CN208507709U - A kind of tail gas of diffusion furnace pipe device reducing diffusion compensation nitrogen consumption - Google Patents
A kind of tail gas of diffusion furnace pipe device reducing diffusion compensation nitrogen consumption Download PDFInfo
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- CN208507709U CN208507709U CN201821226200.9U CN201821226200U CN208507709U CN 208507709 U CN208507709 U CN 208507709U CN 201821226200 U CN201821226200 U CN 201821226200U CN 208507709 U CN208507709 U CN 208507709U
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- periphery
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- tail gas
- draft
- offgas duct
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a kind of tail gas of diffusion furnace pipe devices for reducing diffusion compensation nitrogen consumption, arrange the peripheral draft device that channel and the offgas duct junction install additional including periphery acid row channel, the offgas duct of diffusion furnace and in the periphery acid.The utility model installs a constant peripheral draft device (rise and stablize suction function) additional in the offgas duct junction in peripheral acid row channel and diffusion furnace, optimize each step gas flow in technique formula, it keeps managing interior each step gas flow consistency, stablize overpressure, further according to overpressure, adjusts periphery and take out vacuum magnitude, so that peripheral draft is equal to offgas duct draft, when reaching balance, nitrogen or micro compensation nitrogen are needed not compensate for substantially, substantially cuts down nitrogen consuming amount.
Description
Technical field
The present invention relates to field of semiconductor device preparation, and in particular to a kind of diffusion furnace tail for reducing diffusion compensation nitrogen consumption
Tracheae device.
Background technique
The main flow of solar energy crystal silicon battery production includes: making herbs into wool, diffusion, wet etching, the deposition of antireflective coating, silk
Wire mark brush and sintering.Wherein, diffusion is the master operation of PN junction preparation, and PN junction is the nuclear structure of solar battery, and
The quality of PN junction has important influence to the transfer efficiency of sun crystal silicon battery.
Diffusion furnace exhaust emission device mainly includes gas buffer bottle and exhaust equipment at present, one end of gas buffer bottle with
The offgas duct of diffusion furnace connects, and the other end is connect with exhaust equipment, and pressure monitoring devices are equipped in offgas duct, slow in gas
It rushes bottle and compensates equipment equipped with nitrogen, unidirectionally connected between pressure monitoring devices and nitrogen compensation equipment.Exhaust emission device
The course of work are as follows: the exhaust gas generated in offgas duct is extracted by exhaust equipment, and exhaust gas first passes around gas buffer bottle again by arranging
Wind devices discharge.If the gas in production process in exhaust equipment generates fluctuation, the gas that will lead in offgas duct occurs
Variation, so that the gas pressure of offgas duct changes；After pressure monitoring device monitors this change information, Jiu Huitong
Know that nitrogen compensation equipment makes it carry out " nitrogen compensation " to gas buffer bottle, to adjust the air pressure in exhaust equipment, so that
Stable gas pressure in offgas duct is a certain steady state value.Peripheral acid row draft=compensation nitrogen+offgas duct draft (with pressure is set in pipe
It is closely related)；Under daily common processes menu, in the case of setting overpressure 5Pa, peripheral draft 25PSI, compensation nitrogen is big
It causes to fluctuate in 18-22L/min, nitrogen consuming amount is bigger.One minute consumption of the every root canal of normal pressure tempress equipment compensates nitrogen amount 20L,
1,300,000 liters of consumption of one common workshop one day, converts into 1200 yuans of expense.
Therefore, it is necessary to provide a kind of tail gas of diffusion furnace pipe device that diffusion compensation nitrogen consumption can be greatly decreased.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention, which provides one kind, can be greatly decreased diffusion
Compensate the tail gas of diffusion furnace pipe device of nitrogen consumption.
Technical solution:
A kind of tail gas of diffusion furnace pipe device reducing diffusion compensation nitrogen consumption, the tail including peripheral acid row channel, diffusion furnace
Tracheae and the peripheral draft device installed additional in periphery acid row channel and the offgas duct junction.
The tail gas pressure-detecting device of the gas pressure for detecting offgas duct is installed in the tail gas pipe end, in institute
State the peripheral pressure detection device being equipped at peripheral acid row channel entrance for detecting peripheral acid row draft；It is taken out in the periphery
Power device is equipped with processor, the processor tail gas pressure-detecting device and described with tail gas pipe end installation respectively
The peripheral pressure detection device connection installed at peripheral acid row channel entrance, and receive the gas pressure for the offgas duct that its detection obtains
Power arranges draft with periphery acid, and carries out that the periphery pumping vacuum magnitude that need to be adjusted is calculated；The processor and the periphery are taken out
The motor of power device connects, and takes out vacuum magnitude according to the periphery that the need that it is calculated are adjusted and adjust motor work, and then adjust
Vacuum magnitude is taken out in section periphery, so that peripheral draft is equal to offgas duct draft.
The processor is equipped with wireless communication module, the monitoring that the processor passes through the wireless communication module and backstage
Computer connection.
The utility model has the advantages that offgas duct junction installation one of the utility model in peripheral acid row channel and diffusion furnace is constant outer
Draft device (rise and stablize suction function) is enclosed, optimizes each step gas flow in technique formula, keeps managing interior each step gas stream
Consistency is measured, overpressure is stablized, further according to overpressure, periphery is adjusted and takes out vacuum magnitude, so that peripheral draft is equal to tail gas
Pipe draft when reaching balance, needs not compensate for nitrogen or micro compensation nitrogen substantially, substantially cuts down nitrogen consuming amount.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the tail gas of diffusion furnace pipe device of the utility model.
Wherein, 1 is offgas duct, and 11 be tail gas pressure-detecting device, and 2 be peripheral draft device, and 21 be processor, and 3 be outer
Acid row channel is enclosed, 31 be peripheral pressure detection device.
Specific embodiment
The present invention will be further explained with reference to the accompanying drawing.
Fig. 1 is the structural schematic diagram of the tail gas of diffusion furnace pipe device of the utility model.As shown in Figure 1, the utility model
Tail gas of diffusion furnace pipe device includes that peripheral acid arranges channel 3, the offgas duct 1 of diffusion furnace and in periphery acid row channel 3 and institute
State the peripheral draft device 2 of 1 junction of offgas duct installation.Tail gas pressure-detecting device 11 is installed in the tail gas pipe end,
For detecting the gas pressure of offgas duct 1；Peripheral pressure detection device 31 is installed in periphery acid row's 3 entrance of channel,
For detecting peripheral acid row draft.
It is equipped with processor 21 on the peripheral draft device 2, the processor 21 is pacified with the tail gas pipe end respectively
The tail gas pressure-detecting device 11 of dress and the peripheral pressure detection device 31 of periphery acid row 3 entrance of the channel installation connect,
And gas pressure and the periphery acid row's draft for the offgas duct 1 that its detection obtains are received, and carry out that the periphery that need to be adjusted is calculated
Take out vacuum magnitude.The need that the processor 21 connect with the motor of the peripheral draft device 2, and can be calculated according to it
The periphery of adjusting takes out vacuum magnitude and adjusts motor work, and then adjusts periphery and take out vacuum magnitude, so that peripheral draft is equal to tail gas
Pipe draft when reaching balance, needs not compensate for nitrogen or micro compensation nitrogen substantially, so as to substantially cutting down nitrogen consuming amount.
In the present invention, the processor 21 is equipped with wireless communication module, and the processor 21 passes through described wireless
The connection of the monitoring computer on communication module and backstage.Maintenance personnel monitors the diffusion of the utility model by monitoring computer remote
Furnace exhaust gas pipe device, prevents major accident.
The above is only a preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (3)
1. a kind of tail gas of diffusion furnace pipe device for reducing diffusion compensation nitrogen consumption, it is characterised in that: including peripheral acid row channel, expand
The peripheral draft device for dissipating the offgas duct of furnace and being installed additional in periphery acid row channel and the offgas duct junction.
2. tail gas of diffusion furnace pipe device according to claim 1, it is characterised in that: be equipped with use in the tail gas pipe end
In the tail gas pressure-detecting device of the gas pressure of detection offgas duct, it is equipped at periphery acid row's channel entrance for examining
Survey the peripheral pressure detection device of periphery acid row's draft；Processor, the processor point are equipped on the peripheral draft device
The outer confining pressure installed at channel entrance is not arranged with the tail gas pressure-detecting device of tail gas pipe end installation and the periphery acid
Force checking device connection, and receive its gas pressure for detecting obtained offgas duct and periphery acid and arrange draft, and calculate
Vacuum magnitude is taken out to the periphery that need to be adjusted；The processor is connect with the motor of the peripheral draft device, and according to its calculating
The periphery that obtained need are adjusted takes out vacuum magnitude and adjusts motor work, and then adjusts periphery and take out vacuum magnitude, so that peripheral draft
Equal to offgas duct draft.
3. tail gas of diffusion furnace pipe device according to claim 1, it is characterised in that: the processor is equipped with radio communication mold
Block, the processor are connected by the wireless communication module and the monitoring computer on backstage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821226200.9U CN208507709U (en) | 2018-08-01 | 2018-08-01 | A kind of tail gas of diffusion furnace pipe device reducing diffusion compensation nitrogen consumption |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821226200.9U CN208507709U (en) | 2018-08-01 | 2018-08-01 | A kind of tail gas of diffusion furnace pipe device reducing diffusion compensation nitrogen consumption |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208507709U true CN208507709U (en) | 2019-02-15 |
Family
ID=65290769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821226200.9U Active CN208507709U (en) | 2018-08-01 | 2018-08-01 | A kind of tail gas of diffusion furnace pipe device reducing diffusion compensation nitrogen consumption |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208507709U (en) |
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2018
- 2018-08-01 CN CN201821226200.9U patent/CN208507709U/en active Active
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