CN208776584U - Optical fiber prefabricated rod mandrel depositing device automatic control system - Google Patents

Optical fiber prefabricated rod mandrel depositing device automatic control system Download PDF

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CN208776584U
CN208776584U CN201821307862.9U CN201821307862U CN208776584U CN 208776584 U CN208776584 U CN 208776584U CN 201821307862 U CN201821307862 U CN 201821307862U CN 208776584 U CN208776584 U CN 208776584U
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deposition
mandrel
control system
automatic control
diameter
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CN201821307862.9U
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顾勇
胡军
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Wuxi Cheng Yong Automation Technology Co Ltd
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Wuxi Cheng Yong Automation Technology Co Ltd
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Abstract

The utility model discloses a kind of optical fiber prefabricated rod mandrel depositing device automatic control systems, including plug sedimentation unit, raw material supply unit, detection unit and control unit;The plug sedimentation unit is used to complete the deposition of optical fiber prefabricated rod mandrel, including deposition chamber, lifting assembly and rotation sunpender;The raw material supply unit is used to provide deposition raw material, including SiCl to the plug sedimentation unit4Supply department and deposition blowlamp;The detection unit includes the diameter measurer of the pressure detector and real-time detection diameter of mandrel for pressure value in deposition chamber described in real-time detection;Described control unit includes PLC controller, and for receiving the pressure value and diameter of the pressure-detecting device, diameter measurer feedback, and adaptability adjusts the aperture of the air inlet and outlet and the injection flow of the deposition blowlamp.The automatic control system realizes the Automatic Control of optical fiber prefabricated rod mandrel deposition process, improves the product quality and performance of preform.

Description

Automatic control system of optical fiber preform core rod deposition equipment
Technical Field
The utility model relates to an optical fiber perform plug deposition apparatus automatic control system.
Background
As is known, the optical fiber manufacturing process is generally divided into two steps: manufacturing an optical fiber preform and drawing an optical fiber. The manufacturing quality of the optical fiber preform is the basis of optical fiber drawing, and the control of the manufacturing process is one of the most important links in optical fiber manufacturing. The most mature techniques of the current optical fiber preform fabrication process include core rod deposition and cladding deposition. In the production process of the optical fiber preform, the whole process flow involves the coordinated operation of temperature, flow, pressure, equipment and the like, and the control is very complicated.
The existing optical fiber perform production is mechanical manual operation and control, when control equipment is manually operated, timeliness and accuracy of control over various processes (such as flow control, temperature control, pressure control and the like) cannot be guaranteed, when the flow control accuracy is insufficient, a series of quality parameters such as the shape, the size and the density of the perform are easy to be abnormal, the product yield is low, and the stability of the growth of a core rod or a cladding in the deposition process is influenced; when the pressure control precision is not enough, the air flow fluctuation is caused, the turbulent air flow prevents the particles which are generated by the reaction but do not participate in the deposition from being stably and smoothly discharged from the exhaust pipeline, if the particles which are not discharged are excessively attached to the inner wall of the cavity to form a mirror surface, heat reflection is caused, the internal temperature is gradually increased, the deposition is influenced, and the particles on the inner wall are likely to be attached to the surface of the preform rod in the deposition due to the peeling of the turbulent air flow, so that the product performance is unstable.
SUMMERY OF THE UTILITY MODEL
In view of the not enough of prior art existence above, the utility model aims at providing an optic fibre preform plug deposition apparatus automatic control system has improved control accuracy, and degree of automation is high.
In order to solve the technical problem, the utility model discloses a technical scheme is: the automatic control system of the optical fiber preform core rod deposition equipment comprises a core rod deposition unit, a raw material supply unit, a detection unit and a control unit; wherein,
a core rod deposition unit: the device comprises a deposition cavity, a lifting assembly and a rotary suspender, wherein the upper end of the rotary suspender is connected to the lifting assembly, the rotary suspender can vertically ascend or descend along with the lifting assembly, the lower side of the rotary suspender is arranged in the deposition cavity, the lower end of the rotary suspender is connected with a deposition target rod, one side of the deposition cavity is provided with an air inlet, and the other opposite side of the deposition cavity is provided with an air outlet;
a raw material supply unit: comprising SiCl4Supply part, N2Supply part, O2Supply part, H2Supply and piping with the SiCl4Supply part, N2Supply part, O2Supply part and H2A deposition burner connected to the supply part, a burner port of the deposition burner being located inside the deposition chamber and facing the deposition target rod, for spraying a deposition raw material toward the deposition target rod;
a detection unit: the device comprises a pressure detector arranged on the inner wall of the deposition cavity and a diameter measuring device arranged on one side of the deposition cavity; the pressure detector is used for detecting the pressure value in the deposition cavity in real time and feeding back the pressure value to the control unit, and the diameter measuring device is used for detecting the diameter of the core rod in real time and feeding back the diameter value to the control unit;
a control unit: the pressure detector and the diameter measuring device are electrically connected with the input end of the PLC, the output end of the PLC is connected with the air inlet, the air outlet and the SiCl4The supply part is electrically connected, and the PLC is used for controlling the opening degrees of the air inlet and the air outlet according to the pressure value fed back by the pressure detector and controlling the jet flow of the deposition blowtorch according to the diameter value fed back by the diameter measuring device.
As an improvement to the above scheme, the control unit further includes an industrial personal computer in bidirectional communication with the PLC controller, and programs can be written into the PLC controller and preset values of the operation parameters can be input and set by the industrial personal computer.
As an improvement to the above scheme, the control unit further includes a touch display screen in bidirectional communication with the PLC controller, and the touch display screen can display real-time operating parameters of the mandrel deposition process and turn on and off the automatic control system of the mandrel deposition apparatus.
As an improvement to the above scheme, the lifting assembly includes a lifting motor, a vertical guide rail and a slider, the lifting motor drives the slider to ascend or descend along the vertical guide rail, the upper end of the rotary suspender is connected to the slider through a cross bar, and the lifting motor is electrically connected to the output end of the PLC controller through a first servo driver.
As an improvement to the above solution, the rotary boom is driven to rotate by a spindle motor, and the spindle motor is electrically connected to an output end of the PLC controller through a second servo driver.
As an improvement to the scheme, the diameter measuring device comprises a first diameter measuring device and a second diameter measuring device which are arranged at intervals up and down.
As an improvement to the above solution, the pressure detector is a gas pressure sensor, and the first caliper and the second caliper are one of a CCD camera and an ultrasonic distance measuring sensor.
As an improvement to the above scheme, the air inlet and the air outlet are respectively provided with a first electromagnetic valve and a second electromagnetic valve, and the air inlet and the air outlet are connected with the output end of the PLC controller through the first electromagnetic valve and the second electromagnetic valve.
As an improvement to the above, the SiCl is4The supply part is connected with the output end of the PLC through a mass flow controller.
The utility model provides an optical fiber perform plug deposition apparatus automatic control system, and convenient for operation has realized the full automatic control of optical fiber perform plug deposition process, has improved production efficiency, has ensured flow parameter in the plug deposition process, the promptness and the precision of pressure parameter control, and the detection and the feedback of each parameter are gone on for continuous real time, the feedback mechanism is rapid, reliable, raw materials granule deposition accuracy is high, and stability is strong, the product quality and the performance of optical fiber perform have been improved, and the device is suitable for large-scale production.
Drawings
FIG. 1 is a block diagram of an automatic control system of an optical fiber preform core rod deposition apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a core rod deposition unit in an embodiment of the present invention.
The parts in the drawings are numbered as follows: 100-deposition target rod; 101-a core rod; 10-a core rod deposition unit; 11-a deposition chamber; 111-air inlet; 1110-a first solenoid valve; 112-air outlet; 1120-a second solenoid valve; 121-a lifting motor; 122-vertical guide rails; 123-a slide block; 124-a cross bar; 13-rotating the boom; 131-a spindle motor; 20-a raw material supply unit; 21-SiCl4A supply section; 210-a mass flow controller; 22-deposition burner; 30-a detection unit; 31-a pressure detector; 32-a caliper measuring device; 321-a first caliper; 322-second caliperA machine; 40-a control unit; 41-a PLC controller; 42-an industrial personal computer; 43-touch display screen; 51-a first servo driver; 52-a second servo driver; a-a first position; b-second position.
Detailed Description
In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be mechanically coupled, directly coupled, indirectly coupled through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
The utility model provides an optic fibre preform plug deposition apparatus automatic control system, please refer to fig. 1, fig. 1 shows in this embodiment optic fibre preform plug deposition apparatus automatic control system's structure, optic fibre preform plug deposition apparatus automatic control system includes plug deposition unit 10, raw materials supply unit 20, detecting element 30 and the control unit 40.
Referring to fig. 2, the core rod deposition unit 10 is used for completing the deposition and formation of an optical fiber preform core rod 101, and fig. 2 shows the structure of the core rod deposition unit 10, wherein the core rod deposition unit 10 includes a deposition chamber 11, a lifting assembly and a rotating boom 13. The upper end of the rotary suspender 13 is connected on the lifting component, the rotary suspender 13 can vertically ascend or descend along with the lifting component, the lower side of the rotary suspender 13 is arranged in the deposition cavity 11, the lower end of the rotary suspender 13 is connected with a deposition target rod 100, after the automatic control system of the core rod deposition equipment is started, the rotary suspender 13 drives the deposition target rod 100 to rotate, meanwhile, the deposition raw material of the core rod is deposited on the surface of the deposition target rod 100, the lifting component drives the rotary suspender 13 and the deposition target rod 101 to gradually ascend, and the core rod 101 is gradually deposited, grown and molded from top to bottom. In an initial state, the deposition target rod 100 is located at a first position a, in the process of forming the core rod 101, the deposition target rod 100 gradually and vertically rises along with the lifting assembly, the core rod 101 gradually deposits and grows from top to bottom, after the deposition target rod 100 rises by the distance of the length of the whole finished core rod, the forming of the core rod 101 is completed, and the core rod 101 is located at a second position B.
Further, the lifting assembly comprises a lifting motor 121, a vertical guide rail 122 and a slider 123, the lifting motor 121 drives the slider 123 to ascend along the vertical guide rail 122, so as to drive the rotary suspension rod 13 and the deposition target rod 100 to ascend, the upper end of the rotary suspension rod 13 is connected to the slider 123 through a cross rod 124, and the cross rod 124 is disposed above the deposition chamber 11.
An air inlet 111 is arranged at one side of the deposition chamber 11, an air outlet 112 is arranged at the other opposite side, in some embodiments, an air intake device may be connected to the air inlet 111, or an air exhaust device may be connected to the air outlet 112, so that a certain pressure is maintained in the deposition chamber 11, so as to form a stable gas flow, ensure that the raw material particles which are not deposited on the surface of the deposition target rod 100 can be discharged out of the cavity 11 efficiently, greatly reduce the chance that the raw material particles are attached to the formed core rod 101, avoid the fluctuation of the growth rate and the density of the core rod 101, meanwhile, the probability of the non-deposition particles adhering to the inner wall of the cavity 11 can be reduced, the raw material particles can be prevented from peeling off from the inner wall of the cavity and adhering to the surface of the core rod to form a region with uneven density, the uniformity of the core rod 101 is improved, and the deposition burner 22 can stably spray the raw material particles. It can be understood that when the pressure in the deposition chamber 11 is too low, the raw material particles that are not deposited on the surface of the deposition target rod 100 cannot be efficiently discharged out of the deposition chamber 11, and when the pressure in the deposition chamber 11 is too high, the raw material particles ejected by the deposition burner 22 are very easy to be deposited unstably and flow out of the deposition chamber 11 along with the air flow, thereby reducing the molding effect of the core rod 101. In this embodiment, the air inlet 111 is disposed on the left sidewall of the deposition chamber, the air outlet 112 is disposed on the right sidewall of the deposition chamber 11, and the optimal pressure range in the deposition chamber 11 is 50-75 Pa.
The raw material supply unit 20 is used for supplying a deposition raw material, which includes SiCl in the present embodiment, to the mandrel deposition unit 104Gas, H2、O2And N2Wherein said SiCl4Flame hydrolysis at high temperature (about 1000 ℃) to generate SiO2I.e. the deposition material of the core rod 101, H2As fuel, which is combusted to provide said high temperature condition, O2As a combustion improver with combustion-supporting effect, N2As a carrier gas for carrying the SiCl4Gas, H2And O2
Accordingly, the source material supply unit 20 includes SiCl4Supply part 21, N2Supply part, O2Supply part, H2Supply partAnd is connected with the SiCl through a pipeline4Supply part 21, N2Supply part, O2Supply part, H2Supply-connected deposition torches 22, the SiCl4Supply part 21, N2Supply part, O2Supply part, H2Supply section supplies SiCl to the deposition torches 22, respectively4Gas, N2、O2And H2Said SiCl4Flame hydrolysis at high temperature to form SiO2A burner of the deposition burner 22 is positioned inside the deposition chamber 11 and facing the deposition target 100, and SiO generated by flame hydrolysis2The core rod 101 is formed by spray-depositing in the form of particles onto the outer surface of the deposition target rod 100 through the burner of the deposition burner 22. When the deposition target rod 100 is in the first position a, the burner of the deposition burner 22 faces the top of the deposition target rod 100.
The detection unit 30 comprises a pressure detection device 31 arranged on the inner wall of the deposition cavity 11 and a diameter measurement device 32 arranged on one side of the deposition cavity 11, wherein the pressure detection device 31 is used for detecting the pressure value in the deposition cavity 11 in real time and feeding back the pressure value to the control unit 40, and the diameter measurement device 32 is used for detecting the forming diameter of the mandrel 101 in real time and feeding back the diameter value to the control unit 40.
The control unit 40 includes a PLC controller 41, an input end of the PLC controller 41 is electrically connected to the pressure detecting device 31 and the diameter measuring device 32, and an output end of the PLC controller 41 is electrically connected to the air inlet 111, the air outlet 112 and the SiCl4The supply part 21 is electrically connected, and the PLC controller 41 is configured to receive the pressure value fed back by the pressure detection device 31 and the molding diameter of the mandrel 101 fed back by the diameter measurement device 32, and control the opening degrees of the air inlet 111 and the air outlet 112 according to the pressure value and control the jet flow rate of the deposition burner 22 according to the diameter value.
Specifically, the PLC controller 41 pre-stores a preset pressure threshold in the deposition chamber 11, compares the received real-time feedback pressure value with the preset pressure threshold, when the feedback pressure value is lower than the preset pressure threshold, the PLC controller 41 sends a control command to decrease the opening of the air inlet 111 or/and the air outlet 112, and when the feedback pressure value is higher than the preset pressure threshold, the PLC controller 41 sends a control command to increase the opening of the air inlet 111 or/and the air outlet 112, so as to keep the air pressure in the deposition chamber 11 within an optimal range, form a stable air flow in the deposition chamber 11, and ensure that the raw material particles that are not deposited on the surface of the deposition target rod 100 can be efficiently discharged out of the deposition chamber 11 without affecting the raw material injection operation of the deposition burner 22, the accuracy and the stability of the deposition of the raw material particles are improved. The pressure preset threshold may be set to an optimum pressure range within the deposition chamber 11. Preferably, the pressure detecting device 31 is a gas pressure sensor.
Further, the air inlet 111 and the air outlet 112 are respectively provided with a first electromagnetic valve 1110 and a second electromagnetic valve 1120, the air inlet 111 and the air outlet 112 are respectively connected to an output end of the PLC controller 41 through the first electromagnetic valve 1110 and the second electromagnetic valve 1120, and the PLC controller 41 achieves the purpose of controlling the opening degrees of the air inlet 111 and the air outlet 112 by controlling the opening degrees of the first electromagnetic valve 1110 and the second electromagnetic valve 1120.
The diameter preset threshold of the mandrel 101 is prestored on the PLC controller 41, the diameter preset threshold can be set to the optimal diameter range of the finished mandrel, the PLC controller 41 compares the received real-time feedback mandrel forming diameter of the diameter measuring device 32 with the diameter preset threshold, when the feedback diameter value is greater than the diameter preset threshold, the PLC controller 41 sends a control instruction to reduce the jet flow of the deposition blowtorch 22, and when the feedback mandrel forming diameter value is less than the diameter preset threshold, the PLC controller 41 sends a control instruction to increase the jet flow of the deposition blowtorch 22, so that the deposition-formed mandrel 101 is kept in the optimal diameter range, and the product quality and performance of the mandrel 101 are improved. In this embodiment, the optimum diameter range of the mandrel 101 is 58.2 mm to 58.8 mm.
Further, the SiCl4The supply section 21 is connected to the output of the PLC controller via a mass flow controller 210. The output end of the PLC controller 41 is connected to the mass flow controller 210, and the PLC controller 41 increases or decreases the SiCl by controlling the opening degree of the valve of the mass flow controller 2104The supply section 21 supplies a flow rate of the raw material to the deposition burner 22, thereby controlling an injection flow rate of the deposition burner 22.
In this embodiment, the diameter measuring device 32 includes a first diameter measuring device 321 and a second diameter measuring device 322 which are arranged at an upper and lower interval, the first diameter measuring device 321 and the second diameter measuring device 322 are arranged outside the deposition chamber and are respectively arranged at the bottom end of the mandrel 101 and the 1/2 length position when the mandrel 101 is located at the second position B (the position where the mandrel 101 is completely formed), during the deposition and growth process of the mandrel 101 from top to bottom, the first diameter measuring device 321 and the second diameter measuring device 322 can respectively collect a first forming diameter value and a second forming diameter value of the mandrel 101 according to a certain time interval and feed back the collected first forming diameter value and second forming diameter value to the PLC controller 41, the PLC controller 41 calculates an average value of the first forming diameter value and the second forming diameter value and compares the average diameter value with a preset diameter threshold value thereon, when the average diameter value is larger than the preset diameter threshold value, the PLC controller 41 sends a control command to decrease the opening of the valve of the mass flow controller 210, so as to decrease the SiCl4The supply section 21 supplies the deposition torch 22 with a flow rate of the source material, and when the average diameter value is smaller than the preset diameter threshold value, the PLC controller 41 sends a control command to increase the opening degree of the valve of the mass flow controller 210, thereby increasing the SiCl4The supply section 21 supplies the deposition torch 22 with a flow rate of the raw material.
In this embodiment, the SiCl4A supply part 21 supplies the deposition burner22 is set to be 5 g/min-20 g/min, and further, the first caliper 321 and the second caliper 322 are one of a CCD camera or an ultrasonic distance measuring sensor.
In this embodiment, the lifting motor 121 is electrically connected to an output end of the PLC controller 41 through a first servo driver 51, and the PLC controller 41 controls the lifting motor 121 to ascend at a set speed through the first servo driver 51. The rotary boom 13 is driven to rotate by a spindle motor 131, the spindle motor 131 is electrically connected to an output end of the PLC controller 41 through a second servo driver 52, and the PLC controller 41 controls the spindle motor 131 to rotate at a set rotation speed through the second servo driver 52.
In this embodiment, the control unit 40 further includes an industrial personal computer 42 connected to the PLC controller 41 in a two-way communication manner, the PLC controller 41 and the industrial personal computer 42 may exchange data therebetween, specifically, the industrial personal computer 42 may write a program into the PLC controller 41 and input the setting of a preset threshold value of the pressure in the deposition chamber 11, a preset threshold value of the diameter of the mandrel 101, a rising speed of the lifting motor 121, and operating parameters such as a rotation speed of the spindle motor 131, and the real-time pressure value fed back by the pressure detection device 31 and the real-time molding diameter value fed back by the diameter measurement device 32, which are received by the PLC controller 41, may be stored on the industrial personal computer, and may be visually displayed on an interface of the industrial personal computer.
In one embodiment, the control unit 40 further includes a touch display screen 43 in bidirectional communication with the PLC controller 41, and the touch display screen 43 can display real-time operation parameters of the deposition process of the mandrel 101 and turn on and off the automatic control system of the mandrel deposition apparatus.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims (9)

1. An automatic control system of optical fiber preform core rod deposition equipment is characterized by comprising a core rod deposition unit, a raw material supply unit, a detection unit and a control unit; wherein,
a core rod deposition unit: the device comprises a deposition cavity, a lifting assembly and a rotary suspender, wherein the upper end of the rotary suspender is connected to the lifting assembly, the rotary suspender can vertically ascend or descend along with the lifting assembly, the lower side of the rotary suspender is arranged in the deposition cavity, the lower end of the rotary suspender is connected with a deposition target rod, one side of the deposition cavity is provided with an air inlet, and the other opposite side of the deposition cavity is provided with an air outlet;
a raw material supply unit: comprising SiCl4Supply part, N2Supply part, O2Supply part, H2Supply and piping with the SiCl4Supply part, N2Supply part, O2Supply part and H2A deposition burner connected to the supply part, a burner port of the deposition burner being located inside the deposition chamber and facing the deposition target rod, for spraying a deposition raw material toward the deposition target rod;
a detection unit: the device comprises a pressure detector arranged on the inner wall of the deposition cavity and a diameter measuring device arranged on one side of the deposition cavity; the pressure detector is used for detecting the pressure value in the deposition cavity in real time and feeding back the pressure value to the control unit, and the diameter measuring device is used for detecting the diameter of the core rod in real time and feeding back the diameter value to the control unit;
a control unit: the pressure detector and the diameter measuring device are electrically connected with the input end of the PLC, the output end of the PLC is connected with the air inlet, the air outlet and the SiCl4The supply part is electrically connected, and the PLC is used for controlling the opening degrees of the air inlet and the air outlet according to the pressure value fed back by the pressure detector and controlling the jet flow of the deposition blowtorch according to the diameter value fed back by the diameter measuring device.
2. The automatic control system of the mandrel deposition equipment according to claim 1, wherein the control unit further comprises an industrial personal computer in bidirectional communication with the PLC, and programs can be written into the PLC through the industrial personal computer and preset values of the operating parameters can be input and set.
3. The automatic control system of the mandrel deposition equipment according to claim 1, wherein the control unit further comprises a touch display screen in bidirectional communication with the PLC, and the touch display screen can display real-time operation parameters of the mandrel deposition process and turn on and off the automatic control system of the mandrel deposition equipment.
4. The automatic control system of the mandrel deposition equipment according to claim 1, wherein the lifting assembly comprises a lifting motor, a vertical guide rail and a slide block, the lifting motor drives the slide block to ascend or descend along the vertical guide rail, the upper end of the rotary suspension rod is connected to the slide block through a cross rod, and the lifting motor is electrically connected with the output end of the PLC through a first servo driver.
5. The automated control system of mandrel deposition apparatus of claim 1 wherein the rotating boom is rotated by a spindle motor, the spindle motor being electrically connected to the output of the PLC controller via a second servo drive.
6. The automatic control system of the mandrel deposition apparatus according to claim 1, wherein the diameter measuring device comprises a first diameter measuring device and a second diameter measuring device which are arranged at an interval from top to bottom.
7. The automated control system of claim 6, wherein the pressure detector is a gas pressure sensor, and the first caliper and the second caliper are one of a CCD camera or an ultrasonic ranging sensor.
8. The automatic control system of the mandrel deposition equipment according to claim 1, wherein the air inlet and the air outlet are respectively provided with a first solenoid valve and a second solenoid valve, and the air inlet and the air outlet are connected with the output end of the PLC controller through the first solenoid valve and the second solenoid valve.
9. The mandrel deposition apparatus of claim 1 fromControl system, characterized in that said SiCl4The supply part is connected with the output end of the PLC through a mass flow controller.
CN201821307862.9U 2018-08-14 2018-08-14 Optical fiber prefabricated rod mandrel depositing device automatic control system Active CN208776584U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110736027A (en) * 2019-11-19 2020-01-31 赣州讯飞腾传导技术有限公司 Pressure linkage control system and method for multi-branch axial vapor deposition reaction
CN115010352A (en) * 2022-07-01 2022-09-06 长飞光纤光缆股份有限公司 Deposition device and method for high-uniformity quartz bar

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110736027A (en) * 2019-11-19 2020-01-31 赣州讯飞腾传导技术有限公司 Pressure linkage control system and method for multi-branch axial vapor deposition reaction
CN115010352A (en) * 2022-07-01 2022-09-06 长飞光纤光缆股份有限公司 Deposition device and method for high-uniformity quartz bar
CN115010352B (en) * 2022-07-01 2024-01-23 长飞石英技术(武汉)有限公司 Deposition device and method for high-uniformity quartz bar

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