CN208629451U - A kind of semiconductors manufacture mechanical arm - Google Patents

Abstract

The utility model provides a kind of semiconductors manufacture mechanical arm, it is related to technical field of manufacturing semiconductors, the semiconductors manufacture mechanical arm, including first mechanical arm, second mechanical arm, horizontal sliding rail and fixed connecting plate, the bottom of first mechanical arm and the bottom of second mechanical arm are slidably arranged on horizontal sliding rail, one end of fixed connecting plate and the bottom end of first mechanical arm connect, the other end of fixed connecting plate and the bottom end of second mechanical arm connect, so that first mechanical arm and second mechanical arm move synchronously, the top of first mechanical arm is provided with the first clamping mechanism, the top of second mechanical arm is provided with the second clamping mechanism.Compared to the prior art, a kind of semiconductors manufacture mechanical arm provided by the utility model, enables to wafer uniform force during clamping wafer, avoids damaging wafer when clamping, improves wafer quality.

Description

A kind of semiconductors manufacture mechanical arm

Technical field

The utility model relates to technical field of manufacturing semiconductors, in particular to a kind of semiconductors manufacture manipulator Arm.

Background technique

In semiconductor (such as integrated circuit, Dynamic Random Access Memory etc.) manufacture, big and thin wafer is (typical Person's such as silicon) it must often move from a deposition chamber to another deposition chamber, it is usually a large amount of to use in existing wafer manufacturing technique Industrial robot carries out transfer operation to wafer.

Existing industrial robot is usually single armed configuration, realizes the behaviour for picking up and transporting to wafer by single mechanical arm Make, since wafer is rounded, is difficult by single mechanical arm so that uniform force on wafer, since focusing on certainly for wafer clamped It is easy to damage wafer in journey, in addition, existing single mechanical arm clamps wafer by single gripping finger, further Improve the risk of wafer damage.

In view of this, designing and manufacturing one kind enables to wafer uniform force, avoid damaging partly leading for wafer when clamping Body manufacture is just particularly important with mechanical arm.

Utility model content

The purpose of this utility model is to provide a kind of semiconductors manufacture mechanical arms, during clamping wafer Wafer uniform force is enabled to, avoids damaging wafer when clamping, improves wafer quality.

The utility model is that it is realized by adopting the following technical scheme.

A kind of semiconductors manufacture mechanical arm, including first mechanical arm, second mechanical arm, horizontal sliding rail and fixed company Fishplate bar, the bottom of first mechanical arm and the bottom of second mechanical arm are slidably arranged on horizontal sliding rail, and the one of fixed connecting plate End is connect with the bottom end of first mechanical arm, and the other end of fixed connecting plate and the bottom end of second mechanical arm connect, so that the first machine Tool arm and second mechanical arm move synchronously；The top of first mechanical arm is provided with the first clamping mechanism, and the first clamping mechanism includes First set clamping plate, gripping finger on first, gripping finger and the first lower gripping finger in first, gripping finger on first, gripping finger and the in first Once gripping finger is set side by side and is collectively formed the first grasping part for clamping wafer, and first set clamping plate is arranged in the first machine The top of tool arm is simultaneously connect with gripping finger in gripping finger on first, first and the first lower gripping finger respectively；The top of second mechanical arm is set It is equipped with the second clamping mechanism, the second clamping mechanism includes second set clamping plate, gripping finger on second, in second under gripping finger and second Gripping finger, gripping finger on second, in second gripping finger and the second lower gripping finger be set side by side and be collectively formed for clamping wafer second Grasping part, and gripping finger is oppositely arranged in gripping finger and first on second, gripping finger is oppositely arranged in gripping finger and first in second, and second Lower gripping finger and the first lower gripping finger are oppositely arranged, second set clamping plate be arranged in the top of second mechanical arm and respectively with second on press from both sides Refer to, gripping finger and the second lower gripping finger connection in second.

Further, first mechanical arm includes the first connection pedestal, the first arm connecting rod, first rotating arm and first Swivel head, the first connection pedestal are slidably arranged on horizontal sliding rail and connect with one end of fixed connecting plate, the connection of the first arm Bar is connected on the first connection pedestal and upwardly extends, and one end of first rotating arm is hinged on the first arm connecting rod far from first One end of pedestal is connected, the first swivel head is fixed at the one end of first rotating arm far from the first arm connecting rod, the first rotation Rotary head is connect with first set clamping plate, for driving first set clamping plate to rotate.

Further, the first hydraulic-driven part, the first hydraulic-driven part and the first rotation are provided in the first arm connecting rod Pivoted arm connection, for driving first rotating arm to rotate relative to the first arm connecting rod.

Further, the first swivel head includes the first fixing sleeve, the first rotary core shaft and the first driving motor, and first is fixed Set is fixedly connected with first rotating arm far from one end of the first arm connecting rod, and the first rotary core shaft is accommodated in the first fixing sleeve And with the first fixing sleeve rotatable engagement, the first driving motor be arranged on the first fixing sleeve and with the first rotary core shaft be driven connect It connects, for driving the first rotary core shaft to rotate relative to the first fixing sleeve, first set clamping plate is connect with the first rotary core shaft.

Further, first set clamping plate has opposite the first upper set clamping plate and the first next part occlusal splint, under first Collection occlusal splint is connect with the first rotary core shaft, and the first clamping drive is provided between the first upper set clamping plate and the first next part occlusal splint Moving part, for driving the first upper set clamping plate close or far from the first next part occlusal splint.

Further, second mechanical arm includes the second connection pedestal, the second arm connecting rod, the second rotating arm and second Swivel head, the second connection pedestal are slidably arranged on horizontal sliding rail and connect with the other end of fixed connecting plate, and the second arm connects Extension bar is connected on the second connection pedestal and upwardly extends, and one end of the second rotating arm is hinged on the second arm connecting rod far from One end of two connection pedestals, the second swivel head are fixed at the one end of the second rotating arm far from the second arm connecting rod, and second Swivel head is connect with second set clamping plate, for driving second set clamping plate to rotate.

Further, the second hydraulic-driven part, the second hydraulic-driven part and the second rotation are provided in the second arm connecting rod Pivoted arm connection, for driving the second rotating arm to rotate relative to the second arm connecting rod.

Further, the second swivel head includes the second fixing sleeve, the second rotary core shaft and the second driving motor, and second is fixed Set is fixedly connected with the second rotating arm far from one end of the second arm connecting rod, and the second rotary core shaft is accommodated in the second fixing sleeve And with the second fixing sleeve rotatable engagement, the second driving motor be arranged on the second fixing sleeve and with the second rotary core shaft be driven connect It connects, for driving the second rotary core shaft to rotate relative to the second fixing sleeve, second set clamping plate is connect with the second rotary core shaft.

Further, second set clamping plate has opposite the second upper set clamping plate and the second next part occlusal splint, under second Collection occlusal splint is connect with the second rotary core shaft, and the second clamping drive is provided between the second upper set clamping plate and the second next part occlusal splint Moving part, for driving the second upper set clamping plate close or far from the second next part occlusal splint.

A kind of semiconductors manufacture mechanical arm, including first mechanical arm, second mechanical arm, horizontal sliding rail, two it is opposite The fixed rack and fixed connecting plate of setting, horizontal sliding rail are slidably arranged on two fixed racks, the bottom of first mechanical arm Portion and the bottom of second mechanical arm are slidably arranged on horizontal sliding rail, one end of fixed connecting plate and the bottom end of first mechanical arm Connection, the other end of fixed connecting plate and the bottom end of second mechanical arm connect, so that first mechanical arm is synchronous with second mechanical arm Movement；The top of first mechanical arm is provided with the first clamping mechanism, and the first clamping mechanism includes first set clamping plate, presss from both sides on first Refer to, gripping finger and the first lower gripping finger in first, gripping finger on first, gripping finger and the first lower gripping finger are set side by side and common in first Form the first grasping part for clamping wafer, first set clamping plate is arranged in the top of first mechanical arm and respectively with first Upper gripping finger, gripping finger and the first lower gripping finger connection in first；The top of second mechanical arm is provided with the second clamping mechanism, the second dress Clamp mechanism includes second set clamping plate, gripping finger on second, gripping finger and the second lower gripping finger in second, gripping finger on second, in second Gripping finger and the second lower gripping finger are set side by side and are collectively formed the second grasping part for clamping wafer, and on second gripping finger with Gripping finger is oppositely arranged on first, and gripping finger is oppositely arranged in gripping finger and first in second, and the second lower gripping finger is opposite with the first lower gripping finger Setting, second set clamping plate be arranged in the top of second mechanical arm and respectively with second on gripping finger, gripping finger and second in second Lower gripping finger connection.

The utility model has the following beneficial effects:

A kind of semiconductors manufacture mechanical arm provided by the utility model, the bottom of first mechanical arm and second is mechanical The bottom of arm is slidably arranged on horizontal sliding rail, and one end of fixed connecting plate and the bottom end of first mechanical arm connect, fixed to connect The other end of fishplate bar and the bottom end of second mechanical arm connect.The top of first mechanical arm is provided with the first clamping mechanism, first Clamping mechanism passes through gripping finger on first, gripping finger and the first lower gripping finger clamp wafer jointly in first, on the top of second mechanical arm End is provided with the second clamping mechanism, and the second clamping mechanism passes through gripping finger on second, and gripping finger and the first lower gripping finger are common in second Clamp wafer.Wherein the clamping position of the first clamping mechanism is opposite with the clamping position of the second clamping mechanism, passes through multiple clampings Position, multiple directions clamp wafer, guarantee that wafer clamps uniform force everywhere, avoid damaging wafer.It compares In the prior art, a kind of semiconductors manufacture mechanical arm provided by the utility model can make during clamping wafer Wafer uniform force is obtained, avoids damaging wafer when clamping, improves wafer quality.

Detailed description of the invention

It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also To obtain other relevant attached drawings according to these attached drawings.

Fig. 1 is the structural schematic diagram for the semiconductors manufacture mechanical arm that the utility model first embodiment provides；

Fig. 2 is the structural schematic diagram of first mechanical arm in Fig. 1；

The partial enlarged view that Fig. 3 is in Fig. 2 III；

Fig. 4 is the structural schematic diagram of second mechanical arm in Fig. 1；

The partial enlarged view that Fig. 5 is in Fig. 4 IV.

Icon: 100- semiconductors manufacture mechanical arm；110- first mechanical arm；The connection pedestal of 111- first；113- One arm connecting rod；115- first rotating arm；The first swivel head of 117-；The first fixing sleeve of 1171-；The first rotary core shaft of 1173-； The first driving motor of 1175-；119- the first hydraulic-driven part；130- second mechanical arm；The connection pedestal of 131- second；133- second Arm connecting rod；The second rotating arm of 135-；The second swivel head of 137-；The second fixing sleeve of 1371-；The second rotary core shaft of 1373-； The second driving motor of 1375-；139- the second hydraulic-driven part；The horizontal sliding rail of 150-；170- fixed connecting plate；The first clamping of 180- Mechanism；181- first set clamping plate；Gripping finger on 183- first；Gripping finger in 185- first；The lower gripping finger of 187- first；190- second is filled Clamp mechanism；191- second set clamping plate；Gripping finger on 193- second；Gripping finger in 195- second；The lower gripping finger of 197- second.

Specific embodiment

It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.

Therefore, requirement is not intended to limit to the detailed description of the embodiments of the present invention provided in the accompanying drawings below The scope of the utility model of protection, but it is merely representative of the selected embodiment of the utility model.Based in the utility model Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts, all Belong to the range of the utility model protection.

It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.

In the description of the present invention, it should be noted that term " center ", "upper", "vertical", "horizontal", "inner", The orientation or positional relationship of the instructions such as "outside" is to be based on the orientation or positional relationship shown in the drawings or the utility model product The orientation or positional relationship usually put when use, is merely for convenience of describing the present invention and simplifying the description, without referring to Show or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot manage Solution is limitations of the present invention.In addition, term " first ", " second " etc. are only used for distinguishing description, and should not be understood as referring to Show or imply relative importance.

In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set Set ", " connected ", " installation ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, Or it is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, intermediary can also be passed through It is indirectly connected, can be the connection inside two elements.For the ordinary skill in the art, it can be managed with concrete condition Solve the concrete meaning of above-mentioned term in the present invention.

With reference to the accompanying drawing, it elaborates to some embodiments of the utility model.In the absence of conflict, under The feature in embodiment stated can be combined with each other.

First embodiment

Referring to Fig. 1, a kind of semiconductors manufacture mechanical arm 100 is present embodiments provided, including first mechanical arm 110, Second mechanical arm 130, horizontal sliding rail 150 and fixed connecting plate 170, the bottom of first mechanical arm 110 and second mechanical arm 130 Bottom be slidably arranged on horizontal sliding rail 150, one end of fixed connecting plate 170 is connect with the bottom end of first mechanical arm 110, The other end of fixed connecting plate 170 is connect with the bottom end of second mechanical arm 130, so that first mechanical arm 110 and second mechanical arm 130 move synchronously.

The top of first mechanical arm 110 is provided with the first clamping mechanism 180, and the first clamping mechanism 180 includes first set Gripping finger 185 and the first lower gripping finger 187 in gripping finger 183, first on clamping plate 181, first, gripping finger in gripping finger 183, first on first Gripping finger 187 is set side by side and is collectively formed the first grasping part for clamping wafer, first set clamping plate under 185 and first 181 be arranged in the top of first mechanical arm 110 and respectively with first on gripping finger 185 and the first lower gripping finger in gripping finger 183, first 187 connections.

The top of second mechanical arm 130 is provided with the second clamping mechanism 190, and the second clamping mechanism 190 includes second set Gripping finger 195 and the second lower gripping finger 197 in gripping finger 193, second on clamping plate 191, second, gripping finger in gripping finger 193, second on second Gripping finger 197 is set side by side and is collectively formed the second grasping part for clamping wafer, and gripping finger on second under 195 and second Gripping finger 183 is oppositely arranged on 193 and first, and gripping finger 185 is oppositely arranged in gripping finger 195 and first in second, the second lower gripping finger 197 It is oppositely arranged with the first lower gripping finger 187, second set clamping plate 191 is arranged in the top of second mechanical arm 130 and respectively with second Gripping finger 195 and the second lower gripping finger 197 connect in upper gripping finger 193, second.

In the present embodiment, gripping finger 193 in the lower gripping finger 187, second of gripping finger 185, first in gripping finger 183, first on first, The clamping surface of gripping finger 195 and the second lower gripping finger 197 is provided with cushion rubber layer in second, avoids causing crystal column surface It scratches.

Referring to fig. 2, first mechanical arm 110 includes the first connection pedestal 111, the first arm connecting rod 113, first rotating arm 115 and first swivel head 117, the first connection pedestal 111 be slidably arranged on horizontal sliding rail 150 and with fixed connecting plate 170 One end connection, the first arm connecting rod 113 is connected on the first connection pedestal 111 and upwardly extends, first rotating arm 115 One end is hinged on the one end of the first arm connecting rod 113 far from the first connection pedestal 111, and the first swivel head 117 is fixed at The one end of first rotating arm 115 far from the first arm connecting rod 113, the first swivel head 117 are connect with first set clamping plate 181, For driving first set clamping plate 181 to rotate.

The first hydraulic-driven part 119, the first hydraulic-driven part 119 and the first rotation are provided in first arm connecting rod 113 Pivoted arm 115 connects, for driving first rotating arm 115 to rotate relative to the first arm connecting rod 113.Specifically, the first hydraulic drive The cylinder body of moving part 119 is inclined at the side wall of the first arm connecting rod 113, the piston rod of the first hydraulic-driven part 119 and The middle part of one rotating arm 115 is hinged, slides to drive first rotating arm 115 with respect to the first arm in cylinder body by piston rod Connecting rod 113 rotates.

Referring to Fig. 3, the first swivel head 117 includes the first fixing sleeve 1171, the first rotary core shaft 1173 and the first driving electricity Machine 1175, the first fixing sleeve 1171 are fixedly connected with first rotating arm 115 far from one end of the first arm connecting rod 113, and first Rotary core shaft 1173 be accommodated in the first fixing sleeve 1171 and with 1171 rotatable engagement of the first fixing sleeve, the first driving motor 1175 It is arranged on the first fixing sleeve 1171 and is sequentially connected with the first rotary core shaft 1173, for drives 1173 phase of the first rotary core shaft First fixing sleeve 1171 is rotated, first set clamping plate 181 is connect with the first rotary core shaft 1173.

In the present embodiment, first set clamping plate 181 has opposite the first upper set clamping plate and the first next part occlusal splint, First next part occlusal splint is connect with the first rotary core shaft 1173, is provided between the first upper set clamping plate and the first next part occlusal splint First clamping actuator (not shown), for driving the first upper set clamping plate close or far from the first next part occlusal splint.Specifically Ground, gripping finger 185 and the first lower gripping finger 187 include two clamping plates in gripping finger 183, first on first, two clamping plates respectively with First upper set clamping plate and the connection of the first next part occlusal splint.First clamping actuator is cylinder, and the both ends of cylinder are respectively with first Upper set clamping plate and the connection of the first next part occlusal splint, to drive the first upper set clamping plate close or far from the first next part co-clip Plate, to drive on first, gripping finger 185 and the first lower gripping finger 187 are opened and closed in gripping finger 183, first.

Referring to fig. 4, second mechanical arm 130 includes the second connection pedestal 131, the second arm connecting rod 133, the second rotating arm 135 and second swivel head 137, the second connection pedestal 131 be slidably arranged on horizontal sliding rail 150 and with fixed connecting plate 170 Other end connection, the second arm connecting rod 133 is connected on the second connection pedestal 131 and upwardly extends, the second rotating arm 135 One end be hinged on the second arm connecting rod 133 far from second connection pedestal 131 one end, the second swivel head 137 fixed setting In the one end of the second rotating arm 135 far from the second arm connecting rod 133, the second swivel head 137 connects with second set clamping plate 191 It connects, for driving second set clamping plate 191 to rotate.

The second hydraulic-driven part 139, the second hydraulic-driven part 139 and the second rotation are provided in second arm connecting rod 133 Pivoted arm 135 connects, for driving the second rotating arm 135 to rotate relative to the second arm connecting rod 133.Specifically, the second hydraulic drive The cylinder body of moving part 139 is inclined at the side wall of the second arm connecting rod 133, the piston rod of the second hydraulic-driven part 139 and The middle part of two rotating arms 135 is hinged, slides to drive opposite second arm of the second rotating arm 135 in cylinder body by piston rod Connecting rod 133 rotates.

Referring to Fig. 5, the second swivel head 137 includes the second fixing sleeve 1371, the second rotary core shaft 1373 and the second driving electricity Machine 1375, the second fixing sleeve 1371 are fixedly connected with the second rotating arm 135 far from one end of the second arm connecting rod 133, and second Rotary core shaft 1373 be accommodated in the second fixing sleeve 1371 and with 1371 rotatable engagement of the second fixing sleeve, the second driving motor 1375 It is arranged on the second fixing sleeve 1371 and is sequentially connected with the second rotary core shaft 1373, for drives 1373 phase of the second rotary core shaft Second fixing sleeve 1371 is rotated, second set clamping plate 191 is connect with the second rotary core shaft 1373.

In the present embodiment, second set clamping plate 191 has opposite the second upper set clamping plate and the second next part occlusal splint, Second next part occlusal splint is connect with the second rotary core shaft 1373, is provided between the second upper set clamping plate and the second next part occlusal splint Second clamping actuator, for driving the second upper set clamping plate close or far from the second next part occlusal splint.Specifically, on second Gripping finger 195 and the second lower gripping finger 197 include two clamping plates in gripping finger 193, second, two clamping plates respectively with the second upper set Clamping plate and the connection of the second next part occlusal splint.Second clamping actuator be cylinder, the both ends of cylinder respectively with the second upper set clamping plate It is connected with the second next part occlusal splint, to drive the second upper set clamping plate close or far from the second next part occlusal splint, thus band Gripping finger 195 and the second lower gripping finger 197 are opened and closed in gripping finger 193, second on dynamic second.

In conclusion a kind of semiconductors manufacture mechanical arm 100 is present embodiments provided, its working principles are as follows: will First connection pedestal 111 and second connection pedestal 131 along horizontal 150 synchronizing moving of sliding rail to predetermined position, it is hydraulic by first Actuator 119 rotates first rotating arm 115 to clip position, is revolved the second rotating arm 135 by the second hydraulic-driven part 139 Clip position is gone to, the first driving motor 1175 and the second driving motor 1375 are started, so that the first clamping device and the second folder It holds mechanism and turns to clip position, the first clamping actuator of starting and the second clamping actuator, so that each gripping finger is to crystalline substance Circle carries out clipping operation.Compared to the prior art, a kind of semiconductors manufacture mechanical arm 100 provided by the utility model, Wafer uniform force is enabled to during clamping wafer, avoids damaging wafer when clamping, improves wafer quality.

Second embodiment

Present embodiments provide a kind of semiconductors manufacture mechanical arm 100, basic structure and principle and the skill of generation Art effect is identical with first embodiment, and to briefly describe, the present embodiment part does not refer to place, can refer to phase in first embodiment Answer content.

Semiconductors manufacture provided in this embodiment with mechanical arm 100 include first mechanical arm 110, second mechanical arm 130, 150, two fixed rack (not shown) being oppositely arranged of horizontal sliding rail and fixed connecting plate 170, the horizontal sliding of sliding rail 150 are set It sets on two fixed racks, the bottom of first mechanical arm 110 and the bottom of second mechanical arm 130 are slidably arranged in horizontal cunning On rail 150, one end of fixed connecting plate 170 is connect with the bottom end of first mechanical arm 110, the other end of fixed connecting plate 170 with The bottom end of second mechanical arm 130 connects, so that first mechanical arm 110 and second mechanical arm 130 move synchronously.

The top of first mechanical arm 110 is provided with the first clamping mechanism 180, and the first clamping mechanism 180 includes first set Gripping finger 185 and the first lower gripping finger 187 in gripping finger 183, first on clamping plate 181, first, gripping finger in gripping finger 183, first on first Gripping finger 187 is set side by side and is collectively formed the first grasping part for clamping wafer, first set clamping plate under 185 and first 181 be arranged in the top of first mechanical arm 110 and respectively with first on gripping finger 185 and the first lower gripping finger in gripping finger 183, first 187 connections.

The top of second mechanical arm 130 is provided with the second clamping mechanism 190, and the second clamping mechanism 190 includes second set Gripping finger 195 and the second lower gripping finger 197 in gripping finger 193, second on clamping plate 191, second, gripping finger in gripping finger 193, second on second Gripping finger 197 is set side by side and is collectively formed the second grasping part for clamping wafer, and gripping finger on second under 195 and second Gripping finger 183 is oppositely arranged on 193 and first, and gripping finger 185 is oppositely arranged in gripping finger 195 and first in second, the second lower gripping finger 197 It is oppositely arranged with the first lower gripping finger 187, second set clamping plate 191 is arranged in the top of second mechanical arm 130 and respectively with second Gripping finger 195 and the second lower gripping finger 197 connect in upper gripping finger 193, second.

The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.

Claims (10)

1. a kind of semiconductors manufacture mechanical arm, which is characterized in that including first mechanical arm, second mechanical arm, horizontal sliding rail And fixed connecting plate, the bottom of the bottom of the first mechanical arm and the second mechanical arm are slidably arranged in described horizontal On sliding rail, one end of the fixed connecting plate is connect with the bottom end of the first mechanical arm, the other end of the fixed connecting plate It is connect with the bottom end of the second mechanical arm, so that the first mechanical arm and the second mechanical arm move synchronously；

The top of the first mechanical arm is provided with the first clamping mechanism, first clamping mechanism include first set clamping plate, Gripping finger on first, gripping finger and the first lower gripping finger in first, gripping finger on described first, gripping finger and described first in described first Lower gripping finger is set side by side and is collectively formed the first grasping part for clamping wafer, and the first set clamping plate is arranged described The top of first mechanical arm is simultaneously connect with gripping finger in gripping finger on described first, described first and the first lower gripping finger respectively； The top of the second mechanical arm is provided with the second clamping mechanism, and second clamping mechanism includes second set clamping plate, second Upper gripping finger, gripping finger and the second lower gripping finger in second, gripping finger on described second, gripping finger and the second lower folder in described second Finger is set side by side and the second grasping part for clamping wafer is collectively formed, and presss from both sides in gripping finger and described first on described second Finger is oppositely arranged, and gripping finger is oppositely arranged in gripping finger and described first in described second, under the described second lower gripping finger and described first Gripping finger is oppositely arranged, the second set clamping plate be arranged in the top of the second mechanical arm and respectively with described second on press from both sides Refer to, gripping finger and the second lower gripping finger connection in described second.

2. semiconductors manufacture mechanical arm according to claim 1, which is characterized in that the first mechanical arm includes the One connection pedestal, the first arm connecting rod, first rotating arm and the first swivel head, the first connection pedestal are slidably arranged in It is connect on the horizontal sliding rail and with one end of the fixed connecting plate, the first arm connecting rod is connected to described first and connects It connects on pedestal and upwardly extends, one end of the first rotating arm is hinged on the first arm connecting rod and connects far from described first One end of pedestal is connect, first swivel head is fixed at one of the first rotating arm far from the first arm connecting rod End, first swivel head are connect with the first set clamping plate, for driving the first set clamping plate to rotate.

3. semiconductors manufacture mechanical arm according to claim 2, which is characterized in that in the first arm connecting rod It is provided with the first hydraulic-driven part, the first hydraulic-driven part is connect with the first rotating arm, for driving described first Rotating arm is rotated relative to the first arm connecting rod.

4. semiconductors manufacture mechanical arm according to claim 2, which is characterized in that first swivel head includes the One fixing sleeve, the first rotary core shaft and the first driving motor, first fixing sleeve and the first rotating arm are far from described the One end of one arm connecting rod is fixedly connected, and first rotary core shaft is accommodated in first fixing sleeve and with described first Fixing sleeve rotatable engagement, first driving motor are arranged on first fixing sleeve and are driven with first rotary core shaft Connection, for driving first rotary core shaft rotate relative to first fixing sleeve, the first set clamping plate and described the The connection of one rotary core shaft.

5. semiconductors manufacture mechanical arm according to claim 4, which is characterized in that the first set clamping plate has Opposite the first upper set clamping plate and the first next part occlusal splint, the first next part occlusal splint and first rotary core shaft connect It connects, the first clamping actuator is provided between the first upper set clamping plate and the first next part occlusal splint, for driving State the first upper set clamping plate close to or far from the first next part occlusal splint.

6. semiconductors manufacture mechanical arm according to claim 2, which is characterized in that the second mechanical arm includes the Two connection pedestals, the second arm connecting rod, the second rotating arm and the second swivel head, the second connection pedestal are slidably arranged in It is connect on the horizontal sliding rail and with the other end of the fixed connecting plate, the second arm connecting rod is connected to described second It on connection pedestal and upwardly extends, one end of second rotating arm is hinged on the second arm connecting rod far from described second One end of pedestal is connected, second swivel head is fixed at second rotating arm far from the second arm connecting rod One end, second swivel head are connect with the second set clamping plate, for driving the second set clamping plate to rotate.

7. semiconductors manufacture mechanical arm according to claim 6, which is characterized in that in the second arm connecting rod It is provided with the second hydraulic-driven part, the second hydraulic-driven part is connect with second rotating arm, for driving described second Rotating arm is rotated relative to the second arm connecting rod.

8. semiconductors manufacture mechanical arm according to claim 6, which is characterized in that second swivel head includes the Two fixing sleeves, the second rotary core shaft and the second driving motor, second fixing sleeve and second rotating arm are far from described the One end of two arm connecting rods is fixedly connected, and second rotary core shaft is accommodated in second fixing sleeve and with described second Fixing sleeve rotatable engagement, second driving motor are arranged on second fixing sleeve and are driven with second rotary core shaft Connection, for driving second rotary core shaft rotate relative to second fixing sleeve, the second set clamping plate and described the The connection of two rotary core shafts.

9. semiconductors manufacture mechanical arm according to claim 8, which is characterized in that the second set clamping plate has Opposite the second upper set clamping plate and the second next part occlusal splint, the second next part occlusal splint and second rotary core shaft connect It connects, the second clamping actuator is provided between the second upper set clamping plate and the second next part occlusal splint, for driving State the second upper set clamping plate close to or far from the second next part occlusal splint.

10. a kind of semiconductors manufacture mechanical arm, which is characterized in that including first mechanical arm, second mechanical arm, horizontal cunning Rail, two fixed racks and fixed connecting plate being oppositely arranged, it is sliding that the horizontal sliding rail is slidably arranged in two fixations On rail, the bottom of the bottom of the first mechanical arm and the second mechanical arm is slidably arranged on the horizontal sliding rail, institute The one end for stating fixed connecting plate is connect with the bottom end of the first mechanical arm, the other end of the fixed connecting plate and described second The bottom end of mechanical arm connects, so that the first mechanical arm and the second mechanical arm move synchronously；

The top of the first mechanical arm is provided with the first clamping mechanism, first clamping mechanism include first set clamping plate, Gripping finger on first, gripping finger and the first lower gripping finger in first, gripping finger on described first, gripping finger and described first in described first Lower gripping finger is set side by side and is collectively formed the first grasping part for clamping wafer, and the first set clamping plate is arranged described The top of first mechanical arm is simultaneously connect with gripping finger in gripping finger on described first, described first and the first lower gripping finger respectively； The top of the second mechanical arm is provided with the second clamping mechanism, and second clamping mechanism includes second set clamping plate, second Upper gripping finger, gripping finger and the second lower gripping finger in second, gripping finger on described second, gripping finger and the second lower folder in described second Finger is set side by side and the second grasping part for clamping wafer is collectively formed, and presss from both sides in gripping finger and described first on described second Finger is oppositely arranged, and gripping finger is oppositely arranged in gripping finger and described first in described second, under the described second lower gripping finger and described first Gripping finger is oppositely arranged, the second set clamping plate be arranged in the top of the second mechanical arm and respectively with described second on press from both sides Refer to, gripping finger and the second lower gripping finger connection in described second.