CN208765847U - A kind of optical detector enhancing light absorption - Google Patents
A kind of optical detector enhancing light absorption Download PDFInfo
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- CN208765847U CN208765847U CN201821752797.0U CN201821752797U CN208765847U CN 208765847 U CN208765847 U CN 208765847U CN 201821752797 U CN201821752797 U CN 201821752797U CN 208765847 U CN208765847 U CN 208765847U
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- light
- optical detector
- thermo
- metal strip
- light absorption
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Abstract
The utility model relates to a kind of optical detectors for enhancing light absorption, including thermo-responsive line, it is set to the electrode at thermo-responsive line both ends, the periphery of the thermo-responsive line is provided with metal strip, the periphery of the metal strip is provided with metal film, and cavity is formed between metal strip and metal film；The optical detector of the enhancing light absorption, can 360 ° light is detected, and a Fabry-Perot-type cavity is formed between metal film and metal strip, enable to incident detection light in the intracavitary formation resonance of Fabry-Perot, enhance the absorption of light, the light absorbed can be converted into thermal energy faster and more, influence the conductivity of thermo-responsive line, to improve the detection sensitivity to light, so that the optical detector response speed significantly improves.
Description
Technical field
The present invention relates to photodetector technical fields, and in particular to a kind of optical detector for enhancing light absorption.
Background technique
The physical effect of photodetector is generally divided into photon effect and photo-thermal effect, and corresponding detector is referred to as light
Subtype detector and photo-thermal type detector.The common trait of various photon type detectors is using semiconductor energy carrying material, photon
Energy has generated directly effect to photoelectronic in detection material, therefore photon type detector has cut-off response frequency or wavelength,
And spectral response is limited to a certain wave band, therefore different material systems determines that detector has different response wave length scopes,
Generally it is difficult to use in wide range or multispectral section of detection.Photo-thermal type detector is not caused directly after absorbing optical radiation energy
The change of internal electron state, but the luminous energy of absorption is become the energy of thermal motion of lattice, cause detecting element temperature to rise,
It changes so as to cause the electrical properties of detecting element or other physical properties, therefore the size of photo-thermal effect and photon energy does not have
There is direct relation, photo-thermal type detector is in principle to frequency without selectivity.Due to infrared band especially in LONG WAVE INFRARED with
The photo-thermal effect of upper wave band becomes apparent from compared to Uv and visible light, therefore optothermal detector is commonly used in the spy of middle long wave optical radiation
It surveys, typical photo-thermal type detector includes the types such as micro-metering bolometer, pyroelectric detector and thermocouple detector.Due to temperature
Raising is the effect of heat accumulation, and the general response speed of thermal detector based on photo-thermal effect is slower, in millisecond magnitude.
However existing optothermal detector still has lower to the absorptivity of light, detector response speed is slower to ask
Topic.
Summary of the invention
The object of the present invention is to provide a kind of optical detectors for enhancing light absorption, including thermo-responsive line, are set to thermo-responsive
The electrode at line both ends, the periphery of the thermo-responsive line are provided with metal strip, and the periphery of the metal strip is provided with metal film, metal
Cavity is formed between item and metal film.
Light-transmitting conductive material is filled in the cavity.
The light-transmitting conductive material is TCO.
The light-transmitting conductive material is silica.
Described: the thermo-responsive wire material includes VOx, Si, SiGe, YBCO or NiO.
The metal strip is connected with the outer surface of thermo-responsive line.
There is the second cavity between the metal strip and the outer surface of thermo-responsive line.
Heat-conducting medium is filled in second cavity.
The metal film with a thickness of 5~30nm.
The spacing of the metal strip is 50~130nm.
Beneficial effects of the present invention: it is provided by the invention it is this enhancing light absorption optical detector, can 360 ° to light into
Row detection, and a Fabry-Perot-type cavity is formed between metal film and metal strip, enable to incident detection light in method
The intracavitary formation resonance of Fabry-Perot-type, enhances the absorption of light, the light absorbed can be converted into thermal energy faster and more, influence heat
The conductivity of sensitive line, so that the detection sensitivity to light is improved, so that the optical detector response speed significantly improves.
The present invention is described in further details below with reference to attached drawing.
Detailed description of the invention
Fig. 1 is the optical detector structural schematic diagram for enhancing light absorption.
Fig. 2 is the optical detector structural schematic diagram one for enhancing light absorption.
Fig. 3 is the optical detector side cross-sectional view for enhancing light absorption.
Fig. 4 is the optical detector structural schematic diagram of the enhancing light absorption of the second design method of metal strip.
Fig. 5 is the side schematic view of the optical detector of the enhancing light absorption of the second design method of metal strip.
In figure: 1, thermo-responsive line；2, metal film；3, cavity；4, metal strip；5, electrode；6, the second cavity.
Specific embodiment
Reach the technical means and efficacy that predetermined purpose is taken for the present invention is further explained, below in conjunction with attached drawing and reality
Example is applied to a specific embodiment of the invention, structure feature and its effect, detailed description are as follows.
Embodiment 1
, detector response speed slower problem lower to the absorptivity of light is still had in order to solve optothermal detector.
The present invention provides a kind of optical detectors of enhancing light absorption as shown in Figure 1, Figure 2, Figure 3 shows, including thermo-responsive line 1, are set to
The periphery of the electrode 5 at thermo-responsive 1 both ends of line, the thermo-responsive line 1 is provided with the metal strip 4 of multiple cylindrical arrangements, described
The periphery of metal strip 4 is provided with metal film 2, between metal strip 4 and metal film 2 formed cavity 3, such metal strip 4, metal film 2,
Cavity 3 just constitutes Fabry-Perot-type cavity, so as to improve the absorptivity of light to be detected, so that more heat are generated, so that
The conductivity of thermo-responsive line 1 changes, and the electrode 5 by load at thermo-responsive 1 both ends of line detects what thermo-responsive line 1 was loaded
Voltage change or curent change achieve the purpose that detection light to react the characteristic of light.
In order to enable Fabry-Perot-type cavity can generate resonance to the light of different frequency, filled with saturating in the cavity 3
Light conductive material, the light-transmitting conductive material are connect with 5 points of electrode, and the suction to light of light-transmitting conductive material is adjusted by additional power source
It receives characteristic and enables to the optical detector of the enhancing light absorption to not to change Fabry-Perot-type cavity to the resonant frequency of light
The light of same frequency generates resonance, thus can adjust the resonant frequency and light of Fabry-Perot-type cavity according to the light of different frequency
Generate better resonance effect.
The light-transmitting conductive material is TCO, and more commonly used has tri- kinds of factions of ITO, FTO, ZAO.
Another mode, it is good for silica that the light-transmitting conductive material may be replaced by translucency, but uses
Silica can not just carry out dynamic regulation, and silica electric conductivity is poor, be difficult to change two by the voltage for adjusting load
Absorption characteristic of the silica to light.
1 material of thermo-responsive line includes VOx, Si, SiGe, YBCO or NiO, and the requirement of the material of thermo-responsive line 1 is pair
Change in resistance can occur in fuel factor, above-mentioned material generally has relatively high temperature-coefficient of electrical resistance (TCR), absolutely
Value be greater than 1%/DEG C；In addition, existing other heat-sensitive materials for perceiving thermal change such as existing pyroelectricity material, thermocouple
It can also serve as the making material of thermo-responsive line 1.
There are also being exactly the setting position of the metal strip 4, it can be to be arranged in and be connected with the outer surface of thermo-responsive line 1
Position, as shown in Figure 2；Also it can be set between the outer surface of thermo-responsive line 1 that there are distances, so that metal strip 4 and temperature-sensitive
It is formed with the second cavity 6 between sense line 1, as shown in Figure 1；It is filled with heat-conducting medium in second cavity 6, needs light transmission
Characteristic, which can be air, is also possible to silica, TCO etc..
Metal strip 4 is at a distance from metal film 2, i.e. the height of cavity 3, need to meet that Fabry-Perot is intracavitary to resonate
It is required that 2nL=λ, wherein n is integer, and L is the height of cavity 3, and λ is incident light in intracavitary wavelength, common metal item 4 and gold
The distance range for belonging to film 2 can be between 20~60nm.
In order to ensure light can smoothly penetrate metal film 2, the metal film 2 with a thickness of 5~30nm；The thickness of metal film 2
Spend preferential selection 10nm；Followed by 15nm, 5nm, 20nm others thickness, this is primary concern is that the transmitance of light and right
The factors such as the selection of light.
The metal strip 4 with a thickness of 10~30nm, preferential is selected as 10nm, 15nm, 20nm；Metal strip 4 two-by-two it
Between the width at interval be 50~130nm, preferential is selected as 60nm, 65nm, 70nm；Metal strip 4 not only has reflection resonance
The effect of the light of wavelength also transmits the effect of the light of other wavelength, therefore, should consider that transmissivity will also consider reflectivity,
When selecting metal strip 4, the wave-length coverage of the light detected according to actual needs selects adaptable metal strip 4.
Another embodiment, as shown in Figure 4, Figure 5, the metal strip 4 are annular shape, and thermo-responsive line 1 is arranged in
Periphery, and spaced slot between any two is 50~130nm, and preferential is selected as 60nm, 65nm, 70nm；The thickness of metal strip 4
Degree is 10~30nm, and preferential is selected as 10nm, 15nm, 20nm；Under this mode, a Fabry-Perot can be equally formed
Sieve chamber can be improved the absorptivity of light to be detected, so that more heat are generated, so that the conductivity of thermo-responsive line 1 changes,
Electrode 5 by load at thermo-responsive 1 both ends of line detects the voltage change or curent change that thermo-responsive line 1 is loaded, thus
The characteristic for reacting light, achievees the purpose that detection light.
In conclusion the optical detector of the enhancing light absorption, can 360 ° light is detected, and metal film 2 with
A Fabry-Perot-type cavity is formed between metal strip 4, enables to incident detection light total in the intracavitary formation of Fabry-Perot
Vibration, enhances the absorption of light；The light absorbed can be converted into thermal energy faster and more, influence the conductivity of thermo-responsive line, thus
The detection sensitivity to light is improved, so that the optical detector response speed significantly improves, still further aspect, in the Fabry-
Light-transmitting conductive material is filled in Perot cavity, and is powered on pole at light-transmitting conductive material both ends, it can be by adjusting light-transmitting conductive material
The voltage loaded so that the light transmittance of light-transmitting conductive material changes, thus to the photoresonance frequency of Fabry-Perot-type cavity
Rate is adjusted, and realizes that dynamic controls the purpose of the resonant frequency of the optical detector of the enhancing light absorption, so that the enhancing
The optical detector of light absorption is more preferably good to the detection effect of the light of different frequency.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist
Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention
Protection scope.
Claims (10)
1. a kind of optical detector for enhancing light absorption, it is characterised in that: including thermo-responsive line (1), be set to thermo-responsive line (1) two
The periphery of the electrode (5) at end, the thermo-responsive line (1) is provided with the metal strip (4) of multiple cylindrical arrangements, the metal strip
(4) periphery is provided with metal film (2), forms cavity (3) between metal strip (4) and metal film (2).
2. a kind of optical detector for enhancing light absorption as described in claim 1, it is characterised in that: filling in the cavity (3)
There is light-transmitting conductive material.
3. a kind of optical detector for enhancing light absorption as claimed in claim 2, it is characterised in that: the light-transmitting conductive material is
TCO。
4. a kind of optical detector for enhancing light absorption as claimed in claim 2, it is characterised in that: the light-transmitting conductive material is
Silica.
5. a kind of optical detector for enhancing light absorption as described in claim 1, it is characterised in that: thermo-responsive line (1) material
Material includes VOx, Si, SiGe, YBCO or NiO.
6. a kind of optical detector for enhancing light absorption as described in claim 1, it is characterised in that: the metal strip (4) and heat
The outer surface of sensitive line (1) is connected.
7. a kind of optical detector for enhancing light absorption as described in claim 1, it is characterised in that: the metal strip (4) and heat
There are the second cavity (6) between the outer surface of sensitive line (1).
8. a kind of optical detector for enhancing light absorption as claimed in claim 7, it is characterised in that: in second cavity (6)
Filled with heat-conducting medium.
9. a kind of optical detector for enhancing light absorption as described in claim 1, it is characterised in that: the thickness of the metal film (2)
Degree is 5~30nm.
10. a kind of optical detector for enhancing light absorption as described in claim 1, it is characterised in that: between the metal strip (4)
Away from for 50~130nm.
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| CN201821752797.0U CN208765847U (en) | 2018-10-29 | 2018-10-29 | A kind of optical detector enhancing light absorption |
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| CN201821752797.0U CN208765847U (en) | 2018-10-29 | 2018-10-29 | A kind of optical detector enhancing light absorption |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261965A (en) * | 2019-07-02 | 2019-09-20 | 中山科立特光电科技有限公司 | A kind of optical fiber head enhancing surface-enhanced raman scattering signal |
-
2018
- 2018-10-29 CN CN201821752797.0U patent/CN208765847U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261965A (en) * | 2019-07-02 | 2019-09-20 | 中山科立特光电科技有限公司 | A kind of optical fiber head enhancing surface-enhanced raman scattering signal |
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Granted publication date: 20190419 Termination date: 20211029 |