CN208622444U - It is a kind of ceramics water cooling can not draw the radio-frequency ion source - Google Patents
It is a kind of ceramics water cooling can not draw the radio-frequency ion source Download PDFInfo
- Publication number
- CN208622444U CN208622444U CN201821123072.5U CN201821123072U CN208622444U CN 208622444 U CN208622444 U CN 208622444U CN 201821123072 U CN201821123072 U CN 201821123072U CN 208622444 U CN208622444 U CN 208622444U
- Authority
- CN
- China
- Prior art keywords
- double
- ion source
- ceramic cylinder
- layer ceramic
- radio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The utility model discloses a kind of ceramic water coolings can not draw the radio-frequency ion source, it include double-layer ceramic cylinder, the inside of the double-layer ceramic cylinder and outer layer intermediate gaps are cooling water channel, radio-frequency coil is wound on the outside of double-layer ceramic cylinder, the inlet and outlet communicated with cooling water channel are respectively equipped in the top and bottom of double-layer ceramic cylinder, the top and bottom of double-layer ceramic cylinder are respectively fixed with upper flange and lower flange, it is also sealed and installed with ion source cover board in the upper end of double-layer ceramic cylinder, starting filament and inlet duct are installed on ion source cover board.Processing cost simply greatly reduces using no faraday's barrel structure structure in the utility model;There is no Faraday cup shieldings, are more advantageous to coil power and obtain feed-in;Structure, which is simply conducive to experimenter, to debug;There are the gaps 6mm can be passed through a large amount of cooling waters between two-layer ceramic bucket, and but effect is preferable for water.
Description
Technical field
The utility model relates to technical field of plasma more particularly to a kind of ceramic water cooling can not draw the radio frequency-ion
Source.
Background technique
Neutral beam injection system (Neutral Beam Injection, NBI) has heating efficiency high, and physical mechanism is most clear
The characteristics of Chu is important one of the auxiliary device of EAST tokamak.Ion source is critical component in neutral beam injection system, greatly
The neutral beam injection device of power is necessarily required to the support of high current ion source.With both at home and abroad to the continuous of neutral beam injection system
Development, it is also more and more to the research of high current ion source.The RF ion source of external antenna structure is all made of ceramics both at home and abroad at present
Or quartz glass insulation, since internal power deposition and plasma sputtering can make in ceramics or quartz glass insulating layer temperature
Rising leads to structural damage.Inside must install Faraday cup and be protected, which mainly has the disadvantage that:
(1) Faraday cup cooling water channel difficulty of processing is big, a large amount of water routes need to by the way of vacuum brazing difficulty of processing it is big
And it is at high cost;
(2) Faraday cup barrel can only generally process the section cooling water channel of 4mm or so, and cooling effect is poor;
(3) Faraday cup shielding causes coil to be difficult feed-in effective power;
(4) Faraday cup structure increases the debugging difficulty of experimenter;
(5) it needs complex from internal vacuum chamber extraction cooling water pipe sealing structure and needs to occupy certain space;
(6) it needs to do potential isolation to Faraday cup.
Utility model content
The utility model aim is exactly that in order to make up the defect of prior art, providing a kind of ceramic water cooling can not draw the barrel to penetrate
Frequency ion source.
The utility model is achieved through the following technical solutions:
It is a kind of ceramics water cooling can not draw the radio-frequency ion source, include double-layer ceramic cylinder, the double-layer ceramic cylinder
Inside and outer layer intermediate gaps are cooling water channel, radio-frequency coil are wound on the outside of double-layer ceramic cylinder, in double-layer ceramic cylinder
Top and bottom are respectively equipped with the inlet and outlet communicated with cooling water channel, and the top and bottom of double-layer ceramic cylinder are solid respectively
Surely there are upper flange and lower flange, be also sealed and installed with ion source cover board in the upper end of double-layer ceramic cylinder, pacify on ion source cover board
Equipped with starting filament and inlet duct.
The ion source cover board is fixed on the upper end of double-layer ceramic cylinder by viton seal ring and M6 hexagon socket head cap screw.
The top and bottom of the double-layer ceramic cylinder pass through vacuum brazing respectively and are welded on upper flange and lower flange.
There are four the inlet and outlet are equal.
Traditional ceramics or quartz outer are mainly substituted for double-layer ceramic by the design of radio-frequency ion source ceramics water-cooling structure
Structure is passed through cooling water temperature inside double-layer ceramic to effectively prevent ceramic temperature rising to play the role of protection, due to pottery
Porcelain inner wall, which can independently cool down, does not need the protection of faraday's bucket, therefore can remove faraday's bucket.
Ceramic cylinder inner wall internal diameter is 198mm, with a thickness of 4mm, be highly 150mm, outer wall outer diameter is 226mm, with a thickness of
It 4mm, is highly 150mm, hollow spacing is 6mm between two ceramic cylinders, and it is 300mm that two flange thicknesses, which are 20mm outer diameter,.
Cooling water is passed through by the water inlet that four diameters are 12mm inside double-layer ceramic to cool down ceramic wall, and is led to
It crosses the water outlet discharge hot water that 4 diameters are 12mm and realizes autonomous cooling.
Traditional ceramics or quartz outer are mainly substituted for double-layer ceramic by the design of radio-frequency ion source ceramics water-cooling structure
Structure.Cooling water temperature is passed through inside double-layer ceramic to effectively prevent ceramic temperature rising to play the role of protection.Due to pottery
Porcelain inner wall, which can independently cool down, does not need the protection of faraday's bucket, therefore can remove faraday's bucket.Advantage without faraday's bucket
Be: processing cost simply greatly reduces in radio frequency-ion source structure;There is no Faraday cup shieldings, are more advantageous to coil
Power obtains feed-in;Structure, which is simply conducive to experimenter, to debug;Radio-frequency ion source inner vacuum body is not take up under identical structure
Product, so that plasma generator effective volume increase is conducive to the generation of higher power.
Ceramic water-cooled cylinder is brazed in upper and lower cover plates using double-layer ceramic structure, and inside can be passed through cooling water temperature.When
When radio-frequency ion source works, plasma can act directly on ceramic inner walls and temperature is caused to rise, and cooling water can play drop at this time
Temperature effect is to protect ceramic bucket inner wall not to be damaged.Because the available effective temperature-reducing protection of ceramic bucket is so farad can be removed
Barrel structure is to simplify radio frequency-ion source structure.
The utility model has the advantages that: the utility model is simply greatly reduced using no faraday's barrel structure structure to be added
Work cost;There is no Faraday cup shieldings, are more advantageous to coil power and obtain feed-in;Structure, which is simply conducive to experimenter, to be adjusted
Examination;There are the gaps 6mm can be passed through a large amount of cooling waters between two-layer ceramic bucket, and but effect is preferable for water;It is not take up under identical structure
Radio-frequency ion source inner vacuum volume, so that plasma generator effective volume increase is conducive to the generation of higher power;Nothing
The design of faraday's bucket is without the concern for faraday's bucket potential isolation problem.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Specific embodiment
As shown in Figure 1, a kind of ceramics water cooling can not draw the radio-frequency ion source, and it include double-layer ceramic cylinder 12, it is described
The inside of double-layer ceramic cylinder 12 and outer layer intermediate gaps are cooling water channel, are wound with radio-frequency coil in the outside of double-layer ceramic cylinder 12
9, the water inlet 6 and water outlet 11 communicated with cooling water channel, bilayer pottery are respectively equipped in the top and bottom of double-layer ceramic cylinder 12
The top and bottom of porcelain cylinder 12 are respectively fixed with upper flange 5 and lower flange 10, also seal installation in the upper end of double-layer ceramic cylinder 12
There is ion source cover board 3, starting filament 2 and inlet duct 1 are installed on ion source cover board 3.
The ion source cover board 3 is fixed on double-layer ceramic cylinder 12 by viton seal ring 4 and M6 hexagon socket head cap screw
Upper end.
The top and bottom of the double-layer ceramic cylinder 12 pass through vacuum brazing respectively and are welded on upper flange 5 and lower flange 10
On.
There are four the water inlet 6 and water outlet 11 is equal.
Plasma can act directly on the ceramic generation of bucket internal layer 7 heat deposition and cause in ceramic bucket when radio-frequency ion source works
7 temperature of layer rise.Cold water is injected by water inlet 6 at this time, there are the gap cooling waters of 6mm between ceramic bucket internal layer 7 and outer layer 8
It can flow that internal layer cool down in gap and achieve the purpose that cooling, cooling water is flowed out by water outlet 11.
Claims (4)
1. a kind of ceramics water cooling can not draw the radio-frequency ion source, it is characterised in that: include double-layer ceramic cylinder, the bilayer
The inside of ceramic cylinder and outer layer intermediate gaps are cooling water channel, radio-frequency coil are wound on the outside of double-layer ceramic cylinder, in bilayer
The top and bottom of ceramic cylinder are respectively equipped with the inlet and outlet communicated with cooling water channel, and the upper end of double-layer ceramic cylinder is under
End is respectively fixed with upper flange and lower flange, ion source cover board is also sealed and installed in the upper end of double-layer ceramic cylinder, in ion source
Starting filament and inlet duct are installed on cover board.
2. a kind of ceramic water cooling according to claim 1 can not draw the radio-frequency ion source, it is characterised in that: it is described from
Component cover board is fixed on the upper end of double-layer ceramic cylinder by viton seal ring and M6 hexagon socket head cap screw.
3. a kind of ceramic water cooling according to claim 1 can not draw the radio-frequency ion source, it is characterised in that: described is double
The top and bottom of layer ceramic cylinder pass through vacuum brazing respectively and are welded on upper flange and lower flange.
4. a kind of ceramic water cooling according to claim 1 can not draw the radio-frequency ion source, it is characterised in that: it is described into
The mouth of a river and water outlet it is equal there are four.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821123072.5U CN208622444U (en) | 2018-07-16 | 2018-07-16 | It is a kind of ceramics water cooling can not draw the radio-frequency ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201821123072.5U CN208622444U (en) | 2018-07-16 | 2018-07-16 | It is a kind of ceramics water cooling can not draw the radio-frequency ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
CN208622444U true CN208622444U (en) | 2019-03-19 |
Family
ID=65705690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201821123072.5U Active CN208622444U (en) | 2018-07-16 | 2018-07-16 | It is a kind of ceramics water cooling can not draw the radio-frequency ion source |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN208622444U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111722263A (en) * | 2020-06-15 | 2020-09-29 | 电子科技大学 | Faraday cup design for high-power electron beam spot measurement |
-
2018
- 2018-07-16 CN CN201821123072.5U patent/CN208622444U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111722263A (en) * | 2020-06-15 | 2020-09-29 | 电子科技大学 | Faraday cup design for high-power electron beam spot measurement |
CN111722263B (en) * | 2020-06-15 | 2022-08-23 | 电子科技大学 | Faraday cup design for high-power electron beam spot measurement |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101856581B (en) | Control method of plasma by magnetic field in an exhaust gas treating apparatus and an exhaust gas treating apparatus using the same | |
CN104332184B (en) | Target-plate probe system applicable to full-tungsten divertor of EAST tokamak device | |
CN104235859B (en) | Microwave gas cracker | |
CN101311656B (en) | Quick-opening type water-cooling structure polycrystalline silicon reducing furnace | |
CN104867801B (en) | Inductively coupled plasma spray gun and plasma device | |
CN103065918B (en) | A kind of electrode introduces structure | |
CN208622444U (en) | It is a kind of ceramics water cooling can not draw the radio-frequency ion source | |
CN105149200A (en) | Cooling device of ultrasonic machining device | |
CN210467753U (en) | Radio frequency ion source device | |
CN100460313C (en) | Double cooled ozone discharging tube | |
CN103887133B (en) | A kind of magnetic-field-enhanced linear large-area ionic source | |
CN105543976B (en) | A kind of decompression diffusion furnace fire door cooling sealing device | |
CN109594062A (en) | The electric heating shower plate and its temperature control system imported with radio frequency | |
CN102943242A (en) | Radio-frequency ionization selenium source device | |
CN104602429A (en) | Warm plasma generator | |
CN104241064B (en) | A kind of 20kW/2450MHz injects frequency locking magnetron | |
CN216902791U (en) | Silicon nitride ceramic active cooling radio frequency ion source device without Faraday cylinder | |
CN101161855A (en) | Magnetron sputtering cathode target for ultrahigh vacuum system | |
CN2926186Y (en) | Double-cooling ozone discharging tube | |
CN205049541U (en) | Box -packed putting of ablation test machine sample cooling | |
CN103344121B (en) | A kind of water cooled electrode device for vacuum resistance heating furnace | |
CN203573943U (en) | Industrial X-ray tube with cooling device | |
CN104080947B (en) | Sectional antenna assembly | |
CN112062346A (en) | Cooling water recycling device | |
CN206328462U (en) | A kind of air inlet battery lead plate for plasma enhanced chemical vapor deposition |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |