CN208607350U - A kind of test device for probe contact class testing equipment - Google Patents
A kind of test device for probe contact class testing equipment Download PDFInfo
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- CN208607350U CN208607350U CN201821011877.0U CN201821011877U CN208607350U CN 208607350 U CN208607350 U CN 208607350U CN 201821011877 U CN201821011877 U CN 201821011877U CN 208607350 U CN208607350 U CN 208607350U
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- test
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Abstract
The utility model discloses a kind of test devices for probe contact class testing equipment, including test circuit board and insulating layer；Test circuit board includes multiple test points, and multiple test points are used to test the contact and test accuracy of tested probe groups；Insulating layer is set to the surface of test circuit board, and insulating layer is provided with aperture corresponding with each test point position with exposed each test point.Test device described in the utility model for probe contact class testing equipment, the contact point for testing circuit board and probe is exposed, rest part has insulating blanket, so as to assess whether the position of probe has deviation, in order to which staff can adjust the installation site or replacement probe of tested probe groups in time.
Description
Technical field
The utility model relates to technical field of semiconductors, particularly relate to a kind of test for probe contact class testing equipment
Device.
Background technique
During researching and developing and preparing semiconductor devices, especially photoelectric device such as solar battery, print can pass through
Multiple tracks technique and test, wherein one or multi-channel is electrical testing, such as the insulation groove test of hull cell, solar battery
IV curve test etc. is often tested by one group of elastic probe pushing in probe contact class testing equipment.Probe and substrate
Contact directly affect test result, therefore in plant produced, need periodically to carry out contact test, accuracy to probe
Test and calibration, while needing this step also after replacing probe to guarantee the accuracy of test.
In the prior art, need to install a test dress when testing probe below the probe groups of tester table
It sets, directly probe is pressed onto the test device tests later, the face of the part in test device for being contacted with probe
Product is very big, convenient for can easily test probe.But in this case, even if probe exists because of reasons such as deformations
Caused by position deviation, can also pass through test, reduce probe test accuracy.And use the probe pair of inaccuracy
When substrate is tested, it is unable to get accurate test result.
Utility model content
In view of this, the purpose of this utility model is that proposing a kind of test dress for probe contact class testing equipment
It sets, can be improved the accuracy of probe test.
Based on a kind of above-mentioned purpose test device for probe contact class testing equipment provided by the utility model, including
Test circuit board and insulating layer；
The test circuit board includes multiple test points, and multiple test points are used to test the contact of tested probe groups
And test accuracy；
The insulating layer is set to the surface of the test circuit board, and the insulating layer is provided with and each test point
The corresponding aperture in position is with exposed each test point.
Optionally, the test circuit board includes at least one test circuit, and each test circuit includes setting in parallel
The first circuit and second circuit set, first circuit, the second circuit are respectively arranged with the multiple and test point pair
The tie point answered, two adjacent tie points are for realizing two neighboring spy on first circuit, the second circuit
The resistance value accuracy of needle is tested；The corresponding two tie point connections in position, are used on first circuit, the second circuit
In the contact test for realizing probe pair.
Optionally, on first circuit, the second circuit corresponding two tie points in position by leading
Line connection.
Optionally, first circuit, two tie points adjacent on the second circuit pass through conducting wire and connect.
Optionally, it is connected separately between first circuit, two tie points adjacent on the second circuit
Single measuring resistance.
Optionally, multiple measuring resistances on a test circuit are integrated on a measuring resistance item, institute
Measuring resistance item is stated to be fixed on the test circuit board by locating button.
Optionally, the aperture is greater than the probe of tested probe groups.
Optionally, the test device further includes fixed mechanism and mobile mechanism, and the fixed mechanism is for fixing institute
Test circuit board is stated, the fixed mechanism is connect with the mobile mechanism；The mobile mechanism is for being arranged in tester table
And connect with the controller of the tester table, the test is realized in the instruction that the mobile mechanism is used to receive the controller
The movement of circuit board.
Optionally, the test device further includes rotating mechanism, and the rotating mechanism is arranged in the fixed mechanism and institute
It states between mobile mechanism, for rotating the test circuit board to the side of tested probe groups after the completion of test.
From the above it can be seen that the test device provided by the utility model for probe contact class testing equipment,
It is by the setting insulating layer on test circuit board and test point is exposed outside, in test, if some spy of tested probe groups
Deviation occurs in needle position itself just can not correctly contact with the test point on test circuit board, therefore can detecte out tested probe
There is the case where deviation in the probe of group itself, problematic tested probe groups are calibrated in time in order to tester or
Replacement.Further, when being tested using the probe after calibration or replacement substrate, available accurate test knot
Fruit.
Detailed description of the invention
Fig. 1 is test board structure of circuit figure described in the utility model embodiment；
Fig. 2 is to test circuit diagram described in the utility model embodiment；
Fig. 3 is another test circuit diagram described in the utility model embodiment；
Fig. 4 is the test device structure chart for contacting class testing equipment described in the utility model embodiment for probe；
Fig. 5 is that the utility model embodiment tests circuit board standby mode side view；
Fig. 6 is that the utility model embodiment tests circuit board standby mode other direction side view
Fig. 7 is that the utility model embodiment tests circuit board working condition side view；
Fig. 8 is that the utility model embodiment tests circuit board working condition other direction side view；
Fig. 9 is that the utility model embodiment tests circuit board hidden state side view；
Figure 10 is that the utility model embodiment tests another side view of circuit board hidden state.
In above-mentioned attached drawing, 1- test circuit board, 11- test point, 12- insulating layer, 21- tie point, 22- measuring resistance,
The first circuit of 23- 23,24- second circuit, 3- fixed mechanism, 4- mobile mechanism, 5- rotating mechanism, 6- tester table, 7- are tested
Probe groups, 8- substrate to be measured.
Specific embodiment
For the purpose of this utility model, technical solution and advantage is more clearly understood, below in conjunction with specific embodiment, and
Referring to attached drawing, the utility model is further described.
When testing using probe groups substrate, by taking 10 × 2 probe groups as an example, need to guarantee 10 lateral probes
In two neighboring probe the resistance value between two probes can be tested it is accurate, guarantee vertical each pair of probe groups two probes it
Between contact it is good, therefore before being tested using probe groups substrate, it is necessary to carry out contact survey to probe groups
Examination and the test of resistance value accuracy.
Fig. 1 is that the utility model embodiment tests board structure of circuit figure；Fig. 2 is that the utility model embodiment tests circuit
Figure, for testing all probe contacts；Fig. 3 is another test circuit diagram of the utility model embodiment, for assessing lateral phase
Test accuracy of the adjacent probe to resistance.
The utility model embodiment proposes a kind of test device for probe contact class testing equipment, including test circuit
Plate 1 and insulating layer 12, test circuit board 1 are a flat surface structure, and test circuit board 1 includes multiple test points 11, multiple test points
11 for testing the contact and test accuracy (alternatively referred to as resistance value test accuracy) of tested probe groups 7.In test
Directly tested probe groups 7, which are pressed on test circuit board 1, contacts probe directly with test point 11.Insulating layer 12 is set to survey
Trying the surface of circuit board 1, insulating layer 12 is provided with aperture corresponding with each 11 position of test point with exposed each test point 11,
So that test point 11 is exposed outside, in order to contact in test with tested probe groups 7.Optionally, aperture is slightly larger than quilt
Survey the probe of probe groups 7.
In the above-described embodiments, by the setting insulating layer 12 on test circuit board 1 and test point 11 is exposed outside,
When test, if some probe position of tested probe groups 7 itself there is deviation just can not be with the test point 11 on test circuit board 1
Correct contact, therefore the case where deviation occurs in the probe itself that can detecte out tested probe groups 7, in order to which tester can be with
Problematic tested probe groups 7 are calibrated or replaced in time.Meanwhile the through-hole on insulating layer 12 is set slightly larger than tested
The probe of probe groups 7 can further limit the position of tested probe groups 7 when test, so as to more accurate detection
There is the problem of deviation in the probe for being tested probe groups 7 out.
In another embodiment of the utility model, test circuit board includes at least one test circuit, each test
Circuit includes the first circuit 23 and second circuit 24 disposed in parallel, and the first circuit 23, second circuit 24 are respectively arranged with multiple
Tie point 21 corresponding with test point 11, two adjacent tie points 21 are for realizing quilt on the first circuit 23, second circuit 24
Survey the resistance value accuracy test in probe groups 7 between two neighboring probe.Be located at the first circuit 23, on second circuit 24 and
Corresponding two tie points 21 connection in position, is tested for realizing the contact of probe pair.
In the above-described embodiments, tested probe groups 7 are pressed on test circuit board 1 when test and make probe and test point 11
It directly contacts, i.e., accesses probe on the tie point 21 of test circuit, so that complete circuit is formed between corresponding probe,
In order to be tested accordingly.
Optionally, corresponding two tie points 21 in position on the first circuit 23, second circuit 24 are connected by conducting wire
It connects.In a specific embodiment, tested probe groups 7 are depressed on test circuit board 1 when test, pass through resistance meter
It is scanned by to probe, successively measures each pair of probe.About dozens to hundreds of millisecond of each pair of testing time.With first pair of probe
For, tie point a1, tie point a2 are connected by conducting wire, the conducting wire access in test between tie point a1, tie point a2 the
In the circuit of a pair of of probe, by circuit current/voltage test, judge test circuit in the presence or absence of resistance value it is larger or
Resistance value is unstable, to judge whether the circuit is that open circuit or contact are bad, if open circuit or the contact to probe are not
Good, then contact test does not pass through；After this is completed probe, resistance meter passes sequentially through other tie points 21 to it
His probe is to testing, until whole tests is completed.
Optionally, the first circuit 23, two tie points 21 adjacent on second circuit 24 are connected by conducting wire, in order to reality
0 resistance test and probe zeroing between existing two neighboring probe.Probe zeroing can be electric the resistance of probe itself, inside
The influence of the resistance on road is eliminated, and measuring resistance test then can be more accurately carried out.
Optionally, standard electric is connected separately between the first circuit 23, two tie points 21 adjacent on second circuit 24
Resistance 22.In a specific embodiment, tested probe groups 7 are depressed on test circuit board 1 when test, pass through resistance test
Instrument is scanned pair-wise as a pair of of probe progress using two adjacent probes, successively measures each pair of probe.Each pair of testing time is about several
Ten to milliseconds up to a hundred.In the present embodiment, using adjacent the first probe and the second probe as a pair of of probe for, in tie point 21
Between contact test pass through in the case where, between tie point a3, tie point b3 resistance value accuracy test, test philosophy
Are as follows: tie point a3, tie point b3 are contacted with adjacent the first probe and the second probe respectively, by probe tie point a3,
An electric current, the voltage between test tie point a3, tie point b3 are given on circuit between tie point b3；Or in tie point
A voltage, the electric current between test tie point a3, tie point b3 are given on circuit between a3, tie point b3.And it calculates
Measurement resistance value between tie point a3, tie point b3, by the reality between the measurement resistance value and tie point a3, tie point b3
Resistance value is compared, if to the extent permitted by the error, assert that this test result passes through.After being completed, then successively
By other tie points 21 to other probes to testing, until whole tests is completed.
Optionally, multiple measuring resistances 22 on a test circuit are integrated on a measuring resistance item, measuring resistance
Item can be fixed on test circuit board 1 by locating button, to guarantee the accuracy of 22 installation site of measuring resistance.Have at one
In the embodiment of body, for the ease of using, multiple measuring resistances 22 on each test circuit are welded on shape on same circuit board
At a measuring resistance item, this measuring resistance item is fixed on test circuit board 1 by the locating button at both ends when installation, is convenient for
It installs and uses.
In other embodiments of the utility model, testing on circuit board 1 may include multiple test circuits, survey simultaneously
Examination 1 surface of circuit board is provided with multirow test point 21 corresponding with multiple test circuits.Shown in referring to Fig.1, above it is two rows of for 0 electricity
Hinder test point, corresponding test circuit shown in Fig. 2；Two rows of below is measuring resistance test point 21, is surveyed shown in corresponding diagram 3
Try circuit.In test, mobile test circuit board 1 is completed 0 resistance value and is surveyed so that two rows are contacted with tested probe groups 7 above first
Examination, mobile test circuit board 1 again after test passes through complete measuring resistance survey so that two rows are contacted with tested probe groups 7 below
Examination.
Optionally, the number of rows that can also increase measuring resistance on circuit board 1, corresponding different measuring resistance resistance value electricity are tested
Road, in order to the progress of test.
In the above-described embodiments, by the way that multiple test circuits are arranged on same test circuit board, in this way in test, only
The resistance value accuracy test that different resistance values need to can be realized by the position of mobile test circuit board 1, without surveying every time
Tester table is opened after examination and re-replaces measuring resistance, is reduced the testing time, is improved testing efficiency.
In an alternate embodiment, the multiple test circuits tested on circuit board 1 can be staggered, in this reality
The first row in example, 0 resistance test point 21 of third behavior are applied, the second row, fourth line are measuring resistance test point, so as to reduce
Test the area of circuit board 1.
Fig. 4 is the test device structure chart for contacting class testing equipment described in the utility model embodiment for probe.
In further embodiments, test device further includes fixed mechanism 3 and mobile mechanism 4, and fixed mechanism 3 is for solid
Surely circuit board 1 is tested, so that test circuit board 1 is fixed on specific position in order to test, fixed mechanism 3 and mobile mechanism 4
Connection.The setting of mobile mechanism 4 is connect on tester table 6, and with the controller of tester table 6, and mobile mechanism 4 is for receiving institute
The movement of test circuit board 1, moving up and down and stretch including control test circuit board 1 are realized in the instruction for stating controller.
Optionally, test device further includes rotating mechanism 5, the setting of rotating mechanism 5 fixed mechanism 3 and mobile mechanism 4 it
Between, for test circuit board 1 to be rotated to the side of tested probe groups 7 after the completion of test.
Referring to shown in Fig. 5-7, in above-described embodiment, when testing for the first time, test circuit board 1 is fixed on fixed mechanism 3
On, by the controller on tester table 6 preset test circuit board 1 stand and movement routine, behind survey every time
Examination directly controls test circuit board 1 by controller and is tested, and does not need to test every time and all reinstalls test circuit
Plate 1 and the position for adjusting test circuit board 1.When each test starts, control mobile mechanism 4 is moved to circuit board 1 is tested
The underface of tested probe groups 7, and make the test point 11 on the probe alignment test circuit board 1 of tested probe groups 7；Mobile test
Circuit board 1 is tested so that tested probe groups 7 are pressed on test circuit board 1；After the completion of test, mobile test circuit board 1
To the position of next test circuit, tested.After test is fully completed, test circuit board 1 is packed up, it can be directly by test
After the horizontal extraction of circuit board 1 or the control test circuit board 1 of mobile mechanism 4 move down into certain position, the control of rotating mechanism 5 is surveyed
Examination circuit board 1 overturns 90 ° of sides for being set to tested probe groups 7, later can be directly using tested probe groups 7 to base to be measured
Plate 8 is tested.The each position of test circuit board 1 is mobile and positioning is uniformly controlled by the controller of tester table 6.
Test device described in the utility model for probe contact class testing equipment, tests contact of the circuit board with probe
Point is exposed, and rest part has insulating blanket, whether there is the position deviation as caused by the reasons such as deformation so as to assess probe,
In order to which staff can replace problematic probe in time；Multiple test circuits can be set on test circuit board, i.e., it is more
Test point is arranged, after the completion of one group of test, test circuit board shift position is automatically controlled and carries out next group of test, make tested probe groups
Automatically it corresponds in test point, does not need to open tester table replacement test circuit board or measuring resistance after testing every time,
Simplify test process, improves testing efficiency；The measuring resistance of different resistance values can be set in test circuits different simultaneously, in order to
Realize the test of resistance value accuracy；In the test device Embedded test board, when test, test circuit board is rotated to tested probe groups
Lower section carries out the test of probe contact or the test of probe resistance value accuracy, and after test, test circuit board rotation is moved up, hidden
It is hidden within tested probe groups side, does not influence the proper testing to substrate, so that only filling the test when tester table is processed
Set Embedded test board, when follow-up test only needs the test device for being hidden into tested probe groups side being moved to predeterminated position
Can be tested, rather than every time test when require manually installed, once mounting uses all the life, and can save artificial peace
The trouble and position inaccurate of dress, it is convenient and efficient.
It should be understood by those ordinary skilled in the art that: the discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under the thinking of the utility model, the above reality
Applying can also be combined between the technical characteristic in example or different embodiments, and step can be realized with random order, and be deposited
In many other variations of the different aspect of the utility model as described above, for simplicity, they are not provided in details.
The embodiments of the present invention are intended to cover fall into all such within the broad range of appended claims
Replacement, modifications and variations.Therefore, within the spirit and principle of the utility model, any omission for being made, modification, equivalent
Replacement, improvement etc., should be included within the scope of protection of this utility model.
Claims (9)
1. a kind of test device for probe contact class testing equipment, which is characterized in that the test device includes test electricity
Road plate (1) and insulating layer (12)；
The test circuit board (1) includes multiple test points (11), and multiple test points (11) are for testing tested probe groups
(7) contact and test accuracy；
The insulating layer (12) is set to the surface of test circuit board (1), and the insulating layer (12) is provided with and each institute
The corresponding aperture in test point (11) position is stated with exposed each test point (11).
2. the test device according to claim 1 for probe contact class testing equipment, which is characterized in that the test
Circuit board (1) includes at least one test circuit, and each test circuit includes the first circuit (23) disposed in parallel and the
Two circuits (24), first circuit (23), the second circuit (24) are respectively arranged with multiple right with the test point (11)
The tie point (21) answered, adjacent two tie points (21) are used on first circuit (23), the second circuit (24)
In the resistance value accuracy test for realizing two neighboring probe；Position pair on first circuit (23), the second circuit (24)
Two answered tie point (21) connection, is tested for realizing the contact of probe pair.
3. the test device according to claim 2 for probe contact class testing equipment, which is characterized in that be located at described
Corresponding two tie points (21) in position are connected by conducting wire on first circuit (23), the second circuit (24).
4. the test device according to claim 3 for probe contact class testing equipment, which is characterized in that described first
Adjacent two tie points (21) are connected by conducting wire on circuit (23), the second circuit (24).
5. the test device according to claim 3 for probe contact class testing equipment, which is characterized in that described first
Single measuring resistance is connected separately between adjacent two tie points (21) on circuit (23), the second circuit (24)
(22)。
6. the test device according to claim 5 for probe contact class testing equipment, which is characterized in that described in one
Multiple measuring resistances (22) on test circuit are integrated on a measuring resistance item, and the measuring resistance item passes through positioning
Button is fixed on the test circuit board.
7. the test device according to claim 1 for probe contact class testing equipment, which is characterized in that the aperture
Greater than the probe of tested probe groups (7).
8. the test device according to claim 1 for probe contact class testing equipment, which is characterized in that the test
Device further includes fixed mechanism (3) and mobile mechanism (4), and the fixed mechanism (3) is for fixing the test circuit board
(1), the fixed mechanism (3) connect with the mobile mechanism (4)；The mobile mechanism (4) is for being arranged in tester table (6)
It above and with the controller of the tester table (6) connect, the instruction that the mobile mechanism (4) is used to receive the controller is realized
The movement of test circuit board (1).
9. the test device according to claim 8 for probe contact class testing equipment, which is characterized in that the test
Device further includes rotating mechanism (5), the rotating mechanism (5) setting the fixed mechanism (3) and the mobile mechanism (4) it
Between, for test circuit board (1) to be rotated to the side of tested probe groups (7) after the completion of test.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821011877.0U CN208607350U (en) | 2018-06-28 | 2018-06-28 | A kind of test device for probe contact class testing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821011877.0U CN208607350U (en) | 2018-06-28 | 2018-06-28 | A kind of test device for probe contact class testing equipment |
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| Publication Number | Publication Date |
|---|---|
| CN208607350U true CN208607350U (en) | 2019-03-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821011877.0U Active CN208607350U (en) | 2018-06-28 | 2018-06-28 | A kind of test device for probe contact class testing equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108872917A (en) * | 2018-06-28 | 2018-11-23 | 北京铂阳顶荣光伏科技有限公司 | A kind of test device for probe contact class testing equipment |
| WO2021120274A1 (en) * | 2019-12-18 | 2021-06-24 | 深圳市华星光电半导体显示技术有限公司 | Probe test device and panel lighting testing device |
-
2018
- 2018-06-28 CN CN201821011877.0U patent/CN208607350U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108872917A (en) * | 2018-06-28 | 2018-11-23 | 北京铂阳顶荣光伏科技有限公司 | A kind of test device for probe contact class testing equipment |
| WO2021120274A1 (en) * | 2019-12-18 | 2021-06-24 | 深圳市华星光电半导体显示技术有限公司 | Probe test device and panel lighting testing device |
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| CP01 | Change in the name or title of a patent holder |
Address after: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210409 Address after: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210831 Address after: No.66210, 3rd floor, Pudong Free Trade Zone, Shanghai, China Patentee after: Shanghai zuqiang Energy Co.,Ltd. Address before: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
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