CN202323024U - Deposition chamber for chemical vapor deposition - Google Patents
Deposition chamber for chemical vapor deposition Download PDFInfo
- Publication number
- CN202323024U CN202323024U CN2012200755830U CN201220075583U CN202323024U CN 202323024 U CN202323024 U CN 202323024U CN 2012200755830 U CN2012200755830 U CN 2012200755830U CN 201220075583 U CN201220075583 U CN 201220075583U CN 202323024 U CN202323024 U CN 202323024U
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- China
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- deposition chamber
- chamber body
- sediment chamber
- cover plate
- upper cover
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Abstract
The utility model relates to a deposition chamber for chemical vapor deposition, which belongs to the technical field of charcoal/charcoal composite material manufacture and comprises a deposition chamber body and an upper cover plate. The deposition chamber is characterized in that the deposition chamber body is of a cylindrical structure. The upper cover plate is arranged on top of the deposition chamber body and connected with the deposition chamber body in sealing mode, and an air exhaust hole is arranged on the upper cover plate. The deposition chamber body is sleeved in a heating body and arranged on a deposition furnace base. The deposition chamber body adopts graphite or charcoal/charcoal composite material quality. The deposition chamber is simple in structure, avoids contact between working gas and a graphite heater, increases use rate of the working gas, simultaneously reduces failure such as device short circuit caused by continuous growth of pyrocarbon on the graphite heater and an electricity guiding connection portion, and reduces maintenance work load of devices.
Description
Technical field
The utility model relates to a kind of sediment chamber, relates in particular to a kind of chemical vapor deposition stove and uses the sediment chamber, belongs to carbon/carbon composite manufacturing technology field.
Background technology
Chemical vapour deposition (CVI) is a traditional technology method of making carbon/carbon composite; It is that hydrocarbon gas is fed in the cvd furnace; Under 1000 ℃ of left and right sides conditions; Pyrolytic carbon is constantly grown at carbon fiber surface, finally makes the fibrage body densification form charcoal fiber reinforcement pyrolytic carbon matrix composite.Cvd furnace generally adopts Frequency Induction Heating or graphite resistance heating; In graphite resistance heating deposition stove, can be designed to tubulose, different structural forms such as bar-shaped, tabular according to the big or small graphite heater of burner hearth, in vapor deposition processes pyrolytic carbon except carbon fiber surface constantly growth make the densification of charcoal fiber preform; Also can be on the graphite heater and draw to be electrically connected on the position and grow; Both waste a large amount of unstripped gas and caused sedimentation effect to reduce, and because pyrolytic carbon on the graphite heater and draw the continuous growth that is electrically connected on the position, very easily causes faults such as equipment short circuit; Influence equipment efficiency of usage, increase the equipment repair and maintenance workload.Therefore need a kind of contacting of working gas and graphite heater of in cvd furnace, can avoiding badly, can also increase the sediment chamber of the utilization ratio of working gas.
The utility model content
The utility model is to the deficiency that exists in the graphite resistance heating deposition stove in the above-mentioned prior art; Provide a kind of and simple in structurely in graphite resistance heating deposition stove, not only can avoid contacting of working gas and graphite heater, and increased the sediment chamber of the utilization ratio of working gas.
The technical scheme that the utility model solves the problems of the technologies described above is following: a kind of chemical vapor deposition stove is used the sediment chamber; Comprise sediment chamber's body and upper cover plate; Be characterized in that said sediment chamber body is a cylinder-like structure, said upper cover plate is arranged on the top of said sediment chamber body; And with said sediment chamber airtight connection of body, said upper cover plate is provided with venting hole; Said sediment chamber body is sleeved in the heating element, and said sediment chamber body is arranged on the cvd furnace base.
In graphite resistance heating deposition stove, the utility model is installed; In the utility model, pack into the precast body of preparing vapour deposition and feed hydrocarbon gas by the air inlet port on the cvd furnace base; Precast body is constantly density in the sediment chamber, and reacted waste gas is discharged by the top venting hole.
Further, said sediment chamber's body employing graphite or carbon/carbon composite material.
Further, the venting hole on the upper cover plate is a circular hole, and its diameter is 100mm.Deposition chamber interior reactant gases discharging in the gaseous phase deposition stove stove when being convenient to work.
Further, said venting hole is 5.Guarantee that a large amount of gas can get rid of the sediment chamber at any time.
The beneficial effect of the utility model is: after in graphite resistance heating deposition stove, the utility model being installed; Avoided contacting of working gas and graphite heater; Increased the utilization ratio of working gas; Reduce pyrolytic carbon simultaneously on the graphite heater and draw the faults such as equipment short circuit that are electrically connected the continuous growth on the position and cause, reduced the equipment repair and maintenance workload.
Description of drawings
Fig. 1 is the utility model cross-sectional view;
Fig. 2 is the vertical view of Fig. 1 along the A-A direction.
Fig. 1-shown in Figure 2,1, sediment chamber's body; 2, heating element; 3, upper cover plate; 4, venting hole; 5, cvd furnace base; 6, air inlet port.
Embodiment
Below in conjunction with accompanying drawing the principle and the characteristic of the utility model are described, institute gives an actual example and only is used to explain the utility model, is not the scope that is used to limit the utility model.
As depicted in figs. 1 and 2, a kind of chemical vapor deposition stove is used the sediment chamber, comprises sediment chamber's body 1 and upper cover plate 3, and said sediment chamber body 1 is a cylinder-like structure, is positioned at the top of said cvd furnace base 5; Said upper cover plate 3 is arranged on the top of said sediment chamber body 1, and with 1 airtight connection of said sediment chamber body, said upper cover plate 3 is provided with venting hole 4, the venting hole 4 on the said upper cover plate 3 is a circular hole, the diameter of said circular hole is 100mm; Said sediment chamber body 1 is sleeved in the heating element 2.
Said sediment chamber body 1 adopts graphite or carbon/carbon composite material.Said carbon/carbon composite is a kind of by the material that constitutes after high strength carbon cellulose fiber and the carbon element matrix process greying enhancement process, can be widely used in all kinds of structural parts, well heater and container under the hot environment.
In graphite resistance heating deposition stove, the utility model is installed; In the utility model sediment chamber, pack into and prepare the precast body of vapour deposition; Feed hydrocarbon gas through the air inlet port on the cvd furnace base 56 then; Precast body is constantly density in the sediment chamber, and reacted waste gas is discharged by top venting hole 4, avoids working gas to contact with graphite heater.
The above is merely the preferred embodiment of the utility model, and is in order to restriction the utility model, not all within the spirit and principle of the utility model, any modification of being done, is equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (4)
1. a chemical vapor deposition stove is used the sediment chamber, comprises sediment chamber's body and upper cover plate, it is characterized in that; Said sediment chamber body is a cylinder-like structure; Said upper cover plate is arranged on the top of said sediment chamber body, and with said sediment chamber airtight connection of body, said upper cover plate is provided with venting hole.
2. chemical vapor deposition stove according to claim 1 is used the sediment chamber, it is characterized in that, said sediment chamber body adopts graphite or carbon/carbon composite to process.
3. chemical vapor deposition stove according to claim 1 and 2 is used the sediment chamber, it is characterized in that, the venting hole on the said upper cover plate is a circular hole, and its diameter is 100mm.
4. chemical vapor deposition stove according to claim 3 is used the sediment chamber, it is characterized in that, said venting hole is 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200755830U CN202323024U (en) | 2012-03-02 | 2012-03-02 | Deposition chamber for chemical vapor deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200755830U CN202323024U (en) | 2012-03-02 | 2012-03-02 | Deposition chamber for chemical vapor deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202323024U true CN202323024U (en) | 2012-07-11 |
Family
ID=46435011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200755830U Expired - Fee Related CN202323024U (en) | 2012-03-02 | 2012-03-02 | Deposition chamber for chemical vapor deposition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202323024U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103103493A (en) * | 2012-11-07 | 2013-05-15 | 山东鑫汇铜材有限公司 | Production device of graphene copper wire |
| CN109371379A (en) * | 2018-12-03 | 2019-02-22 | 湖南顶立科技有限公司 | A kind of precipitation equipment and the method for preparing pyrolytic carbon |
| CN112723898A (en) * | 2020-12-30 | 2021-04-30 | 内蒙古栢特新材料科技有限公司 | Preparation method of carbon/carbon liner for natural gas chemical vapor deposition furnace |
| CN112830807A (en) * | 2021-03-19 | 2021-05-25 | 中南大学 | Vapor deposition device and preparation method of carbon/carbon composite material |
-
2012
- 2012-03-02 CN CN2012200755830U patent/CN202323024U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103103493A (en) * | 2012-11-07 | 2013-05-15 | 山东鑫汇铜材有限公司 | Production device of graphene copper wire |
| CN103103493B (en) * | 2012-11-07 | 2015-05-06 | 山东鑫汇铜材有限公司 | Production device of graphene copper wire |
| CN109371379A (en) * | 2018-12-03 | 2019-02-22 | 湖南顶立科技有限公司 | A kind of precipitation equipment and the method for preparing pyrolytic carbon |
| CN109371379B (en) * | 2018-12-03 | 2021-05-11 | 湖南顶立科技有限公司 | Deposition device and method for preparing pyrolytic carbon |
| CN112723898A (en) * | 2020-12-30 | 2021-04-30 | 内蒙古栢特新材料科技有限公司 | Preparation method of carbon/carbon liner for natural gas chemical vapor deposition furnace |
| CN112830807A (en) * | 2021-03-19 | 2021-05-25 | 中南大学 | Vapor deposition device and preparation method of carbon/carbon composite material |
| CN112830807B (en) * | 2021-03-19 | 2022-05-20 | 中南大学 | Vapor deposition device and preparation method of carbon/carbon composite material |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20150302 |
|
| EXPY | Termination of patent right or utility model |