CN208520478U - A kind of optothermal detector of detectable optical field distribution - Google Patents
A kind of optothermal detector of detectable optical field distribution Download PDFInfo
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- CN208520478U CN208520478U CN201821291494.3U CN201821291494U CN208520478U CN 208520478 U CN208520478 U CN 208520478U CN 201821291494 U CN201821291494 U CN 201821291494U CN 208520478 U CN208520478 U CN 208520478U
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Abstract
The utility model relates to a kind of optothermal detectors of detectable optical field distribution, including thermo-responsive line, positive/negative electrode is provided at left and right sides of the thermo-responsive line, the thermo-responsive line upper surface is additionally provided with multiple holes, the upper surface of the thermo-responsive line is also covered with light absorbing layer, and the thermo-responsive line is provided with and the multiple and one-to-one detection electrode of hole on one side；The optothermal detector of detectable optical field distribution, solve the problems, such as that optothermal detector can not carry out the detection of optical field distribution, by in thermo-responsive line, prepare hole, and in thermo-responsive line and hole surface light absorbing layer, the light absorbed can be converted into thermal energy faster and more, to improve the detection sensitivity to light, and it is provided with the detection electrode that can detect each hole luminous intensity, when practical application, the size of current of each detection electrode of acquisition can be passed through, to react the light intensity at each hole, to summarize the optical field distribution situation of entire hole overlay area out.
Description
Technical field
The present invention relates to photodetector technical fields, and in particular to a kind of optothermal detector of detectable optical field distribution.
Background technique
The physical effect of photodetector is generally divided into photon effect and photo-thermal effect, and corresponding detector is referred to as light
Subtype detector and photo-thermal type detector.The common trait of various photon type detectors is using semiconductor energy carrying material, photon
Energy has generated directly effect to photoelectronic in detection material, therefore photon type detector has cut-off response frequency or wavelength,
And spectral response is limited to a certain wave band, therefore different material systems determines that detector has different response wave length scopes,
Generally it is difficult to use in wide range or multispectral section of detection.Photo-thermal type detector is not caused directly after absorbing optical radiation energy
The change of internal electron state, but the luminous energy of absorption is become the energy of thermal motion of lattice, cause detecting element temperature to rise,
It changes so as to cause the electrical properties of detecting element or other physical properties, therefore the size of photo-thermal effect and photon energy does not have
There is direct relation, photo-thermal type detector is in principle to frequency without selectivity.Due to infrared band especially in LONG WAVE INFRARED with
The photo-thermal effect of upper wave band becomes apparent from compared to Uv and visible light, therefore optothermal detector is commonly used in the spy of middle long wave optical radiation
It surveys, typical photo-thermal type detector includes the types such as micro-metering bolometer, pyroelectric detector and thermocouple detector.Due to temperature
Raising is the effect of heat accumulation, and the general response speed of thermal detector based on photo-thermal effect is slower, in millisecond magnitude.
However, existing optothermal detector be primarily used to detection light intensity, main improvement direction also embody be
In terms of the intensity for the light how to detect, the detection of optical field distribution can not be carried out.
Summary of the invention
In view of the above-mentioned problems, present invention aim to address optothermal detectors can not carry out asking for the detection of optical field distribution
Topic.
For this purpose, the present invention provides a kind of optothermal detector of detectable optical field distribution, including thermo-responsive line, the temperature-sensitive
It is provided with positive/negative electrode at left and right sides of sense line, multiple holes are additionally provided with above the thermo-responsive line, the thermo-responsive line
Upper surface is covered with light absorbing layer, and the thermo-responsive line is provided with and the multiple and one-to-one detection electrode of hole on one side.
The set-up mode of described hole is to be alternatively arranged along thermo-responsive line extending direction, and the detection electrode is set to
The side of thermo-responsive line.
Described hole is square matrix arrangement, and conductive plate is provided between thermo-responsive line and positive/negative electrode, the detection electricity
Pole is set to the bottom surface of thermo-responsive line.
The light absorbing layer is the nano-particle layer that gold, silver are formed.
The light absorbing layer be multilayered structure, by it is lower and on be followed successively by glassy layer, layers of chrome, germanium layer, silicon layer, titanium dioxide
Layer, bifluoride magnesium.
The glassy layer with a thickness of 20~150nm, the layers of chrome with a thickness of 150~250nm, the germanium with a thickness of
25~45nm, the silicon layer with a thickness of 25~45nm, the titanium dioxide layer with a thickness of 40~60nm, the bifluoride magnesium
With a thickness of 100~150nm.
The glassy layer with a thickness of 35nm, the layers of chrome with a thickness of 210nm, the germanium layer with a thickness of 35nm, institute
State the thickness 35nm of silicon layer, the titanium dioxide layer with a thickness of 55nm, the bifluoride magnesium with a thickness of 120nm.
The thermo-responsive wire material includes VOx, Si, SiGe, YBCO or NiO.
Beneficial effects of the present invention: the optothermal detector of this detectable optical field distribution provided by the invention solves photo-thermal
Detector can not carry out the problem of detection of optical field distribution, by thermo-responsive line, preparing hole, and in thermo-responsive line and hole
Hole surface light absorbing layer, the light absorbed can be converted into thermal energy faster and more, so that the detection sensitivity to light is improved, and
And be provided with and can detect the detection electrode of each hole luminous intensity, when practical application, it is electric that each detection of acquisition can be passed through
The size of current of pole, so that the light intensity at each hole is reacted, to summarize the optical field distribution shape of entire hole overlay area out
Condition.
The present invention is described in further details below with reference to attached drawing.
Detailed description of the invention
Fig. 1 is the optothermal detector structure top view of detectable optical field distribution.
Fig. 2 is the optothermal detector side view of detectable optical field distribution.
Fig. 3 is the optothermal detector structure top view two of detectable optical field distribution.
Fig. 4 is metal nanoparticle various metals combination schematic diagram of a layer structure.
In figure: 1, thermo-responsive line；2, hole；3, light absorbing layer；4, positive/negative electrode；5, detection electrode；6, conductive plate；
301, glassy layer；302, layers of chrome；303, germanium layer；304, silicon layer；305, titanium dioxide layer；306, bifluoride magnesium.
Specific embodiment
Reach the technical means and efficacy that predetermined purpose is taken for the present invention is further explained, below in conjunction with attached drawing and reality
Example is applied to a specific embodiment of the invention, structure feature and its effect, detailed description are as follows.
Embodiment 1
In order to solve the problems, such as that optothermal detector can not carry out the detection of optical field distribution.The present invention provides a kind of detectable
The left and right sides of the optothermal detector of optical field distribution, including thermo-responsive line 1, the thermo-responsive line 1 is provided with positive/negative electrode 4, should
Positive/negative electrode 4 is for accessing external detection power supply, thus power supply needed for providing optical field distribution detection；The thermo-responsive line 1
Upper surface is additionally provided with multiple holes 2, and the upper surface of the thermo-responsive line 1 is covered with light absorbing layer 3, and light absorbing layer 3 not only covers
Thermo-responsive 1 upper surface of line is covered, and also covers the surface of hole 2, in this manner it is possible to which make light is irradiated to thermo-responsive line 1
Upper surface has good absorptivity；Being provided on one side for the thermo-responsive line 1 is detected with multiple with hole 2 correspondingly
Electrode 5, the detection electrode 5 can receive the light field signal at each hole 2, according to the electric signal received at each hole
(mainly current signal/voltage signal) judges the power of light field.
In conclusion the optothermal detector of the detectable optical field distribution, is by detecting different light fields to thermo-responsive line 1
Change in resistance cause different influences, thus detect the power supply that thermo-responsive line 1 is loaded voltage or current variation, come
Detect the variation of light field.When practical application, positive/negative electrode 4 is electrically connected external power supply, detection electrode 5 and external light field
The signal detection end of compartment system, for identifying the electric signal at each detection electrode 5, to draw or show light
Field pattern.Above-mentioned external optical field distribution system, major function are to collect the letter of the optothermal detector of detectable optical field distribution
Number, and corresponding signal is handled, it is then shown as optical field distribution figure, main comprising modules include signal input
End, signal processing module, controller and signal display module；The optical field distribution system is detected using existing optical field distribution
System, the present embodiment are no longer described in detail.
In addition, point of line detection light field point-blank can be set into the optothermal detector of the detectable optical field distribution
Mode for cloth, as shown in Figure 1 and Figure 2, the set-up mode of described hole 2 are to be alternatively arranged along thermo-responsive 1 extending direction of line, institute
State the side that detection electrode 5 is set to thermo-responsive line 1.
Also the distribution mode of line detection light field in one plane can be set into, as shown in figure 3, described hole 2 is side
Battle array arrangement, at this time needs to be provided with conductive plate 6 between thermo-responsive line 1 and positive/negative electrode 4, to ensure that hole 2 is applied
External voltage more stable equilibrium, the detection electrode 5 is set to the bottom surface of thermo-responsive line 1, in this way can be more in aspect
State the acquisition that signal detection end carries out several electric signals.
The light absorbing layer 3 is the nano-particle layer that gold, silver are formed.
As shown in figure 4, the light absorbing layer 3 be multilayered structure, by it is lower and on be followed successively by glassy layer 301, layers of chrome 302, germanium
Layer 303, silicon layer 304, titanium dioxide layer 305, bifluoride magnesium 306；The light absorbing layer 3 by it is lower and on to incident light have it is different
Refractive index, so that integrally to the absorptivity of light 90~100%, in this manner it is possible to improve the efficiency of detection optical field distribution
And accuracy rate.
Absorption in order to ensure light absorbing layer 3 to incident light, the glassy layer 301 with a thickness of 20~150nm, the chromium
Layer 302 with a thickness of 150~250nm, the germanium layer 303 with a thickness of 25~45nm, the silicon layer 304 with a thickness of 25~
45nm, the titanium dioxide layer 305 with a thickness of 40~60nm, the bifluoride magnesium 306 with a thickness of 100~150nm.
It is preferential, above-mentioned glassy layer 301 with a thickness of 35nm, the layers of chrome 302 with a thickness of 210nm, the germanium layer 303
With a thickness of 35nm, the thickness 35nm of the silicon layer 304, the titanium dioxide layer 305 with a thickness of 55nm, the bifluoride magnesium
306 with a thickness of 120nm.
The material of the thermo-responsive line 1 mainly includes VOx, Si, SiGe, YBCO or NiO, and the material of thermo-responsive line 1 is wanted
For fuel factor change in resistance can occur for Seeking Truth, and above-mentioned material generally has relatively high temperature-coefficient of electrical resistance (TCR),
Its absolute value be greater than 1%/DEG C；In addition, existing other temperature-sensitives for perceiving thermal change such as existing pyroelectricity material, thermocouple
Sense material can also serve as the making material of thermo-responsive line 1.
In conclusion the optothermal detector of this detectable optical field distribution provided in this embodiment, solves optothermal detector
The problem of can not carrying out the detection of optical field distribution, by thermo-responsive line 1, preparing hole 2, and in thermo-responsive line 1 and hole 2
Surface light absorbing layer 3, the light absorbed can be converted into thermal energy faster and more, so that the detection sensitivity to light is improved, and
And be provided with and can detect the detection electrode 5 of each 2 luminous intensity of hole, when practical application, each detection of acquisition can be passed through
The size of current of electrode 5, so that the light intensity at each hole 2 is reacted, to summarize the light field point of entire 2 overlay area of hole out
Cloth situation.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (8)
1. a kind of optothermal detector of detectable optical field distribution, it is characterised in that: including thermo-responsive line (1), the thermo-responsive line
(1) it is provided at left and right sides of positive/negative electrode (4), thermo-responsive line (1) upper surface is additionally provided with multiple holes (2), described
The upper surface of thermo-responsive line (1) is covered with light absorbing layer (3), and the thermo-responsive line (1) is provided with and multiple and hole on one side
(2) one-to-one detection electrode (5).
2. a kind of optothermal detector of detectable optical field distribution as described in claim 1, it is characterised in that: described hole (2)
Set-up mode be alternatively arranged along thermo-responsive line (1) extending direction, the detection electrode (5) is set to thermo-responsive line
(1) side.
3. a kind of optothermal detector of detectable optical field distribution as described in claim 1, it is characterised in that: described hole (2)
It is arranged for square matrix, and is provided with conductive plate (6) between thermo-responsive line (1) and positive/negative electrode (4), the detection electrode (5) sets
It is placed in the bottom surface of thermo-responsive line (1).
4. a kind of optothermal detector of detectable optical field distribution as described in claim 1, it is characterised in that: the light absorbing layer
(3) nano-particle layer formed for gold, silver.
5. a kind of optothermal detector of detectable optical field distribution as described in claim 1, it is characterised in that: the light absorbing layer
(3) be multilayered structure, by it is lower and on be followed successively by glassy layer (301), layers of chrome (302), germanium layer (303), silicon layer (304), titanium dioxide
Titanium layer (305), bifluoride magnesium (306).
6. a kind of optothermal detector of detectable optical field distribution as claimed in claim 5, it is characterised in that: the glassy layer
(301) with a thickness of 20~150nm, the layers of chrome (302) with a thickness of 150~250nm, the germanium layer (303) with a thickness of
25~45nm, the silicon layer (304) with a thickness of 25~45nm, the titanium dioxide layer (305) with a thickness of 40~60nm, institute
State bifluoride magnesium (306) with a thickness of 100~150nm.
7. a kind of optothermal detector of detectable optical field distribution as claimed in claim 6, it is characterised in that: the glassy layer
(301) with a thickness of 35nm, the layers of chrome (302) with a thickness of 210nm, the germanium layer (303) with a thickness of 35nm, the silicon
The thickness 35nm of layer (304), the titanium dioxide layer (305) with a thickness of 55nm, the bifluoride magnesium (306) with a thickness of
120nm。
8. a kind of optothermal detector of detectable optical field distribution as described in claim 1, it is characterised in that: the thermo-responsive line
(1) material includes VOx, Si, SiGe, YBCO or NiO.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821291494.3U CN208520478U (en) | 2018-08-11 | 2018-08-11 | A kind of optothermal detector of detectable optical field distribution |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821291494.3U CN208520478U (en) | 2018-08-11 | 2018-08-11 | A kind of optothermal detector of detectable optical field distribution |
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| Publication Number | Publication Date |
|---|---|
| CN208520478U true CN208520478U (en) | 2019-02-19 |
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| CN201821291494.3U Expired - Fee Related CN208520478U (en) | 2018-08-11 | 2018-08-11 | A kind of optothermal detector of detectable optical field distribution |
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2018
- 2018-08-11 CN CN201821291494.3U patent/CN208520478U/en not_active Expired - Fee Related
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Granted publication date: 20190219 Termination date: 20210811 |