CN208570560U - A kind of specimen holder for the processing of semiconductor substrate chemical liquids - Google Patents
A kind of specimen holder for the processing of semiconductor substrate chemical liquids Download PDFInfo
- Publication number
- CN208570560U CN208570560U CN201821033553.7U CN201821033553U CN208570560U CN 208570560 U CN208570560 U CN 208570560U CN 201821033553 U CN201821033553 U CN 201821033553U CN 208570560 U CN208570560 U CN 208570560U
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- CN
- China
- Prior art keywords
- specimen holder
- holder according
- handle
- vertical bar
- fixedly connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 22
- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 239000007788 liquid Substances 0.000 title claims abstract description 15
- 238000012545 processing Methods 0.000 title claims abstract description 15
- 239000000126 substance Substances 0.000 title claims abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 238000004381 surface treatment Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 238000010276 construction Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000002253 acid Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 241000521257 Hydrops Species 0.000 description 1
- 206010030113 Oedema Diseases 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006389 polyphenyl polymer Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application belongs to the field of surface treatment of semiconductor substrate, it is related to a kind of specimen holder for the processing of semiconductor substrate chemical liquids, the specimen holder, it include: main body, it includes symmetrically arranged, equal with horizontal plane angle where bottom first side and second side, and first side and second side include quadrilateral frame and a plurality of vertical bar；Bottom comprising securing device.Specimen holder construction is rationally, easily operated, can accommodate multiple round or rectangular prints simultaneously, wherein print, which can be, to be vertically disposed between vertical bar, is horizontally or diagonally stuck on the transverse concave groove of vertical bar.The specimen holder materials save and securely；The process of sample clean or processing can be greatlyd improve, production efficiency is improved.
Description
Technical field
The present utility model application belongs to the field of surface treatment of semiconductor substrate, is related to a kind of simple structure, easily operated
Specimen holder, be used for semiconductor substrate chemical liquids processing in.
Background technique
In semicon industry, the prints such as silicon wafer, glass are widely used, for researching and developing and preparing semiconductor devices.One
Aspect, these prints usually require to be surface-treated by high temperature, acid, alkali and organic solvent etc., it is therefore desirable to a kind of both resistance to
High temperature, strong alkali-acid resistance, and it is capable of the specimen holder of the more convenient efficient multiple prints of single treatment, to accelerate production effect
Rate reduces fragment rate and production cost.On the other hand, the demand that can be compatible with print of different shapes also enhances increasingly, such as
Circular monocrystalline silicon silicon ingot, the original slice of disk, or use when making special-shaped solar cell piece round or rectangular
Or other shapes substrate.
But existing specimen holder or carrier are not met by the demand, moreover, most specimen holders are usually only applicable in
In the substrate of a certain shape, such as or be suitable for rectangular or be suitable for circle, common rectangular and circle cannot be compatible with
Shape substrate.
In addition, structure is complicated for specimen holder disclosed in the prior art, hollow out and meshing are intensive, thereby result in multistep
There is dead angle when cleaning, is easy residual liquid, and since structure is complicated is inconvenient to dismantle and cleans for specimen holder.There are also existing skills
Specimen holder structure setting disclosed in art is not reasonable, and some is not provided with handle, it has not been convenient to take out print to be replaced and cleaned liquid
Or solution.
Utility model content
In view of above-mentioned deficiencies of the prior art with above-mentioned semicon industry growth requirement, the utility model is intended to design one kind
Specimen holder can be the specimen holder of half immersion, not only can once carry, cleans or handle 10 or more prints, and
And it is suitable for rectangular and circular shape print, it is brought greatly just to the semiconductor material research and development and preparation of laboratory scale
Benefit.
Therefore, the utility model provides a kind of specimen holder for the processing of semiconductor substrate chemical liquids, the specimen holder packet
It includes:
Main body, the main body include symmetrically arranged and equal with horizontal plane angle where bottom first side and second
Side, the first side and second side include quadrilateral frame and a plurality of vertical bar；With
Bottom, the bottom include securing device.
Specifically, the first side or second side and the angle of bottom place horizontal plane are obtuse angle, and the obtuse angle is big
In 90 ° less than 160 °, preferably 100 ° -145 °, thus the trapezoidal structure in the cross section of the main body.
The quadrilateral frame includes the transverse bar and longitudinal rod being fixedly connected.
The securing device of the bottom is configured to the transverse bar with the first side and second side lower edge respectively
The strip structure being fixedly connected.
The securing device is configured to the cuboid or trapezoidal plate of at least two or more same shapes.Preferably, institute
Stating securing device is two or three.
The groove for accommodating the lower edge transverse bar of first side and second side or hole are provided on the securing device.
The a plurality of vertical bar of the first side and the second side is arranged to equidistant structure.
Optionally, between a plurality of vertical bar of the first side and the second side may be also configured to
Away from not equal structure.
It is provided with transverse concave groove in the vertical bar of the first side and the second side, U-shaped or V-type, with
Accommodate print edge.
At least two cross bars for the height settings such as the specimen holder can also include, are fixedly installed on the main body respectively
Both ends.
Specifically, the both ends of the cross bar are respectively fixedly connected with the longitudinal rod in the first side and second side
On.
In addition, the specimen holder further includes the handle being fixedly connected with the main body, wherein the handle includes mutually interconnecting
The crossbeam and vertical bar connect.One, two or more handles has can be set in the specimen holder.
Specifically, the handle is in inverted T-shaped, and the vertical bar of the handle is fixedly connected with the beam vertical.Described
The both ends of the crossbeam of hand are respectively connected on the longitudinal rod of the quadrilateral frame of the first side and second side.Its
In, pluggable inclined hole can be set on the longitudinal rod of the quadrilateral frame, and combine fastener, such as nut and bolt
Deng being fixedly connected with the crossbeam with the longitudinal rod.
Selectively, the handle is T-shaped, and the vertical bar of the handle is fixedly connected with the cross bar.
Specifically, the crossbeam of the handle is located at top, in the center of the cross bar of the specimen holder, the handle
Vertical bar is fitted vertically with the cross bar and connect.Wherein it is possible to be fixedly connected by providing holes or groove, or in conjunction with fastener,
Such as nut and bolt etc..
When in use, print can horizontally or diagonally shape be placed on the specimen holder specimen holder, specifically, by sample
Piece horizontally or diagonally is stuck in the U-shaped or V-type transverse concave groove in a plurality of vertical bar of first side and second side, is pressed
Sample is successively horizontally or diagonally placed in sample frame body from small to large；Optionally, by samples vertical it is placed on institute
It states in the gap between the vertical bar of main body.Both modes of emplacement can be used to accommodate and transfer round or rectangular sample
Piece or substrate, for subsequent cleaning or surface treatment operations.
Beneficial effect
The specimen holder for the processing of semiconductor substrate chemical liquids provided by the utility model can be compatible with round or side
Shape substrate；It is configured to engraved structure, and in cleaning or taking-up, specimen holder bottom will not there are hydrops；10 can be accommodated simultaneously
Or it is more than 10 sample strips or substrate, this product is reasonable in design, and print modes of emplacement can be disposed vertically or horizontally, the sample
Product frame materials save and securely；The process of sample clean or processing can be greatlyd improve, production efficiency is improved.
Detailed description of the invention
Fig. 1 is a kind of structure of embodiment of the specimen holder described herein for the processing of semiconductor substrate chemical liquids
Schematic diagram；
Fig. 2 is first in a kind of embodiment of the specimen holder described herein for the processing of semiconductor substrate chemical liquids
The structural schematic diagram of side or second side；
Fig. 3 is first in a kind of embodiment of the specimen holder described herein for the processing of semiconductor substrate chemical liquids
The longitudal section structural schematic diagram of a plurality of vertical bar of side or second side；
Fig. 4 is a kind of the described of embodiment of the specimen holder described herein for the processing of semiconductor substrate chemical liquids
The structural schematic diagram of the securing device of bottom；
Wherein, in Fig. 1-4: 1, first side；2, second side；3, handle；4, securing device；5, inclined hole；5 ', hole；6,
Convex shape；7, groove.
Specific embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is only used for explaining relevant utility model, rather than any restriction to the utility model.It further needs exist for
It is bright, part relevant to utility model is illustrated only for ease of description, in attached drawing.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination or replacement.
Fig. 1 is that a kind of structure of embodiment of the specimen holder described herein for the processing of semiconductor substrate chemical liquids is shown
It is intended to.As shown in Figure 1, the specimen holder in the embodiment includes: bottom, main body；Wherein: main body includes first side 1 and second
Side 2, wherein first side 1 and second side 2 are arranged to symmetrically, and with horizontal plane where bottom at obtuse angle, described blunt
Angle angle is equal, and is greater than 90 ° less than 160 °, preferably 100 ° -145 °, makes the trapezoidal structure in the cross section of main body；First side 1
Quadrilateral frame and a plurality of vertical bar are respectively included with second side 2；Quadrilateral frame includes the transverse bar being fixedly connected and indulges
To bar；Bottom includes securing device 4, is as shown in the figure two securing devices；In addition, specimen holder shown in FIG. 1 further includes handle
3, shown in handle 3 be two handles, include crossbeam and vertical bar, the handle respectively with first side of the main body
Face is fixedly connected with the second side, wherein as shown in Figure 1, the longitudinal direction of the quadrilateral frame of the crossbeam and main body of handle 3
Bar be fixedly connected mode be by the way that the insertion of the crossbeam both ends of handle is arranged in the inclined hole on the longitudinal rod of quadrilateral frame, and
Matching fastener is fixed.
Specifically, it is shown in Fig. 2 be for semiconductor substrate chemical liquids processing specimen holder first side or second side
The structural schematic diagram in face.It can be clearly seen that from Fig. 1-2, quadrilateral frame includes the transverse bar being fixedly connected and longitudinal direction
Bar is provided with inclined hole 5 on the longitudinal rod of the quadrilateral frame, and is provided on the transverse bar of quadrilateral frame lower edge
It is inserted into the convex shape 6 of securing device.
The securing device 4 of bottom is configured to solid with the transverse bar of 2 lower edge of the first side 1 and second side respectively
Surely the strip structure connected.Securing device 4 may be constructed such that the cuboid or trapezoidal plate of two or more same shapes.Figure
Securing device 4 shown in 1 is two rectangular-shape structures.It is provided on securing device and accommodates first side 1 and second side 2
Lower edge transverse bar groove or hole 5 '.
The crossbeam of handle 3 is parallel to horizontal plane, and both ends are respectively connected to the quadrilateral frame of first side and second side
On the longitudinal rod of frame.Center fixed thereto connection of the vertical bar of handle 3 in crossbeam.As shown in Fig. 2, in the quadrilateral frame
Setting insertion inclined hole 5 on the longitudinal rod of frame in order to which the inclined hole is inserted at the both ends of the crossbeam of handle, and combines fastener, example
Such as nut and bolt, are thus fixedly connected with handle with main body.
As shown in Figs. 1-2, a plurality of vertical bar of first side 1 and second side 2 is arranged to equidistant structure.It may be selected
Property, a plurality of vertical bar of first side and the second side may be also configured to the structure of spacing not etc..
As shown in figure 3, it is provided with transverse concave groove in the vertical bar of first side 1 and second side 2, and it is V-shaped, to hold
It receives and print marginal portion and blocks print.
At least two cross bars for the height settings such as specimen holder can also include, are fixedly installed on the both ends of main body respectively.
Wherein, the both ends of cross bar are respectively fixedly connected on the longitudinal rod of first side and second side.
As shown in Figure 1 and Figure 4, the crossbeam of handle can be with the quadrilateral frame of the first side and the second side
Longitudinal rod be fixedly connected.Shown handle is in inverted T-shaped, the center of the vertical bar of the handle in the crossbeam of the handle
It is fixedly connected perpendicularly thereto.
Selectively, the handle can be with T-shaped, and the crossbeam is located at top, and the vertical bar of the handle is described
The center of the cross bar of specimen holder is fixedly connected perpendicularly thereto.Wherein it is possible to by providing holes or groove, or combine fastening
Part is fixedly connected, such as nut and bolt etc..
In these embodiments, the material for preparing specimen holder is selected from polyether-ether-ketone, polytetrafluoroethylene (PTFE), polyimides, polyphenyl
Any one in the engineering plastics such as thioether and polyetherimide, also selected from stainless steel and other metal materials.
When in use, print can horizontally or diagonally shape be placed on the specimen holder specimen holder, specifically, by sample strip
In edge level or the U-shaped or V-type transverse concave groove being obliquely stuck in a plurality of vertical bar of first side and second side,
It is successively horizontally or diagonally placed on from the bottom up from small to large by sample in the main body of specimen holder；Optionally, sample is hung down
Directly it is placed on the gap between the vertical bar of the main body.Both modes of emplacement can be used to accommodate and transfer it is round or
Rectangular sample strip or substrate, for subsequent cleaning or surface treatment operations.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art
Member is it should be appreciated that utility model range involved in the application, however it is not limited to made of the specific combination of above-mentioned technical characteristic
Technical solution, while should also cover in the case where not departing from the application design, by above-mentioned technical characteristic or its equivalent feature into
Row any combination and the other technical solutions formed；And without prejudice to the design of the spirit of the present invention, to this
Any equivalent replacement of a certain component of utility model or component, modification or combination are within scope of protection of the utility model.
Claims (13)
1. a kind of specimen holder for the processing of semiconductor substrate chemical liquids, which is characterized in that the specimen holder includes:
Main body, the main body include symmetrically arranged and equal with horizontal plane angle where bottom first side and second side
Face, the first side and second side include quadrilateral frame and a plurality of vertical bar；With
Bottom, the bottom include securing device.
2. specimen holder according to claim 1, which is characterized in that water where the first side and second side and bottom
The angle of plane is obtuse angle, and the obtuse angle is greater than 90 ° less than 160 °.
3. specimen holder according to claim 2, which is characterized in that the obtuse angle is 100 ° -145 °.
4. specimen holder according to claim 1, which is characterized in that the quadrilateral frame includes the transverse bar being fixedly connected
And longitudinal rod.
5. specimen holder according to claim 4, which is characterized in that the securing device of the bottom be configured to respectively with institute
State the strip structure that first side is fixedly connected with the transverse bar of second side lower edge.
6. specimen holder according to claim 1, which is characterized in that the securing device is configured at least two or more
The cuboid or trapezoidal plate of same shape.
7. specimen holder according to claim 4, which is characterized in that be provided with receiving first side on the securing device
Groove or hole with the lower edge transverse bar of second side.
8. specimen holder according to claim 1, which is characterized in that the first side and the second side it is described more
Transverse concave groove is provided in vertical bar.
9. specimen holder according to claim 4, which is characterized in that the specimen holder further comprises that equal height is arranged extremely
Few two cross bars, are fixedly installed on the both ends of the main body respectively.
10. specimen holder according to claim 9, which is characterized in that the both ends of the cross bar are respectively fixedly connected with described
On the longitudinal rod of first side and second side.
11. specimen holder according to claim 9, which is characterized in that it further include the handle being fixedly connected with the main body,
Described in handle include crossbeam and vertical bar interconnected.
12. specimen holder according to claim 11, which is characterized in that the handle is in inverted T-shaped, wherein the cross of the handle
The both ends of beam are respectively connected on the longitudinal rod of the quadrilateral frame of the first side and second side.
13. specimen holder according to claim 11, which is characterized in that the handle is T-shaped, the vertical bar of the handle and institute
Cross bar is stated to be fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821033553.7U CN208570560U (en) | 2018-07-02 | 2018-07-02 | A kind of specimen holder for the processing of semiconductor substrate chemical liquids |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821033553.7U CN208570560U (en) | 2018-07-02 | 2018-07-02 | A kind of specimen holder for the processing of semiconductor substrate chemical liquids |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208570560U true CN208570560U (en) | 2019-03-01 |
Family
ID=65490474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821033553.7U Expired - Fee Related CN208570560U (en) | 2018-07-02 | 2018-07-02 | A kind of specimen holder for the processing of semiconductor substrate chemical liquids |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208570560U (en) |
-
2018
- 2018-07-02 CN CN201821033553.7U patent/CN208570560U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 102600 room 3001, building 6, yard 7, Rongchang East Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 102600 room 3001, building 6, yard 7, Rongchang East Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210401 Address after: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 102600 room 3001, building 6, yard 7, Rongchang East Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210826 Address after: No.66210, 3rd floor, Pudong Free Trade Zone, Shanghai, China Patentee after: Shanghai zuqiang Energy Co.,Ltd. Address before: Room 201, Building A, 1 Qianwan Road, Qianhai Shenzhen-Hong Kong Cooperation Zone, Shenzhen, Guangdong Province Patentee before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190301 |