CN208630057U - A kind of wafer carrying apparatus - Google Patents
A kind of wafer carrying apparatus Download PDFInfo
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- CN208630057U CN208630057U CN201821373667.6U CN201821373667U CN208630057U CN 208630057 U CN208630057 U CN 208630057U CN 201821373667 U CN201821373667 U CN 201821373667U CN 208630057 U CN208630057 U CN 208630057U
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- ejection
- tensioning
- loading
- pedestal
- loading pedestal
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Abstract
The utility model discloses a kind of wafer carrying apparatus, including the carrying disk for placing material, it further include the first loading pedestal, first loading pedestal is equipped with tensioning apparatus, tensioning apparatus includes the second loading pedestal being installed on the first loading pedestal, second loading pedestal is from top to bottom disposed with tensioning top plate and tensioning bottom plate, and carrying disk is installed on tensioning top plate；Wherein, it is tensioned on top plate and offers avoid holes, be tensioned on bottom plate and can be rotatably set tightening hoop, tightening hoop runs through avoid holes；Carrying disk includes loading film, and loading film is covered in avoid holes, and the upper end of tightening hoop is connect with loading film；By making tightening hoop make rotating motion, material is enable successfully to strip down from loading film.The utility model provides a kind of wafer carrying apparatus, and the rate and success rate of material removing are improved by setting tensioning apparatus, solves the problems, such as that current material removing success rate is not high.
Description
Technical field
The utility model relates to technical field of mechanical processing more particularly to a kind of wafer carrying apparatus.
Background technique
In the production process of electronic equipment, fitting is one of them essential production process, such as cell-phone camera
The optical filter fitting of head.In bonding process, need for material to be stripped out from wafer carrying apparatus, in order to paste with support plate
It closes.
In current bonding process, main ejector pin mechanism is used often to realize the function of ejecting material from film surface.By
It is inaccurate for the control of elevating movement in current main thimble equipment, merely by main thimble equipment make the removing of material compared with
For difficulty, it is easy to cause ejection bad, the success rate for causing material to remove is not high.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of wafer carrying apparatus, solves wafer in the prior art
Material on carrying apparatus removes the not high problem of success rate.
To achieve the above objectives, the present invention provides the following technical solutions:
A kind of wafer carrying apparatus further includes the first loading pedestal including the carrying disk for placing material, and described first
Loading pedestal is equipped with tensioning apparatus, and the tensioning apparatus includes the second loading bottom being installed on the first loading pedestal
Seat, the second loading pedestal are equipped with the tensioning top plate from top to bottom set gradually and tensioning bottom plate；The carrying disk installing
In on the tensioning top plate；
Wherein, avoid holes are offered on the tensioning top plate, can be rotatably set tightening hoop on the tensioning bottom plate, institute
Tightening hoop is stated through the avoid holes；The carrying disk includes loading film, and the loading film is covered in the avoid holes, and institute
The upper end for stating tightening hoop is connect with the loading film；
The second loading pedestal is equipped with the first tensioning and adjusts actuator, is rotatably provided on the tensioning bottom plate
First tensioning regulating wheel, first tensioning adjust actuator and are drivingly connected the first tensioning regulating wheel, first tensioning
The regulating wheel transmission connection tightening hoop.
Optionally, the tensioning bottom plate is equipped with the first mounting portion；
The second loading pedestal is equipped with the second tensioning regulating wheel and the second tensioning adjusts actuator, second tensioning
It adjusts actuator and belt transmission connection the second tensioning regulating wheel is adjusted by the second tensioning；In the second tensioning regulating wheel
Equipped with screw rod, the screw rod connects first mounting portion；
First tensioning adjusts actuator and is drivingly connected the first tensioning regulating wheel by the first tensioning adjusting belt.
Optionally, there are four the second tensioning regulating wheel is set；There are two first mounting portion is set, each described first
Two second tensioning regulating wheels are connected by two screw rods respectively on mounting portion.
It optionally, further include third loading pedestal, the second loading pedestal is installed on the third loading pedestal；Institute
The first loading pedestal is stated equipped with X-axis straight line mould group, the X-axis linear module drive connects the third loading pedestal.
Optionally, the third loading pedestal is equipped with Y-axis straight line mould group, described in Y-axis linear module drive connection
Second loading pedestal.
Optionally, the first loading pedestal is equipped with liftout attachment, and the liftout attachment is solid by a bottom fixing frame
Due on the first loading pedestal；
The liftout attachment includes the ejection pedestal being fixedly installed on the bottom fixing frame, sliding on the ejection pedestal
Dynamic to be provided with the first ejection slide, the first ejection slide is equipped with the main thimble for jacking up loading film.
Optionally, the ejection pedestal is equipped with the first ejection actuator, is drivingly connected on the first ejection actuator
There is the first ejection eccentric wheel, the first ejection eccentric wheel is equipped with the first ejection piece, the first ejection piece connection described the
One ejection slide, the first ejection slide are slidably connected with the first ejection pedestal.
Optionally, limiting slot has been dug on first ejection piece, the width of the limiting slot is greater than first ejection
The diameter of eccentric wheel, the first ejection eccentric wheel clamp are set in the limiting slot.
Optionally, the main thimble is hollow structure, and the top of the main thimble is equipped with ejection hole；In the main thimble
Sliding is provided with secondary thimble；Sliding is provided with the second ejection slide on the first ejection slide, and the second ejection slide connects
Connect the secondary thimble；
The first ejection slide is equipped with the second ejection actuator, and the second ejection actuator is equipped with the second ejection
Eccentric wheel；The second ejection slide is equipped with the second ejection piece, the limited block that second ejection piece is arranged by two block gaps
Composition, the length of the limited block are greater than the diameter of the first ejection eccentric wheel, and the second ejection eccentric wheel is set to institute
It states between two pieces of limited blocks；
Wherein, the upper surface of the main thimble offers ejection hole, position, size and the ejection hole of the pair thimble
Position, size matches.
Optionally, the diameter of the first ejection eccentric wheel is greater than the diameter of the second ejection eccentric wheel.
Compared with prior art, the utility model has the following beneficial effects:
The utility model provides a kind of wafer carrying apparatus, and the success of material removing is improved by setting tensioning apparatus
Rate solves the problems, such as that current material removing success rate is not high.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is a kind of structural schematic diagram of wafer carrying apparatus provided by the utility model；
Fig. 2 is the structural schematic diagram of tensioning apparatus in a kind of wafer carrying apparatus provided by the utility model；
Fig. 3 is the structural schematic diagram of liftout attachment in a kind of wafer carrying apparatus provided by the utility model；
Fig. 4 is the another structural schematic diagram of liftout attachment in a kind of wafer carrying apparatus provided by the utility model.
In above-mentioned figure: the first loading pedestal 411, X-axis straight line mould group 4111, the second loading pedestal 412, third loading pedestal
413, Y-axis straight line mould group 4121, tensioning apparatus 42 is tensioned top plate 421, and avoid holes 4212 are tensioned bottom plate 422, the first mounting portion
4221, the first tensioning adjusts actuator 423, and the first tensioning adjusts belt 4231, the first tensioning regulating wheel 4232, and the second tensioning is adjusted
Actuator 424 is saved, the second tensioning adjusts belt 4241, the second tensioning regulating wheel 4242, tightening hoop 425, carrying disk 43, ejection dress
44 are set, bottom fixing frame 441 ejects pedestal 442, the first ejection actuator 443, the first ejection eccentric wheel 4431, the first ejection
Part 4433, the first ejection slide 4434, limiting slot 4435, the second ejection actuator 444, the second ejection eccentric wheel 4441, second
Ejection piece 4443, the second ejection slide 4444, main thimble 445 eject hole 4451, secondary thimble 4452.
Specific embodiment
It is practical below in conjunction with this to enable the purpose of this utility model, feature, advantage more obvious and understandable
Attached drawing in new embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that under
The described embodiments are only a part of the embodiments of the utility model in face, and not all embodiment.Based on the utility model
In embodiment, all other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, fall within the protection scope of the utility model.
In the following the description of the utility model, for convenience of description, the direction vertical with main thimble is set to " up and down
Direction ", wherein it by the direction definition that main thimble is directed toward loading film is " upper direction ", direction definition that will be opposite with " upper direction "
For " lower direction ".
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.
Referring to Fig. 1, Fig. 1 is a kind of structural schematic diagram of wafer carrying apparatus provided by the embodiment of the utility model.
In the present embodiment, which includes:
First loading pedestal 411, is installed on the board of equipment, for providing a supporting role for other devices.
Carrying disk 43, for placing material；Wherein, which includes loading film, and material is placed on the loading film,
It needs to remove material from loading film during fitting, to realize subsequent being bonded with support plate.
Tensioning apparatus 42 is installed on the first loading pedestal 411, and the tensioning apparatus 42 is for realizing material and loading film
Removing.
Each mechanism is described in detail respectively below.
Fig. 1, Fig. 2 are please referred to, Fig. 2 is tensioning apparatus 42 in a kind of wafer carrying apparatus provided by the embodiment of the utility model
Structural schematic diagram.
Tensioning apparatus 42 includes the second loading pedestal 412, which is installed in the first loading pedestal 411
On.Second loading pedestal 412 be equipped with tensioning top plate 421 and tensioning bottom plate 422, the tensioning top plate 421 and tensioning bottom plate 422 by
It is set gradually under.Wherein, carrying disk 43 is installed on tensioning top plate 421.
Avoid holes 4212 are offered on tensioning top plate 421, loading film is covered in avoid holes 4212；It is tensioned on bottom plate 422
Tightening hoop 425 is can be rotatably set, tightening hoop 425 is disposed through in avoid holes 4212, and the upper end of tightening hoop 425 and load
The connection of object film.
In the present embodiment, the second loading pedestal 412 is equipped with the first tensioning and adjusts actuator 423, is tensioned on bottom plate 422
It is rotatably provided the first tensioning regulating wheel 4232, the first tensioning adjusts actuator 423 and adjusts belt by the first tensioning
4231 transmission connection the first tensioning regulating wheels 4232, are rotated with control the first tensioning regulating wheel 4232.Wherein, which adjusts
Section wheel 4232 is set on tightening hoop 425, to be sequentially connected with tightening hoop 425.
When the first tensioning, which adjusts the driving of actuator 423 first tensioning regulating wheel 4232, to be rotated, the first tensioning regulating wheel
4232 drive tightening hoop 425 to rotate, and so that tightening hoop 425 is driven the rotation of loading film, so that loading film goes out with the material on loading film
Existing relative displacement, and then material is enable to strip down from loading film.
In the present embodiment, tensioning bottom plate 422 is equipped with protrusion and is provided with the first mounting portion 4221；Second loading pedestal
412 are equipped with the second tensioning regulating wheel 4242 and the second tensioning adjusting actuator 424, and the second tensioning adjusts actuator 424 and passes through
Second tensioning adjusts the transmission connection of the belt 4,241 second tensioning regulating wheel 4242；Second tensioning regulating wheel 4242 is equipped with silk
Bar, screw rod connect the first mounting portion 4221.
In an optional embodiment of the present embodiment, there are two the first mounting portion 4221 is set, two first installations
Portion 4221 is centrosymmetric.There are four second tensioning regulating wheel 4242 is set；Pass through two on each first mounting portion 4221 respectively
Screw rod connects two second tensioning regulating wheels 4242.
Actuator 424 is adjusted by the second tensioning and drives four second tensioning regulating wheel 4242 rotations, and the second tensioning is adjusted
Wheel 4242 drives tensioning bottom plate 422 to move up and down by screw rod, drives tightening hoop 425 to do lifting fortune to be tensioned bottom plate 422
It is dynamic, to change the tensioning state of loading film, so that material is stripped down from loading film.
Referring to Fig. 3, Fig. 3 is the knot of liftout attachment 44 in a kind of wafer carrying apparatus provided by the embodiment of the utility model
Structure schematic diagram.
In the present embodiment, which further includes a liftout attachment 44, which passes through a bottom
Fixed frame 441 is fixed on the first loading pedestal 411.
Specifically, liftout attachment 44 includes the ejection pedestal 442 being fixedly installed on bottom fixing frame 441, ejects pedestal
Sliding is provided with equipped with the first ejection slide 4434 on 442, and the first ejection slide 4434 is equipped with the master for jacking up loading film
Thimble 445.It is moved upwards by the first ejection slide 4434, drives main thimble 445 to jack up loading film upwards, make material and loading
Gap is generated between film, to realize the removing of material.
It ejects pedestal 442 and is equipped with the first ejection actuator 443, being drivingly connected on the first ejection actuator 443 has first
Eject eccentric wheel 4431.First ejection eccentric wheel 4431 is equipped with the first ejection piece 4433, the first ejection piece 4433 connection first
Slide 4434 is ejected, the first ejection slide 4434 is slidably connected with the first ejection pedestal 442.
Specifically, limiting slot 4435 has been dug on the first ejection piece 4433, the width of limiting slot 4435 is greater than the first ejection
The diameter of eccentric wheel 4431, the first ejection eccentric wheel 4431 are arranged in limiting slot 4435；When the first ejection eccentric wheel 4431 revolves
When turning, since the position-limiting action of limiting slot 4435 makes the first ejection piece 4433 do oscilaltion campaign, to drive main thimble 445
It moves up and down, to realize the ejection of loading film.
Also referring to Fig. 3, Fig. 4, Fig. 4 is to eject dress in a kind of wafer carrying apparatus provided by the embodiment of the utility model
Set 44 another structural schematic diagram.
In addition, in order to further increase the ejection precision of the liftout attachment 44, main thimble 445 is hollow structure, and main top
The top of needle 445 is equipped with ejection hole 4451；Sliding is provided with secondary thimble 4452 in main thimble 445.Wherein, main thimble 445 is upper
End face offers ejection hole 4451, and the position of secondary thimble 4452, size match with the position in ejection hole 4451, size.
Specifically, the first ejection slide 4434 is equipped with the second ejection actuator, and the second ejection actuator 444 is equipped with the
Two ejection eccentric wheels 4441.
Sliding is provided with the second ejection slide 4444, the second ejection 4444 auxiliary connection top of slide on first ejection slide 4434
Needle 4452；Second ejection slide 4444 is equipped with the second ejection piece 4443, the limit that the second ejection piece 4443 is arranged by two block gaps
Position block composition, the length of the limited block are greater than the diameter of the first ejection eccentric wheel 4441, and the second ejection eccentric wheel 4441 is arranged
Between two pieces of limited blocks.
When second ejection actuator 444 driving the second ejection eccentric wheel 4441 rotates, limited block moves up and down, thus band
Dynamic second ejection slide 4444 lifting carriage on the first ejection slide 4434, and then drive secondary thimble 4452 in main thimble 445
It is interior to be moved up and down through ejection hole 4451.
Further, the diameter of the first ejection eccentric wheel 4431 is greater than the diameter of the second ejection eccentric wheel 4441, makes secondary top
The heave amplitude of the relatively main thimble of needle is smaller out, therefore accurate ejection operation can be carried out by secondary eject pin.
Based on above-mentioned each embodiment, for the ease of adjusting the position of the carrying apparatus, in order in bonding process with
Other devices match, and the present embodiment makes following improvement:
In the present embodiment, which further includes third loading pedestal 413, and the second loading pedestal 412 is installed in
On the third loading pedestal 413；The first loading pedestal is equipped with X-axis straight line mould group 4111, the X-axis straight line mould group
4111 are drivingly connected the third loading pedestal 413.
In addition, third loading pedestal 413 is equipped with Y-axis straight line mould group 4121, the Y-axis straight line mould group 4121 is drivingly connected
The second loading pedestal 412.
It is matched by X-axis straight line mould group 4111 and Y-axis straight line mould group 4121, to adjust the carrying apparatus in X-axis and Y
Position on axis so as to realize closer cooperation with other devices of abutted equipment, and then improves fitting rate.
The above, above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations；Although ginseng
The utility model is described in detail according to previous embodiment, those skilled in the art should understand that: it is still
It is possible to modify the technical solutions described in the foregoing embodiments, or part of technical characteristic is equally replaced
It changes；And these are modified or replaceed, various embodiments of the utility model technical solution that it does not separate the essence of the corresponding technical solution
Spirit and scope.
Claims (10)
1. a kind of wafer carrying apparatus, including the carrying disk for placing material, which is characterized in that further include the first loading bottom
Seat, the first loading pedestal are equipped with tensioning apparatus, and the tensioning apparatus includes being installed on the first loading pedestal
Second loading pedestal, the second loading pedestal are equipped with the tensioning top plate from top to bottom set gradually and tensioning bottom plate；It is described
Carrying disk is installed on the tensioning top plate；
Wherein, avoid holes are offered on the tensioning top plate, can be rotatably set tightening hoop on the tensioning bottom plate, described
Tight ring runs through the avoid holes；The carrying disk includes loading film, and the loading film is covered in the avoid holes, and described
The upper end of tight ring is connect with the loading film；
The second loading pedestal is equipped with the first tensioning and adjusts actuator, is rotatably provided first on the tensioning bottom plate
It is tensioned regulating wheel, first tensioning adjusts actuator and is drivingly connected the first tensioning regulating wheel, and first tensioning is adjusted
The wheel transmission connection tightening hoop.
2. wafer carrying apparatus according to claim 1, which is characterized in that the tensioning bottom plate is equipped with the first installation
Portion；
The second loading pedestal is equipped with the second tensioning regulating wheel and the second tensioning adjusts actuator, and second tensioning is adjusted
Actuator adjusts belt transmission connection the second tensioning regulating wheel by the second tensioning；The second tensioning regulating wheel is equipped with
Screw rod, the screw rod connect first mounting portion；
First tensioning adjusts actuator and is drivingly connected the first tensioning regulating wheel by the first tensioning adjusting belt.
3. wafer carrying apparatus according to claim 2, which is characterized in that there are four the second tensioning regulating wheel is set；
There are two first mounting portion is set, two second tensionings are connected by two screw rods respectively on each first mounting portion and are adjusted
Section wheel.
4. wafer carrying apparatus according to claim 1, which is characterized in that it further include third loading pedestal, described second
Loading pedestal is installed on the third loading pedestal；The first loading pedestal is equipped with X-axis straight line mould group, and the X-axis is straight
Line mould group is drivingly connected the third loading pedestal.
5. wafer carrying apparatus according to claim 4, which is characterized in that it is straight that the third loading pedestal is equipped with Y-axis
Line mould group, the Y-axis linear module drive connect the second loading pedestal.
6. wafer carrying apparatus according to claim 1, which is characterized in that the first loading pedestal is equipped with ejection dress
It sets, the liftout attachment is fixed on the first loading pedestal by a bottom fixing frame；
The liftout attachment includes the ejection pedestal being fixedly installed on the bottom fixing frame, slides and sets on the ejection pedestal
It is equipped with the first ejection slide, the first ejection slide is equipped with the main thimble for jacking up loading film.
7. wafer carrying apparatus according to claim 6, which is characterized in that the ejection pedestal is equipped with the first ejection and drives
Moving part, being drivingly connected on the first ejection actuator has the first ejection eccentric wheel, and the first ejection eccentric wheel is equipped with the
One ejection piece, the first ejection piece connection the first ejection slide, the first ejection slide and first ejection bottom
Seat is slidably connected.
8. wafer carrying apparatus according to claim 7, which is characterized in that dug limit on first ejection piece
Slot, the width of the limiting slot are greater than the diameter of the first ejection eccentric wheel, and the first ejection eccentric wheel clamp is set to described
In limiting slot.
9. wafer carrying apparatus according to claim 8, which is characterized in that the main thimble is hollow structure, and described
The top of main thimble is equipped with ejection hole；Sliding is provided with secondary thimble in the main thimble；It slides and sets on the first ejection slide
It is equipped with the second ejection slide, the second ejection slide connection secondary thimble；
The first ejection slide is equipped with the second ejection actuator, and it is eccentric that the second ejection actuator is equipped with the second ejection
Wheel；The second ejection slide is equipped with the second ejection piece, and second ejection piece is made of the limited block that two block gaps are arranged,
The length of the limited block is greater than the diameter of the first ejection eccentric wheel, and the second ejection eccentric wheel is set to described two pieces
Between limited block；
Wherein, the upper surface of the main thimble offers ejection hole, position, size and the position for ejecting hole of the pair thimble
It sets, size matches.
10. wafer carrying apparatus according to claim 9, which is characterized in that the diameter of the first ejection eccentric wheel is big
In the diameter of the second ejection eccentric wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821373667.6U CN208630057U (en) | 2018-08-24 | 2018-08-24 | A kind of wafer carrying apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821373667.6U CN208630057U (en) | 2018-08-24 | 2018-08-24 | A kind of wafer carrying apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208630057U true CN208630057U (en) | 2019-03-22 |
Family
ID=65742863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821373667.6U Active CN208630057U (en) | 2018-08-24 | 2018-08-24 | A kind of wafer carrying apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208630057U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097656A (en) * | 2020-11-09 | 2020-12-18 | 西安奕斯伟硅片技术有限公司 | Detection system and detection method for edge removal width of wafer back sealing film |
-
2018
- 2018-08-24 CN CN201821373667.6U patent/CN208630057U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097656A (en) * | 2020-11-09 | 2020-12-18 | 西安奕斯伟硅片技术有限公司 | Detection system and detection method for edge removal width of wafer back sealing film |
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