CN208721309U - A kind of simple oil filling core body - Google Patents

Abstract

It is light-weight, it is at low cost, manufacture a kind of same simple oil filling core body of qualification rate, the upper and lower side of shell is connected with tube socket and convoluted diaphragm respectively, diffused-silicon pressure chip is connected on the tube socket, it is described envelope filled to be equipped with silicone oil, the shell is suitable for reading with the in-flanges being stamped and formed out, lateral margin is withheld above the tube socket outer rim in the arc in-flanges, tube socket is set to be fixed on the shell, mouth has the pressure ring of outer company under the shell, and the convoluted diaphragm is placed between the shell and pressure ring, and the shell, convoluted diaphragm and pressure ring are welded in together.The utility model is for manufacturing diffusion silicon pressure sensor.

Description

A kind of simple oil filling core body

Technical field

The utility model relates to sensors, especially diffusion silicon pressure sensor.

Background technique

Oil filling core body is a kind of packing forms of diffusion silicon pressure sensor.Diffused-silicon pressure chip package is in stainless steel case In body；Impressed pressure is transmitted on pressure chip by the silicone oil of stainless steel diaphragm, inner sealing, and pressure chip is not directly contacted with By side medium, the structure of whole solid state of pressure measurement is formed.

1, diffused-silicon pressure chip

Diffused-silicon pressure chip is using monocrystalline silicon as matrix, using advanced ion implantation technology and micromachined work Skill, is made the pressure-sensing device with Wheatstone bridge and precision mechanics structure, and size can accomplish 1*1*0.5mm.

The principle is as follows Fig. 1, shown in 2, ring structure and closed loop configuration are separated.It, can R1=R2=wherein when pressure is 0 R3=R4=R；When pressurized, R1 and R3 resistance decrease, R2 and R4 resistance value rise, and 4 resistance variations amplitudes are consistent, i.e. △ R.Then Vout=Vout+-Vout-=Vcc* △ R/R.If △ R changes linearly (perfect condition) under stress, then Vout is in pressure Linear change.The output of actual dispersion silicon is illustrated in fig. 3 shown below (certain model 100psi diffused-silicon pressure chip).

2, oil filling core body structure, principle

Fig. 4 is the structural schematic diagram of oil filling core body.Oil filling core body mainly by stainless steel casing 5, convoluted diaphragm 6, silicone oil 3, TO tube socket 1, diffused-silicon pressure chip 2 form.Its production process are as follows: 1) by TO tube socket electric current pressure welding on stainless steel casing；2) Diffused-silicon pressure chip is sticked on TO tube socket simultaneously pressure welding spun gold；3) silicone oil is filled；4) laser welding wave under high temperature, vacuum environment Line diaphragm.

3, oil filling core body advantage and disadvantage

Advantage:

High sensitivity.The severity factor for spreading silicon-sensitive resistance is 50~80 times higher than metal strain plate, its full scale Signal is exported in 80-100mv or so.

Precision is high.The impression of diffusion silicon pressure sensor, sensitive conversion and the detection Trinity, no mechanical moving part connection Conversion links, so repeatability and lag error very little.Since the rigidity of silicon materials is good, deformation is small, thus sensor is linear Also very good.Therefore comprehensive statement precision is very high.

High reliablity.The amount of elastic deformation of silicon-sensitive diaphragm is spread in the microstrain order of magnitude, and diaphragm maximum displacement exists Carry out the micron order of magnitude, and without mechanical wear, no fatigue, no aging.

Frequency response is high.Since the inherently frequency of sensitive diaphragm silicon materials is high, generally in 50KC.Manufacturing process uses The effective area of integrated technique, diaphragm can be equipped with the preposition installation special designing of rigid structure, respond sensor frequency with very little It is very high, using bandwidth up to zero-frequency to 100 kHz.

Good corrosion resistance.Suitable for various severe corrosive medium environment.It is widely used in petroleum, chemical industry, metallurgy, electricity Power, electronic system, aerospace, medical treatment, automobile, electromechanical equipment etc..

Disadvantage:

Price is high.Its cost usually accounts for 60% or more of pressure transducer assembly sheet.

Volume is big, weight is big.Oil filling core body diameter minimum gauge is 19mm, and height is generally more than 15mm, and weight exists 150g or more, and the weight of the ceramic pressure sensor of same diameter is within 40g.

Complex process.The technique for needing the high technology contents such as ultrasonic wire bonding, electric current pressure welding, laser welding, technique step Rapid more, technical difficulty is big, and wherein laser welding need to carry out under high temperature, vacuum environment, and technical difficulty is maximum.

● equipment cost is high.Supersonic pressure welding machine, electric current press welder, laser-beam welding machine are all the equipment of high technology content, It is expensive；The vacuum chamber that can be increased temperature needs to customize, expensive.

Summary of the invention

The utility model to solve the diffusion silicon pressure sensor in prior art oil filling core body volume and weight it is big, system Make complex process, problem at high cost provides a kind of simple oil filling core body of the utility model, this core construction letter thus It is single, it is easy to make, it is at low cost.

To solve the above problems, the technical solution adopted in the utility model be on the shell, downside be connected with respectively tube socket and Convoluted diaphragm, is connected with diffused-silicon pressure chip on the tube socket, it is described it is envelope filled be equipped with silicone oil, be characterized in that described outer Shell is suitable for reading with the in-flanges being stamped and formed out, and lateral margin is withheld above the tube socket outer rim in the arc in-flanges, consolidates tube socket There is the pressure ring of outer company due to mouth under the shell, the shell, the convoluted diaphragm is placed between the shell and pressure ring, institute Shell, convoluted diaphragm and pressure ring is stated to be welded in together.

The in-flanges is preferably arc in-flanges.

The arc flange carries out interior compression by flange pre-set on shell, by hydraulic press, and flange is turned over Camber flange.

The utility model is described in further detail with reference to the accompanying drawings and detailed description.

Detailed description of the invention

Fig. 1 is diffused-silicon pressure chip open loop type bridge circuit schematic diagram；

Fig. 2 is diffused-silicon pressure core sign closed loop bridge circuit schematic diagram；

Fig. 3 is diffused-silicon pressure chip output characteristic curve figure；

Fig. 4 is the oil filling core body structural schematic diagram in prior art；

Fig. 5 is the oil filling core body structural schematic diagram of the utility model；

Fig. 6 is shell, convoluted diaphragm and pressure ring combination schematic diagram in Fig. 5 core；

Fig. 7 is schematic diagram before shell in Fig. 6, convoluted diaphragm and pressure ring weld；

Fig. 8 is schematic diagram after shell in Fig. 6, convoluted diaphragm and pressure ring weld；

Fig. 9 is status diagram before the utility model punching press flange；

Figure 10 is status diagram after the utility model punching press flange；

Figure 11 is the utility model vacuum oil status diagram.

Specific embodiment

A kind of simple oil filling core body, the upper and lower side of shell 5 are connected with tube socket 1 and convoluted diaphragm 6 respectively, diffusion are connected on tube socket 1 Silicon pressure chip 2 fills in shell 5 and is equipped with silicone oil 3, and shell 5 is suitable for reading with the arc in-flanges 8 being stamped and formed out, the arc varus Lateral margin is withheld above 1 outer rim of tube socket in side, and tube socket 1 is made to be fixed on shell 5, and the lower mouth of shell 5 has the pressure ring 10 of outer company, wave Line diaphragm 6 is placed between shell 5 and pressure ring 10, and shell 5, convoluted diaphragm 6 and pressure ring 10 are welded in together.

The manufacturing process of the utility model:

1) laser welding convoluted diaphragm

Convoluted diaphragm 6 is clipped between stainless steel casing 5 and pressure ring 10, then is welded with laser-beam welding machine.Weld nothing High temperature, vacuum are needed, at normal temperature, avoiding the prior art needs the rigors of high temperature, vacuum environment.

2) TO tube socket is bonded diffused-silicon pressure chip

Diffused-silicon pressure chip 2 is bonded on TO tube socket 1 with super glue.

3) spun gold pressure welding

With supersonic pressure welding machine by spun gold pressure welding on 1 stitch of diffused-silicon pressure chip 2 and TO tube socket.

4) TO tube socket flange

Rubber seal 4, TO tube socket 1 are placed on the shell that convoluted diaphragm 6 is welded, carried out with hydraulic press mold M Interior compression flange, punching machine presses speed control is within 0.2m/S.After flange, shell 5, tube socket 1 and convoluted diaphragm 6 form one A entirety with inner cavity.

5) vacuum injection silicone oil

Under room temperature, in vacuum chamber, silicone oil is injected in shell 5 by the oil fuel tube 7 on tube socket 1 with note needle 9, until Silicone oil overflows.

6) oil fuel tube is blocked up

Oil fuel tube is pinched, then oiling pipe end is melted with laser-beam welding machine, is blocked.

7) oil filling core body is cleaned

Oil filling core body is cleaned with silicone oil cleaning agent.

Under represent the simple oil filling core body performance indexes of common oil filling core body and the utility model.

Project	Common oil filling core body	The utility model
			Nonlinearity (%FS)	0.25	0.4
Sensitivity (mS)	1	1
			Temperature drift -40~125 DEG C (%FS)	0.1	0.5
Reliability (2MPa inflation/deflation 600,000 times)	Performance is constant	Performance is constant
			Leak pressure (MPa)	35	12
Weight (g)	106	32
			Disqualification rate (‰)	15	4
Produce 10,000 average unit costs (member /)	65	23

As can be seen from the above table, compared with common oil filling core body, the simple oil filling core body of the utility model nonlinearity, Performance is slightly worse in temperature drift, leak pressure, has great advantage in weight, qualification rate, cost, and be fabricated to pressure sensor at After product, by the amendment of rear end professional treatment chip, temperature compensation, sensor is entirely capable of in the precision of -40~125 DEG C of temperature ranges Accomplish 0.4%FS, can apply to general precision detection instrument.

Claims (2)

1. a kind of simple oil filling core body, the upper and lower side of shell (5) is connected with tube socket (1) and convoluted diaphragm (6) respectively, on the tube socket Be connected with diffused-silicon pressure chip (2), it is described it is envelope filled be equipped with silicone oil (3), it is characterized in that the shell it is suitable for reading have punching press shape At in-flanges, lateral margin is withheld above the tube socket outer rim in the arc in-flanges, and tube socket is made to be fixed on the shell, described Mouth has the pressure ring (10) of outer company under shell, and the convoluted diaphragm (6) is placed between the shell and pressure ring, the shell, wave Line diaphragm and pressure ring are welded in together.

2. simple oil filling core body as described in claim 1, it is characterized in that the in-flanges is arc in-flanges (8).