CN103546117B - Two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide - Google Patents
Two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide Download PDFInfo
- Publication number
- CN103546117B CN103546117B CN201210247336.9A CN201210247336A CN103546117B CN 103546117 B CN103546117 B CN 103546117B CN 201210247336 A CN201210247336 A CN 201210247336A CN 103546117 B CN103546117 B CN 103546117B
- Authority
- CN
- China
- Prior art keywords
- directions
- dimensional
- radio frequency
- acoustic wave
- photonic crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention relates to a two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide which comprises a two-dimensional metal dot matrix disposed on the piezoelectric substrate. The lattice constant in the y direction of the two-dimensional metal dot matrix is in proportion to the lattice constant in the x direction to allow the pass band in the x direction to correspond to the stop band in the y direction, specifically the lattice constant in the y direction of the two-dimensional metal dot matrix is 1.5-4.5 times of the lattice constant in the x direction. By the two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide, acoustic surface waves of radio frequency bands can be transmitted efficiently in the x direction of the piezoelectric photonic crystal, energy effective reflection in the y direction can be achieved, and the radio frequency band sound wave guide function can be achieved.
Description
Technical field
The present invention relates to piezoelectric device field, more particularly to a kind of two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide.
Background technology
At present, conventional two-dimensional symmetric phonon crystal, i.e. x directions and y directions lattice paprmeter is equal, can be used for improving humorous
Shake the performance of device, as shown in Figure 1.Due to band gap distribution one on the x directions and y directions obtained by the two-dimensional symmetric phonon crystal
Cause, the sound wave being in band gap realizes that energy is totally reflected on x directions and y directions.Therefore photonic crystal structure is used as reflecting grating
With energy leakage is prevented, the resonator behavior of high q-factor is obtained.
In existing patent CN200410077471.9 utility model patent " acoustic construction of 2 D phonon crystal " and
CN200420102759.2 utility model patents " acoustic construction of 2 D phonon crystal ", CN200910061996.6 utility models are special
Sharp " a kind of periodic damping structure for automobile and its vibration and noise reducing method ", CN201020198828.X utility model patents are " compound
The application of conventional phonon crystal is directed in three-dimensional phonon crystal automobile exhaust muffler ", is passed in periodical media using sound wave
The forbidden band characteristic broadcast reach sound insulation, eliminate the noise or noise reduction purpose, these technologies adopt non-piezoelectric material, therefore are only applied to low frequency
Field, and acoustic waveguide function can not be realized.
Development and maturation with micro-or nano size processing technology, the application of phonon crystal is no longer limited to macro-size
Low frequency section, and it is equally applicable in the radio frequency band of MHz/GHz.IEEE.UFFC in 2010:Pp.30-37 articles《A SAW
resonator with two-dimensional reflectors》Mention a kind of new two-dimentional catoptric arrangement surface acoustic wave
Resonator.Two-dimensional metallic dot matrix in the structure is only bound by acoustic surface wave energy in resonator, improves the resonant Q of resonator
Value, so as to improve the performance of resonator.The SAW resonator can be applicable to radio band, but simply complete sound table with dot matrix
Limitation function of the wave energy on x directions and y directions, realizes resonator behavior, can not realize acoustic waveguide function.
The content of the invention
It is an object of the invention to provide a kind of two-dimensional piezoelectric phonon crystal radio frequency that can realize radio band acoustic waveguide function
Acoustic waveguide.
For achieving the above object, the invention provides a kind of two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide, it is characterised in that
Including the two-dimensional metallic dot matrix being arranged on piezoelectric substrate, y directions lattice paprmeter and the x directions lattice of the two-dimensional metallic dot matrix
Constant is proportional so that the passband on x directions is corresponding to the stopband on y directions.
Further, the y directions lattice paprmeter of the two-dimensional metallic dot matrix is proportional to x directions lattice paprmeter is specially institute
State 1.5～4.5 times that y directions lattice paprmeter is x directions lattice paprmeter.
Further, the two-dimensional metallic dot matrix adopts metallic material of aluminum, copper, tungsten or gold.
Further, the cross sectional shape of the two-dimensional metallic dot matrix is circular, square, oval, rectangle.
The present invention can make the surface acoustic wave of radio band realize efficient propagation on x directions in phonon crystal, in y-direction
Realize that Energy Efficient reflects, so as to realize radio band acoustic waveguide function.
Description of the drawings
Fig. 1 is conventional two-dimensional symmetric phonon crystal resonator structure schematic diagram；
Fig. 2 is the two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide structural representation of the embodiment of the present invention；
Fig. 3 is 360YX lithium tantalates are the two-dimensional symmetric aluminium pixel frequency response diagram of piezoelectric substrate；
Fig. 4 is the two-dimensional symmetric aluminium pixel frequency response diagram that Y-Z lithium niobates are piezoelectric substrate；
Fig. 5 is 1280YX lithium niobates are the two-dimensional symmetric aluminium pixel frequency response diagram of piezoelectric substrate
Fig. 6 is the two-dimensional symmetric aluminium pixel frequency response diagram that ST-X quartz is piezoelectric substrate
Fig. 7 is the 128 of the embodiment of the present invention0YX lithium niobates are responded for the two-dimentional sound wave modulation aluminium pixel frequency of piezoelectric substrate
Figure.
Specific embodiment
Below by drawings and Examples, technical scheme is described in further detail.
As shown in Fig. 2 it is the two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide structural representation of the embodiment of the present invention.
Two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide includes two-dimensional metallic dot matrix 1 and piezoelectric substrate 2.Two-dimensional metallic dot matrix 1
With y directions lattice paprmeter be in the form of 1.5～4.5 times of x directions lattice paprmeter layout on piezoelectric substrate 2.Wherein, two-dimensional gold
Category dot matrix can be circular, square, oval or rectangle etc. using the metal materials such as aluminium, copper, tungsten or gold, its shape of cross section.
The band connection frequency f in the x directions of two-dimensional metallic dot matrix 1x,pWith stop-band frequency fx,sBy formula（1）With（2）It is calculated,
fX, p=Vp/a （1）
fx,s=Vs/a （2）
A for two-dimensional metallic dot matrix 1 x directions lattice paprmeter, VpAnd VsFor passband different in two-dimensional metallic dot matrix 1 and resistance
With corresponding acoustic wave mode speed, generally there are multiple values.
Likewise, the band connection frequency f in the y directions of two-dimensional metallic dot matrix 1y,pWith stop-band frequency fy,sBy formula（3）With（4）Meter
Obtain,
fy,p=Vp/b （3）
fy,s=Vs/b （4）
B is the y directions lattice paprmeter of two-dimensional metallic dot matrix 1.
If during equal with the y directions lattice paprmeter b i.e. two-dimensional symmetric metal lattice of x directions lattice paprmeter a, y directions
It is the corresponding stop-band frequency in x directions that stop-band frequency is corresponding, i.e. fy,s=Vs/b=Vs/a=fx,s, so x directions and y directions are simultaneously anti-
Acoustic surface wave energy is penetrated, acoustic waveguide function can not be realized.
In order to realize acoustic waveguide function, then need to change lattice paprmeter a and b, make the stop-band frequency correspondence x directions on y directions
On passband.Assume that a is constant, change b, then the stop-band frequency and band connection frequency in x directions is constant, and the stop-band frequency in y directions
Can change with band connection frequency.Adjustment b so that stop-band frequency f on y directions 'y,sPassband f on correspondence x directionsx,p, so fx,p=
f’y,s=Vs/b.Thus formula can be obtained（5）, by formula（5）It can be seen that the y directions stop-band frequency and x of two-dimensional symmetric metal lattice
Direction band connection frequency ratio is equal to the lattice paprmeter ratio in y directions and x directions.
fy,s/fx,p=（Vs/a）/(Vs/b)=b/a （5）
Therefore according to the x directions band connection frequency and y directions stop-band frequency ratio adjustment two-dimensional metallic of two-dimensional symmetric metal lattice
The x directions of dot matrix 1 and y directions lattice paprmeter ratio can just realize that surface acoustic wave x directions in piezoelectric photonic crystal efficiently pass through,
And realize that Energy Efficient reflects in y directions, so as to realize acoustic waveguide function.
But, the x directions band connection frequency of the two-dimensional symmetric metal lattice 1 on the piezoelectric substrate 2 of different materials and y directions hinder
Band frequency is than difference, therefore the x directions lattice paprmeter after adjusting is also different from y directions lattice paprmeter ratio.
In the present embodiment, piezoelectric substrate 2 adopts lithium tantalate, lithium niobate, quartz, two-dimensional metallic dot matrix 1 to adopt metallic aluminium.Two
All in the λ scopes of 0.5% λ to 10%, λ is surface acoustic wave wavelength to dimension aluminium dot matrix thickness, within the range, two-dimensional lattice frequency response point
Cloth is held essentially constant.
Specifically, piezoelectric substrate 2 adopts 360During YX lithium tantalates, as shown in figure 3, it is 360YX lithium tantalates are piezoelectric substrate
Two-dimensional symmetric aluminium pixel frequency response diagram.It can be seen that the band connection frequency f that x directions ripple is little, relative amplitude is highx,pPoint
Cloth near 0.2, y directions stop-band frequency value fy,sIt is distributed near 0.3～0.36,0.41,0.65,0.75,0.85,0.9, because
This is 1.5～4.5 than b/a values scope than the lattice paprmeter after adjustment according to x directions band connection frequency and y directions stop-band frequency.
When piezoelectric substrate 2 adopts Y-Z lithium niobates, as shown in figure 4, it is the two-dimensional symmetric that Y-Z lithium niobates are piezoelectric substrate
Aluminium pixel frequency response diagram.It can be seen that the band connection frequency f that x directions ripple is little, relative amplitude is highx,pIt is distributed in 0.22 attached
Closely, stop-band frequency value f in y directionsy,sIt is distributed near 0.41～0.48,0.58, therefore according to x directions band connection frequency and y directions
Stop-band frequency is 1.9～2.6 than b/a values scope than the lattice paprmeter after adjustment.
Piezoelectric substrate 2 adopts 1280During YX lithium niobates, as shown in figure 5, it is 1280YX lithium niobates are the two dimension of piezoelectric substrate
Symmetrical aluminium pixel frequency response diagram.It can thus be seen that the band connection frequency f that x directions ripple is little, relative amplitude is highx,pIt is distributed in
Near 0.22, stop-band frequency value f in y directionsy,sIt is distributed near 0.38～0.45,0.5,0.55,0.71,0.84,0.9, therefore
It is 1.7～4.1 than b/a values scope than the lattice paprmeter after adjustment according to x directions band connection frequency and y directions stop-band frequency.
When piezoelectric substrate 2 adopts ST-X quartzy, as shown in fig. 6, it is the two-dimensional symmetric aluminium that ST-X quartz is piezoelectric substrate
Pixel frequency response diagram.It can thus be seen that the high band connection frequency f of the little relative amplitude of x directions ripplex,pIt is distributed near 0.2, y
Stop-band frequency value f in directiony,sIt is distributed near 0.31,0.39,0.5,0.55, therefore according to x directions band connection frequency and y directions
Stop-band frequency is 1.6～2.6 than b/a values scope than the lattice paprmeter after adjustment.
Ratio, the y directions lattice of the two-dimensional metallic dot matrix 1 that can be summarized as on piezoelectric substrate 2 are adjusted by above lattice paprmeter
Constant is 1.5～4.5 times of x directions lattice paprmeter.
By the lattice paprmeter ratio for changing the two-dimensional metallic dot matrix x directions on piezoelectric substrate and y directions so that x directions lead to
Band correspondence y directions stopband, makes surface acoustic wave efficiently pass through in x directions in the two-dimensional piezoelectric phonon crystal, and realizes energy in y directions
Amount effectively reflection, finally makes energy propagate in the x direction, so as to realize radio frequency acoustic waveguide function.
As shown in fig. 7, it is 1280YX lithium niobates modulate aluminium pixel frequency response diagram for the two-dimentional sound wave of piezoelectric substrate.This
The piezoelectric substrate of the two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide in embodiment adopts 1280YX lithium niobates, metal lattice adopts aluminium
Material, x directions lattice period is 10 microns, and the y directions point real cycle is that x directions are brilliant for 18.6 microns, i.e. y directions lattice paprmeter
1.86 times of lattice constant, cylindrical metal aluminium dot matrix radius is 7 microns.As seen from Figure 7, frequency 0.21～0.25 is for x side
To for band connection frequency, for y directions are stop-band frequency, therefore surface acoustic wave frequency is at 0.21～0.25, the two-dimensional piezoelectric sound
Sub- crystal can realize surface acoustic wave Energy Efficient reflection in y-direction, in the x direction efficient propagation.
The substrate of the two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide that the present invention is provided adopts piezoelectric, by piezoelectricity base
The regulation in two-dimensional metallic dot matrix x directions and y directions lattice paprmeter ratio on piece, makes the surface acoustic wave of radio band in phonon crystal
Realize propagating on x directions, realize that energy reflects in y-direction, so as to realize radio band acoustic waveguide function.
Above-described specific embodiment, has been carried out further to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail, should be understood that the specific embodiment that the foregoing is only the present invention, be not intended to limit the present invention
Protection domain, all any modification, equivalent substitution and improvements within the spirit and principles in the present invention, done etc. all should include
Within protection scope of the present invention.
Claims (3)
1. a kind of two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide, it is characterised in that including the two-dimensional gold being arranged on piezoelectric substrate
Category dot matrix, the y directions lattice paprmeter of the two-dimensional metallic dot matrix is proportional to x directions lattice paprmeter so that the passband on x directions
Corresponding to the stopband on y directions；
The y directions lattice paprmeter of the two-dimensional metallic dot matrix specially y directions lattice proportional to x directions lattice paprmeter is normal
Number is 1.5～4.5 times of x directions lattice paprmeter.
2. two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide according to claim 1, it is characterised in that the two-dimensional metallic point
Battle array adopts metallic material of aluminum, copper, tungsten or gold.
3. two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide according to claim 1, it is characterised in that the two-dimensional metallic point
The shape of cross section of battle array is circular, square, oval or rectangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210247336.9A CN103546117B (en) | 2012-07-17 | 2012-07-17 | Two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210247336.9A CN103546117B (en) | 2012-07-17 | 2012-07-17 | Two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103546117A CN103546117A (en) | 2014-01-29 |
| CN103546117B true CN103546117B (en) | 2017-05-10 |
Family
ID=49969243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210247336.9A Active CN103546117B (en) | 2012-07-17 | 2012-07-17 | Two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103546117B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105281599A (en) * | 2015-11-27 | 2016-01-27 | 国网江西省电力科学研究院 | Sound energy collector by adopting phonon crystal and electromechanical Helmholtz resonator |
| CN105634437B (en) * | 2015-12-25 | 2019-01-11 | 宇龙计算机通信科技(深圳)有限公司 | SAW filter, the processing method of SAW filter and communication equipment |
| CN107424599B (en) * | 2017-05-09 | 2021-03-16 | 广东工业大学 | Phononic crystal and method for regulating and controlling sound wave emergent direction |
| CN107733393B (en) * | 2017-11-22 | 2021-04-23 | 中国科学院微电子研究所 | Phononic crystal surface acoustic wave filter and manufacturing method thereof |
| CN109377977A (en) * | 2018-11-29 | 2019-02-22 | 南京航空航天大学 | The piezo-electric type phonon crystal plate of active control propagation path and its application |
| CN110311642B (en) * | 2019-07-10 | 2023-07-14 | 电子科技大学 | Micro-electromechanical resonator integrated with phonon crystal matrix and processing method thereof |
| CN113507276B (en) * | 2021-06-22 | 2024-09-24 | 电子科技大学 | Phonon lattice plate calculation method of cell-like topological structure and micro-electromechanical resonator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101952882A (en) * | 2007-12-21 | 2011-01-19 | 3M创新有限公司 | Viscoelastic phononic crystal |
| CN101989422A (en) * | 2010-11-10 | 2011-03-23 | 北京交通大学 | Non-convex section hole-containing phononic functional material structure and manufacturing method thereof |
| CN202652159U (en) * | 2012-07-17 | 2013-01-02 | 中国科学院声学研究所 | Two-dimensional piezoelectric phononic crystal radio-frequency acoustic waveguide |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI422238B (en) * | 2009-09-25 | 2014-01-01 | Ind Tech Res Inst | Acoustic power generator and the manufacturing method thereof |
-
2012
- 2012-07-17 CN CN201210247336.9A patent/CN103546117B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101952882A (en) * | 2007-12-21 | 2011-01-19 | 3M创新有限公司 | Viscoelastic phononic crystal |
| CN101989422A (en) * | 2010-11-10 | 2011-03-23 | 北京交通大学 | Non-convex section hole-containing phononic functional material structure and manufacturing method thereof |
| CN202652159U (en) * | 2012-07-17 | 2013-01-02 | 中国科学院声学研究所 | Two-dimensional piezoelectric phononic crystal radio-frequency acoustic waveguide |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103546117A (en) | 2014-01-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103546117B (en) | Two-dimensional piezoelectric photonic crystal radio frequency acoustic wave guide | |
| Yuan et al. | On the coupling of resonance and Bragg scattering effects in three-dimensional locally resonant sonic materials | |
| CN1902817B (en) | Boundary acoustic wave device | |
| CN104205632A (en) | Laterally coupled bulk acoustic wave filter with improved passband characteristics | |
| EP1928089A3 (en) | Boundary acoustic wave device | |
| CN114337582B (en) | Surface acoustic wave resonator | |
| Wang et al. | Underwater sound absorption of a meta-absorption layer with double negativity | |
| CN202652159U (en) | Two-dimensional piezoelectric phononic crystal radio-frequency acoustic waveguide | |
| CN106230401A (en) | A kind of slow sound chronotron based on surface acoustic wave phonon crystal | |
| Darinskii et al. | Mutual conversion of bulk and surface acoustic waves in gratings of finite length on half-infinite substrates. I. FE analysis of surface wave generation | |
| Jeon et al. | Elastic coiling-up-space metamaterial | |
| Ravanbod et al. | Innovative lightweight re-entrant cross-like beam phononic crystal with perforated host for broadband vibration attenuation | |
| Davies et al. | Graded quasiperiodic metamaterials perform fractal rainbow trapping | |
| Pillarisetti et al. | Control of Rayleigh wave propagation through imposing Mindlin boundary conditions on the surface | |
| Ravanbod et al. | A thin-walled cavity structure with double-layer tapered scatterer locally resonant metamaterial plates for extreme low-frequency attenuation | |
| Wan et al. | A combined periodic acoustic black hole beams with wide vibration attenuation bands | |
| CN108512525B (en) | Sound surface transverse wave resonant filter | |
| Hsu | Low-frequency forbidden bands in phononic crystal plates with Helmholtz resonators | |
| Chen et al. | Anchor loss reduction of quartz resonators utilizing phononic crystals | |
| JPH09270667A (en) | Surface acoustic wave resonator | |
| CN102739188B (en) | Unidirectional conductor sound wave restrained type sound surface wave device | |
| Huang et al. | Analysis of SAW scattering at discontinuity between periodic gratings using travelling wave excitation and hierarchical cascading technique | |
| Borulko | Superluminal tunneling and negative group delay in layered Bragg structures | |
| Duan et al. | A new eccentric resonance matching layer with anti-reflection characteristics for underwater acoustic scattering suppression | |
| KR102628439B1 (en) | Metamaterial-based elastic wave parallel translator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210927 Address after: 510535 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou, Guangdong Patentee after: Guangdong guangnaixin Technology Co.,Ltd. Address before: 100190, No. 21 West Fourth Ring Road, Beijing, Haidian District Patentee before: INSTITUTE OF ACOUSTICS, CHINESE ACADEMY OF SCIENCES |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A two-dimensional piezoelectric phononic crystal radio frequency acoustic waveguide Effective date of registration: 20230423 Granted publication date: 20170510 Pledgee: Bank of China Limited Guangzhou Development Zone Branch Pledgor: Guangdong guangnaixin Technology Co.,Ltd. Registration number: Y2023980038808 |