CN208645714U - A kind of silicon single crystal rod slicing device - Google Patents
A kind of silicon single crystal rod slicing device Download PDFInfo
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- CN208645714U CN208645714U CN201820710729.1U CN201820710729U CN208645714U CN 208645714 U CN208645714 U CN 208645714U CN 201820710729 U CN201820710729 U CN 201820710729U CN 208645714 U CN208645714 U CN 208645714U
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Abstract
The utility model relates to a kind of silicon single crystal rod slicing devices, including workbench, craft to take piece tooling and saw blade cutting operating mechanism；There is scroll saw recessing groove, scroll saw recessing groove opens up downwards from bench top on workbench；Taking piece tooling by hand includes Magnetic gauge stand, universal support arm and slice sucker, universal support arm one end is connect with Magnetic gauge stand, the other end of universal support arm is connect with slice sucker, and piece tooling is taken to be located on workbench by hand, end face of the slice sucker for the silicon single crystal rod of slice；Saw blade cutting operating mechanism includes rack, saw blade cutting unit and hoisting mechanism, and saw blade cutting unit is located at the top of workbench, and saw blade cutting unit is fixed via hoisting mechanism and rack, and the hoisting mechanism drives saw blade cutting unit to process monocrystalline silicon wafer.Take piece tooling by hand in the present apparatus, clamping monocrystalline silicon piece to be cut, clamping efficiency is high, and the absorption of monocrystalline silicon piece is reliable and stable, easy to operate.
Description
Technical field
The utility model relates to hard and brittle material cutting technology field more particularly to a kind of silicon single crystal rod slicing devices.
Background technique
The photovoltaic industry of use in to(for) silicon wafer is very extensive.In order to meet the mass parameter of the silicon crystal bar work together with lower
Shape, the size of sequence and to silicon rod carry out preparatory processing, it is indispensable in photovoltaic solar cell piece process early period
Step.Firstly the need of seed crystal is processed, evolution processing is carried out to seed crystal, then silicon single crystal rod, or casting are drawn out by seed crystal
Then polysilicon block out is again truncated silicon single crystal rod, polysilicon block, slice processing etc..
Because single silicon wafer matter is thin and frangible.Therefore under normal circumstances, the work of silicon wafer material slice is required using special
The silicon wafer bar slicer of door, to reduce the broken probability of single silicon wafer to the greatest extent.And special silicon wafer bar slicer uses
Cost is excessively high, and the slice work utilization rate of equipment and installations for only carrying out silicon crystal bar is low.In existing silicon wafer process equipment, silicon wafer is cut
Off line with it is closest in slicer structure, work efficiency is high for silicon wafer shear, and truncation surface evenness is high, therefore many producers will
Silicon wafer shear is used in the slice work of silicon crystal bar, but uses the above tables of equipment silicon wafer after the completion of cutting, is cut
Monocrystalline silicon piece lacks clamping tooling clamping, takes piece more difficult, and single silicon wafer, which is easy to be slipped to ground, to be broken into pieces, or falls work
It is cut in recessing groove on platform and pounds disconnected diamond fretsaw, influence to be sliced being normally carried out for work.
Summary of the invention
For this reason, it may be necessary to a kind of silicon single crystal rod slicing device be provided, to solve to carry out being produced into for silicon wafer in the prior art
This height, the silicon wafer of well cutting lack clamping tooling clamping, the problem for taking piece more difficult.
To achieve the above object, a kind of silicon single crystal rod slicing device is inventor provided, the slicing device includes work
Platform takes piece tooling and saw blade cutting operating mechanism by hand；
There is scroll saw recessing groove, the scroll saw recessing groove opens up downwards from bench top, the work on the workbench
Make platform for placing silicon single crystal rod to be cut；
It includes Magnetic gauge stand, universal support arm and slice sucker, described universal support arm one end and magnetic that the craft, which takes piece tooling,
Property gauge stand connection, the other end of universal support arm connect with slice sucker, takes piece tooling to be located on workbench by hand, the slice suction
End face of the disk for the silicon single crystal rod of slice；
The saw blade cutting operating mechanism includes rack, saw blade cutting unit and hoisting mechanism, the saw blade cutting unit
Positioned at the top of workbench, saw blade cutting unit is fixed via hoisting mechanism and rack, and the hoisting mechanism drives saw blade cutting
Unit processes monocrystalline silicon wafer.
As a kind of preferred structure of the utility model, the slicing device further includes multiple idler wheel mechanisms, the multiple
Idler wheel mechanism is symmetrical arranged into two groups along bench top, the position of idler wheel mechanism on the table not with scroll saw recessing groove weight
Folded, the idler wheel mechanism includes U-shaped rolling wheel support frame, connecting rod and idler wheel, and the U-shaped rolling wheel support frame and bench top are solid
Fixed connection, the idler wheel are fixed in the U-lag of rolling wheel support frame via connecting rod, and idler wheel can be rotated around connecting rod.
As a kind of preferred structure of the utility model, the extended line of idler wheel center line is formed default in two groups of idler wheel mechanisms
Angle β, the angle β are 30-60 °.
As a kind of preferred structure of the utility model, the slicing device further includes feeding mechanism, the feeding mechanism
Including conveying mechanism and clamping device, the conveying mechanism includes carriage and driving mechanism, and the driving mechanism is for driving
Carriage is axially moved along workbench, and the clamping device includes the first master jaw, the second master jaw, claw and extensible member, institute
The arc-shaped structure of the first master jaw, the second master jaw is stated, one end of the first master jaw and one end of extensible member are hinged, the first card
The other end of pawl seat is fixed with claw, and one end of the second master jaw and the other end of extensible member are hinged, the second master jaw it is another
End is fixed with claw, and the first master jaw passes through support column with the second master jaw and connect carriage, the first master jaw and the second card
Pawl seat can be rotated around with support column junction.
As a kind of preferred structure of the utility model, the driving mechanism includes servo motor, transmission gear and transmission
Rack gear, the driving rack are arranged on the side wall of workbench, and the transmission gear is meshed with driving rack, the servo electricity
The output shaft of machine is connect through carriage with transmission gear.
As a kind of preferred structure of the utility model, the saw blade cutting operating mechanism is planer-type annular diamond wire
Saw cut mechanism, the planer-type annular diamond fretsaw cutting mechanism include portal frame, annular diamond fretsaw cutter unit
And hoisting mechanism, the annular diamond fretsaw cutter unit include train installation panel, guide wheel assembly and annular diamond wire
Saw, the annular diamond fretsaw are laid in the guide wheel wire casing of guide wheel assembly, and the hoisting mechanism includes promoting motor, being promoted
Speed reducer, lifting handle and hoisting nut, the promotion motor are set on the crossbeam of portal frame, are promoted motor and are subtracted via promotion
Fast machine is connect with lifting handle, promotes motor for driving lifting handle to rotate, and the hoisting nut is socketed on lifting handle,
The train installation panel is mutually fixed with hoisting nut.
As a kind of preferred structure of the utility model, the slicing device further includes mobile spraying mechanism, the movement
Spraying mechanism includes mobile mechanism and spraying mechanism, and the spraying mechanism includes water storage box, flow pipe, water spray chamber, space limiting side plate
With water blocking hairbrush, inlet opening, the flow pipe connection water storage box and water spray chamber are offered on the water storage box, the water spray chamber
Offer multiple hole for water sprayings on bottom plate, the hole for water spraying is all provided with towards scroll saw recessing groove on the front and rear sides face of the water spray chamber
It is equipped with space limiting side plate, the bottom end of the space limiting side plate has arc notch, is provided with water blocking in the left and right sides of water spray chamber
Hairbrush.
As a kind of preferred structure of the utility model, the slicing device further includes flexible water blocking mechanism, described flexible
Water blocking mechanism includes rolling-up mechanism and water blocking curtain sheet, and water blocking curtain sheet one end is fixed with workbench, the other end of water blocking curtain sheet
Retracting is in rolling-up mechanism.
It is different from the prior art, above-mentioned technical proposal has the advantages that the utility model silicon single crystal rod slicing device, institute
The craft used takes piece tooling light-weight, when operation first will slice sucker suction in the end face of silicon wafer to be cut, then by Magnetic gauge stand
It is adsorbed on work top, then locks the universal support arm of Magnetic gauge stand, completes the clamping of monocrystalline silicon piece to be cut, clamping efficiency is high, single
After crystal silicon chip is sliced, the monocrystalline silicon piece of slice sucker suction is removed, the absorption of monocrystalline silicon piece is reliable and stable, and structure is simple,
It operates very convenient, completely solves monocrystalline silicon piece and be easy to slide rupture, or even the problem of pound disconnected diamond fretsaw；And the dress
When setting use with silicon single crystal rod truncation work, it can very easily go lower craft to take piece tooling or place it on idle area
Domain does not influence the truncation work of silicon single crystal rod, improves device and utilizes, reduces use cost.
Detailed description of the invention
Fig. 1 is the oblique view of structural diagram of one embodiment of the utility model silicon single crystal rod slicing device；
Fig. 2 is the oblique view of structural diagram of one embodiment of workbench of the utility model silicon single crystal rod slicing device；
Fig. 3 is the schematic front view of one embodiment of workbench of the utility model silicon single crystal rod slicing device；
Fig. 4 is that the craft of the utility model silicon single crystal rod slicing device takes the schematic front view of one embodiment of piece tooling；
Fig. 5 is that the craft of the utility model silicon single crystal rod slicing device takes the schematic front view of one embodiment of piece tooling；
Fig. 6 is the schematic front view of one embodiment of idler wheel mechanism of the utility model silicon single crystal rod slicing device；
Fig. 7 is the main view signal of one embodiment of saw blade cutting operating mechanism of the utility model silicon single crystal rod slicing device
Figure；
Fig. 8 is the backsight signal of one embodiment of saw blade cutting operating mechanism of the utility model silicon single crystal rod slicing device
Figure；
Fig. 9 is the schematic front view of one embodiment of mobile spraying mechanism of the utility model silicon single crystal rod slicing device；
Figure 10 is the schematic front view of flexible one embodiment of water blocking mechanism of the utility model silicon single crystal rod slicing device.
Description of symbols:
1, workbench；11, scroll saw recessing groove；12, boss；
2, piece tooling is taken by hand；21, Magnetic gauge stand；22, universal support arm；23, it is sliced sucker；
3, saw blade cutting operating mechanism；
31, portal frame；
321, train installs panel；322, guide wheel assembly；323, annular diamond fretsaw；
331, motor is promoted；332, lifting speed reducer；333, lifting handle；334, hoisting nut；335, lift rail；
336, sliding block is promoted；
4, silicon single crystal rod；
5, idler wheel mechanism；51, U-shaped rolling wheel support frame；52, connecting rod；53, idler wheel；
6, feeding mechanism；
61, carriage；
621, servo motor；622, transmission gear；623, driving rack；624, speed reducer；625, linear guide；626, sliding
Block；
631, the first master jaw；632, the second master jaw；633, claw；634, extensible member；635, support column；636, it supports
Plate；
7, mobile spraying mechanism；
71, mobile mechanism；
721, water storage box；722, flow pipe；723, water spray chamber；724, space limiting side plate；725, water blocking hairbrush；
73, mounting bracket；
8, flexible water blocking mechanism；81, rolling-up mechanism；82, water blocking curtain sheet.
Specific embodiment
Technology contents, construction feature, the objects and the effects for detailed description technical solution, below in conjunction with specific reality
It applies example and attached drawing is cooperated to be explained in detail.
The utility model provides a kind of silicon single crystal rod slicing device referring to FIG. 1 to FIG. 4, and the slicing device includes
Workbench 1 takes piece tooling 2 and saw blade cutting operating mechanism 3 by hand；
Bearing structure of the workbench 1 as slice monocrystalline silicon, the movement and processing of silicon single crystal rod 4 are in workbench
It is completed on 1.Specifically, on the workbench 1 have scroll saw recessing groove 11, the scroll saw recessing groove 11 from 1 top surface of workbench to
Under open up, the workbench 1 is for placing silicon single crystal rod 4 to be cut.The scroll saw recessing groove 11 be located at saw blade cutting unit into
On row slice work operating path, the scroll saw is when carrying out cutting work, across scroll saw recessing groove 11 to cut off monocrystalline silicon
Stick 4.
Referring to Fig. 5, the craft takes piece tooling 2 for adsorbing monocrystalline silicon piece, prevent monocrystalline silicon piece landing from breaking into pieces.Specifically
, it includes Magnetic gauge stand 21, universal support arm 22 and slice sucker 23, described universal 22 one end of support arm that the craft, which takes piece tooling 2,
It is connect with Magnetic gauge stand 21, the other end of universal support arm 22 is connect with slice sucker 23, and piece tooling 2 is taken to be located at workbench 1 by hand
On, the end face of silicon single crystal rod 4 of the slice sucker 23 for slice.Sucker 23 is sliced when carrying out silicon single crystal rod 4 and being sliced
It is adsorbed on the end face of slice silicon single crystal rod 4, then by 21 absorption workbench 1 of Magnetic gauge stand, then locks the universal support arm 22 of magnetic,
To complete the clamping of silicon wafer to be cut, after slice, lower silicon slice can be unloaded as long as gently stirring 23 1 jiaos of sucker of slice.Monocrystalline
The absorption of silicon wafer is reliable and stable, and structure is simple, and operation is very convenient, completely solves monocrystalline silicon piece and is easy to slide rupture, even
The problem of pounding disconnected diamond fretsaw.And take piece tooling 2 by hand or be fixed on workbench 1 by Magnetic gauge stand 21, make
User remove by hand take piece tooling 2 or be moved to idle region after, the utility model silicon single crystal rod slicing device can also fit
For the truncation work of silicon single crystal rod 4, improves utilization ratio of device, reduces use cost.Preferably, the slice sucker 23 is nothing
Vacuum source sucker.
The saw blade cutting operating mechanism 3 specifically executes the component of cutting function as the present apparatus, to list to be processed
Crystalline silicon rod 4 executes slice or break-in facility.Specifically, the saw blade cutting operating mechanism 3 includes rack, saw blade cutting list
Member and hoisting mechanism, the saw blade cutting unit are located at the top of workbench 1, and saw blade cutting unit is via hoisting mechanism and rack
Fixed, the hoisting mechanism drives saw blade cutting unit to process monocrystalline silicon wafer.
The utility model silicon single crystal rod slicing device, used craft takes piece tooling, light-weight, first will slice when operation
Sucker suction is adsorbed on work top in the end face of silicon wafer to be cut, then by Magnetic gauge stand, then locks the universal support arm of Magnetic gauge stand,
The clamping of monocrystalline silicon piece to be cut is completed, clamping efficiency is high, after monocrystalline silicon piece is sliced, removes the monocrystalline silicon of slice sucker suction
The absorption of piece, monocrystalline silicon piece is reliable and stable, and structure is simple, and operation is very convenient, completely solves easy slide of monocrystalline silicon piece and breaks
The problem of splitting, or even pounding disconnected diamond fretsaw；And it when work is truncated with silicon single crystal rod in the device use, can very easily go
Lower craft takes piece tooling 2 or places it on idle region, does not influence the truncation work of silicon single crystal rod, improves device and utilizes,
Reduce use cost.
Referring to Fig. 5, a kind of preferred embodiment as the utility model, the slicing device further includes multiple roller machines
Structure 5, the multiple idler wheel mechanism 5 are symmetrical arranged into two groups along 1 top surface of workbench, and position of the idler wheel mechanism 5 on workbench 1 is not
Chong Die with scroll saw recessing groove 11, the idler wheel mechanism 5 includes U-shaped rolling wheel support frame 51, connecting rod 52 and idler wheel 53, described U-shaped
Rolling wheel support frame 51 is fixedly connected with 1 top surface of workbench, and the idler wheel 53 is fixed on the U of 53 support frame of idler wheel via connecting rod 52
In shape slot, idler wheel 53 can be rotated around connecting rod 52.Idler wheel mechanism 5 is arranged to said mechanism, the installation of idler wheel 53 is fairly simple,
Without opening up 53 mounting hole of idler wheel on workbench 1, complicated installation process is saved, abrasion occurs in idler wheel 53, and only needs will mill
53 support frame of idler wheel where damage idler wheel 53, which is dismantled, to be replaced, and replaces simple brief cost, and use 53, idler wheel
Support installs idler wheel 53, it is only necessary to control the tilt angle of 53 support frame of idler wheel, can very easily control in idler wheel 53
The extended line of heart line is formed by angle, that is, holding angle of the silicon single crystal rod 4 when rolling on idler wheel mechanism 5.Preferably, two
It is 30-60 ° that the extended line of 53 center line of idler wheel, which is formed by angle, in group idler wheel mechanism 55, and idler wheel 53 is arranged to this angle
In silicon single crystal rod 4 when 53 upper feeding of idler wheel is cut, the movement of silicon single crystal rod 4 is more stable.
Referring to Fig. 6, a kind of preferred embodiment as the utility model, the slicing device further includes feeding mechanism 6,
The feeding mechanism 6 includes conveying mechanism and clamping device, and the conveying mechanism includes carriage 61 and driving mechanism, the drive
For motivation structure for driving carriage 61 to be axially moved along workbench 1, the clamping device includes the first master jaw, the second claw
Seat, claw and extensible member, the arc-shaped structure of first master jaw, the second master jaw, one end of the first master jaw and flexible
One end of part is hinged, and the other end of the first master jaw is fixed with claw, and one end of the second master jaw and the other end of extensible member are cut with scissors
It connects, the other end of the second master jaw is fixed with claw, and the first master jaw passes through support column with the second master jaw and connect carriage
61, the first master jaw and the second master jaw can be rotated around with support column junction.The carriage 61 is as clamping device
Mounting rack, driving mechanism drive carriage 61 to move, to drive the clamping device movement of clamping silicon single crystal rod 4, reach it is mobile to
Process the effect of silicon single crystal rod 4.In the present embodiment, extensible member elongation will drive the first master jaw being fixed on carriage 61
It is inwardly rotated with the second master jaw around support column, in the first claw and the clamping close to each other to shrink clamping device of the second claw
Chamber, the claw for being also secured to master jaw open end are shunk, and clamping device is enabled to clamp the silicon single crystal rod 4 on workbench 1,
When extensible member is shunk, the first deck will be separated from each other with the second master jaw, to decontrol silicon single crystal rod 4, be pressed from both sides using the structure
It is fixed to the clamping of silicon single crystal rod 4 very simple and convenient to hold mechanism.Preferably, the extensible member can be electric cylinder, liquid
Cylinder pressure or linear motor.Preferably, it is additionally provided with cushion on the contact surface of the claw and silicon single crystal rod 4, cushion is adopted
It is made of polyurethane material.Preferably, the clamping device further includes support plate, and the both ends of the support plate are respectively with first
Master jaw and the side walls hinged fixation of the second master jaw, the support plate are used to improve the structural rigidity of entire clamping device, enhancing
Play firmness.
In 1, Fig. 3 and embodiment shown in fig. 6, the driving mechanism includes servo motor 621,622 and of transmission gear
Driving rack 623, the driving rack 623 are arranged on the side wall of workbench 1, the transmission gear 622 and driving rack 623
It is meshed, the output shaft of the servo motor 621 is connect through carriage 61 with transmission gear 622.The servo motor 621 opens
Dynamic, the output shaft of servo motor 621 drives the transmission gear 622 engaged to rotate, and transmission gear 622 drives carriage
61 move along a straight line along driving rack 623.Preferably, it is additionally provided between the servo motor 621 and transmission gear 622
Speed reducer 624, the high revolving speed that the speed reducer 624 is used to export servo motor 621 are exported after reducing by output shaft.Using
Such driving mechanism, clever structure, manufacture is more simple, and driving mechanism is entirely set on the side of workbench 1, convenient for dimension
Shield.Preferably, it is additionally provided with linear guide 625 on the workbench 11, compatible shifting is expected on frame and carriage 61 therewith
It is provided with guide rail slide block 626, to guarantee that it is more stable that shifting material frame and carriage 61 move.
Fig. 1, Fig. 7 and Fig. 8 are please referred to, as a kind of preferred structure of the utility model, the saw blade cutting operating mechanism 3
For planer-type annular diamond fretsaw cutting mechanism, the planer-type annular diamond fretsaw cutting mechanism include portal frame 31,
Annular diamond fretsaw cutter unit and hoisting mechanism, the annular diamond fretsaw cutter unit include train installation panel
321, guide wheel assembly 322 and annular diamond fretsaw 323, the annular diamond fretsaw 323 are laid in guide wheel assembly 322
In guide wheel wire casing, the hoisting mechanism includes promoting motor 331, lifting speed reducer 332, lifting handle 333 and hoisting nut
334, the promotion motor 331 is set on the crossbeam of portal frame 31, is promoted motor 331 via lifting speed reducer 332 and is promoted
Screw rod 333 connects, and promotes motor 331 for driving lifting handle 333 to rotate, the hoisting nut 334 is socketed on lifting handle
On 333, the train installation panel 321 is fixed with 334 phase of hoisting nut.Preferably, the slicing device further includes boss 12,
The two sides of workbench 1 are arranged in the boss 12, and the rack is fixed on boss 12.Specifically, the portal frame 31 includes
Left and right two root posts and the crossbeam for being connected to column top promote motor 331, lifting speed reducer 332 is fixed on crossbeam, ring
The train installation panel 321 of shape diamond fretsaw cutter unit is fixed with 334 phase of hoisting nut, and the lifting handle 333 rotates
Hoisting nut 334 is driven to rise or decline.The promotion motor 331 is used to provide the driving force of lifting for hoisting mechanism.It is excellent
Choosing, lift rail 335 is additionally provided on the column, it is sliding to be fixed with matched promotion on train installation panel 321
Block 336.The lifting speed reducer 332 is then reduced for that will promote the high revolving speed of 331 output shaft of motor output, is cut with slowing down
Cut the lifting or decrease speed of unit.The lifting handle 333 and hoisting nut 334 cooperates, by lifting handle 333
Rotary motion is converted into the elevating movement of hoisting nut 334.In certain other embodiments, the saw blade cutting operating mechanism
3 may be Wound-rotor type diamond fretsaw cutting mechanism.
Fig. 1 and Fig. 9 are please referred to, as a kind of preferred structure of the utility model, the slicing device further includes mobile spray
Drench mechanism 7, the mobile spraying mechanism 7 include mobile mechanism 71 and spraying mechanism, the spraying mechanism include water storage box 721,
Flow pipe 722, water spray chamber 723, space limiting side plate 724 and water blocking hairbrush 725 offer inlet opening on the water storage box 721, described
Flow pipe 722 is connected to water storage box 721 and water spray chamber 723, offers multiple hole for water sprayings on the bottom plate of the water spray chamber 723, described
Hole for water spraying is provided with space limiting side plate 724, the limit on the front and rear sides face of the water spray chamber 723 towards scroll saw recessing groove 11
The bottom end of position side plate 724 has arc notch, is provided with water blocking hairbrush 725 in the left and right sides of water spray chamber 723.It is external cold
But the inlet opening that water first passes around on water storage box 721 is flowed into water storage box 721, is then transported to spray by flow pipe 722
Then water tank 723 is sprayed onto the saw kerf of silicon single crystal rod 4, to diamond ring by the multiple hole for water sprayings opened up on water spray chamber 723
The cut surface of scroll saw and silicon single crystal rod 4 cools down, while can also play and moisten to cutting break flour, prevents break flour
Pollute working environment.The effect of the mobile mechanism 71 is that lifting up and down or reduces the position of water spray chamber 723, follows and cuts
Operating mechanism movement is cut, in case operation interference occurs for saw blade cutting operating mechanism 3 and spraying mechanism.Preferably, the moving machine
Structure 71 can be cylinder, hydraulic cylinder or linear motor.Preferably, the flow pipe 722 is steel pipe, and flow pipe 722 is
Two.Preferably, the mobile spraying mechanism 7 further includes mounting bracket 73, and the setting of mounting bracket 73 is horizontal in portal frame 31
On the side of beam, the mobile mechanism 71 is fixed in mounting bracket 73.724 one side of space limiting side plate can prevent from spraying water
The coolant liquid sprayed in hole is ejected into other positions, causes the waste of shower water, goes back in space limiting side plate 724 described in another aspect
With arc notch compatible with 4 shape of silicon single crystal rod, under the drive of mobile mechanism 71, two pieces of space limiting side plates 724 are just
Fit and abut on the side of silicon single crystal rod 4, the annular diamond fretsaw 323 described at this time just from two pieces of space limiting side plates 724 it
Between pass through, annular diamond fretsaw 323 cuts silicon single crystal rod 4, and space limiting side plate 724 passes through when carrying out cutting work
The both ends for pushing down 4 notch of silicon single crystal rod, when reducing cutting 4 stress release of silicon single crystal rod so as to cause notch chipping possibility,
Spray liquid space limiting side plate 724 limit, can only from the incision of silicon single crystal rod 4 spray into and be gone out from two sides, good cold cut and
Chip removal not only effectively raises the service life of annular diamond fretsaw 323, ensure that cut quality, also reduces flying for shower water
It splashes.In addition, annular diamond fretsaw 323 can pass through the position of water blocking hairbrush 725, therefore use in practical work process
Water blocking hairbrush 725 can be cut to scroll saw operation channel in the process.Preferably, the space limiting side plate 724 is nylon material,
It can prevent silicon wafer material surface from being scratched, the quality of silicon single crystal rod 4 will not also be impacted.
Fig. 1 and Figure 10 are please referred to, as a kind of preferred embodiment of the utility model, the slicing device further includes stretching
Water blocking mechanism 8, the flexible water blocking mechanism 8 include rolling-up mechanism 81 and water blocking curtain sheet 82, described 82 one end of water blocking curtain sheet and work
Make platform 1 to fix, the other end of water blocking curtain sheet 82 furls in rolling-up mechanism 81.The flexible water blocking mechanism 8 is for preventing from spraying
The splashing for drenching cooling water, impacts the use environment of operator.Specifically, the rolling-up mechanism 81 is arranged in saw blade cutting
On the cutting rack of operating mechanism 3, the train of such as 323 cutter unit of annular diamond fretsaw installs 321 bottom end of panel, rolling-up mechanism
81, which can install panel 321 with train, moves up and down, and water blocking curtain sheet 82 can then be wound in real time in rolling-up mechanism 81,
Further the spray liquid of splashing is blocked and water conservancy diversion, to reduce pollution of the spray liquid to environment of splashing.Preferably,
The two sides of 1 top surface of workbench are provided with collecting tank.Specifically, the rolling-up mechanism 81 includes winding cabinet and rotation axis,
Described 82 one end of water blocking curtain sheet is fixed on the rotating shaft.In other examples, the flexible water blocking mechanism 8 is with retracting ruler
Structure is similar, and rolling-up mechanism 81 includes winding cabinet and compression elastic slice, and the water blocking curtain sheet 82 is wrapped in outside compression elastic slice.
It should be noted that being not intended to limit although the various embodiments described above have been described herein
The scope of patent protection of the utility model.Therefore, based on the innovative idea of the utility model, embodiment described herein is carried out
Change and modification or equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, directly
Or above technical scheme is used in other related technical areas indirectly, it is included in the patent protection model of the utility model
Within enclosing.
Claims (8)
1. a kind of silicon single crystal rod slicing device, which is characterized in that the slicing device includes workbench, takes piece tooling and line by hand
Saw cut operating mechanism；
There is scroll saw recessing groove, the scroll saw recessing groove opens up downwards from bench top, the workbench on the workbench
For placing silicon single crystal rod to be cut；
It includes Magnetic gauge stand, universal support arm and slice sucker, described universal support arm one end and magnetic table that the craft, which takes piece tooling,
The other end of seat connection, universal support arm is connect with slice sucker, takes piece tooling to be located on workbench by hand, the slice sucker is used
In the end face of the silicon single crystal rod of slice；
The saw blade cutting operating mechanism includes rack, saw blade cutting unit and hoisting mechanism, and the saw blade cutting unit is located at
The top of workbench, saw blade cutting unit are fixed via hoisting mechanism and rack, and the hoisting mechanism drives saw blade cutting unit
Monocrystalline silicon wafer is processed.
2. silicon single crystal rod slicing device according to claim 1, which is characterized in that the slicing device further includes multiple idler wheels
Mechanism, the multiple idler wheel mechanism are symmetrical arranged into two groups along bench top, the position of idler wheel mechanism on the table not with
The overlapping of scroll saw recessing groove, the idler wheel mechanism includes U-shaped rolling wheel support frame, connecting rod and idler wheel, the U-shaped rolling wheel support frame with
Bench top is fixedly connected, and the idler wheel is fixed in the U-lag of rolling wheel support frame via connecting rod, and idler wheel can be around connecting rod
Rotation.
3. silicon single crystal rod slicing device according to claim 2, which is characterized in that idler wheel center line in two groups of idler wheel mechanisms
Extended line forms default angle β, and the angle β is 30-60 °.
4. silicon single crystal rod slicing device according to claim 1, which is characterized in that the slicing device further includes feeder
Structure, the feeding mechanism include conveying mechanism and clamping device, and the conveying mechanism includes carriage and driving mechanism, the drive
For motivation structure for driving carriage to be axially moved along workbench, the clamping device includes the first master jaw, the second master jaw, card
The one of pawl and extensible member, the arc-shaped structure of first master jaw, the second master jaw, one end of the first master jaw and extensible member
End is hinged, and the other end of the first master jaw is fixed with claw, and one end of the second master jaw and the other end of extensible member are hinged, and second
The other end of master jaw is fixed with claw, and the first master jaw passes through support column with the second master jaw and connect carriage, the first card
Pawl seat and the second master jaw can be rotated around with support column junction.
5. silicon single crystal rod slicing device according to claim 4, which is characterized in that the driving mechanism include servo motor,
Transmission gear and driving rack, the driving rack are arranged on the side wall of workbench, the transmission gear and driving rack phase
The output shaft of engagement, the servo motor is connect through carriage with transmission gear.
6. silicon single crystal rod slicing device according to claim 1, which is characterized in that the saw blade cutting operating mechanism is dragon
Gate-type annular diamond fretsaw cutting mechanism, the planer-type annular diamond fretsaw cutting mechanism include portal frame, annular gold
Hard rock saw blade cutting unit and hoisting mechanism, the annular diamond fretsaw cutter unit include train installation panel, guide wheel group
Part and annular diamond fretsaw, the annular diamond fretsaw are laid in the guide wheel wire casing of guide wheel assembly, the hoisting mechanism
It is set on the crossbeam of portal frame including promoting motor, lifting speed reducer, lifting handle and hoisting nut, the promotion motor,
It promotes motor to connect via lifting speed reducer with lifting handle, promotes motor and be used to that lifting handle to be driven to rotate, the promotion spiral shell
Mother set is connected on lifting handle, and the train installation panel is mutually fixed with hoisting nut.
7. silicon single crystal rod slicing device described in -6 any one according to claim 1, which is characterized in that the slicing device is also
Including mobile spraying mechanism, the mobile spraying mechanism includes mobile mechanism and spraying mechanism, and the spraying mechanism includes water storage
Case, flow pipe, water spray chamber, space limiting side plate and water blocking hairbrush, inlet opening is offered on the water storage box, and the flow pipe connection stores
Water tank and water spray chamber offer multiple hole for water sprayings on the bottom plate of the water spray chamber, and the hole for water spraying is described towards scroll saw recessing groove
Space limiting side plate is provided on the front and rear sides face of water spray chamber, the bottom end of the space limiting side plate has arc notch, water spray chamber
Water blocking hairbrush is provided in left and right sides.
8. silicon single crystal rod slicing device according to claim 1, which is characterized in that the slicing device further includes flexible gear
Water dispenser structure, the flexible water blocking mechanism includes rolling-up mechanism and water blocking curtain sheet, and water blocking curtain sheet one end is fixed with workbench, gear
The other end of curtain sheet furls in rolling-up mechanism.
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