tracheae front end is the first venthole, and length of first venthole apart from furnace tail-hood plate is equal to LPCVD pipe furnace inner hole axial length
60%；Second blowdown pipe front end is the second venthole, and length of second venthole apart from furnace tail-hood plate is equal to LPCVD pipe furnace inner hole
The 50% of axial length；Third blowdown pipe front end is third venthole, and length of the third venthole apart from furnace tail-hood plate is equal to
The 40% of LPCVD pipe furnace inner hole axial length；4th blowdown pipe front end is the 4th venthole, and the 4th venthole is apart from furnace tail-hood plate
Length be equal to LPCVD pipe furnace inner hole axial length 30%.
4. the making-up air device of tubular reactor according to claim 3, it is characterized in that:
Four blowdown pipe rear ends be connected tos with supervisor respectively, supervisor end and process gas needed for being passed through plated film, by be responsible for
Four blowdown pipe gas supply.
5. the making-up air device of tubular reactor according to claim 3, it is characterized in that:
Four blowdown pipe rear portions are respectively equipped with flow control valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821341961.9U CN208803143U (en) | 2018-08-20 | 2018-08-20 | The making-up air device of tubular reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821341961.9U CN208803143U (en) | 2018-08-20 | 2018-08-20 | The making-up air device of tubular reactor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208803143U true CN208803143U (en) | 2019-04-30 |
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ID=66235287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821341961.9U Active CN208803143U (en) | 2018-08-20 | 2018-08-20 | The making-up air device of tubular reactor |
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| Country | Link |
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| CN (1) | CN208803143U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108754457A (en) * | 2018-08-20 | 2018-11-06 | 普乐新能源（蚌埠）有限公司 | The making-up air device of tubular reactor |
-
2018
- 2018-08-20 CN CN201821341961.9U patent/CN208803143U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108754457A (en) * | 2018-08-20 | 2018-11-06 | 普乐新能源（蚌埠）有限公司 | The making-up air device of tubular reactor |
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