CN208545492U - A kind of chemical vapor deposition stove - Google Patents
A kind of chemical vapor deposition stove Download PDFInfo
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- CN208545492U CN208545492U CN201820840628.6U CN201820840628U CN208545492U CN 208545492 U CN208545492 U CN 208545492U CN 201820840628 U CN201820840628 U CN 201820840628U CN 208545492 U CN208545492 U CN 208545492U
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- shaft
- air inlet
- settling chamber
- inlet pipe
- part plate
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Abstract
A kind of chemical vapor deposition stove, it is related to chemical deposition technique field, more particularly to a kind of chemical vapor deposition stove, it includes furnace base, shaft, bell, burner hearth, calandria, insulating layer, air inlet pipe, through-hole, pod, gas-guide tube, settling chamber, put part plate, venthole, matrix, escape pipe, the bottom of shaft is provided with furnace base, bell is provided at the top of shaft, burner hearth is provided in shaft, insulating layer is disposed between shaft and burner hearth from outside to inside, calandria, the middle position of furnace base is provided with air inlet pipe, the closed upper part of air inlet pipe, the side wall of air inlet pipe is evenly arranged with through-hole, the top of air inlet pipe is provided with pod, it is provided in settling chamber and several puts part plate, it puts and is evenly arranged with venthole on part plate, it puts and is placed with matrix on part plate, escape pipe is provided at the top of settling chamber.After adopting the above technical scheme, the utility model has the beneficial effect that it is not only simple in structure, design is reasonable, and deposition effect is good, and conversion rate of products is high.
Description
Technical field
The utility model relates to chemical deposition technique fields, and in particular to a kind of chemical vapor deposition stove.
Background technique
Modern science and technology need the New Inorganic Materials using a large amount of Various Functions, these functional materials must be high-purity
, or intentionally mix in high-purity material the dopant material of certain impurity formation.Chemical vapor deposition is recent decades
The new technology of the preparation inorganic material to grow up.Chemical vapour deposition technique be widely used for purifying substances, develop new crystal,
Deposit various monocrystalline, polycrystalline or glassy state inorganic thin film material.
Chemical vapor deposition is a kind of Chemical Engineering Technology, which mainly utilizes one or more of gas containing film element
Phase compound or simple substance carry out the method that chemical reaction generates film on the surface of a substrate.Chemical vapor deposition is recent decades
The new technology of the preparation inorganic material to grow up.CVD method be widely used for purifying substances, develop new crystal,
Deposit various monocrystalline, polycrystalline or glassy state inorganic thin film material.These materials can be oxide, sulfide, nitride, carbonization
Object is also possible to III-V, II-IV, the binary in group IV-VI or compound between polynary element, and their physical function
It can accurately be controlled by the deposition process of gas phase doping.Currently, chemical vapor deposition has become one of Inorganic synthese chemistry
Frontier.
But existing gaseous phase deposition stove, there are still some shortcomings, such as structure are complex, figure is larger, and
It is influenced by factors, conversion rate of products is low.
Utility model content
The purpose of this utility model is that it is in view of the drawbacks of the prior art and insufficient, a kind of chemical vapor deposition stove is provided,
It is not only simple in structure, and design is reasonable, and deposition effect is good, and conversion rate of products is high.
To achieve the above object, the utility model is using following technical scheme: it includes furnace base 1, shaft 2, bell
3, burner hearth 4, calandria 5, insulating layer 6, air inlet pipe 7, through-hole 8, pod 9, gas-guide tube 10, settling chamber 11, put part plate 12, ventilation
Hole 13, matrix 14, escape pipe 15, the bottom of shaft 2 are provided with furnace base 1, and the top of shaft 2 is provided with bell 3, in shaft 2
It is provided with burner hearth 4, is disposed with insulating layer 6, calandria 5, the interposition of furnace base 1 between shaft 2 and burner hearth 4 from outside to inside
It installs and is equipped with air inlet pipe 7, the closed upper part of air inlet pipe 7, the side wall of air inlet pipe 7 is evenly arranged with through-hole 8, the top of air inlet pipe 7
It is provided with pod 9, the top of pod 9 is connected to by gas-guide tube 10 with settling chamber 11, and several put is provided in settling chamber 11
Part plate 12 is put and is evenly arranged with venthole 13 on part plate 12, and venthole 13 is put by row's distribution and is placed with matrix 14 on part plate 12,
The top of settling chamber 11 is provided with escape pipe 15.
The furnace base 1 is non-dismountable component, and the bell 3 is detachable member.When the component hair in shaft 2
When raw failure or damage, opens bell 3 and repair.
The pod 9 is columnar structured in lower openings.The inner space of pod 9 forms preheating buffering
Band, gas are entered after wherein being preheated again in settling chamber 11, are conducive to improve conversion rate of products.
It is described to put that the spacing of part plate 12 between any two is equal, and it is equal to be placed on 14 quantity of matrix put on part plate 12.
It adopts the structure so that the thickness of film or coating that gas is formed after reacting is essentially identical, it is ensured that product
Consistency.
The escape pipe 15 includes that exhaust pipe 15-1 and horn-like gas outlet 15-2, exhaust pipe 15-1 are placed in settling chamber 11
Outside, horn-like gas outlet 15-2 is placed in the inside of settling chamber 11.Post-depositional exhaust gas is collected through horn-like gas outlet 15-2,
It is discharged again by exhaust pipe 15-1, the hole size of horn-like gas outlet 15-2 to exhaust pipe 15-1 from large to small, effectively prevents
Exhaust gas is deposited in escape pipe 15 and is resulted in blockage.
After adopting the above technical scheme, the utility model has the beneficial effect that it is not only simple in structure, design is reasonable, and
Deposition effect is good, and conversion rate of products is high.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the cross-sectional view of air inlet pipe 7 in the utility model；
Fig. 3 is the structural schematic diagram that part plate 12 is put in the utility model.
Description of symbols: furnace base 1, shaft 2, bell 3, burner hearth 4, calandria 5, insulating layer 6, air inlet pipe 7, through-hole 8,
Pod 9, settling chamber 11, puts part plate 12, is venthole 13, matrix 14, escape pipe 15, exhaust pipe 15-1, horn-like gas-guide tube 10
Gas outlet 15-2.
Specific embodiment
Referring to shown in Fig. 1-Fig. 3, present embodiment the technical solution adopted is that: it includes furnace base 1, shaft 2, furnace
Lid 3, calandria 5, insulating layer 6, air inlet pipe 7, through-hole 8, pod 9, gas-guide tube 10, settling chamber 11, puts part plate 12, is logical burner hearth 4
Stomata 13, matrix 14, escape pipe 15, the bottom of shaft 2 are provided with furnace base 1, and the top of shaft 2 is provided with bell 3, shaft 2
It is inside provided with burner hearth 4, is disposed with insulating layer 6, calandria 5, the centre of furnace base 1 between shaft 2 and burner hearth 4 from outside to inside
Position is provided with air inlet pipe 7, the closed upper part of air inlet pipe 7, and the side wall of air inlet pipe 7 is evenly arranged with through-hole 8, air inlet pipe 7 it is upper
Portion is provided with pod 9, and the top of pod 9 is connected to settling chamber 11 by gas-guide tube 10, is provided in settling chamber 11 several
Part plate 12 is put, puts and is evenly arranged with venthole 13 on part plate 12, venthole 13 is put by row's distribution and is placed with matrix on part plate 12
14, the top of settling chamber 11 is provided with escape pipe 15.
The furnace base 1 is non-dismountable component, and the bell 3 is detachable member.When the component hair in shaft 2
When raw failure or damage, opens bell 3 and repair.
The pod 9 is columnar structured in lower openings.The inner space of pod 9 forms preheating buffering
Band, gas are entered after wherein being preheated again in settling chamber 11, are conducive to improve conversion rate of products.
It is described to put that the spacing of part plate 12 between any two is equal, and it is equal to be placed on 14 quantity of matrix put on part plate 12.
It adopts the structure so that the thickness of film or coating that gas is formed after reacting is essentially identical, it is ensured that product
Consistency.
The escape pipe 15 includes that exhaust pipe 15-1 and horn-like gas outlet 15-2, exhaust pipe 15-1 are placed in settling chamber 11
Outside, horn-like gas outlet 15-2 is placed in the inside of settling chamber 11.Post-depositional exhaust gas is collected through horn-like gas outlet 15-2,
It is discharged again by exhaust pipe 15-1, the hole size of horn-like gas outlet 15-2 to exhaust pipe 15-1 from large to small, effectively prevents
Exhaust gas is deposited in escape pipe 15 and is resulted in blockage.
Working principle of the utility model is: gas is after the entrance of air inlet pipe 7, via through holes 8 are diffused in pod 9, through leading
Stream cover 9 preheating after again through gas-guide tube 10 enter settling chamber 11 in chemically reacts, make matrix 14 surface formation film or
Coating to enhance the wearability of matrix 14, while also improving the inoxidizability of matrix 14, and post-depositional tail gas is through escape pipe
15, which discharge out of the furnace, carries out subsequent gases purified treatment.
The above is merely intended for describing the technical solutions of the present application, but not for limiting the present application, those of ordinary skill in the art couple
The other modifications or equivalent replacement that the technical solution of the utility model is made, without departing from technical solutions of the utility model
Spirit and scope should all cover in the scope of the claims of the utility model.
Claims (5)
1. a kind of chemical vapor deposition stove, it is characterised in that: it include furnace base (1), shaft (2), bell (3), burner hearth (4),
Calandria (5), air inlet pipe (7), through-hole (8), pod (9), gas-guide tube (10), settling chamber (11), puts part plate at insulating layer (6)
(12), venthole (13), matrix (14), escape pipe (15), the bottom of shaft (2) are provided with furnace base (1), the top of shaft (2)
Portion is provided with bell (3), is provided with burner hearth (4) in shaft (2), is disposed with from outside to inside between shaft (2) and burner hearth (4)
Insulating layer (6), calandria (5), the middle position of furnace base (1) are provided with air inlet pipe (7), the closed upper part of air inlet pipe (7), into
The side wall of tracheae (7) is evenly arranged with through-hole (8), and the top of air inlet pipe (7) is provided with pod (9), the top of pod (9)
Be connected to by gas-guide tube (10) with settling chamber (11), be provided in settling chamber (11) it is several put part plate (12), put on part plate (12)
It is evenly arranged with venthole (13), venthole (13) is put by row's distribution and is placed with matrix (14) on part plate (12), settling chamber (11)
Top be provided with escape pipe (15).
2. a kind of chemical vapor deposition stove according to claim 1, it is characterised in that: the furnace base (1) is can not
Component is dismantled, the bell (3) is detachable member.
3. a kind of chemical vapor deposition stove according to claim 1, it is characterised in that: the pod (9) is in lower part
What is be open is columnar structured.
4. a kind of chemical vapor deposition stove according to claim 1, it is characterised in that: it is described put part plate (12) two-by-two it
Between spacing it is equal, and it is equal to be placed on matrix (14) quantity put on part plate (12).
5. a kind of chemical vapor deposition stove according to claim 1, it is characterised in that: the escape pipe (15) includes row
Tracheae (15-1) and horn-like gas outlet (15-2), exhaust pipe (15-1) are placed in the outside of settling chamber (11), horn-like gas outlet
(15-2) is placed in the inside of settling chamber (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820840628.6U CN208545492U (en) | 2018-06-01 | 2018-06-01 | A kind of chemical vapor deposition stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820840628.6U CN208545492U (en) | 2018-06-01 | 2018-06-01 | A kind of chemical vapor deposition stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208545492U true CN208545492U (en) | 2019-02-26 |
Family
ID=65420601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820840628.6U Active CN208545492U (en) | 2018-06-01 | 2018-06-01 | A kind of chemical vapor deposition stove |
Country Status (1)
| Country | Link |
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| CN (1) | CN208545492U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110042362A (en) * | 2019-05-13 | 2019-07-23 | 杨卫正 | A kind of multipurpose chemical vapor deposition unit |
| CN111020530A (en) * | 2019-12-26 | 2020-04-17 | 湖南德智新材料有限公司 | Chemical vapor deposition furnace with air inlet at two ends |
| CN112661525A (en) * | 2020-12-29 | 2021-04-16 | 中南大学 | Chemical vapor infiltration process and device |
| CN116715532A (en) * | 2023-06-13 | 2023-09-08 | 北京理工大学 | Preparation method of uniform interfacial phase of single-layer fiber fabric |
-
2018
- 2018-06-01 CN CN201820840628.6U patent/CN208545492U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110042362A (en) * | 2019-05-13 | 2019-07-23 | 杨卫正 | A kind of multipurpose chemical vapor deposition unit |
| CN111020530A (en) * | 2019-12-26 | 2020-04-17 | 湖南德智新材料有限公司 | Chemical vapor deposition furnace with air inlet at two ends |
| CN112661525A (en) * | 2020-12-29 | 2021-04-16 | 中南大学 | Chemical vapor infiltration process and device |
| CN116715532A (en) * | 2023-06-13 | 2023-09-08 | 北京理工大学 | Preparation method of uniform interfacial phase of single-layer fiber fabric |
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