CN208656730U - High performance surface wave filter - Google Patents
High performance surface wave filter Download PDFInfo
- Publication number
- CN208656730U CN208656730U CN201821533345.3U CN201821533345U CN208656730U CN 208656730 U CN208656730 U CN 208656730U CN 201821533345 U CN201821533345 U CN 201821533345U CN 208656730 U CN208656730 U CN 208656730U
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- China
- Prior art keywords
- material layer
- piezoelectric material
- metal electrode
- high performance
- wave filter
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 claims abstract description 56
- 239000002184 metal Substances 0.000 claims abstract description 32
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 230000000694 effects Effects 0.000 claims abstract description 19
- 238000000429 assembly Methods 0.000 claims abstract description 15
- 230000000712 assembly Effects 0.000 claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims abstract description 9
- 239000007769 metal material Substances 0.000 claims description 7
- 239000011358 absorbing material Substances 0.000 claims description 4
- 229910013336 LiNiO3 Inorganic materials 0.000 claims description 3
- 229910012463 LiTaO3 Inorganic materials 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 230000002708 enhancing effect Effects 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000005489 elastic deformation Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 230000000644 propagated effect Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The utility model provides a kind of high-performance SAW filter, including substrate, support column, the piezoelectric material layer for being set to upper part of the supporting column and transducer assemblies in the piezoelectric material layer top；Position is hollow structure among support column, is formed between piezoelectric material layer and substrate conducive to surface acoustic wave by the hollow region of piezoelectric material Es-region propagations；Transducer assemblies include sending transducer unit and reception transducer unit；And the transmission transducer unit includes the first metal electrode component and signal source unit, in actual moving process, entered inside the hollow region by the surface acoustic wave that transmission transducer unit and piezoelectric material layer are collectively formed, by the reflection of hollow region, it is finally traveled to by piezoelectric material layer absorption and receives transducer unit position, since hollow region can preferably reflect surface acoustic wave, avoid the ill effect that surface acoustic wave is absorbed by substrate in traditional structure, it is more advantageous to the realization of filter function, effect is prominent.
Description
[technical field]
The utility model relates to filter product technical field, more particularly to it is a kind of reasonable in design, filter effect is prominent
High-performance SAW filter out.
[background technique]
With the fast development of the communication technology, microwave communication system (such as radar and communication system) is to performance of filter
It is required that higher and higher, these filters need to realize that high q-factor, low insertion loss, Out-of-band rejection decline the spies such as precipitous, small in size
Property.Filter in the prior art tends not to meet these requirements, and conventional filter is at narrowband, the damage of filter
Consumption can be very high, on the other hand, if conventional filter expects higher performance, generally results in volume and further increases, and
Filter effect is poor.
Based on this, those skilled in the art has carried out a large amount of research and development and experiment, the tool produced from SAW filter
Body construction portion, which is started with, to be improved and improves, and achieves preferable achievement.
[utility model content]
To overcome the problems of prior art, the utility model provides a kind of reasonable in design, and filter effect is prominent
High-performance SAW filter out.
The scheme that the utility model solves technical problem is to provide a kind of high-performance SAW filter, including substrate,
It is set to the support column on the substrate top, is set to the piezoelectric material layer of the upper part of the supporting column and in the piezoelectricity
The transducer assemblies on material layer top；Position is hollow structure, the shape between piezoelectric material layer and substrate among the support column
The hollow region propagated is absorbed by piezoelectric material layer at surface acoustic wave is conducive to；The transducer assemblies include sending energy converter list
Member and reception transducer unit；And the transmission transducer unit includes being used to form reciprocal piezoelectric effect, generating elastic deformation, life
At the first metal electrode component of surface acoustic wave and the signal source unit with the first metal electrode component electric connection；Institute
State receive transducer unit include be used to form direct piezoelectric effect, generate electric signal the second metal electrode component and with it is described
The load unit that second metal electrode component is electrically connected.
Preferably, the piezoelectric material layer both ends are additionally provided with the sound-absorbing material unit for absorbing part surface acoustic wave.
Preferably, the first metal electrode component, the second metal electrode component all include the forward direction in interdigitated setting
Metal electrode unit and negative sense metal electrode unit.
Preferably, the thickness range of the piezoelectric material layer is 0.1-250um.
Preferably, it is additionally provided between the support column and piezoelectric material layer for enhancing piezoelectric material layer intensity, control
The metal material layer of filter bandwidht.
Preferably, the thickness range of the metal material layer is 0.02-300um.
Preferably, the altitude range of position hollow structure is 1-200um among the support column.
Preferably, the thickness range of the transducer assemblies is 0.02-300um.
Preferably, the piezoelectric material layer includes LiTaO3、LiNiO3, quartz crystal, ALN or ZnO.
Compared with prior art, a kind of high-performance SAW filter of the utility model pass through and meanwhile be arranged substrate 11,
It is set to the support column 12 on 11 top of substrate, the piezoelectric material layer 13 on 12 top of support column is set to and is in and be somebody's turn to do
The transducer assemblies 14 on 13 top of piezoelectric material layer, and the intermediate position of support column 12 is designed as hollow structure, in piezoelectricity
The hollow region propagated in piezoelectric material layer 13 conducive to surface acoustic wave, actual motion are formed between material layer 13 and substrate 11
In the process, entered inside the hollow region by the surface acoustic wave that transmission transducer unit and piezoelectric material layer 13 are collectively formed, warp
Hollow region reflection is crossed, is finally traveled to by piezoelectric material layer 13 and receives transducer unit position, since hollow region can be right
Surface acoustic wave is preferably reflected, and avoids the ill effect that surface acoustic wave is absorbed by substrate 11 in traditional structure, more favorably
In the realization of filter function, effect is prominent.
[Detailed description of the invention]
Fig. 1 is the section status architecture schematic diagram of the utility model first embodiment high-performance SAW filter.
Fig. 2 is the first metal electrode component, second in the utility model first embodiment high-performance SAW filter
The flat state structural schematic diagram of metal electrode component.
Fig. 3 is the section status architecture schematic diagram of the utility model second embodiment high-performance SAW filter.
[specific embodiment]
To make the purpose of this utility model, technical solution and advantage are more clearly understood, with reference to the accompanying drawings and embodiments,
The present invention will be further described in detail.It should be appreciated that specific embodiment described herein is used only for explaining this
Utility model is not used to limit this utility model.
It please refers to Fig.1 to Fig.3, the utility model high-performance SAW filter 1 includes substrate 11, is set to the base
The support column 12 on 11 top of plate, the piezoelectric material layer 13 for being set to 12 top of support column and be in the piezoelectric material
The transducer assemblies 14 on 13 top of layer；The intermediate position of the support column 12 is hollow structure, in piezoelectric material layer 13 and substrate 11
Between be formed with the hollow region propagated conducive to surface acoustic wave by piezoelectric material layer 13；The transducer assemblies 14 include sending to change
It can device unit and reception transducer unit；And the transmission transducer unit includes being used to form reciprocal piezoelectric effect, generating elasticity
Deformation, the first metal electrode component for generating surface acoustic wave and the signal source being electrically connected with the first metal electrode component
Unit；It is described receive transducer unit include be used to form direct piezoelectric effect, generate electric signal the second metal electrode component with
And the load unit being electrically connected with the second metal electrode component.
The application passes through while substrate 11 is arranged, the support column 12 for being set to 11 top of substrate, is set to the branch
The piezoelectric material layer 13 on 12 top of dagger and transducer assemblies 14 in 13 top of piezoelectric material layer described in this, and will support
The intermediate position of column 12 is designed as hollow structure, is formed between piezoelectric material layer 13 and substrate 11 conducive to surface acoustic wave by piezoelectricity
The hollow region that material layer 13 is propagated in actual moving process, is collectively formed by transmission transducer unit and piezoelectric material layer 13
Surface acoustic wave enter the hollow region inside, by the reflection of hollow region, reception is finally traveled to by piezoelectric material layer 13
Transducer unit position, since hollow region (highly-resistant material that air is sonic transmissions) can carry out preferably surface acoustic wave
Reflection, avoid the ill effect that surface acoustic wave is absorbed by substrate 11 in traditional structure, be more advantageous to the reality of filter function
Existing, effect is prominent.
Preferably, 13 both ends of piezoelectric material layer are additionally provided with the sound-absorbing material list for absorbing part surface acoustic wave
Member.The surface acoustic wave backwards to reception transducer unit direction of the generation of piezoelectric material layer 13 can be absorbed in sound-absorbing material unit.
Preferably, the first metal electrode component, the second metal electrode component all include the forward direction in interdigitated setting
Metal electrode unit 141 and negative sense metal electrode unit 142.Electrical effect is prominent.
Preferably, the thickness range of the piezoelectric material layer 13 is 0.1-250um.Using the filtering of the design frame mode
Device can effectively reduce in the thickness and the first metal electrode component, the second metal electrode component of piezoelectric material layer 13 just
To the gap of metal electrode unit 141 and negative sense metal electrode unit 142, increase positive metal electrode unit 141 and negative sense gold
The electrode width for belonging to electrode unit 142 reduces the difficulty of processing of electrode, improves accuracy.
Preferably, a kind of high-performance SAW filter 2 of the second embodiment includes substrate 21, is set to the base
The support column 22 on 21 top of plate, the piezoelectric material layer 23 for being set to 22 top of support column and be in the piezoelectric material
The transducer assemblies 24 on 23 top of layer, are additionally provided with for enhancing piezoelectric material layer 23 between support column 22 and piezoelectric material layer 23
Intensity, the metal material layer 25 for controlling filter bandwidht.The addition of metal material layer 25 can be further improved properties of product, increase
Strong filtering frequency selects effect and accuracy.
Preferably, the thickness range of the metal material layer 25 is 0.02-300um.
Preferably, the altitude range of the intermediate position hollow structure of the support column (12/22) is 1-200um.
Preferably, the thickness range of the transducer assemblies (14/24) is 0.02-300um.
Preferably, the piezoelectric material layer 13 includes but is not limited to LiTaO3、LiNiO3, quartz crystal, ALN or ZnO.
Compared with prior art, the utility model high-performance SAW filter 1 passes through while being arranged substrate 11, setting
In 11 top of substrate support column 12, be set to the piezoelectric material layer 13 on 12 top of support column and in this is described
The transducer assemblies 14 on 13 top of piezoelectric material layer, and the intermediate position of support column 12 is designed as hollow structure, in piezoelectric material
It is formed between layer 13 and substrate 11 conducive to surface acoustic wave in the hollow region propagated by piezoelectric material layer 13, actual moving process
In, entered inside the hollow region by the surface acoustic wave that transmission transducer unit and piezoelectric material layer 13 are collectively formed, in
The reflection of empty region is finally traveled to by piezoelectric material layer 13 and receives transducer unit position, since hollow region can be to sound
Surface wave is preferably reflected, and is avoided the ill effect that surface acoustic wave is absorbed by substrate 11 in traditional structure, is more advantageous to
The realization of filter function, effect are prominent.
Above-described the utility model embodiment, does not constitute the restriction to scope of protection of the utility model.It is any
Modifications, equivalent substitutions and improvements made within spirit of the present utility model and principle etc., should be included in the utility model
Claims within.
Claims (9)
1. high performance surface wave filter, it is characterised in that: including substrate, the support column that is set to the substrate top, setting
In the piezoelectric material layer of the upper part of the supporting column and transducer assemblies in piezoelectric material layer top described in this；The support
Position is hollow structure among column, is formed between piezoelectric material layer and substrate conducive to surface acoustic wave in piezoelectric material Es-region propagations
Hollow region；The transducer assemblies include sending transducer unit and reception transducer unit；And the transmission energy converter
Unit include be used to form reciprocal piezoelectric effect, generate elastic deformation, generate surface acoustic wave the first metal electrode component and with
The signal source unit that the first metal electrode component is electrically connected；The reception transducer unit includes being used to form positive piezoelectricity
Effect, the second metal electrode component for generating electric signal and the component list being electrically connected with the second metal electrode component
Member.
2. high performance surface wave filter as described in claim 1, it is characterised in that: the piezoelectric material layer both ends are also set up
There is the sound-absorbing material unit for absorbing part surface acoustic wave.
3. high performance surface wave filter as claimed in claim 1 or 2, it is characterised in that: the first metal electrode component,
Second metal electrode component all includes the positive metal electrode unit and negative sense metal electrode unit in interdigitated setting.
4. high performance surface wave filter as described in claim 1, it is characterised in that: the thickness range of the piezoelectric material layer
For 0.1-250um.
5. high performance surface wave filter as described in claim 1 or 4, it is characterised in that: the support column and piezoelectric material
The metal material layer for enhancing piezoelectric material layer intensity, controlling filter bandwidht is additionally provided between layer.
6. high performance surface wave filter as claimed in claim 5, it is characterised in that: the thickness range of the metal material layer
For 0.02-300um.
7. high performance surface wave filter as described in claim 1, it is characterised in that: the hollow knot in position among the support column
The altitude range of structure is 1-200um.
8. high performance surface wave filter as described in claim 1, it is characterised in that: the thickness range of the transducer assemblies
For 0.02-300um.
9. high performance surface wave filter as described in claim 1 or 4, it is characterised in that: the piezoelectric material layer includes
LiTaO3, LiNiO3, quartz crystal, ALN or ZnO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821533345.3U CN208656730U (en) | 2018-09-19 | 2018-09-19 | High performance surface wave filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821533345.3U CN208656730U (en) | 2018-09-19 | 2018-09-19 | High performance surface wave filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208656730U true CN208656730U (en) | 2019-03-26 |
Family
ID=65792868
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821533345.3U Expired - Fee Related CN208656730U (en) | 2018-09-19 | 2018-09-19 | High performance surface wave filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208656730U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108880502A (en) * | 2018-09-19 | 2018-11-23 | 刘月 | A kind of high performance surface wave filter |
-
2018
- 2018-09-19 CN CN201821533345.3U patent/CN208656730U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108880502A (en) * | 2018-09-19 | 2018-11-23 | 刘月 | A kind of high performance surface wave filter |
| CN108880502B (en) * | 2018-09-19 | 2023-11-14 | 刘月 | High-performance surface wave filter |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190326 |
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| CF01 | Termination of patent right due to non-payment of annual fee |