CN111571833B - Single crystal silicon rod slicing device - Google Patents
Single crystal silicon rod slicing device Download PDFInfo
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- CN111571833B CN111571833B CN202010428169.2A CN202010428169A CN111571833B CN 111571833 B CN111571833 B CN 111571833B CN 202010428169 A CN202010428169 A CN 202010428169A CN 111571833 B CN111571833 B CN 111571833B
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- single crystal
- silicon rod
- crystal silicon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a monocrystalline silicon rod slicing device, which structurally comprises a distribution box, a cutting head, an introduction device, a processing table, a fixed seat and a base, wherein the fixed seat is arranged on the base, the processing table is arranged on the fixed seat, and the cutting head is matched with the introduction device, so that the monocrystalline silicon rod slicing device has the beneficial effects that: when the clamping layer on the clamping head is in contact with the single crystal silicon rod, the magnetism of the two magnetic blocks is different, the clamping force of the clamping head is reinforced through mutual attraction, the clamping head can clamp and fix the single crystal silicon rod under the dual action, the two movable grooves can be pushed out and replaced along with the diameter of the single crystal silicon rod and adapt to the size of the single crystal silicon rod, when the two movable grooves and the two fixed grooves are located on the same arc line, outward movement is stopped, force is applied to the single crystal silicon rod simultaneously, the single crystal silicon rod is fixed, the single crystal silicon rod is prevented from being displaced under the impact force of a wire saw, the relative fixation of the position in the processing process of the single crystal silicon rod is guaranteed, and the slicing quality of the single crystal silicon rod is further guaranteed.
Description
Technical Field
The invention relates to the field of semiconductors, in particular to a single crystal silicon rod slicing device.
Background
The silicon crystal has wide application in the photovoltaic industry, and the shape and the size of the silicon crystal need to be processed before the silicon crystal is put into use, so that the silicon crystal meets the processing requirement of the next procedure, and the current silicon single crystal rod slicing device has the following defects:
the existing single crystal silicon rod slicing device realizes slicing of single crystal silicon by placing a single crystal silicon rod on a processing table and pushing the single crystal silicon rod, and in the slicing process, a wire saw is used for bearing certain impact force on the single crystal silicon rod in the operation process of the single crystal silicon rod, and the single crystal silicon rod is similar to a cylinder in shape, so that under the dual effects of the impact force and the shape of the single crystal silicon rod, relative displacement is easy to occur in the operation process, and the slicing quality is influenced.
Disclosure of Invention
Aiming at the defects of the prior art, the invention is realized by the following technical scheme: a monocrystalline silicon rod slicing device structurally comprises a distribution box, a cutting head, a leading-in device, a processing table, a fixed seat and a base, wherein a fretsaw is arranged in the south of the cutting head in the upward direction;
the leading-in device comprises cover frame, guide chamber, guide ring, a chamber, extension platform, solid layer, cover frame and solid layer fixed connection, solid layer is connected with the extension platform, the guide ring is located to the extension platform and is just upwards south, be equipped with the guide chamber in the guide ring.
As a further optimization of the invention, the guide ring is composed of a first limiting head and a second limiting head, the first limiting head and the second limiting head are both arranged on the ring wall of the guide ring, and the first limiting head is matched with the second limiting head.
As a further optimization of the invention, the first limiting head is composed of two movable rods, a rotating disk, two clamping heads and a first hollow frame, the movable rods are connected with the rotating disk, one end of each movable rod, far away from the rotating disk, is connected with the clamping head, the clamping heads are mechanically welded with the movable rods, the first hollow frame is matched with the clamping heads, the first hollow frame is arranged on the ring wall of the guide ring, the first hollow frame penetrates through the ring wall of the guide ring, the two rotating disks are arranged, and the two rotating disks are symmetrically arranged on the ring wall of the guide ring.
As a further optimization of the invention, the second limiting head is composed of a fixed groove, a second hollow frame, a movable groove and fixed connecting blocks, the fixed groove is matched with the movable groove, the second hollow frame is positioned on the ring wall of the guide ring, the fixed grooves are positioned at two sides of the center of the guide cavity, the diameter of the fixed groove is larger than that of the movable groove, the movable groove is matched with the second hollow frame, two fixed connecting blocks are arranged, and the fixed groove and the inner wall of the guide cavity are fixedly connected together through the fixed connecting blocks.
As a further optimization of the invention, the clamping head comprises an engaging shaft, a connecting rod, two magnetic blocks, plate bodies, arc-shaped blocks, a clamping layer and a positioning block, wherein the engaging shaft is fixedly connected with the plate bodies, the plate bodies are arranged in an arc shape, the concave direction of the plate bodies is inward, the plate bodies are fixedly connected with the connecting rod, the connecting rod is connected with the magnetic blocks, the two magnetic blocks are arranged between the two plate bodies in a symmetrical structure, the clamping layer is arranged on the inner side of the plate bodies, the arc-shaped blocks and the positioning block are arranged on the clamping layer, the arc-shaped blocks and the positioning block are distributed at intervals, and the clamping layer is fixedly connected with the arc-shaped blocks and the positioning block.
As a further optimization of the invention, the arc-shaped block is provided with a groove cavity, an elliptical roller is arranged in the groove cavity, two ends of the roller are penetrated and fixed in the groove cavity by a roller, and the surface layer of the roller is a rubber layer.
As a further optimization of the invention, two magnetic blocks are arranged and are in an isosceles trapezoid shape, the lower bottoms of the two magnetic blocks are opposite, the opposite sides are both magnetic layers, and the magnetism is different.
As a further optimization of the invention, the center of the top of the extension table is provided with an arc-shaped groove, and the radian of the arc-shaped groove is embedded with the radian of the outer wall of the movable groove.
As a further optimization of the invention, the guide ring is set in a circular shape, and the topmost end and the bottommost end are both provided with a second hollow frame.
Advantageous effects
The invention relates to a monocrystalline silicon rod slicing device, which is characterized in that a monocrystalline silicon rod is led in from an introduction device and is matched with a wire saw on a cutting head, the wire saw monocrystalline silicon rod on the cutting head is cut after equipment is started, when the monocrystalline silicon rod with smaller diameter is led in, two rotating disks rotate oppositely by means of external mechanical force, and a clamping head is driven by a movable rod to move oppositely, so that the monocrystalline silicon rod with smaller diameter is clamped, when the two movable rods move oppositely, a clamping layer on the clamping head is contacted with the monocrystalline silicon rod, an arc-shaped block and a positioning block on the clamping layer are connected with the monocrystalline silicon rod, an elliptical roller is arranged in a groove cavity on the arc-shaped block, the surface layer of the roller is a rubber layer, so that the friction force between the clamping layer and the monocrystalline silicon rod is increased, the magnetism of the two magnetic blocks is different, the clamping force of the clamping head is mutually attracted and reinforced, and the clamping head can clamp and fix the monocrystalline silicon rod under the double action, when the diameter of the introduced silicon single crystal rod is gradually increased, when the silicon single crystal rod is introduced into the guide cavity, the movable groove in the guide cavity is gradually pushed outwards, the movable groove penetrates through the second hollow frame and moves outwards in the process, the distance between the two movable grooves is matched with the diameter of the silicon single crystal rod, the movable groove is gradually pushed outwards, when the maximum diameter between the two movable grooves is equal to the diameter between the two fixed grooves and is matched with the diameter of the silicon single crystal rod, the outward movement is stopped, and the fixed grooves and the movable grooves exert double effects on the silicon single crystal rod at the moment, so that the fixing effect of the silicon single crystal rod is better.
Compared with the prior art, the invention has the following advantages:
according to the invention, the first limiting head and the second limiting head are arranged in the guide ring, when the clamping layer on the clamping head is in contact with the single crystal silicon rod, the magnetism of the two magnetic blocks is different, the clamping force of the clamping head is reinforced by mutual attraction, the clamping head can clamp and fix the single crystal silicon rod under the dual action, the two movable grooves can be pushed out along with the diameter of the single crystal silicon rod to replace and adapt to the size of the single crystal silicon rod, when the two movable grooves and the two fixed grooves are positioned on the same arc line, the outward movement is stopped, and meanwhile, the force is applied to the single crystal silicon rod, so that the single crystal silicon rod is fixed, the single crystal silicon rod is prevented from being displaced under the impact force of a wire saw, the relative fixing of the position in the processing process of the single crystal silicon rod is ensured, and the slicing quality of the single crystal silicon rod is further ensured.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
fig. 1 is a schematic structural view of a single crystal silicon rod slicing apparatus according to the present invention.
FIG. 2 is a view showing a configuration of an introducing apparatus of a single crystal silicon rod slicing apparatus according to the present invention.
FIG. 3 is a first limiting head structural diagram of a single crystal silicon rod slicing device according to the present invention.
FIG. 4 is a view showing a structure of a chuck of a device for slicing a single crystal silicon rod according to the present invention.
FIG. 5 is a structural view of a second stopper of a device for slicing a single crystal silicon rod according to the present invention.
FIG. 6 is a side view of a guide ring of the apparatus for slicing a single crystal silicon rod according to the present invention.
Fig. 7 is an operation state diagram of fig. 5.
In the figure, a distribution box 1, a cutting head 2, an introduction device 3, a processing table 4, a fixed seat 5, a base 6, a cover frame a, a guide cavity b, a guide ring c, a first cavity d, an extension table e, a solid layer f, a first limit head g, a second limit head h, a movable rod g1, a rotating disk g2, a clamping head g3, a first hollow frame g4, a fixed groove h1, a second hollow frame h2, a movable groove h3, a fixed connecting block h4, a connecting shaft g31, a connecting rod g32, a magnetic block g33, a plate body g34, an arc block g35, a clamping layer g36, a positioning block g37 and a roller 351.
Detailed Description
In order to make the technical means, the original characteristics, the achieved purposes and the effects of the invention easy to understand, the following description and the accompanying drawings further illustrate the preferred embodiments of the invention.
Example 1
Referring to fig. 1-7, the invention provides a single crystal silicon rod slicing device, which structurally comprises a distribution box 1, a cutting head 2, an introduction device 3, a processing table 4, a fixed seat 5 and a base 6, wherein a wire saw is arranged in the south-to-south direction of the cutting head 2, a connecting seat is arranged in the south-to-south direction of the distribution box 1 and is fixed on the fixed seat 5 through the connecting seat, the fixed seat 5 is arranged on the base 6, the processing table 4 is arranged on the fixed seat 5, the cutting head 2 is arranged on the processing table 4, and the cutting head 2 is matched with the introduction device 3;
the guiding device 3 comprises a cover frame a, a guiding cavity b, a guiding ring c, a first cavity d, an extending platform e and a solid layer f, wherein the cover frame a is fixedly connected with the solid layer f, the solid layer f is connected with the extending platform e, the extending platform e is arranged right south of the guiding ring c, and the guiding cavity b is arranged in the guiding ring c.
The guide ring c is composed of a first limiting head g and a second limiting head h, the first limiting head g and the second limiting head h are both installed on the ring wall of the guide ring c, the first limiting head g is matched with the second limiting head h, and the first limiting head g and the second limiting head h are matched to fix the single crystal silicon rods with various diameters.
The first limiting head g comprises a movable rod g1, a rotating disk g2, two clamping heads g3 and a first hollow frame g4, the movable rod g1 is connected with the rotating disk g2, the number of the movable rods g1 is two, one end, far away from the rotating disk g2, of the movable rod g1 is connected with the clamping head g3, the clamping head g3 is mechanically welded with the movable rod g1, the first hollow frame g4 is matched with the clamping head g3, the first hollow frame g4 is arranged on the ring wall of the guide ring c, the first hollow frame g4 penetrates through the ring wall of the guide ring c, the two rotating disks g2 are arranged on the ring wall of the guide ring c in a symmetrical structure, and the rotating disk g2 is connected with an external mechanical force, so that the movable rod g1 can be driven to rotate along with the rotating disk g 2.
The second limiting head h is composed of a fixing groove h1, a second hollow frame h2, a movable groove h3 and a fixing connecting block h4, the fixing groove h1 is matched with the movable groove h3, the second hollow frame h2 is located on the ring wall of the guide ring c, the fixing groove h1 is located on two sides of the center of the guide cavity b, the diameter of the fixing groove h1 is larger than that of the movable groove h3, the movable groove h3 is matched with the second hollow frame h2, the number of the fixing connecting blocks h4 is two, the fixing connecting block h4 fixedly connects the fixing groove h1 with the inner wall of the guide cavity b together, the position of the fixing groove h1 is fixed all the time, and the relative positions of the two movable grooves h3 are displaced along with the diameter change of the single crystal silicon rod.
The clamping head g3 is composed of a connecting shaft g31, a connecting rod g32, a magnetic block g33, a plate g34, an arc-shaped block g35, a clamping layer g36 and a positioning block g37, the connecting shaft g31 is fixedly connected with the plate g34, the plate g34 is arranged in an arc shape, the concave direction is inward, the plate g34 is fixedly connected with the connecting rod g32, the connecting rod g32 is connected with the magnetic block g32, the magnetic blocks g32 are provided with two magnetic blocks and are arranged between the two plate g32 in a symmetrical structure, a clamping layer g32 is arranged on the inner side of the plate g32, the clamping layer g32 is provided with the arc-shaped block g32 and the positioning block g32, the arc-shaped block g32 and the positioning block g32 are distributed at intervals, the clamping layer g32 is fixedly connected with the arc-shaped block g32 and the positioning block g32, and the action points of the arc-shaped block g32 and the positioning block g32 are positioned on the same arc line, so that force can be applied to the silicon rod together.
The arc-shaped block g35 is provided with a groove cavity, an elliptical roller g351 is arranged in the groove cavity, two ends of the roller g351 are penetrated through by a roller and fixed in the groove cavity, and the surface layer of the roller g351 is a rubber layer.
The two magnetic blocks g33 are arranged in an isosceles trapezoid shape, the lower bottoms of the two magnetic blocks g33 are opposite, and the opposite sides are magnetic layers with different magnetism.
The center of the top of the extension table e is provided with an arc-shaped groove, and the radian of the arc-shaped groove is embedded with the radian of the outer wall of the movable groove h 3.
The guide ring c is circularly arranged, and the topmost end and the bottommost end are both provided with a second hollow frame h 2.
The monocrystalline silicon rod is led in from the lead-in device 3 and is matched with the wire saw on the cutting head 2, after the equipment is started, the wire saw monocrystalline silicon rod on the cutting head 2 is cut, when the monocrystalline silicon rod with smaller diameter is led in, the two rotating disks g2 rotate oppositely by means of external mechanical force, and the clamping heads g3 are driven to move oppositely by the movable rod g1, thereby clamping the single crystal silicon rod with smaller diameter, when the two movable rods g1 move oppositely, the clamping layer g36 on the clamping head g3 contacts with the single crystal silicon rod, and the arc block g35 and the positioning block g37 on the clamping layer g36 are connected with the single crystal silicon rod, an elliptical roller g351 is arranged in a groove cavity on the arc block g35, and the surface layer of the roller g351 is a rubber layer, so that the friction force between the clamping layer g36 and the single crystal silicon rod is increased, and the magnetism of the two magnetic blocks g33 is different, the clamping force of the clamping head g3 is strengthened by mutual attraction, and the clamping head g3 can clamp and fix the monocrystalline silicon rod under the double action.
Example 2
Referring to fig. 1-2 and 5-7, the invention provides a single crystal silicon rod slicing device, which comprises a distribution box 1, a cutting head 2, an introduction device 3, a processing table 4, a fixed seat 5 and a base 6, wherein a wire saw is arranged on the cutting head 2 in the south-to-south direction, a connecting seat is arranged on the distribution box 1 in the south-to-south direction and is fixed on the fixed seat 5 through the connecting seat, the fixed seat 5 is arranged on the base 6, the processing table 4 is arranged on the fixed seat 5, the cutting head 2 is arranged on the processing table 4, and the cutting head 2 is matched with the introduction device 3; the guiding device 3 comprises a cover frame a, a guiding cavity b, a guiding ring c, a first cavity d, an extending table e and a solid layer f, wherein the cover frame a is fixedly connected with the solid layer f, the solid layer f is connected with the extending table e, the extending table e is arranged right south of the guiding ring c, and the guiding cavity b is arranged in the guiding ring c; the guide ring c is composed of a first limiting head g and a second limiting head h; no. two spacing heads h comprises fixed slot h1, No. two fretwork frames h2, activity groove h3, fixed connecting block h4, fixed slot h1 cooperatees with activity groove h3, No. two fretwork frames h2 are located guide ring c's rampart, fixed slot h1 is located guide chamber b central authorities both sides, fixed slot h 1's diameter is greater than activity groove h 3's diameter, activity groove h3 cooperatees with No. two fretwork frames h2, fixed connecting block h4 is equipped with two, fixed connecting block h4 is in the same place fixed slot h1 and guide chamber b inner wall fixed connection.
Under the action of the first embodiment, when the diameter of the introduced silicon single crystal rod is gradually increased, the movable groove h3 in the guide cavity b is gradually pushed outwards when the silicon single crystal rod is introduced into the guide cavity b, in the process, the movable groove h3 penetrates through the second hollow frame h2 and moves outwards, so that the distance between the two movable grooves h3 is matched with the diameter of the silicon single crystal rod, the outwards movement is stopped when the maximum diameter between the two movable grooves h3 is equal to the diameter between the two fixed grooves h1 and is matched with the diameter of the silicon single crystal rod along with the gradual outward pushing of the movable groove h3, and the fixed groove h1 and the movable groove h3 exert double effects on the silicon single crystal rod at the moment, so that the fixing effect of the silicon single crystal rod is better.
While there have been shown and described what are at present considered the fundamental principles of the invention, the essential features and advantages thereof, it will be understood by those skilled in the art that the present invention is not limited by the embodiments described above, which are merely illustrative of the principles of the invention, but rather, is capable of numerous changes and modifications in various forms without departing from the spirit or essential characteristics thereof, and it is intended that the invention be limited not by the foregoing descriptions, but rather by the appended claims and their equivalents.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (4)
1. A single crystal silicon rod slicing device is characterized in that: the structure of the wire saw comprises a distribution box (1), a cutting head (2), a lead-in device (3), a processing table (4), a fixed seat (5) and a base (6), wherein a wire saw is arranged in the south-to-south direction of the cutting head (2), a linking seat is arranged in the south-to-south direction of the distribution box (1) and fixed on the fixed seat (5) through the linking seat, the fixed seat (5) is arranged on the base (6), the processing table (4) is arranged on the fixed seat (5), the cutting head (2) is arranged on the processing table (4), and the cutting head (2) is matched with the lead-in device (3);
the guiding device (3) is composed of a cover frame (a), a guiding cavity (b), a guiding ring (c), a first cavity (d), an extending table (e) and a solid layer (f), wherein the cover frame (a) is fixedly connected with the solid layer (f), the solid layer (f) is connected with the extending table (e), the extending table (e) is arranged right south of the guiding ring (c) and upward, and the guiding cavity (b) is arranged in the guiding ring (c);
the guide ring (c) is composed of a first limiting head (g) and a second limiting head (h), the first limiting head (g) and the second limiting head (h) are both arranged on the ring wall of the guide ring (c), and the first limiting head (g) is matched with the second limiting head (h);
the first limiting head (g) is composed of a movable rod (g1), a rotating disk (g2), a clamping head (g3) and a first hollow frame (g4), the movable rod (g1) is connected with the rotating disk (g2), one end, far away from the rotating disk (g2), of the movable rod (g1) is connected with the clamping head (g3), the clamping head (g3) is mechanically welded with the movable rod (g1), the first hollow frame (g4) is matched with the clamping head (g3), and the first hollow frame (g4) penetrates through the annular wall of the guide ring (c);
the second limiting head (h) is composed of a fixing groove (h1), a second hollow frame (h2), a movable groove (h3) and a fixed connecting block (h4), the fixing groove (h1) is matched with the movable groove (h3), the second hollow frame (h2) is located on the ring wall of the guide ring (c), the fixing groove (h1) is located on two sides of the center of the guide cavity (b), the movable groove (h3) is matched with the second hollow frame (h2), and the fixed connecting block (h4) fixedly connects the fixing groove (h1) with the inner wall of the guide cavity (b);
the center of the top of the extension table (e) is provided with an arc-shaped groove, and the radian of the arc-shaped groove is embedded with the radian of the outer wall of the movable groove (h 3);
the guide ring (c) is circularly arranged, and the topmost end and the bottommost end are both provided with a second hollow frame (h 2).
2. The device for slicing a single crystal silicon rod as set forth in claim 1, wherein: the clamping head (g3) is composed of a connecting shaft (g31), a connecting rod (g32), a magnetic block (g33), a plate body (g34), an arc-shaped block (g35), a clamping layer (g36) and a positioning block (g37), the connecting shaft (g31) is fixedly connected with the plate body (g34), the plate body (g34) is fixedly connected with the connecting rod (g32), the connecting rod (g32) is connected with the magnetic block (g33), the magnetic blocks (g33) are two, the magnetic blocks are symmetrically arranged between the two plate bodies (g34), a clamping layer (g36) is arranged on the inner side of the plate body (g34), and the clamping layer (g36) is fixedly connected with the arc-shaped block (g35) and the positioning block (g 37).
3. The device for slicing a single crystal silicon rod as set forth in claim 2, wherein: the arc-shaped block (g35) is provided with a groove cavity, an elliptical roller (g351) is arranged in the groove cavity, two ends of the roller (g351) are penetrated through by a roller and fixed in the groove cavity, and the surface layer of the roller (g351) is a rubber layer.
4. The device for slicing a single crystal silicon rod as set forth in claim 2, wherein: the two magnetic blocks (g33) are arranged in an isosceles trapezoid shape, the lower bottoms of the two magnetic blocks (g33) are opposite, and the opposite sides are both magnetic layers and have different magnetism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010428169.2A CN111571833B (en) | 2020-05-20 | 2020-05-20 | Single crystal silicon rod slicing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010428169.2A CN111571833B (en) | 2020-05-20 | 2020-05-20 | Single crystal silicon rod slicing device |
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| Publication Number | Publication Date |
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| CN111571833A CN111571833A (en) | 2020-08-25 |
| CN111571833B true CN111571833B (en) | 2021-09-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010428169.2A Active CN111571833B (en) | 2020-05-20 | 2020-05-20 | Single crystal silicon rod slicing device |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102825672A (en) * | 2012-07-31 | 2012-12-19 | 金慧 | Oriented clamping device for single-crystal rods |
| CN105835246A (en) * | 2016-05-14 | 2016-08-10 | 洛阳金诺机械工程有限公司 | Cutting device for crystalline silicon bar and cutting method for cutting device |
| CN109049374A (en) * | 2018-09-10 | 2018-12-21 | 张玉锦 | A kind of LED light production monocrystal rod cutter device |
| CN208645714U (en) * | 2018-05-14 | 2019-03-26 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod slicing device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6913183B2 (en) * | 2017-05-16 | 2021-08-04 | アーシェル ラボラトリーズ，インク． | Module unit, clamp assembly, and slicing device with these |
-
2020
- 2020-05-20 CN CN202010428169.2A patent/CN111571833B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102825672A (en) * | 2012-07-31 | 2012-12-19 | 金慧 | Oriented clamping device for single-crystal rods |
| CN105835246A (en) * | 2016-05-14 | 2016-08-10 | 洛阳金诺机械工程有限公司 | Cutting device for crystalline silicon bar and cutting method for cutting device |
| CN208645714U (en) * | 2018-05-14 | 2019-03-26 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod slicing device |
| CN109049374A (en) * | 2018-09-10 | 2018-12-21 | 张玉锦 | A kind of LED light production monocrystal rod cutter device |
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| CN111571833A (en) | 2020-08-25 |
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