CN208752231U - A kind of highly effective antireflection film and optical system of width wavelength domain - Google Patents
A kind of highly effective antireflection film and optical system of width wavelength domain Download PDFInfo
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- CN208752231U CN208752231U CN201821357026.1U CN201821357026U CN208752231U CN 208752231 U CN208752231 U CN 208752231U CN 201821357026 U CN201821357026 U CN 201821357026U CN 208752231 U CN208752231 U CN 208752231U
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Abstract
The utility model discloses a kind of highly effective antireflection film of wide wavelength domain and using the projection display optical system and shooting imaging optical system of the antireflective coating, antireflective coating includes that substrate and being arranged in substrate is successively made of the assembly of thin films that dispersion compensation membrane stack, admittance matching membrane stack and anti-reflection membrane stack are constituted.Dispersion compensation membrane stack is by high refractive index Ta2O5Film and time low-refraction SiO2Film alternately forms；Admittance matches membrane stack by high refractive index Ta2O5Film and low-refraction MgF2Film alternately forms；Anti-reflection membrane stack is successively by middle refractive index Al2O3Film, high refractive index Ta2O5Film and low-refraction MgF2Film composition；Film layer number is 16~23 layers.Average residual reflectivity of the antireflective coating in 450~650nm of wavelength domain is 0.0023%.This antireflective coating is of great significance in Projection Display and shooting imaging system.
Description
Technical field
The utility model relates to highly effective antireflection film technical fields, and in particular to a kind of highly effective antireflection film of width wavelength domain
And projection display optical system and shooting imaging optical system using the antireflective coating.
Background technique
Antireflective coating is a kind of most widely used optical thin film.The optical glass or optics of refractive index 1.5 to 1.9 are moulded
Material, the reflection loss on each of which surface is about 4.0% to 9.6%, and this surface reflection, which is lost, causes two serious consequences: one
It is optical energy loss, reduces the brightness of picture；Second is that surface reflection becomes stray light through optical system multiple reflections, make pair of picture
It is reduced than degree.Obviously, this optical system to the complexity such as Projection Display and photography and vedio recording, this width wavelength domain efficiently subtract
Reflectance coating is extremely critical.
With being constantly progressive for film fabrication techniques, now the characteristic of actual film with the result of Theoretical Design increasingly
It is close.Regrettably, the residual reflectivity of many Single wavelength laser anti-reflection films is typically only capable to reach 0.1% or so so far, and can
The average residual reflectivity of the light-exposed wide wavelength domain anti-reflection film in area is usually 0.2% or so.Reason be exactly actual film not only always
Along with the dispersion difference between substrate and each film and between film and film, but also there is admittance match it is bad
Situation.
The utility model is directed to a kind of highly effective antireflection film of wide wavelength domain, proposes anti-reflection in substrate and existing routine
Dispersion compensation membrane stack is set between membrane stack and admittance matches membrane stack, has respectively obtained the dispersion of antireflective coating and admittance
Kind compensation and matching not only improves the brightness of picture so that the average residual reflectivity loss of antireflective coating is reduced to minimum, and
And stray light is substantially reduced, increase picture contrast.This is to say, dispersion compensation membrane stack and admittance matching membrane stack design are these
The key problem that utility model waits exploring and solving.
Utility model content
The purpose of the utility model is to provide a kind of highly effective antireflection films of wide wavelength domain, by anti-reflection in substrate and routine
Dispersion compensation membrane stack is designed between membrane stack and admittance matches membrane stack, to obtain the Projection Display optical system of low-loss, high comparison
System and shooting imaging optical system.
The design of the utility model is as follows: usually using three-decker to the anti-reflection film of the wide wavelength domain of visible region: substrate
(K9) | quarter-wave di-aluminium trioxide film (λ0/4Al2O3)-half wavelength tantalum pentoxide film (λ0/2Ta2O5)-four
/ mono- wavelength magnesium fluoride film (λ0/4MgF2) | air, λ0=520nm, average residual reflectivity of the membrane system in 450~650nm
It is 0.1545%.But if in K9 substrate and λ0/4Al2O3One layer of λ is inserted between film0/4SiO2Film, i.e. membrane system become from 3-tier architecture
At 4 layers of structure: K9 | λ0/4SiO2-λ0/4Al2O3-λ0/2Ta2O5-λ0/4MgF2| air, at this moment, although SiO2The refractive index of film with
K9 substrate is very close to (respectively 1.463 and 1.519), that is to say, that this layer of SiO2Influence of the film to substrate is very small
, but be actually unexpectedly very large, average remnants to the contribution of the average residual reflectivity of 450~650nm
Reflectivity is reduced to the 0.0281% of 4 layers of structure from the 0.1545% of 3-tier architecture.To find out its cause, in fact, what this layer was inserted into
λ0/4SiO2Film Chang Yinqi refractive index is not much different with K9 substrate and is ignored by film engineers, but exactly to dispersion compensation
There is important contribution with admittance matching.Might as well simply be analyzed as follows: the refractive index of note K9 glass is ng, to central wavelength
520nm, ng=1.519, and to wavelength 450nm, ng=1.527, the dispersion of refractive index difference of K9 glass is between this two wavelength
0.008.If plating λ on K90/4SiO2Film, due to SiO2Refractive index n of the film in 520nm and 450nmsRespectively 1.463 Hes
1.467, dispersion of refractive index difference is 0.004, therefore K9 substrate and SiO2Film is combined into the refractive index after new substrate and (often combination is claimed to lead
Receive) it is Y=ns 2/ ng is respectively 1.4091 and 1.4094, this is to say, this two in the combination admittance Y of 520nm and 450nm
The dispersion of refractive index difference of combined substrate falls below 0.0003 between wavelength, this is poorer than the dispersion of refractive index of K9 glass to reduce fully
26 times！Even compare SiO2The dispersion of refractive index difference of film itself also reduces 13 times！So this layer of λ0/4SiO2Film has strong color
Dissipate compensating action.Referring to see admittance match condition, to 3-tier architecture: K9 | λ0/4Al2O3-λ0/2Ta2O5-λ0/4MgF2| it is empty
Gas, from " Film Optics " it is found that central wavelength, due to intermediate λ0/2Ta2O5Film is that absentee layer can eliminate, as long as so
Analyze K9 | λ0/4Al2O3-λ0/4MgF2| 2 layers of structure of air just, from this 2 layers of structures it is found that Al2O3The refractive index of film is answered
It can be only achieved exact matching when should be for 1.70, and practical Al2O3The refractive index of film only has 1.623 or so (referring to tables 1), this is obviously
It is relatively low, so still having about 0.24% residual reflectivity (referring to Fig. 1).Residual reflectivity to be further decreased, in K9
Substrate and Al2O3In the case that film refractive index is fixed, design K9 substrate is reassembled into a new substrate with film, and
And the refractive index by adjusting film is allowed to the Al with refractive index 1.623 it is expected that reaching the purpose for reducing new substrate refractive index2O3
Match, actually proves that this is feasible.Oneself is analyzed from dispersion of refractive index above it is found that K9 substrate and SiO2Film is combined into new base
The combination admittance Y=1.4091 at bottom reduces about 0.11 than former K9 substrate ng=1.519, and then residual reflectivity can be further
Dropped to for about 0.1% (referring to fig. 2), this explanation, this layer of λ0/4SiO2Film not only has very strong dispersion compensation functions, but also
With very strong admittance matching effect.
Does is next problem that more perfect dispersion compensation and admittance matching how are realized in wide wavelength domain? by anti-
Retrial is tested, and following understanding is achieved: first is that multilayer thin film stack must be used, because monofilm can not have in entire wavelength domain
The admittance of the dispersion of refractive index consistent with substrate and exact matching completely, substrate refractive index dispersion is bigger, and dispersion compensation is got over
Difficulty often needs more film layers or bigger film thickness.From the principle, because dispersion curve is steep, wavelength admittance slightly away
It is just mismatched again quickly with wavelength.Second is that in order to more accurately carry out wide wavelength domain dispersion compensation and wide wavelength domain admittance
Match, it is necessary to dispersion compensation and admittance matching are divided into two membrane stacks, such as the utility model proposes Ta2O5Film and SiO2Film is handed over
The dispersion compensation membrane stack and Ta replaced2O5Film and MgF2The alternate admittance of film matches membrane stack.Third is that dispersion compensation membrane stack and leading
Matching membrane stack of receiving is sequentially placed between K9 substrate of glass and current anti-reflection membrane stack, although dispersion compensation and admittance matching are cross-correlation
Connection, but the dispersion compensation of substrate of glass is first carried out, then carry out admittance matching and be just easier.In this way, it is expected to 450~
The efficient antireflective of average residual reflectivity 0.0023%, minimum residual reflectivity 0.0006% is realized in the wavelength domain of 650nm
Film, this reduces two orders of magnitude than the antireflective coating of the prior art residual reflectivity that is averaged fully！
High refractive index Ta in the above design2O5TiO can be selected in film in some cases2The principle of film, selection is: if
Wavelength in wavelength domain is less than 450nm, must selection Ta in order to reduce absorption loss2O5As high refractive index film, because working as wavelength
When less than 450nm, TiO2The absorption of film sharply increases；It, can be in TiO if the wavelength in wavelength domain is all larger than 450nm2And Ta2O5
In choose any one kind of them material as high refractive index film.
High-index material TiO for the utility model2Or Ta2O5, middle refractive index materials A l2O3, secondary low-refraction
Material SiO2And low-index material MgF2Refractive index near central wavelength 520nm is as shown in table 1.It should be noted that
The wavelength as corresponding to the refractive index in commercial thin film design software TFCal material table is interval, and different, therefore table
The refractive index value near central wavelength 520nm can only be provided in 1.
Table 1
To achieve the above object, the specific technical solution that the utility model is taken is:
A kind of highly effective antireflection film of width wavelength domain, the assembly of thin films including substrate and setting on the substrate, institute
The assembly of thin films stated is constituted by setting gradually dispersion compensation membrane stack on the substrate, admittance matching membrane stack and anti-reflection membrane stack；
The substrate is optical glass or optical plastic；
The dispersion compensation membrane stack by the silicon dioxide film of secondary low-refraction and the tantalum pentoxide film of high refractive index or
Titanium dioxide film alternately forms；
The admittance matching membrane stack is by the magnesium fluoride film of low-refraction and the tantalum pentoxide film or dioxy of high refractive index
Change titanium film alternately to form；
The anti-reflection membrane stack successively by the di-aluminium trioxide film of middle refractive index, high refractive index tantalum pentoxide film or
The magnesium fluoride film of titanium dioxide film and low-refraction composition；
Film layer sum in the assembly of thin films is 16~23 layers.
In the utility model, high refractive index, middle refractive index, secondary low-refraction, low-refraction are relative concept, are shown
The opposite height of the refractive index of each material, is that term is commonly stated in optical field in assembly of thin films.
Further, the substrate is the optical glass or optical plastic that refractive index is 1.5 to 1.9.
Further, the film layer sum in the assembly of thin films is 20 layers.The film layer number of the dispersion compensation membrane stack
It is 8 layers, odd-level (1st, 3,5,7 layer) tantalum pentoxide film for high refractive index outside by substrate, even level (the 2nd, 4,6,8
Layer) be time low-refraction silicon dioxide film, the 1st to the 8th layer of thickness is successively are as follows: 9.18,64.76,14.92,160.28,
4.08,69.34,23.25,206.70, unit nm.
The film layer number of the described admittance matching membrane stack is 9 layers, outside by dispersion compensation membrane stack, odd-level (the 9th, 11,13,
15,17 layers) be high refractive index tantalum pentoxide film, (the 10th, 12,14,16 layer) of even level be low-refraction magnesium fluoride film,
9th to the 17th layer of thickness is successively are as follows: and 72.63,29.36,17.50,121.24,69.04,9.48,37.43,114.92,
19.87, unit nm.
The film layer number of the anti-reflection membrane stack is 3 layers, and outside by admittance matching membrane stack, the 18th to 20 layer is successively three oxidations
Two aluminium films, tantalum pentoxide film and magnesium fluoride film, thickness is successively are as follows: 34.81,61.36,96.74, unit nm.
Further, the highly transmissive wavelength domain of the assembly of thin films is 450~650nm, average residual in this wavelength domain
Coreflection rate is 0.0023%.
Further, if high refractive index tantalum pentoxide film is replaced with titanium dioxide, in the wavelength of 450~650nm
In domain, average residual reflectivity is further reduced to 0.0017%.
Further, assembly of thin films is adjusted by thickness appropriate, so that it may for 60 ° of field angle, i.e., incidence angle from
In the range of 0 ° to 30 °, with every 10 ° of intervals average residual reflectivity calculated for 0.0171%.
The highly effective antireflection film of the wide wavelength domain of the utility model can be used for the Projection Display optical system of low-loss, high comparison
System and shooting imaging optical system.
Compared with prior art, the utility model has the beneficial effects that
1) the current double-layer reflection reducing coating of is most commonly that three-decker: substrate | λ0/4-λ0/2-λ0/ 4 | air or substrate |
λ0/2-λ0/2-λ0/ 4 | air, the former is used for substrate refractive index less than 1.63, and the latter is greater than 1.63 for substrate refractive index
Design.This three-decker mainly considers central wavelength and central wavelength shortwave side and central wavelength long wave in the design process
Admittance matching in a total of three wavelength points of side, to reach the anti-reflective effect of wide wavelength domain, it is clear that its admittance matching is ratio
More rough, and the concept not comprising any dispersion compensation.The utility model is carefully analyzing 4 layers of structure: substrate | λ0/
4SiO2-λ0/4Al2O3-λ0/2Ta2O5-λ0/4MgF2| on the basis of air, propose wide wavelength domain dispersion compensation and admittance matching
Concept, and then have devised Ta2O5Film (or TiO2Film) and SiO2The alternate dispersion compensation membrane stack of film and Ta2O5Film (or
TiO2Film) and MgF2The alternate admittance of film matches membrane stack, and dispersion compensation membrane stack and admittance matching membrane stack be successively plated on substrate with
Between conventional anti-reflection membrane stack, the highly effective antireflection film that residual reflectivity is extremely low in the wide wavelength domain of visible region is obtained.This design
Concept cannot be only used for the low-refraction substrate of such as K9, and be equally applicable to the high refractive index substrate of such as SF57；Not only
It can be used for the situation of vertical incidence light, it can also be used to the case where oblique incident ray.
2) the average residual reflectivity of the wide wavelength domain antireflective coating of visible region of prior art design is usually 0.2%
Left and right, and it is extremely sensitive to substrate refractive index, and even if the antireflective coating number of plies increases, above situation is also still such.And it uses
The design method of the utility model can obtain extremely excellent anti-reflective effect: to the K9 substrate of glass (ng=of low-refraction
1.52@520nm), in the wavelength domain of 450~650nm, if selecting the Ta of high refractive index2O5Film, average residual reflectivity are
0.0023%, minimum residual reflectivity is 0.0006%；If selecting the TiO of high refractive index2Film, average residual reflectivity are
0.0017%, minimum residual reflectivity is 0.0004%.And to SF57 substrate of glass (the ng=1.864@of high refractive index
520nm), dispersion of refractive index is very big, but using the design method of the utility model, if selecting the Ta of high refractive index2O5Film,
Then the average residual reflectivity in the wavelength domain of 450~650nm is 0.0023%, and minimum residual reflectivity is 0.0005%；
If selecting the TiO of high refractive index2Film, average residual reflectivity are 0.0018%, and minimum residual reflectivity is 0.0006%.Thus
It can be seen that: first, no matter to low-refraction substrate or high refractive index substrate, in 450~650nm wavelength domain, the utility model
The average residual reflectivity of antireflective coating reduce two orders of magnitude fully than the conventional membrane system of the prior art, this is to exceed to anticipate
Material！Second, as previously mentioned, the conventional membrane system of the prior art: substrate | λ0/4-λ0/2-λ0/ 4 | air is small for substrate refractive index
In 1.63 the case where, and substrate | λ0/2-λ0/2-λ0/ 4 | the case where air is greater than 1.63 for substrate refractive index, problem is in base
When bottom refractive index is near 1.63, anti-reflective effect can be become very poor.And to the utility model, substrate refractive index from low to high,
Its antireflection characteristic is substantially consistent, exactly because among these the reason of the utility model designed at substrate of glass
Dispersion of refractive index compensates membrane stack, which is inherently adjusted between substrate of glass refractive index and substrate of glass and film layer
Dispersion of refractive index difference, therefore substrate of glass refractive index height and the dispersion difference between substrate of glass and film layer are substantially
It will not cause the too big variation of antireflective coating residual reflectivity.
3) antireflective coating of prior art design generally has biggish angular effect, this is because existing design does not have
Any dispersion of refractive index compensation is carried out, fine admittance matching is not also carried out on wide wavelength domain, in addition the thickness of every tunic
Thicker (although total number of plies is less), various factors superposition causes angular effect more sensitive.And the antireflective coating of the utility model
The field angle that can be used for 60 °, in the range of incidence angle is from 0 ° to 30 °, if with every 10 ° of interval calculations, average residual reflectivity
Rate is only 0.0171%, and reflection preventing ability is still very good.
Detailed description of the invention
Fig. 1 is the light splitting of prior art residual reflectivity of common 3 layers of antireflective coating and wavelength in K9 substrate of glass
Curve；
Fig. 2 is the light splitting curve of the utility model residual reflectivity of 4 layers of antireflective coating and wavelength in K9 substrate of glass；
Fig. 3 is K9 substrate of glass, SiO2Film and K9 substrate and SiO2The dispersion of refractive index curve of film combined substrate, wherein
1 is the dispersion of refractive index curve of K9 substrate of glass, and 2 be SiO2The dispersion of refractive index curve of film, 3 be K9 substrate and SiO2Film combination
The dispersion of refractive index curve of substrate；
Fig. 4 is that the utility model K9 substrate of glass has the residual of the antireflective coating of dispersion compensation membrane stack and admittance matching membrane stack
The light splitting curve of coreflection rate and wavelength；
Fig. 5 is the dispersion of refractive index curve of SF57 substrate of glass；
Fig. 6 is the antireflective coating that the utility model SF57 substrate of glass has dispersion compensation membrane stack and admittance matching membrane stack
The light splitting curve of residual reflectivity and wavelength；
Fig. 7 is that the SF57 substrate of glass of the utility model has the antireflective coating of dispersion compensation membrane stack and admittance matching membrane stack
The refractive index and film thickness profile of system；
Fig. 8 is the utility model using using TiO in the antireflective coating of K9 substrate of glass and SF57 substrate of glass2Replace Ta2O5
The light splitting curve of residual reflectivity and wavelength afterwards；Wherein: a) K9 substrate of glass, b) SF57 substrate of glass；
Fig. 9 be the antireflective coating of the utility model for 60 ° of field angle when residual reflectivity and wavelength light splitting curve,
Wherein: being a) dividing for 10 ° of incident residual reflectivities and wavelength for the light splitting curve of 0 ° of incident residual reflectivity and wavelength, b)
Light curve, c) be 20 ° of incident residual reflectivity and wavelength light splitting curve, d) be 30 ° of incident residual reflectivities and wavelength
Light splitting curve；
Figure 10 be the antireflective of the utility model for 60 ° of field angle when membrane system refractive index and film thickness profile；
Figure 11 is the structural schematic diagram of the wide wavelength domain highly effective antireflection film of the utility model.
Specific embodiment
Fig. 1 is the prior art common 3 layers of antireflective in K9 substrate of glass (Chengdu Guangming Photoelectricity Joint-stock Co., Ltd)
The residual reflectivity of film and the light splitting curve of wavelength, specific film structure are as follows: K9 substrate | λ0/4Al2O3-λ0/2Ta2O5-λ0/
4MgF2| air.This three-decker mainly considers central wavelength 520nm and central wavelength shortwave side in the design process
Admittance matching in tri- wavelength points of 470nm and central wavelength long wave side 595nm, to reach the purpose of wide wavelength domain antireflective.
Obviously, in Fig. 1, the residual reflectivity of central wavelength 520nm is relatively high, this is because Al2O3The too low reason of film refractive index.?
Central wavelength 520nm, if Al2O3The refractive index of film can reach 1.70, then can achieve zero in the residual reflectivity of 520nm.Unfortunate
It is that the stabilizing films that refractive index is 1.70 are hardly resulted in reality, so the helpless Al using refractive index 1.6232O3Film.This
Illustrate that the admittance matching of the antireflective coating is more rough, let alone has the concept of any dispersion compensation.
Fig. 2 is the light splitting curve of the utility model residual reflectivity of 4 layers of antireflective coating and wavelength in K9 substrate of glass,
Specific film structure are as follows: K9 substrate | λ0/4SiO2-λ0/4Al2O3-λ0/2Ta2O5-λ0/4MgF2| air.It can be seen that the membrane system
Only in the K9 substrate and Al of Fig. 1 three-decker2O3Film has interleave one layer of SiO2Film, but being divided curve is but obviously improved.
Front has special analysis, illustrates this tunic while having dispersion compensation functions and admittance matching effect.It is seen on surface, SiO2
The refractive index of film and K9 substrate are very close, are inserted into SiO2Film should on K9 substrate influence less, but in fact, K9 substrate and
SiO2The combination admittance of film but produces significant contribution to dispersion compensation and admittance matching.Thus it inspires, introduces dispersion compensation film
Heap and admittance matching membrane stack improve the antireflection characteristic of wide wavelength domain further.
Fig. 3 is K9 substrate of glass, SiO2Film and K9 substrate and SiO2Refractive index (i.e. combination admittance) color of film combined substrate
Non-dramatic song line, in Fig. 3, from dispersion of refractive index curve 1, the SiO of K9 substrate of glass2The dispersion of refractive index curve 2 of film and combination
The dispersion of refractive index curve 3 of substrate causes three-decker very as can be seen that since the dispersion of refractive index of K9 substrate of glass is bigger
The perfect index match in hardly possible realization all-wave length domain, and SiO2The dispersion of refractive index of film is smaller, it with make after K9 substrate combination
The dispersion of refractive index of combined substrate is almost compensated, this is very favorable to all-wave length domain admittance matching.
Embodiment one
Fig. 4 is that the antireflective coating with dispersion compensation membrane stack and admittance matching membrane stack in the utility model K9 substrate of glass is residual
The light splitting curve of coreflection rate and wavelength.The membrane system overall thickness be 1236nm, a total of 20 tunic, as shown in figure 11, wide wavelength
The highly effective antireflection film in domain, the assembly of thin films including substrate 1 and setting on the base 1, assembly of thin films is by being successively set on base
Dispersion compensation membrane stack 2, admittance matching membrane stack 3 and anti-reflection film on bottom 1 (specific to select K9 substrate of glass or SF57 substrate of glass)
Heap 4 is constituted；It is divided into dispersion compensation membrane stack 2, admittance matching membrane stack 3 and anti-reflection membrane stack 4, wherein 2 number of plies of dispersion compensation membrane stack
It is 8 layers, odd-level (1st, 3,5,7 layer) Ta for high refractive index outside by substrate2O5Film, even level (the 2nd, 4,6,8 layer) are
The SiO of secondary low-refraction2Film, the 1st to the 8th layer of thickness is successively are as follows: and 9.18,64.76,14.92,160.28,4.08,69.34,
23.25,206.70, unit nm；It is 9 layers that admittance, which matches 3 number of plies of membrane stack, outward by dispersion compensation membrane stack 2, odd-level (the 9th,
11,13,15,17 layers) be high refractive index Ta2O5Film, (the 10th, 12,14,16 layer) of the even level MgF for low-refraction2Film, the
9 to the 17th layers of thickness is successively are as follows: and 72.63,29.36,17.50,121.24,69.04,9.48,37.43,114.92,19.87,
Unit is nm；Anti-reflection 4 number of plies of membrane stack is 3 layers, and outward by admittance matching membrane stack 3, the 18th to 20 layer is successively Al2O3Film, Ta2O5
Film and MgF2Film, thickness is successively are as follows: 34.81,61.36,96.74, unit nm.The membrane system is in the flat of wavelength 450-650nm
Equal residual reflectivity is 0.0023%, and minimum reflectance 0.0006%, reflection preventing ability is extremely excellent.Note: practical new at this
In the residual reflectivity light splitting curve diagram of type, the maximum value of ordinate is 0.5%, this is exaggerated 8~10 times than conventional expression.
Embodiment two
Fig. 5 is the dispersion of refractive index curve of SF57 substrate of glass (Xiao Te, Schott).With the folding of the K9 substrate of glass of Fig. 3
The rate dispersion curve of penetrating is compared, it can be seen that not only refractive index is high for SF57 glass, but also dispersion of refractive index is bigger, this refractive index
The very big substrate design of dispersion can be more difficult.
Fig. 6 is the antireflective coating in the utility model SF57 substrate of glass with dispersion compensation membrane stack and admittance matching membrane stack
The light splitting curve of residual reflectivity and wavelength.The membrane system overall thickness is 1215.4nm, a total of 18 tunic (referring to Fig. 7).With Fig. 4
Shown membrane system is similar, and the dispersion compensation membrane stack number of plies is 6 layers, outside by substrate, and (the 1st, 3,5 layer) of odd-level is Ta2O5Film, even number
(the 2nd, 4,6 layer) of layer is SiO2Film；Admittance match the membrane stack number of plies be 9 layers, it is outside by dispersion compensation membrane stack, odd-level (the 7th, 9,
11,13,15 layers) it is Ta2O5Film, (the 8th, 10,12,14 layer) of even level is MgF2Film；The anti-reflection film heap number of plies is 3 layers, by admittance
It is successively Al outward with membrane stack2O3Film, Ta2O5Film and MgF2Film.Average residual reflectivity of the membrane system in wavelength 450-650nm be
0.0023%, minimum reflectance 0.0005%, reflection preventing ability is almost the same with shown in Fig. 4.
Fig. 7 is that the SF57 substrate of glass of the utility model has the antireflective coating of dispersion compensation membrane stack and admittance matching membrane stack
The refractive index and film thickness profile of system.In Fig. 7, ordinate indicates refractive index, and abscissa indicates film thickness, so corresponding each film layer
Refractive index and thickness can be obtained from figure.
Embodiment three
Fig. 8 is to use TiO in the utility model Fig. 4 and antireflective coating shown in fig. 62Replace Ta2O5Rear residual reflectivity with
The light splitting curve of wavelength；Wherein: a) for using K9 substrate of glass the case where, b) be using SF57 substrate of glass the case where.In Fig. 8
(a) in, membrane system overall thickness is 1195nm, a total of 16 tunic.The final average residual reflectivity obtained in wavelength 450-650nm
It is 0.0017%, minimum reflectance 0.0004%.In Fig. 8 (b), membrane system overall thickness is 1416nm, in total and 16 tunics.Most
Acquisition is 0.0016% in the average residual reflectivity of 450~650nm of wavelength eventually, minimum reflectance 0.0003%.As it can be seen that with more
The TiO of high refractive index2Film replaces Ta2O5Residual reflectivity after film is even lower.
Example IV
Fig. 9 be the antireflective coating of the utility model for 60 ° of field angle when residual reflectivity and wavelength light splitting curve；
It is wherein: a) being 0 ° of incidence, b) 10 ° of incidences, c) be 20 ° of incidences, d) it is 30 ° of incidences.In Fig. 9, field angle is designed to 60 °
When, design difficulty increases sharply, and shows: first is that antireflection characteristic is deteriorated；Second is that film layer number increases.Figure 10 is the utility model
Antireflective be used for 60 ° of field angle when membrane system refractive index and film thickness profile.From fig. 10 it can be seen that this membrane system in total 23
Layer, film thickness 1387nm.Film structure and previously described typical structure are different: 20 layers against K9 substrate of glass are
Al2O3And Ta2O5Alternate films, it is believed that dispersion compensation membrane stack and admittance matching membrane stack be fused together；After but 3
Layer anti-reflection film, is followed successively by SiO2、Ta2O5And MgF2.To calculate the average residual reflectivity under full-shape, since 60 ° of field angles are corresponding
In 30 ° of incidence angles, therefore average residual reflectivity (referring to Fig. 9) is first calculated with the incidence angle at 10 ° of intervals, then again to 4 incidences
The residual reflectivity at angle is averaging, and the average residual reflectivity for obtaining the membrane system is 0.0171%, though this value is more practical than above-mentioned
The average residual reflectivity of 0 ° of novel incidence structure rises an order of magnitude, but still than 0 ° of incidence structure of the prior art
The small an order of magnitude of average residual reflectivity, it is clear that 60 ° of field angles, this is still an extremely good wide angle anti-reflection
Penetrate film.It is believed that the susceptibility that dispersion compensation and admittance matched design influence incidence angle on characteristics of antireflecting film is significantly
It reduces, thus remains to obtain excellent antireflection characteristic under 60 ° of field angles.
Claims (8)
1. a kind of highly effective antireflection film of width wavelength domain, the assembly of thin films including substrate and setting on the substrate are special
Sign is, the assembly of thin films is by setting gradually dispersion compensation membrane stack on the substrate, admittance matching membrane stack and anti-reflection
Membrane stack is constituted；
The substrate is optical glass or optical plastic；
The dispersion compensation membrane stack is by the silicon dioxide film of secondary low-refraction and the tantalum pentoxide film of high refractive index or dioxy
Change titanium film alternately to form；
The admittance matching membrane stack is by the magnesium fluoride film of low-refraction and the tantalum pentoxide film or titanium dioxide of high refractive index
Film alternately forms；
The anti-reflection membrane stack is successively by the di-aluminium trioxide film of middle refractive index, the tantalum pentoxide film or dioxy of high refractive index
Change the magnesium fluoride film composition of titanium film and low-refraction.
2. the highly effective antireflection film of width wavelength domain according to claim 1, which is characterized in that in the assembly of thin films
Film layer sum is 16~23 layers.
3. the highly effective antireflection film of width wavelength domain according to claim 1, which is characterized in that in the assembly of thin films
Film layer sum is 20 layers.
4. the highly effective antireflection film of width wavelength domain according to claim 3, which is characterized in that the dispersion compensation membrane stack
Film layer number be 8 layers, it is outside by substrate, the 1st, 3,5,7 layer be high refractive index tantalum pentoxide film, the 2nd, 4,6,8 layer is secondary
The silicon dioxide film of low-refraction, the 1st to the 8th layer of thickness is successively are as follows: and 9.18,64.76,14.92,160.28,4.08,
69.34,23.25,206.70, unit nm.
5. the highly effective antireflection film of width wavelength domain according to claim 4, which is characterized in that the admittance matches membrane stack
Film layer number be 9 layers, it is outside by dispersion compensation membrane stack, the 9th, 11,13,15,17 layer be high refractive index tantalum pentoxide film, the
10,12,14,16 layers of magnesium fluoride film for low-refraction, the 9th to the 17th layer of thickness is successively are as follows: and 72.63,29.36,17.50,
121.24,69.04,9.48,37.43,114.92,19.87, unit nm.
6. the highly effective antireflection film of width wavelength domain according to claim 5, which is characterized in that the film of the anti-reflection membrane stack
The number of plies is 3 layers, and outside by admittance matching membrane stack, the 18th to 20 layer is successively di-aluminium trioxide film, tantalum pentoxide film and fluorination
Magnesium film, thickness is successively are as follows: 34.81,61.36,96.74, unit nm.
7. a kind of projection display optical system, which is characterized in that using the described in any item wide wavelength domains of claim 1~6
Highly effective antireflection film.
8. a kind of shooting imaging optical system, which is characterized in that using the described in any item wide wavelength domains of claim 1~6
Highly effective antireflection film.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109001849A (en) * | 2018-08-22 | 2018-12-14 | 杭州科汀光学技术有限公司 | A kind of highly effective antireflection film and optical system of width wavelength domain |
| CN109001849B (en) * | 2018-08-22 | 2024-04-19 | 杭州科汀光学技术有限公司 | Efficient antireflection film with wide wavelength range and optical system |
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