CN109594062A - The electric heating shower plate and its temperature control system imported with radio frequency - Google Patents
The electric heating shower plate and its temperature control system imported with radio frequency Download PDFInfo
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- CN109594062A CN109594062A CN201811530898.8A CN201811530898A CN109594062A CN 109594062 A CN109594062 A CN 109594062A CN 201811530898 A CN201811530898 A CN 201811530898A CN 109594062 A CN109594062 A CN 109594062A
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- Prior art keywords
- shower plate
- radio frequency
- heater
- temperature
- electric heating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/4557—Heated nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Surface Heating Bodies (AREA)
Abstract
The present invention relates to a kind of electric heating shower plate and its temperature-controlling system, which realizes being precisely controlled for temperature by the cooperation of electric heater, thermocouple and temperature controller.Such shower plate can be heated to 400 DEG C hereinafter, its temperature upper limit is mainly limited by the material of heater strip and shower plate, if material more resistant to high temperature can be used in system, can break through 400 DEG C of temperature limiting.It realizes in the case where not increasing filter, imports radio frequency by top electrode of shower plate, it not only can satisfy high temperature (200 DEG C or more) demand, but also can split cleaning, neither increase occupation area of equipment, and reduce equipment cost.
Description
Technical field
The invention belongs to semiconductive thin film deposition applications and manufacturing technology fields, and in particular to what a kind of adjoint radio frequency imported
Electric heating shower plate and its temperature control system.
Background technique
Currently, the temperature control of shower plate mostly uses two ways in semiconductive thin film deposition applications and manufacturing technology field: stream
Body heating and electric heating.The shower plate of fluid heating is divided into integrated shower plate and seperated shower plate, and integral type shower plate is mostly to weld
It connects and is made, having the advantages of fluid channel, such mode in shower plate is that thermal conduction effect is good, and temperature uniformity is good, the disadvantage is that
Expensive, temperature is limited by fluid and cannot be excessively high.Split type shower plate is mostly upper layer and lower layer, is equipped with stream in the shower plate of upper layer
Body channel is for heating, and lower layer's shower plate is only used for ventilating, and heat passes to lower layer's shower plate by upper layer shower plate.Such mode
The advantages of be moderate, convenient for safeguarding and replacement, the disadvantage is that temperature limited by fluid and cannot be excessively high, and thermal conduction effect compared with
Difference.Electric heating shower plate is equally divided into integral type and two kinds split type, integral type mostly casting or welding procedure, integrally casting formula
Shower plate is to cast directly over the heater strip with insulating layer in aluminum profile, therefore have good stickiness, but casting technique
There is very high requirement to manufacturer, therefore the shower plate of many welding procedures occurs.
Shower plate has a wide range of applications in semiconductor manufacturing industry, it is a kind of gas introducing apparatus, is similar to household
Shower nozzle.In previous semiconductor equipment, shower plate does not have demand for heat, and the heat that its temperature can be fixed against cavity passes
The heat radiation with heating dish is passed, but with the progress of semiconductor technology, the film type that China independently manufactures gradually increases, to spray
The temperature requirement of leaching plate also increasingly increases.We also start to heat shower plate, and what is mostly used at present is fluid
Heating method has asphalt channel inside shower plate, by the cooperation of oil temperature machine and high-temperature hot oil, fluid is passed through shower plate fluid
In channel, so that shower plate be made to reach set temperature.Such mode can satisfy lower shower plate temperature requirements (200 DEG C with
Under), temperature requirements are higher than with 200 DEG C of shower plate, due to the temperature limiting by high temperature oil and oil temperature machine, this mode is nothing
What method reached.In addition, its higher operating costs, because oil temperature machine and high temperature oil are all more expensive.Therefore from function and cost
From the aspect of two, current use demand is not satisfied.
U.S.'s shower plate patent (patent No.: US8137467B2) is integrated welded type shower plate, and shower plate outer ring has electricity to add
Heated filament, inner circle area are that gas flows through region, have fluid cooling duct in shower plate handle structure, its advantage is that can be heated to
Higher temperature, the disadvantage is that integral type shower plate, which once pollutes, to be renewed, because there are electricity pieces directly to steep in acid for inside
A possibility that middle cleaning, secondary use, substantially reduces, so higher operating costs.Another drawback is shower plate in semiconductor
The top electrode mostly imported as radio frequency in equipment, if it is fluid temperature control shower plate, as long as carrying out insulation meets use
It is required that.But electric heating shower plate either one or separate structure all suffer from the problem of RF energy interference circuit malfunction.
Split type electrical heating shower plate mainly passes through detachable several part combinations and heats together to shower plate, it excellent
Point be it is cheap, be conveniently replaceable and safeguard, can be heated to higher temperature.Disadvantage is equally that RF energy can produce electric heater
Raw interference signal problem.This problem be in the past avoided by increasing filter, but filter in addition to increase equipment cost with
The a large amount of device space has been also taken up outside.Another disadvantage is that fission will lead to heat transference efficiency reduction.U.S.'s shower plate patent
(patent No.: US20050241765A1) uses separate structure, and flake heater is placed in above shower plate in atmosphere,
Central filler insulating materials, lower section shower plate are in vacuum.Such heating method heat transference efficiency is lower, and without solving to penetrate
Frequency interference electric loop problem.Therefore, this patent is directed to a kind of Split type electrical heating shower plate structure, is not increasing filtering
In the case where device, radio frequency is imported by top electrode of shower plate, it not only can satisfy high temperature (200 DEG C or more) demand, but also can tear open
It distinguishes and washes, neither increase occupation area of equipment, and reduce equipment cost.
Summary of the invention
This patent is directed to a kind of electric heating shower plate and its temperature-controlling system, mainly solves semiconductors manufacture neck at this stage
Plate temperature is sprayed in domain cannot meet harsher process requirements problem；The invention proposes a kind of electricity that adjoint radio frequency imports to add
Hot shower plate and its temperature control system, the system realize the accurate control of temperature by the cooperation of electric heater, thermocouple and temperature controller
System.The shower plate can be heated to 400 DEG C hereinafter, its temperature upper limit is mainly limited by the material of heater strip and shower plate, if being
Material more resistant to high temperature can be used in system, then can break through 400 DEG C of temperature limiting；
The present invention includes following technical solution:
It is main with the electric heating shower plate that radio frequency imports, including main structure, heater, thermocouple, ground connection flange (1)
Heater is placed in body structure and thermocouple (2), the heater and thermocouple (2) are grounded.
The main structure includes shower plate (11), spray upper plate (6,10) and shower plate sealing flange (5), the spray
The top of plate (11) is equipped with spray upper plate (10), is equipped with shower plate sealing flange (5) above spray upper plate (10), shower plate sealing
Structure more than flange (5) is in atmosphere, and structure below is in vacuum；It sprays and places heating on upper plate (10)
Device, the heater are made of heater strip (13) and bushing, and flexible metal structure is for guaranteeing between bushing and ground connection flange
Good contact, ground connection flange and board other ground structure has been connected, to realize the ground connection of heater.
The earthing mode of the thermocouple (2) is identical as heater, forms earth-return circuit by bushing and ground connection flange (1),
Elastic metallic structure is equipped between bushing and ground connection flange (1).
The heater is ring-shaped heater, and the bushing is aluminium insert.
The ring-shaped heater upper, middle and lower three parts are ceramic material, the ceramic jacket of ceramics (9), middle part including bottom
It manages, the ceramic shield (7) on top, ring-shaped heater and spray upper plate (10) is insulated by ceramic (9)；In the upper of ceramic shield (7)
Side is equipped with briquetting for guaranteeing good heat transfer by heat conduction；Porcelain bushing (3) is equally installed and is used in thermocouple (2) outer surface
Insulation.
Radio frequency copper strips (20) are connected on the shower plate sealing flange (5), the radio frequency copper strips (20) is for leading radio frequency
Enter in shower plate (11), flexible metal structure is for guaranteeing that radio frequency is led between shower plate sealing flange (5) and spray upper plate (6)
Enter well, also flexible metal structure is used to guarantee the good importing of radio frequency between spray upper plate (6) and shower plate (11).
The water inlet (15), insulating ceramics (16), fluid channel (19) are connections, for cooling down cushion rubber (12)；Institute
State cold water block water channel (22), ice-cold piece (23), insulating ceramics (24), water route import (25) be connection, for cooling down cushion rubber
(21)。
The installation site of the heater strip is adjacent with the upper surface of nearly shower plate (11).
The spray upper plate (10) is " soil " character form structure；The ceramic jacket selects aluminium nitride material.
With the electric heating system for the electric heating shower plate that radio frequency imports, including temperature control system, alarm system；The system
Specifically: shower plate is provided with a heater strip (13) and two thermocouples (2,14), and thermocouple (2) is used for temperature control, thermocouple
(14) for alarming；Temperature controller is by reaching set temperature, thermocouple (2) Real-time Feedback temperature value to heater strip output power
To temperature controller, the accurate control of spray plate temperature may be implemented by PID automatic adjustment for temperature controller；Alarm temperature value is set, when
When thermocouple (14) detects temperature higher than alarming value, alarm module will cut off temperature controller to the power output of heater strip.
Beneficial effects of the present invention:
The electric heating shower plate that a kind of adjoint radio frequency that this patent proposes imports, having can be improved spray plate temperature, drop
The electric heating shower plate that low equipment cost, the advantages that being easily installed maintenance, and this patent propose is not introduce filter
In the case of, it is realized by metallic shield and ceramic insulation and imports radio frequency using electric heating shower plate.
Detailed description of the invention
The present invention will be further described below with reference to the drawings.
Fig. 1 is the electric heating shower plate two dimension cross-sectional view that the present invention is imported with radio frequency；
Fig. 2 is the electric heating shower plate three dimensional sectional view that the present invention is imported with radio frequency；
Fig. 3 is the electric heating shower plate three-dimensional figure that the present invention is imported with radio frequency；
Fig. 4 is the present invention a kind of temperature control and alarm principle figure of the temperature control system that adjoint radio frequency imports；
Fig. 5 is a kind of electricity piece radio shielding schematic diagram for the temperature control system that adjoint radio frequency imports of the present invention.
Specific embodiment
Embodiment 1
As shown in Figure 1, Figure 2 and Figure 3, the electric heating shower plate that radio frequency imports comprises the following structure: ground connection flange 1, heat
Galvanic couple 2,14, insulating ceramics casing 3, shielding aluminium set 4, shower plate sealing flange 5, shower plate upper plate 6, shower plate 11, heater strip
13.The channel used when shower plate is depositing operation, its function and shape are similar to the showerhead of family.In semiconductor
In membrane equipment, shower plate is indispensable component, and the orifice plate for having gas to circulate is typically mounted in vacuum chamber cavity, is such as schemed
In 1 11 shown in.
The top of shower plate 11 is spray upper plate 10, and intralamellar part has 17 and 18 two of flow process gas to lead on spray
Road, as shown in Figure 2.
Spraying above upper plate is shower plate sealing flange 5, more than this flange is in atmosphere, is in vacuum below
In, this three parts together forms the main structure of shower plate.For the temperature requirements for making shower plate 11 reach different, this patent
It placed a ring-shaped heater on spray upper plate, ring-shaped heater is welded by heater strip 13 and aluminium insert 8, heater strip
Usually nickel Lip river alloy material, therefore very high temperature (700 DEG C or so) can be heated to, heater strip 13 is a kind of with sheath
Flexible heater silk, its exocuticle are usually the steel for being unsatisfactory for technique requirement, and wall is thin is not easy to finish, and outside heater strip
8 material of aluminium insert then can taking human as selection meet the aluminium of technique requirement and make, a thermocouple is contained inside heater strip
14, it is used for overtemperature alarm.In addition, aluminium insert 8 is because be that machine adds part that can finish to reach seal request.Aluminium insert with connect
For flexible metal structure for guaranteeing well to contact, the ground connection access the earth of flange 1 thereby realizes heater strip between ground flange
Ground connection.Two parts are ceramic material to ring-shaped heater up and down, and bottom ceramics 9 can choose the good aluminium nitride of thermal conduction effect
Ceramics, top ceramic shield 7 then can choose aluminium oxide ceramics for cost consideration, and the purpose of this two parts ceramic member is will be cyclic annular
Heater and spray upper plate insulation.In order to avoid generating unwanted plasma field or other interference, by heater outlet portion
Divide and is equally mounted with insulating ceramics casing.Radio shielding principle at thermocouple 2 is similar with heater strip, and thermocouple outer surface is same
Installation aluminum casing 4 and porcelain bushing 3 are for being grounded and insulating.
Since the temperature after shower plate heating may cause cushion rubber failure, fluid is provided on shower plate sealing flange
Channel 19, herein for leading to recirculated cooling water, the import of water is as shown in 15 in Fig. 2, since spray upper plate 6 and shower plate seal
Flange 5 is electrical body, so insulated using insulating ceramics 16 shower plate and water route.The cooling water of fluid channel 19 is mainly used
Sealing rubber ring 12 between coolant seal flange 5 and spray upper plate 6, because the temperature of spray upper plate 6 here may be higher.
Cushion rubber 21 is also at the higher temperature region of shower plate 6, therefore water-cooled block 23 is used to cool down the cushion rubber of the position, water-cooled block water channel
Positioned at shown in the 22 of Fig. 2.Insulating ceramics 24 is equally used for insulation shower plate upper plate and water route, and 25 be water route import.Spray version
Radio frequency copper strips 20 is connected on sealing flange 5, the copper strips be used for by radio frequency import shower plate 11 in, shower plate sealing flange 5 with
Flexible metal structure is for guaranteeing that it is good that radio frequency imports between spray upper plate 6, likewise, spray upper plate 6 and shower plate 11 it
Between also flexible metal structure be used to guarantee the good importing of radio frequency.
Installation and maintenance: the shower plate component of present patent application can take out heater strip component 8 from top, specific to grasp
It is first integrally to take out shower plate component as step, then disassembles shower plate sealing flange 5, heater strip group can be taken out later
Part is for replacing, therefore other than heater strip use not capable of washing, other assemblies can reuse after cleaning, reduce
Equipment cost.
Heat transfer effect: heater strip 13 itself is in atmospheric environment, but the installation site of heater strip 13 is very close to spray
The upper surface of plate 11 is drenched, therefore, such heating method efficiency is higher.In addition, in the top of insulating ceramics 7, there are also briquettings for protecting
Demonstrate,prove good heat transfer by heat conduction." soil " character form structure of spray upper plate 10 can reduce the thermal loss of heater strip, because of diameter
Rapid drawdown can weaken from spray upper plate bottom to top heat transmitting, to reduce heat loss.
Installation and maintenance: the shower plate component of present patent application can will add ring-shaped heater 8,13 is whole to take from top
Out, specific operating procedure is first all to take out spray board assembly entirety, then disassembles shower plate sealing flange 5, it
After can take out ring-shaped heater 8,13 for replacing, therefore other than heater strip use not capable of washing, other assemblies
It reuses after cleaning, reduces equipment cost.
Heat transfer effect: heater strip 13 itself is in atmospheric environment, but the installation site of heater strip 13 is very close to spray
The upper surface of plate 11 is drenched, therefore, such heating method efficiency is higher.In addition, in the top of insulating ceramics 7, there are also briquettings for protecting
Demonstrate,prove good heat transfer by heat conduction." soil " character form structure of spray upper plate 10 can reduce the thermal loss of heater strip, because of diameter
Rapid drawdown can weaken from spray upper plate bottom to top heat transmitting, to reduce heat loss.
Embodiment 2
As shown in Figure 4,5, a kind of temperature control system that adjoint radio frequency imports, including temperature control system, alarm system；The system
Specifically: shower plate is provided with a heater strip and two thermocouples, and thermocouple 2 is used for temperature control, and thermocouple 14 is for alarming；Temperature
Control device is by reaching set temperature to heater strip output power, and for 2 Real-time Feedback temperature value of thermocouple to temperature controller, temperature controller is logical
Crossing PID automatic adjustment may be implemented the accurate control of spray plate temperature；Alarm temperature value is set, when thermocouple 14 detects temperature height
When alarming value, alarm module will cut off temperature controller to the power output of heater strip.
Shower plate can become electrical body after radio frequency importing, and heater strip and thermocouple crust are metal sheath, if not
It is shielded and is insulated, radio frequency can directly be entered in entire electric loop by cable, and circuitry collapse is caused.This patent
Preventing principle is as shown in figure 4, there are one layer of aluminium insert, aluminium insert ground connection in the outer surface of heater strip and thermocouple.Aluminium insert outer surface
There is one layer of ceramic jacket, this layer is used to insulate, the radio frequency isolation of heater strip and shower plate may be implemented in this way, and between the two
Heat transmitting still has, and the inherently hot good conductor of aluminium insert, insulating ceramics can equally be guaranteed using aluminium nitride material
Good heat transmitting, therefore this patent can import radio frequency from electric heating shower plate in the case where not using filter.
Temperature control process: setting 11 demand temperature of shower plate, thermocouple 2 transfer data to temperature controller, temperature control in real time first
Device reads thermoelectricity even number value and judges whether to need output power, if detection temperature lower than continuing to output power if setting value, one
Denier temperature reaches in range of set value, and temperature controller stops power output.When temperature as natural cooling drops under setting range
In limited time, output power, spray plate temperature reach setting value to temperature controller again again, and the temperature of shower plate can be realized in reciprocation cycle
Control.
Alarm procedure: thermocouple 14 passes data to alarm module in real time, once alarming value of the temperature beyond setting, report
Alert module can cut off the power output of temperature controller, to guarantee that heating will not be abnormal.
Above content is only to structure of the invention example and explanation, affiliated those skilled in the art couple
Described specific embodiment does various modifications or additions or is substituted in a similar manner, without departing from invention
Structure or beyond the scope defined by this claim, is within the scope of protection of the invention.
Claims (10)
1. the electric heating shower plate imported with radio frequency, which is characterized in that including main structure, heater, thermocouple, ground connection method
Blue (1) places heater in main structure and thermocouple (2), the heater and thermocouple (2) is grounded.
2. the electric heating shower plate that adjoint radio frequency according to claim 1 imports, which is characterized in that the main structure packet
Shower plate (11), spray upper plate (6,10) and shower plate sealing flange (5) are included, the top of the shower plate (11) is equipped on spray
Plate (10), spray upper plate (10) top are equipped with shower plate sealing flange (5), and structure more than shower plate sealing flange (5) is located
In atmosphere, structure below is in vacuum；Heater is placed on spray upper plate (10), the heater is by heater strip
(13) it is formed with bushing, flexible metal structure is grounded flange and machine for guaranteeing well to contact between bushing and ground connection flange
Platform other ground structure is connected, to realize the ground connection of heater.
3. the electric heating shower plate that adjoint radio frequency according to claim 1 imports, which is characterized in that the thermocouple (2)
Earthing mode it is identical as heater, earth-return circuit is formed by bushing and ground connection flange (1), bushing and is grounded between flange (1)
Equipped with elastic metallic structure.
4. the electric heating shower plate that adjoint radio frequency according to claim 2 or 3 imports, which is characterized in that the heater
For ring-shaped heater, the bushing is aluminium insert.
5. the electric heating shower plate that adjoint radio frequency according to claim 1 imports, which is characterized in that on ring-shaped heater
Lower three parts are ceramic material, and the ceramic shield (7) of ceramics (9), the porcelain bushing at middle part, top including bottom passes through pottery
Porcelain (9) insulate ring-shaped heater and spray upper plate (10)；Briquetting is equipped with for guaranteeing good heat in the top of ceramic shield (7)
Conduction heat transfer；Porcelain bushing (3) are equally installed for insulating in thermocouple (2) outer surface.
6. the electric heating shower plate that adjoint radio frequency according to claim 1 imports, which is characterized in that shower plate sealing flange
(5) radio frequency copper strips (20) are connected on, which is used to import radio frequency in shower plate (11), shower plate Sealing Method
Flexible metal structure sprays upper plate (6) and shower plate for guaranteeing that it is good that radio frequency imports between blue (5) and spray upper plate (6)
(11) also flexible metal structure is used to guarantee the good importing of radio frequency between.
7. the electric heating shower plate that adjoint radio frequency according to claim 3 imports, which is characterized in that the water inlet
(15), insulating ceramics (16), fluid channel (19) are connections, for cooling down cushion rubber (12)；The cold water block water channel (22), ice
Cold piece (23), insulating ceramics (24), water route import (25) be connection, for cooling down cushion rubber (21).
8. the electric heating shower plate that adjoint radio frequency according to claim 1 imports, which is characterized in that the peace of the heater strip
Holding position is adjacent with the upper surface of nearly shower plate (11).
9. the electric heating shower plate that adjoint radio frequency according to claim 1 imports, which is characterized in that the spray upper plate
It (10) is " soil " character form structure；The ceramic jacket selects aluminium nitride material.
10. with the electric heating system for the electric heating shower plate that radio frequency imports, which is characterized in that including temperature control system, alarm system
System；The system specifically: shower plate is provided with a heater strip (13) and two thermocouples (2,14), and thermocouple (2) is used for
Temperature control, thermocouple (14) is for alarming；For temperature controller by reaching set temperature to heater strip output power, thermocouple (2) is real
When feedback temperature value to temperature controller, the accurate control of spray plate temperature may be implemented by PID automatic adjustment for temperature controller；Setting report
Alert temperature value, when thermocouple (14) detection temperature is higher than alarming value, alarm module will cut off temperature controller to the function of heater strip
Rate output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811530898.8A CN109594062B (en) | 2018-12-14 | 2018-12-14 | Electrical heating spray plate with radio frequency introduction and temperature control system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811530898.8A CN109594062B (en) | 2018-12-14 | 2018-12-14 | Electrical heating spray plate with radio frequency introduction and temperature control system thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109594062A true CN109594062A (en) | 2019-04-09 |
| CN109594062B CN109594062B (en) | 2021-05-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811530898.8A Active CN109594062B (en) | 2018-12-14 | 2018-12-14 | Electrical heating spray plate with radio frequency introduction and temperature control system thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111001503A (en) * | 2019-12-04 | 2020-04-14 | 沈阳拓荆科技有限公司 | Heating device and temperature control spray assembly |
| CN111411348A (en) * | 2020-04-13 | 2020-07-14 | 沈阳拓荆科技有限公司 | Heating system of PE-CVD reactor spray plate |
| CN113804046A (en) * | 2020-06-15 | 2021-12-17 | 拓荆科技股份有限公司 | Low-cost active temperature control spray head |
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| US20160141183A1 (en) * | 2012-03-01 | 2016-05-19 | Hitachi High-Technologies Corporation | Dry etching apparatus and method |
| CN108054074A (en) * | 2018-01-11 | 2018-05-18 | 北京北方华创微电子装备有限公司 | A kind of pedestal and the semiconductor processing equipment including the pedestal |
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| CN111001503A (en) * | 2019-12-04 | 2020-04-14 | 沈阳拓荆科技有限公司 | Heating device and temperature control spray assembly |
| CN111001503B (en) * | 2019-12-04 | 2021-07-09 | 拓荆科技股份有限公司 | Heating device and temperature control spray assembly |
| CN111411348A (en) * | 2020-04-13 | 2020-07-14 | 沈阳拓荆科技有限公司 | Heating system of PE-CVD reactor spray plate |
| CN111411348B (en) * | 2020-04-13 | 2022-06-21 | 拓荆科技股份有限公司 | Heating system of PE-CVD reactor spray plate |
| CN113804046A (en) * | 2020-06-15 | 2021-12-17 | 拓荆科技股份有限公司 | Low-cost active temperature control spray head |
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