CN208721594U - A kind of material secondary electron emission characteristic measurement sample pretreatment apparatus - Google Patents
A kind of material secondary electron emission characteristic measurement sample pretreatment apparatus Download PDFInfo
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- CN208721594U CN208721594U CN201821523191.XU CN201821523191U CN208721594U CN 208721594 U CN208721594 U CN 208721594U CN 201821523191 U CN201821523191 U CN 201821523191U CN 208721594 U CN208721594 U CN 208721594U
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- 239000000463 material Substances 0.000 title claims abstract description 42
- 238000005259 measurement Methods 0.000 title abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 84
- 210000004907 gland Anatomy 0.000 claims abstract description 82
- 238000003860 storage Methods 0.000 claims abstract description 73
- 230000033001 locomotion Effects 0.000 claims description 43
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 41
- 238000001816 cooling Methods 0.000 claims description 36
- 239000000498 cooling water Substances 0.000 claims description 18
- 238000009413 insulation Methods 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 11
- 230000009471 action Effects 0.000 claims description 8
- 239000012780 transparent material Substances 0.000 claims description 5
- 238000013461 design Methods 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 13
- 239000000356 contaminant Substances 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 9
- 239000000243 solution Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 12
- 238000012360 testing method Methods 0.000 description 11
- 238000012546 transfer Methods 0.000 description 10
- 238000007872 degassing Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 239000002826 coolant Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007781 pre-processing Methods 0.000 description 3
- 238000002203 pretreatment Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000002285 radioactive effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000005619 thermoelectricity Effects 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000001073 sample cooling Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000005439 thermosphere Substances 0.000 description 1
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Abstract
The utility model discloses a kind of material secondary electron emission characteristics to measure sample pretreatment apparatus, including vacuum cavity and vacuum pump, further includes heating device, the heating device includes bottom bucket and gland；It further include driving portion, the driving portion is for driving gland to move along the direction of bottom bucket open end；It further include sample storage platform, when the gland is fastened on bottom bucket open end, the sample storage platform is located in the space that both bottom bucket and gland are surrounded；It further include crawl transhipment portion and gate portion, the gate portion is as the channel on the outside of the enclosure space and vacuum cavity；It heats in the space that the heating device is used to surround both bottom bucket and gland.The influence that the pretreatment unit can not only effectively eliminate sample surfaces adsorbed gas and volatility organic contaminant measure material secondary electron emission characteristic, while the design of its structure can effectively avoid sample and be transferred to measurement chamber by pretreatment chamber and is secondarily contaminated in the process.
Description
Technical field
The utility model relates to vacuum bakeout equipment technical fields, more particularly to a kind of material secondary electron emission characteristic
Measure sample pretreatment apparatus.
Background technique
When beam bombardment solid material with certain energy, material surface can launch electronics, and this phenomenon is known as
The secondary phenomenon of solid material.The number ratio of the secondary electron that material surface is launched and original incident electronics is known as
Secondary electron yield, it is a kind of figuratrix parameter of material.The secondary electron yield and hair of material surface
The spectral distribution of the secondary electron of injection is not only with material category, incident electron energy and electron impact angle etc. because being known as
It closes, also suffers from the influence of the material surfaces state such as sample surfaces roughness and clean surface degree, especially sample to be tested
Clean surface degree, if the organic contaminant covering of foreign gas or volatility that sample surfaces are adsorbed, then secondary electricity
The test result of sub- emission characteristics is by the actual conditions of substantial deviation detected materials.
Existing secondary electron yield measuring device, some are not equipped with dedicated bakeout degassing pretreatment system,
After sample to be tested carries out solvent cleaning, bakeout degassing pretreatment, this processing mode bakeout degassing are carried out to sample using baking oven
Temperature is low, and degassing effect is not ideal enough, and in transport process of the sample by baking oven to test cavity, there are the productions of exposed atmosphere
The problem of raw secondary pollution.Some devices be equipped with sampling system, it can be achieved that primary multiple samples sample introduction, and in sample test
Heater strip is set on platform, heating degasification pretreatment is carried out to sample to be tested, there is certain degassing effect in situ, but this design
There are sample heating outgassing temperature is not high enough, single can only carry out degassing processing to sample, so that integral experiment test effect
The problems such as rate is lower.
Utility model content
For it is set forth above in the prior art, for the material measured for secondary electron emission characteristic carry out surface
There are secondary pollution after there are problems that temperature deficiency when pretreatment or pre-processing, the utility model provides a kind of material secondary
Electron emission characteristic measure sample pretreatment apparatus, the pretreatment unit can not only effectively eliminate sample surfaces adsorbed gas with
The influence that the organic contaminant of volatility measures material secondary electron emission characteristic, while the design of its structure can effectively avoid sample
It is transferred to during measurement chamber and is secondarily contaminated by pretreatment chamber.
The technological means of this programme is as follows, a kind of material secondary electron emission characteristic measurement sample pretreatment apparatus, including
Vacuum cavity with enclosure space and the vacuum pump being connected with the enclosure space, further include heating device, the heating dress
It sets including the bottom bucket in tubbiness and as the gland of bottom bucket opening end-plate, the heating device is located in the enclosure space；
It further include the driving portion being installed on vacuum cavity, the driving portion is connected by motion transmission member with gland, institute
Driving portion is stated for driving gland to move along the direction of bottom bucket open end；
It further include the sample storage platform being mounted on gland, when the gland is fastened on bottom bucket open end, the sample
Product storage platform is located in the space that both bottom bucket and gland are surrounded；
It further include the crawl transhipment portion and gate portion being fixed on vacuum cavity, the gate portion is as the enclosure space
With the channel on the outside of vacuum cavity, and the channel on off operating mode is adjustable；
Sample storage platform with gland in driving portion under the action of by being removed in bottom bucket after, crawl transhipment portion crawl sample
Product store the sample on platform, and grab the outside that the sample grabbed is transported to enclosure space by transhipment portion by the gate portion；
It heats in the space that the heating device is used to surround both bottom bucket and gland.
Specifically, in the present solution, vacuum generator of the vacuum pump of setting as the confined space, that is, pass through and vacuumize
Mode, vacuum environment is obtained in vacuum cavity.As those skilled in the art, if gland and bottom bucket cooperate post heating device
Interior surrounded space is confined space, in this way, not vacuumized with before bottom bucket cooperation in gland then, if gland and bottom bucket
The space surrounded in cooperation post heating device is non-confined space, then can be to true after sample is installed on sample storage platform
The intracorporal space of cavity carries out vacuumize process.In this way, may make what is surrounded in heating device to be used to accommodate sample storage platform
Space is a vacuum environment under the action of vacuum pump.
It is installed on gland in the present solution, being set as sample storage platform, gland can match under the action of driving portion with bottom bucket
It closes, so that sample storage platform is located in heating device area defined, and heating device is used for both bottom bucket and gland institute
The space surrounded is heated, in this way, in the vacuum chamber measured for sample radioactive nature in compared to the prior art, due to by
The vacuum environment that bottom bucket, gland are surrounded is in design, satisfaction receiving function of sample to sample storage platform and thereon, no
It needs also to need to consider to accommodate sample carrying in volume design as the vacuum chamber for the measurement of sample secondary electron emission characteristic
Platform, secondary electron collector, electron gun etc., therefore use above scheme, it is contemplated that the heat-transfer capability of vacuum environment is compared to atmosphere
The worse characteristic of environment heat-transfer capability is arranged specific heating device form for heating sample, can make easily to sample
Baking temperature is increased to 500 DEG C or more by existing 200 DEG C or so, therefore uses this programme, toasts and pre-processes for sample, not only
Pretreatment efficiency can be improved by way of improving baking temperature, while can also more be had by way of improving baking temperature
The elimination sample surfaces adsorbed gas of effect and the organic contaminant of volatility, avoid the above gas and contaminant to material secondary electronics
Emission characteristics measurement impacts.
Simultaneously in the present solution, be set as include driving portion drive gland, with change gland and bottom bucket matching relationship so that
The state of heating device can be: sample storage platform is in the state convenient for merging sample, sample toasts state, sample storage
Platform is in be converted between the state of sample convenient for taking out.It is set as further including crawl transhipment portion simultaneously, the above crawl transhipment portion exists
Sample storage platform by pretreated sample and is transported to gate portion by crawl after removing in bottom bucket, in specific use, passes through
The side for being set as gate portion is above-described enclosure space, and the other side is for carrying out secondary electron emission characteristic to sample
After the measurement vacuum space of measurement, i.e. gate portion are opened, channel of the gate portion as two vacuum spaces of connection, therefore located in advance
When sample shifts after reason, there is no contact the problem of lead to secondary pollution with atmospheric environment, therefore design can for the structure of this programme
It effectively avoids sample from being transferred to during measurement chamber by pretreatment chamber to be secondarily contaminated.
As those skilled in the art, only need just to open when sample transfer after the pre-treatment with upper lock gate portion, therefore gate
Flashboard in portion may be regarded as a part of vacuum cavity cavity wall, and gate portion can be realized accordingly using slide valve in the prior art
Purpose.The above driving portion may be configured as including the power part as power source, and the above motion transmission member can be used including moving shape
Exporting when state conversion equipment, motion transfering device such as power part are motor is torque, and motion transmission member may be designed as wrapping at this time
Include gear can tooth plate, the gear is meshed with tooth plate, can convert rotational motion into straight reciprocating motion；Also it may be configured as
Motion transmission member includes threaded rod and the sliding block that is threadedly coupled with the threaded rod, and electricity conllinear by threaded rod and electrical axis
Machine driving threaded rod can be passed through around own axis by providing the constraint that anti-limited slip block is rotated with threaded rod for sliding block
The rotation direction of threaded rod is controlled, so that sliding block moves to drive gland towards specific direction along the axis direction of threaded rod
Movement.The power part is set as the actuating device of atmospheric pressure of exportable linear motion, fluid pressure drive device, power transmission part setting
Corresponding purpose can be also realized for the connecting rod between corresponding piston rod and gland.
The above crawl transhipment portion at work, needs to complete crawl, transhipment movement, above as those skilled in the art
Grasping movement, which can be used, is arranged handgrip in the end in crawl transhipment portion, such as mechanical arm, corresponding transhipment movement in addition to can be used with
Other than the mode that upper driving portion driving gland is subjected to displacement in space, the function can also be realized using magnetic rod.
The above crawl transhipment portion and driving portion are required to setting power source, for the benefit of the intracorporal vacuum environment of vacuum chamber, such as
It avoids formation deflation source, pollution medium in vacuum cavity from entering in vacuum cavity, is preferably arranged to the equal position of the above power source
In the outside of vacuum cavity, in this way, corresponding power source can be fixed on the outer wall of vacuum cavity by connecting flange, Xiang Yingyun
Packing seal, O-ring etc. is arranged i.e. in dynamic transferring member or the rod piece needed to protrude between vacuum cavity and vacuum cavity cooperation position
It can guarantee vacuum cavity and extraneous seal isolation.
Further technical solution are as follows:
Due to the sample problem inconsistent there may be volume, geomery, to have this pretreatment unit
Better adaptability and the pretreatment that multiple samples can be completed at the same time, setting are as follows: the sample storage platform is in the form of a column knot
Structure, and multiple slots are provided on the side of sample storage platform.Using this programme, multiple slots can cooperate multiple sample trays,
I.e. by the way that sample tray to be inserted into slot, sample is fixed on the mode on sample tray, so that the volume of sample, shape etc. are no
The mode that sample is installed on sample storage platform is influenced, improves this pretreatment unit to the adaptability of sample；It is set as slot
To be multiple, slots multiple in this way and multiple sample trays cooperate, that is, may make multiple samples to be fixed on sample storage platform with
Improve the pretreatment efficiency of the present apparatus.
As driving portion and the specific implementation in crawl transhipment portion, the driving portion driving gland does linear reciprocation fortune
Dynamic, the grasping end of crawl transhipment portion driving thereon does straight reciprocating motion, grabs transhipment portion with gate portion and is on vacuum cavity
Relationship is arranged in face.Using this programme, driving portion and crawl transhipment portion are logical when completing the position transfer of sample in space
Crossing linear motion can reach corresponding purpose, therefore this programme has the characteristics that structure is simple, facilitates manufacture and maintenance.As ability
Field technique personnel, since sample must transmit between driving portion and crawl transhipment portion, therefore above two straight reciprocating motion needs to have
There is crosspoint, is delivered in above to be realized on overcrossing point.Preferably, phase is moved to reduce both driving portion and crawl transhipment portion
It mutually influences, the direction of motion that may be configured as above two straight reciprocating motion is mutually perpendicular to, and the movement exported such as driving portion is located at perpendicular
Histogram is to the movement of crawl transhipment portion output is located at horizontal direction, further, as driving portion is installed on the top of vacuum cavity
Portion grabs transhipment portion and gate portion and is installed on the side of vacuum cavity, and grabs the side and gate portion place where transhipment portion
Side be a pair to side, heating device is located at the bottom of vacuum cavity, the open end of bottom bucket upward, in sample in heating dress
After setting interior completion pretreatment, the point that crawl transhipment portion can grab is moved up to gland, crawl transhipment portion completes sample crawl
Afterwards, gland is continued up to move for crawl transhipment portion working front edge to gate portion and provide moving conduit.
To improve heat utilization efficiency and improving the pretreatment efficiency to sample, it is provided in the bottom bucket and gland heat-insulated
Layer, in gland after cooperating as bottom bucket opening end-plate and bottom bucket, the thermal insulation layer in both bottom bucket and gland surrounds closed
Space, the sample storage platform are located in the closed space.It may make after gland and bottom bucket cooperation using this programme
Counter sample can be heated in one with extraneous heat-insulated vacuum space.This programme is used, if heating device is to include electricity
Heater strip is arranged on the inside of the thermal insulation layer electric calorifie installation of heated filament.
As those skilled in the art, no matter there is thermal insulation layer or be not provided with thermal insulation layer, can not avoid completely heat
It is transmitted outward by heating device, achievable forces cooling technical solution, setting as a kind of are as follows: the side wall of the bottom bucket is
Dividing wall type structure including outer cylinder and inner cylinder, the outer cylinder are set in the outside of inner cylinder, have gap, institute between outer cylinder and inner cylinder
Stating side wall further includes blocking up under the water cooling upper plugging plate as the gap upper-end closing plate and the water cooling as end-plate under the gap
Plate, the water cooling upper plugging plate, water cooling lower plugging plate, outer cylinder, inner cylinder surround cooling water accommodating chamber, further include one end and cooling water
The outlet pipe that the connected water inlet pipe of accommodating chamber and one end are connected with cooling water accommodating chamber.In the present solution, the inner barrel and outer barrel is equal
It may be configured as being cylindrical in shape structure, water cooling upper plugging plate and water cooling lower plugging plate may be configured as annularly, and above four surround with receiving
The closed cooling water accommodating chamber of heat-absorbing medium, imported by the water inlet pipe and outlet pipe into the cooling water accommodating chamber and
Fluid is exported, for reaching above-mentioned forced cooling function.Using above scheme, heat can effectively avoid more to heating device
It is distributed in the vacuum space in outside, may make the vacuum space temperature-controllable on the outside of heating device, in this way to protect vacuum cavity
Corresponding component in sealing performance, vacuum cavity, so that completing pretreated sample can be after cooled to room temperature by lock
Door portion enters in measurement vacuum chamber.As those skilled in the art, if being provided with thermal insulation layer in bottom bucket, to promote heat utilization
The outside of thermal insulation layer is preferably arranged in rate and raising pretreatment efficiency, the above side wall including cooling water accommodating chamber, i.e. thermal insulation layer is pacified
On inside loaded on inner cylinder.As those skilled in the art, although being defined as water cooling upper plugging plate, water to technical term in this programme
Cold lower plugging plate, cooling water accommodating chamber, water inlet pipe, outlet pipe, actually corresponding cooling medium such as use gas, other liquid also may be used
Realize it is corresponding force cooling effect, therefore when corresponding cooling medium is gas, other liquid is also identical as this programme or equivalent
Scheme.
To reduce the heat that heating device is transmitted to vacuum cavity to improve heat utilization efficiency and pretreatment efficiency, setting
Are as follows: the bottom bucket is fixed on vacuum cavity by plurality of rods part.Specifically, may be configured as the rod piece include connecting screw and
Locating rod, the above locating rod realize the opposite of bottom bucket and vacuum cavity in such a way that bottom bucket and vacuum cavity are inserted into both ends respectively
Position is tentatively fixed, then realizes that the relative position of bottom bucket and vacuum cavity is finally fixed in such a way that connecting screw tenses.Such as
Bottom bucket is installed on vacuum cavity bottom surface, and the open end of bottom bucket upward, may be configured as equal in vacuum cavity bottom surface and bottom bucket bottom surface
With the groove body for being inserted into locating rod, connecting screw realizes the relative position of bottom bucket and vacuum cavity most by way of tension
It is fixed eventually, using this programme, it not only may make bottom bucket and vacuum cavity to obtain reliable connection relationship, while connecting spiral shell in rod piece
Bar quantity is less, can facilitate the assembly of the present apparatus.As those skilled in the art, the above locating rod both ends can also pass through clamping
Mode is connected with bottom bucket, vacuum cavity, and connecting screw can realize bottom bucket and vacuum cavity by way of squeezing to two sides at this time
Relative position fix.
The heating device scheme fast as a kind of heating speed, power is easily controllable, the heating device are electric heating dress
It sets.When using this programme, as a kind of integrated design, it is preferably arranged to be additionally provided with power wiring seat on vacuum cavity.
As one kind convenient for being placed in sample to be processed on sample storage platform and in preprocessing process, facilitate observation true
The implementation of cavity body inner workings, setting are as follows: further include the observation window as vacuum cavity local wall, the sight
The material for examining window is transparent material, and the observation window is as the detachable wall surface or openable wall surface on vacuum cavity.This
In scheme, the above transparent material is to be used to observe the working condition of the present apparatus, the above observation window as on vacuum cavity can
Dismantle wall surface or openable wall surface, i.e., after the observation window disassembles or after opening, as on sample storage platform merging to
Handle the handle hole of sample.As skilled person, manhole method on pressure vessel in the prior art is can be used in the above observation window
Blue, connection scheme of the hand hole flange on pressure vessel.
It further include the vent valve being mounted on vacuum cavity as a kind of integrated design.As those skilled in the art,
The above vent valve, which passes through the vent valve interface being arranged on vacuum cavity, to be connected with vacuum cavity, and the above vent valve is as true
The pressure-equalizing device of cavity body inner space and external environment.
For convenience of the heating temperature of detection heating device, setting are as follows: further include the thermoelectricity for measuring heating device temperature
It is even.
The utility model has the following beneficial effects:
It is installed on gland in the present solution, being set as sample storage platform, gland can match under the action of driving portion with bottom bucket
It closes, so that sample storage platform is located in heating device area defined, and heating device is used for both bottom bucket and gland institute
The space surrounded is heated, in this way, in the vacuum chamber measured for sample radioactive nature in compared to the prior art, due to by
The vacuum environment that bottom bucket, gland are surrounded is in design, satisfaction receiving function of sample to sample storage platform and thereon, no
It needs also to need to consider to accommodate sample carrying in volume design as the vacuum chamber for the measurement of sample secondary electron emission characteristic
Platform, secondary electron collector, electron gun etc., therefore use above scheme, it is contemplated that the heat-transfer capability of vacuum environment is compared to atmosphere
The worse characteristic of environment heat-transfer capability is arranged specific heating device form for heating sample, can make easily to sample
Baking temperature is increased to 500 DEG C or more by existing 200 DEG C or so, therefore uses this programme, toasts and pre-processes for sample, not only
Pretreatment efficiency can be improved by way of improving baking temperature, while can also more be had by way of improving baking temperature
The elimination sample surfaces adsorbed gas of effect and the organic contaminant of volatility, avoid the above gas and contaminant to material secondary electronics
Emission characteristics measurement impacts.
Simultaneously in the present solution, be set as include driving portion drive gland, with change gland and bottom bucket matching relationship so that
The state of heating device can be: sample storage platform is in the state convenient for merging sample, sample toasts state, sample storage
Platform is in be converted between the state of sample convenient for taking out.It is set as further including crawl transhipment portion simultaneously, the above crawl transhipment portion exists
Sample storage platform by pretreated sample and is transported to gate portion by crawl after removing in bottom bucket, in specific use, passes through
The side for being set as gate portion is above-described enclosure space, and the other side is for carrying out secondary electron emission characteristic to sample
After the measurement vacuum space of measurement, i.e. gate portion are opened, channel of the gate portion as two vacuum spaces of connection, therefore located in advance
When sample shifts after reason, there is no contact the problem of lead to secondary pollution with atmospheric environment, therefore design can for the structure of this programme
It effectively avoids sample from being transferred to during measurement chamber by pretreatment chamber to be secondarily contaminated.
Detailed description of the invention
Fig. 1 is that a kind of material secondary electron emission characteristic described in the utility model measures sample pretreatment apparatus one tool
The structural schematic diagram of body embodiment；
Fig. 2 is that a kind of material secondary electron emission characteristic described in the utility model measures sample pretreatment apparatus one tool
The partial sectional view of body embodiment, the cross-sectional view reflect the structure of driving portion and the connection relationship of driving portion and sample storage platform；
Fig. 3 is that a kind of material secondary electron emission characteristic described in the utility model measures sample pretreatment apparatus one tool
The partial structural diagram of body embodiment, which reflects the structure of bottom bucket, and the viewport attempted is located at bottom bucket inferoanterior；
Fig. 4 is that a kind of material secondary electron emission characteristic described in the utility model measures sample pretreatment apparatus one tool
The partial structural diagram of body embodiment, which reflects the structure of bottom bucket, and this attempts the bottom view for bottom bucket；
Fig. 5 is that a kind of material secondary electron emission characteristic described in the utility model measures sample pretreatment apparatus one tool
The partial sectional view of body embodiment, the cross-sectional view reflect the structure of bottom bucket and the connection relationship with vacuum cavity；
Fig. 6 is that a kind of material secondary electron emission characteristic described in the utility model measures sample pretreatment apparatus one tool
The partial sectional view of body embodiment, the cross-sectional view reflect the structure of bottom bucket and the connection relationship with vacuum cavity.
Appended drawing reference in figure is respectively as follows: 1, power part, 2, motion transmission member, 3, connecting flange, 4, gland, and 5, sample deposits
Storage platform, 6, sample tray, 7, thermocouple, 8, water cooling upper plugging plate, 9, inner cylinder, 10, bottom bucket, 11, outer cylinder, 12, water cooling lower plugging plate,
13, locating rod, 14, vacuum cavity, 15, groove body, 16, connecting screw, 17, water inlet pipe, 18, outlet pipe, 19, vent valve interface,
20, power wiring seat, 21, vent valve, 22, driving portion, 23, crawl transhipment portion, 24, gate portion, 25, vacuum pump.
Specific embodiment
Below with reference to embodiment, the utility model is described in further detail, but the structure of the utility model is not only
It is limited to following embodiment.
Embodiment 1:
As shown in Figures 1 to 6, a kind of material secondary electron emission characteristic measures sample pretreatment apparatus, including has envelope
The vacuum pump 25 for closing the vacuum cavity 14 in space and being connected with the enclosure space, further includes heating device, the heating device
Including the bottom bucket 10 in tubbiness and as the gland 4 of the opening end-plate of bottom bucket 10, the heating device is located at the enclosure space
It is interior；
It further include the driving portion 22 being installed on vacuum cavity 14, the driving portion 22 passes through motion transmission member 2 and gland 4
It is connected, the driving portion 22 is for driving gland 4 to move along the direction of 10 open end of bottom bucket；
It further include the sample storage platform 5 being mounted on gland 4, when the gland 4 is fastened on 10 open end of bottom bucket, institute
Sample storage platform 5 is stated to be located in the space that both bottom bucket 10 and gland 4 are surrounded；
It further include the crawl transhipment portion 23 and gate portion 24 being fixed on vacuum cavity 14, described in the conduct of gate portion 24
The channel in 14 outside of enclosure space and vacuum cavity, and the channel on off operating mode is adjustable；
Sample storage platform 5 with gland 4 in driving portion 22 under the action of by bottom bucket 10 remove after, the crawl transhipment portion
Sample on 23 crawl sample storage platforms 5, and grab transhipment portion 23 and the sample grabbed is transported to envelope by the gate portion 24
Close the outside in space；
The heating device is used to heat the space that both bottom bucket 10 and gland 4 are surrounded.
Specifically, in the present solution, vacuum generator of the vacuum pump 25 of setting as the confined space, i.e., true by taking out
Empty mode, obtains vacuum environment in vacuum cavity 14.As those skilled in the art, if after gland 4 and bottom bucket 10 cooperate
The space surrounded in heating device is confined space, in this way, then vacuumized before gland 4 does not cooperate with bottom bucket 10,
If gland 4 and bottom bucket 10 cooperate the space surrounded in post heating device to be non-confined space, sample is installed in sample and is deposited
After storing up on platform 5 vacuumize process can be carried out to the space in vacuum cavity 14.In this way, may make the use surrounded in heating device
In accommodating sample storage platform 5 space under the action of vacuum pump 25 be a vacuum environment.
It is installed on gland 4 in the present solution, being set as sample storage platform 5, gland 4 can be the bottom of under the action of driving portion 22
Bucket 10 cooperates, so that sample storage platform 5 is located in heating device area defined, and heating device is used for bottom bucket 10 and pressure
The space that both lids 4 are surrounded is heated, in this way, in the vacuum measured for sample radioactive nature in compared to the prior art
Chamber, since the vacuum environment surrounded by bottom bucket 10, gland 4 is in design, satisfaction appearance of sample to sample storage platform 5 and thereon
It receives function, does not need also to need to consider in volume design as the vacuum chamber for the measurement of sample secondary electron emission characteristic
Sample plummer, secondary electron collector, electron gun etc. are accommodated, therefore uses above scheme, it is contemplated that the heat transfer energy of vacuum environment
Power is arranged specific heating device form and is used to heat sample compared to the worse characteristic of atmospheric environment heat-transfer capability, can be easily
So that the baking temperature to sample is increased to 500 DEG C or more by existing 200 DEG C or so, therefore this programme is used, is dried for sample
Roasting pretreatment can not only improve pretreatment efficiency by way of improving baking temperature, while can also be by improving baking temperature
The more efficiently elimination sample surfaces adsorbed gas of the form of degree and the organic contaminant of volatility, avoid the above gas and contaminant
Material secondary electron emission characteristic measurement is impacted.
Simultaneously in the present solution, being set as including that driving portion 22 drives gland 4, closed with changing the cooperation of gland 4 and bottom bucket 10
System is so that the state of heating device can be: sample storage platform 5 be in the state convenient for merging sample, sample baking state,
Sample storage platform 5 is in be converted between the state of sample convenient for taking out.It is set as further including crawl transhipment portion 23 simultaneously, grab above
It takes transhipment portion 23 to pass through pretreated sample by crawl after removing in bottom bucket 10 in sample storage platform 5 and is transported to gate portion 24,
In specific use, the side by being set as gate portion 24 is above-described enclosure space, and the other side is for sample
The measurement vacuum space of secondary electron emission characteristic measurement is carried out, i.e., after gate portion 24 opens, gate portion 24 is true as connection two
Absolutely empty channel, therefore when sample after being pre-processed shifts, lead to secondary pollution there is no contacting with atmospheric environment
Problem, therefore the design of the structure of this programme can effectively avoid sample and is transferred to during measurement chamber by pretreatment chamber by secondary dirt
Dye.
As those skilled in the art, only need just to open when sample transfer after the pre-treatment with upper lock gate portion 24, Gu Zha
Flashboard in door portion 24 may be regarded as a part of 14 cavity wall of vacuum cavity, and gate portion 24 uses slide valve in the prior art
Realize corresponding purpose.The above driving portion 22 may be configured as including the power part 1 as power source, and the above motion transmission member 2 can be adopted
With including motion state conversion equipment, motion transfering device, exporting when such as power part 1 be motor is torque, at this time movement biography
Pass part 2 and may be designed as include gear can tooth plate, the gear is meshed with tooth plate, can convert rotational motion into linear reciprocation
Movement；Also may be configured as motion transmission member 2 includes threaded rod and the sliding block that is threadedly coupled with the threaded rod, by threaded rod and
Electrical axis is conllinear and motor driven threaded rod is around own axis, is rotated by providing anti-limited slip block for sliding block with threaded rod
Constraint, can be by controlling the rotation direction of threaded rod, so that sliding block is along the axis direction of threaded rod towards specific direction
Movement is to drive gland 4 to move.The power part 1 is set as the actuating device of atmospheric pressure of exportable linear motion, hydraulic-driven
Device, the connecting rod that power transmission part is set as between corresponding piston rod and gland 4 can also realize corresponding purpose.
The above crawl transhipment portion 23 at work, needs to complete crawl, transhipment movement, as those skilled in the art, with
Upper grasping movement, which can be used, is arranged handgrip, such as mechanical arm in the end in crawl transhipment portion 23, and corresponding transhipment movement is in addition to that can adopt
Other than the mode that is subjected to displacement in space of the above driving portion 22 driving gland 4, the function can also be realized using magnetic rod.
The above crawl transhipment portion 23 and driving portion 22 are required to setting power source, for the benefit of the vacuum ring in vacuum cavity 14
Border such as avoids formation deflation source, pollution medium in vacuum cavity 14 from entering in vacuum cavity 14, is preferably arranged to above dynamic
Power source is respectively positioned on the outside of vacuum cavity 14, in this way, corresponding power source can be fixed on vacuum cavity 14 by connecting flange 3
On outer wall, corresponding sports transferring member 2 or the rod piece needed to protrude between vacuum cavity 14 and 14 cooperation position of vacuum cavity are arranged
Packing seal, O-ring etc. can guarantee that vacuum cavity 14 is sealed off with extraneous.
Embodiment 2:
As shown in Figures 1 to 6, the present embodiment is further qualified on the basis of embodiment 1: since sample may
There is a problem of that volume, geomery are inconsistent, to make this pretreatment unit that there is better adaptability and can be same
When complete the pretreatments of multiple samples, setting are as follows: the sample storage platform 5 is in the form of a column structure, and on the side of sample storage platform 5
It is provided with multiple slots.Using this programme, multiple slots can cooperate multiple sample trays 6, i.e., inserted by the way that sample tray 6 to be inserted into
In slot, sample is fixed on the mode on sample tray 6, so that the volume of sample, shape etc. do not influence sample in sample storage platform 5
The mode of upper installation improves this pretreatment unit to the adaptability of sample；Be set as slot be it is multiple, slots multiple in this way with
Multiple sample trays 6 cooperate, that is, multiple samples may make to be fixed in the pretreatment effect for improving the present apparatus on sample storage platform 5
Rate.
Gland 4 is driven to do straight line as driving portion 22 and the specific implementation in crawl transhipment portion 23, the driving portion 22
It moves back and forth, the grasping end of crawl transhipment portion 23 driving thereon does straight reciprocating motion, and crawl transhipment portion 23 and gate portion 24 exist
Relationship is set in face on vacuum cavity 14.Using this programme, driving portion 22 and crawl transhipment portion 23 complete sample in space
In position transfer when, corresponding purpose can reach by linear motion, thus this programme has that structure is simple, facilitate manufacture and
The characteristics of maintenance.As those skilled in the art, since sample must transmit between driving portion 22 and crawl transhipment portion 23, therefore with
Upper two straight reciprocating motion needs to be delivered in above with crosspoint to realize on overcrossing point.It preferably, is reduction driving portion
The movement of both 22 and crawl transhipment portion 23 influences each other, and the direction of motion that may be configured as above two straight reciprocating motion is mutually hung down
Directly, the movement as driving portion 22 exports is located at vertical direction, and the movement that crawl transhipment portion 23 exports is located at horizontal direction, further
, if driving portion 22 is installed on the top of vacuum cavity 14, grabs transhipment portion 23 and gate portion 24 is installed on vacuum cavity 14
Side, and the side for grabbing 24 place of side and gate portion where transhipment portion 23 is a pair of to side, heating device is located at true
The bottom of cavity body 14, the open end of bottom bucket 10 are upward, upward with gland 4 after sample completes pretreatment in heating device
Move to the point that can grab of crawl transhipment portion 23, after crawl transhipment portion 23 completes sample crawl, gland 4 continue up with for
It grabs 23 working front edge of transhipment portion and moves offer moving conduit to gate portion 24.
To improve heat utilization efficiency and improve to the pretreatment efficiency of sample, be provided in the bottom bucket 10 and gland 4 every
Thermosphere, in thermal insulation layer of the gland 4 using after be open as bottom bucket 10 end-plate and the cooperation of bottom bucket 10, in bottom bucket 10 and 4 the two of gland
Closed space is surrounded, the sample storage platform 5 is located in the closed space.Using this programme, in gland 4 and bottom bucket 10
After cooperation, counter sample is aloowed to be heated in one with extraneous heat-insulated vacuum space.This programme is used, if heating
Device is the electric calorifie installation for including heating wire, and heater strip is arranged on the inside of the thermal insulation layer.
As those skilled in the art, no matter there is thermal insulation layer or be not provided with thermal insulation layer, can not avoid completely heat
It is transmitted outward by heating device, as a kind of achievable technical solution for forcing cooling, setting are as follows: the side wall of the bottom bucket 10
It is the dividing wall type structure for including outer cylinder 11 and inner cylinder 9, the outer cylinder 11 is set in the outside of inner cylinder 9, between outer cylinder 11 and inner cylinder 9
With gap, the side wall further includes as the water cooling upper plugging plate 8 of the gap upper-end closing plate and as end seal under the gap
The water cooling lower plugging plate 12 of plate, the water cooling upper plugging plate 8, water cooling lower plugging plate 12, outer cylinder 11, inner cylinder 9 four surround cooling water receiving
Chamber further includes the water inlet pipe 17 that one end is connected with cooling water accommodating chamber and the outlet pipe 18 that one end is connected with cooling water accommodating chamber.
In the present solution, the inner cylinder 9 and outer cylinder 11 may be configured as being cylindrical in shape structure, water cooling upper plugging plate 8 and water cooling lower plugging plate 12 can be set
It is set to annularly, above four surround with the closed cooling water accommodating chamber for accommodating heat-absorbing medium, pass through the water inlet pipe 17
It imports into the cooling water accommodating chamber with outlet pipe 18 and exports fluid, for reaching above-mentioned forced cooling function.Use with
Upper scheme can effectively avoid heat and more distribute into the vacuum space on the outside of heating device, may make heating device in this way
The vacuum space temperature-controllable in outside, to protect 14 sealing performance of vacuum cavity, the corresponding component on vacuum cavity 14, so that
Completing pretreated sample can be entered in measurement vacuum chamber after cooled to room temperature by gate portion 24.As this field
Technical staff, if being provided with thermal insulation layer in bottom bucket 10, to promote heat utilization efficiency and improving pretreatment efficiency, above includes cooling water
The outside of thermal insulation layer is preferably arranged in the side wall of accommodating chamber, i.e. thermal insulation layer is installed on the inside of inner cylinder 9.As those skilled in the art
Member, although being defined as water cooling upper plugging plate 8, water cooling lower plugging plate 12, cooling water accommodating chamber, water inlet pipe to technical term in this programme
17, outlet pipe 18, actually corresponding cooling medium such as use gas, other liquid can also realize corresponding pressure cooling effect, therefore
Corresponding cooling medium is also the scheme identical or equivalent with this programme when being gas, other liquid.
To reduce the heat that heating device is transmitted to vacuum cavity 14 to improve heat utilization efficiency and pretreatment efficiency, setting
Are as follows: the bottom bucket 10 is fixed on vacuum cavity 14 by plurality of rods part.Specifically, may be configured as the rod piece includes connection spiral shell
Bar 16 and locating rod 13, the above locating rod 13 realize bottom bucket 10 in such a way that bottom bucket 10 and vacuum cavity 14 are inserted into both ends respectively
It is tentatively fixed with the relative position of vacuum cavity 14, then bottom bucket 10 and vacuum cavity are realized in such a way that connecting screw 16 tenses
14 relative position is finally fixed.If bottom bucket 10 is installed on 14 bottom surface of vacuum cavity, the open end of bottom bucket 10 is upward, settable
To all have the groove body 15 for being inserted into locating rod 13 in 14 bottom surface of vacuum cavity and 10 bottom surface of bottom bucket, connecting screw 16 passes through drawing
Tight mode realizes that bottom bucket 10 and the relative position of vacuum cavity 14 are finally fixed, and using this programme, not only may make bottom bucket 10
Reliable connection relationship is obtained with vacuum cavity 14, while 16 quantity of connecting screw is less in rod piece, can facilitate the dress of the present apparatus
Match.As those skilled in the art, above 13 both ends of locating rod also can by way of clamping with bottom bucket 10,14 phase of vacuum cavity
Even, connecting screw 16 can realize that bottom bucket 10 and the relative position of vacuum cavity 14 are fixed by way of squeezing to two sides at this time.
The heating device scheme fast as a kind of heating speed, power is easily controllable, the heating device are electric heating dress
It sets.When using this programme, as a kind of integrated design, it is preferably arranged to be additionally provided with power wiring seat on vacuum cavity 14
20。
As one kind convenient for being placed in sample to be processed on sample storage platform 5 and in preprocessing process, facilitate observation true
The implementation of 14 inner workings of cavity body, setting are as follows: further include the observation window as 14 local wall of vacuum cavity, institute
The material for stating observation window is transparent material, and the observation window is as the detachable wall surface or openable wall on vacuum cavity 14
Face.In the present solution, the above transparent material is the working condition for being used to observe the present apparatus, the above observation window is as vacuum cavity 14
On detachable wall surface or openable wall surface, i.e., after the observation window disassembles or open after, as on sample storage platform 5
It is placed in the handle hole of sample to be processed.As skilled person, the above observation window be can be used on pressure vessel in the prior art
The connection scheme of manhole flange, hand hole flange on pressure vessel.
It further include the vent valve 21 being mounted on vacuum cavity 14 as a kind of integrated design.As art technology
Personnel, the above vent valve 21, which passes through the vent valve interface 19 being arranged on vacuum cavity 14, to be connected with vacuum cavity 14, with
Pressure-equalizing device of the upper vent valve 21 as vacuum cavity 14 inner space and external environment.
For convenience of the heating temperature of detection heating device, setting are as follows: further include the thermoelectricity for measuring heating device temperature
Even 7.
Embodiment 3:
Present embodiments provide a kind of specific implementation side of material secondary electron emission characteristic measurement sample pretreatment apparatus
Formula, what 14 periphery top of vacuum cavity connected has vacuum moving platform, and the vacuum moving platform is the driving portion 22, and middle part is set
The magnetic rod in the promising crawl transhipment portion 23 being equipped with and magnetic rod opposite are the slide valve in gate portion 24 and are vacuum pump 25
Molecular pump, 14 bottom of vacuum cavity are connected with vent valve 21 and the power wiring seat 20 as computer heating control power supply introduction point；
Vacuum moving platform is arranged in 14 top of vacuum cavity, and the output end of vacuum moving platform is located at lower end, and sample storage platform 5 and gland 4 connect
It connects on the lower end of vacuum moving platform, bottom bucket 10 is located at immediately below gland 4, and the open end of bottom bucket 10 is upward, bottom bucket 10 and pressure
The heat-barrier material as heat shielding is provided on lid 4.
When carrying out sample introduction operation, first the sample to be tested Jing Guo solvent cleaning treatment is fixed on sample tray 6, is opened fast
Enabling observation window, vacuum moving platform drive 5 face quick operating valve observation window of sample storage platform, five samples are arranged on sample storage platform 5
Product install station, and by five, the sample tray 6 with tabletting is sequentially inserted into as the sample of sample installation station in the form of sheets and thereon
Lattice are stored, vent valve 21 and quick operating valve observation window are then shut, fore pump is opened and molecular pump vacuumizes；To in vacuum cavity 14
Vacuum degree reach 10-3Pa magnitude, vacuum moving platform driving sample storage platform 5 drop in the ring heater for bottom bucket 10,
So that upper and lower two parts heat shield structure: gland 4 and bottom bucket 10 are combined into an entirety, i.e., are wrapped in 5 entirety of sample storage platform
In ring heater；It opens water cooling unit and heater controls power supply, according to the heating of the different set sample of sample to be tested material
Heating rate, thermostat temperature and constant temperature time carry out bakeout degassing pretreatment to sample, are automatically stopped heating after completing baking,
It closes computer heating control power supply and makes sample cooled to room temperature；Before the secondary electron emission characteristic test for starting sample, first
Rising to face by vacuum moving platform driving sample storage platform 5 is to grab the magnetic rod front position in transhipment portion 23, rotates sample
Storage platform makes the manipulator of 6 face magnetic rod front end of sample tray, and manipulator grabs sample tray 6 for sample by sample storage
It is taken out in platform 5, vacuum moving platform driving sample storage platform 5 continues to rise to the height for not stopping magnetic rod to move；It is pre- to open this
Sample is sent by magnetic rod and measures indoor sample test microscope carrier, then received by the slide valve between processing unit and measuring chamber
Magnetic rod is returned, slide valve is closed, carries out the test of secondary electron emission characteristic to sample in measuring chamber；After completing test, beat
Plate valve is opened a sluice gate, magnetic rod withdraws sample tray together with sample, and vacuum moving platform driving sample storage platform drops to sky and deposits
The position for storing up lattice face magnetic rod front end robot, sample tray is put back in sample storage platform, and then mobile example stores platform 5
Position, manipulator grabs next sample to be tested；According to above-mentioned steps be sequentially completed the transmitting of five samples to be tested, test,
After recycling, slide valve and vacuum-pump power supply are closed, after the shutdown of vacuum pump 25, opens the vent valve 21 connecting with nitrogen cylinder,
So that the air pressure in vacuum cavity 14 is reverted to atmospheric pressure, open quick operating valve observation window, vacuum moving platform is mobile by sample storage platform 5
To face quick operating valve observation window, successively take out five samples for completing test, then entire sample introduction, bakeout degassing pretreatment, sample presentation,
The process test, varied is fully completed.
There are five sample storage lattice for the side of sample storage platform 5, and each sample storage lattice are to be inserted into for sample tray 6
Groove is fixed on sample tray upper surface by the tabletting on sample tray having a size of 20mm × 20mm × 2mm sample, with sample
Product pallet 6 can once be put into five samples to be tested in sample storage platform 5；Sample storage platform 5 passes through three layers of heat shielding of top
Structure is connected with the bottom of gland 4, and gland 4 is connected with the vacuum moving platform being installed at the top of vacuum chamber, is driven by vacuum moving platform
Dynamic sample storage platform 5 is moved up and down and is rotated in vacuum cavity 14.
Ring heater and the outer layer of heat shielding mechanism are water cooling sleeve, and inside is heater, and the two is connected respectively to bottom
On the blank flange in portion；The outside of bottom bucket 10 is also provided with three layers of heat shielding, three layers of heat shielding of bottom bucket 10 and outside and most
The water cooling sleeve of outside is coaxial configuration；By water cooling upper plugging plate 8, inner cylinder 9, outer cylinder 11, water cooling lower plugging plate 12, water inlet pipe 17 and go out
Water pipe 18 forms complete water cooling sleeve, by water cooling unit cooling water is recycled in water cooling sleeve, can take away heating dress
The heat of going out that scatters and disappears is set, avoids other position excessive temperature rises of vacuum cavity 14, entire water cooling sleeve is by inlet and outlet pipes and locating rod
13 are fixed on blank flange together；The periphery of heating device is three layers of thermal shield, by connecting screw after forming a whole
16 are fixed in the flange support ring of blank flange；Coiling armouring heater strip forms heating furnace inside heating device, adds to dropping to
The whole heated baking carried out under vacuum state of sample storage platform 5 in thermal, close to sample storage platform in heating furnace
Nearby it is separated by arrangement K-type thermocouple on three positions in 120 ° of orientation by upper, middle and lower, by thermocouple junction block and power wiring seat
20, thermocouple temperature measurement signal and heating furnace wiring are connected on Heating Furnace Control power supply；It is fed back by K-type thermocouple, it can be
After setting heating rate, thermostat temperature and constant temperature time, so that Heating Zone Temperature uniformity controlling is at ± 10 DEG C in heating furnace.By
Heating Furnace Control power supply automatically supervises the in due course sample temperature in holding temperature, temperature uniformity and sample cooling procedure
Control is automatically stopped heating and cooled to room temperature after completing heating.
The above content is the further descriptions made in conjunction with specific preferred embodiment to the utility model, cannot recognize
Determine specific embodiment of the present utility model to be only limited to these instructions.For the common skill of the utility model technical field
For art personnel, the other embodiments obtained in the case where not departing from the technical solution of the utility model be should be included in corresponding real
With in novel protection scope.
Claims (10)
1. a kind of material secondary electron emission characteristic measures sample pretreatment apparatus, including the vacuum cavity with enclosure space
(14) and with the enclosure space vacuum pump (25) being connected, further includes heating device, which is characterized in that the heating device packet
The bottom bucket (10) in tubbiness and the gland (4) as bottom bucket (10) opening end-plate are included, the heating device is located at the closing
In space；
Further include the driving portion (22) being installed on vacuum cavity (14), the driving portion (22) by motion transmission member (2) with
Gland (4) is connected, and the driving portion (22) is used to that gland (4) to be driven to move along the direction of bottom bucket (10) open end；
Further include the sample storage platform (5) being mounted on gland (4), is fastened on bottom bucket (10) open end in the gland (4)
When, the sample storage platform (5) is located in the space that both bottom bucket (10) and gland (4) are surrounded；
It further include the crawl transhipment portion (23) and gate portion (24) being fixed on vacuum cavity (14), gate portion (24) conduct
Channel on the outside of the enclosure space and vacuum cavity (14), and the channel on off operating mode is adjustable；
Sample storage platform (5) with gland (4) in driving portion (22) under the action of by removing in bottom bucket (10) after, the crawl turns
Fortune portion (23) grabs the sample on sample storage platform (5), and grabs transhipment portion (23) for the sample grabbed by the gate portion
(24) it is transported to the outside of enclosure space；
The heating device is used to heat the space that both bottom bucket (10) and gland (4) are surrounded.
2. a kind of material secondary electron emission characteristic according to claim 1 measures sample pretreatment apparatus, feature exists
In the sample storage platform (5) is in the form of a column structure, and is provided with multiple slots on the side of sample storage platform (5).
3. a kind of material secondary electron emission characteristic according to claim 2 measures sample pretreatment apparatus, feature exists
In driving portion (22) driving gland (4) does straight reciprocating motion, and the grasping end of crawl transhipment portion (23) driving thereon is done directly
Line moves back and forth, and relationship is arranged in face on vacuum cavity (14) in crawl transhipment portion (23) and gate portion (24).
4. a kind of material secondary electron emission characteristic according to claim 1 measures sample pretreatment apparatus, feature exists
In, be provided with thermal insulation layer on the bottom bucket (10) and gland (4), gland (4) using as bottom bucket (10) opening end-plate with
After bottom bucket (10) cooperation, the thermal insulation layer in bottom bucket (10) and gland (4) the two surrounds closed space, the sample storage platform
(5) it is located in the closed space.
5. a kind of material secondary electron emission characteristic according to claim 1 measures sample pretreatment apparatus, feature exists
In the side wall of the bottom bucket (10) is the dividing wall type structure for including outer cylinder (11) and inner cylinder (9), and the outer cylinder (11) is set in interior
The outside of cylinder (9) has gap between outer cylinder (11) and inner cylinder (9), the side wall further includes as the gap upper-end closing plate
Water cooling upper plugging plate (8) and water cooling lower plugging plate (12) as end-plate under the gap, the water cooling upper plugging plate (8), water cooling
Lower plugging plate (12), outer cylinder (11), inner cylinder (9) four surround cooling water accommodating chamber, further include that one end is connected with cooling water accommodating chamber
Water inlet pipe (17) and the outlet pipe (18) that is connected with cooling water accommodating chamber of one end.
6. a kind of material secondary electron emission characteristic according to claim 1 measures sample pretreatment apparatus, feature exists
In the bottom bucket (10) is fixed on vacuum cavity (14) by plurality of rods part.
7. a kind of material secondary electron emission characteristic according to claim 1 measures sample pretreatment apparatus, feature exists
In the heating device is electric heater unit.
8. a kind of material secondary electron emission characteristic according to claim 1 measures sample pretreatment apparatus, feature exists
In further including the observation window as vacuum cavity (14) local wall, the material of the observation window is transparent material, and described
Observation window is as the detachable wall surface or openable wall surface on vacuum cavity (14).
9. a kind of material secondary electron emission characteristic according to claim 1 measures sample pretreatment apparatus, feature exists
In further including the vent valve (21) being mounted on vacuum cavity (14).
10. a kind of material secondary electron emission characteristic as claimed in any of claims 1 to 9 measures sample pretreatment
Device, which is characterized in that further include for measuring the thermocouple of heating device temperature (7).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821523191.XU CN208721594U (en) | 2018-09-18 | 2018-09-18 | A kind of material secondary electron emission characteristic measurement sample pretreatment apparatus |
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| CN201821523191.XU CN208721594U (en) | 2018-09-18 | 2018-09-18 | A kind of material secondary electron emission characteristic measurement sample pretreatment apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896594A (en) * | 2018-09-18 | 2018-11-27 | 中国工程物理研究院流体物理研究所 | A kind of material secondary electron emission characteristic measurement sample pretreatment apparatus |
| CN112946002A (en) * | 2021-02-05 | 2021-06-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | In-situ spectroscopy characterization system |
-
2018
- 2018-09-18 CN CN201821523191.XU patent/CN208721594U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896594A (en) * | 2018-09-18 | 2018-11-27 | 中国工程物理研究院流体物理研究所 | A kind of material secondary electron emission characteristic measurement sample pretreatment apparatus |
| CN108896594B (en) * | 2018-09-18 | 2024-02-06 | 中国工程物理研究院流体物理研究所 | Material secondary electron emission characteristic measurement sample preprocessing device |
| CN112946002A (en) * | 2021-02-05 | 2021-06-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | In-situ spectroscopy characterization system |
| CN112946002B (en) * | 2021-02-05 | 2023-03-03 | 中国科学院苏州纳米技术与纳米仿生研究所 | In-situ spectroscopy characterization system |
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