CN208476958U - A kind of atomic force microscope very-short-reach laser detector - Google Patents
A kind of atomic force microscope very-short-reach laser detector Download PDFInfo
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- CN208476958U CN208476958U CN201820591193.6U CN201820591193U CN208476958U CN 208476958 U CN208476958 U CN 208476958U CN 201820591193 U CN201820591193 U CN 201820591193U CN 208476958 U CN208476958 U CN 208476958U
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- laser
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- object lens
- atomic force
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Abstract
The utility model discloses a kind of atomic force microscope very-short-reach laser detectors, comprising: Liar component；And the laser detection head immediately below the Liar component, the laser detection head include: the shell of inner hollow；And it is disposed in the housing the laser assembly in portion, probe carriage component and position sensing device assembly, wherein, the Liar component includes the object lens of rotating nosepiece and the multiple and different amplification factors being arranged in the rotating nosepiece circumferential direction, and the amplification factor of the object lens is 4~100 times.Atomic force microscope very-short-reach laser detector provided by the utility model, it is not accurate enough with thoroughly solving the problems, such as that existing apparatus low power objective positions, arbitrarily switching amplification factor and optical field can be carried out according to sample actual conditions, the operability of atomic force microscope is greatly facilitated, the beneficial effect of sample areas to be measured can be easily found very much.
Description
Technical field
The utility model relates to fine measuring instrument field, in particular to a kind of atomic force microscope very-short-reach laser inspection
Survey device.
Background technique
Atomic force microscope is by the extremely weak between detection sample to be tested surface and a miniature force sensitive element
Interatomic interaction force studies the surface texture and property of substance.Micro-cantilever one end of a pair of miniature power extreme sensitivity is consolidated
Fixed, the small needle point of the other end is close to sample, and at this moment needle point will interact with sample, and active force will be so that shape occurs for micro-cantilever
Become or motion state changes.In order to obtain the information of sample surfaces, laser detection method, this corresponding device are generally utilized
Also referred to as laser detection probe.Laser beam is beaten at the probe cantilever back side, is then reflected on position sensor.When scanning,
Due to the interatomic interaction force of sample and probe tip, probe cantilever will bending fluctuation, reflection with sample surface morphology
Light beam will also deviate therewith, then by the variation of facula position on detection position sensor, can obtain sample surface shape
The information of looks.
The resolution ratio of atomic force microscope is very high, but scanning range but very little, usually only tens microns.And it is general
When using afm scan sample, sample characteristic region to be measured is not to be uniformly distributed, it usually needs in advance
It is positioned, first to find sample areas range to be measured.At this moment just need an optical observation positioning device as auxiliary, side
Atomic force microscope is helped to find the sample areas for wanting to survey.Currently marketed atomic force microscope generally can all configure optical observation
Positioning device, common mode are all one single channel optical imageries of increase on the laser detection probe of atomic force microscope
Device, but due to the laser detection probe of atomic force microscope, this body structure is extremely complex, and probe is in scanning
The bottom of head, the optical path in optical system needs to beat across probe could be imaged in the lowermost probe and sample.And light
The multiple for learning object lens is bigger, and numerical aperture is bigger, and operating distance is with regard to smaller, since the structure of atomic force laser scanning head limits
System can only often use the Liar of low power to be positioned (usually 10 times), this is just difficult to more small sample area
Positioning.In view of this, it is really necessary to develop a kind of atomic force microscope very-short-reach laser detector, to solve above-mentioned ask
Topic.
Utility model content
For the shortcomings of the prior art, it is super that the purpose of the utility model is to provide a kind of atomic force microscope
Short distance laser detector, to solve existing laser detection probe since the limitation of structure leads to that high power light cannot be used
Learn the problems such as object lens are accurately positioned, are inconvenient for use.
In order to realize above-mentioned purpose according to the present utility model and other advantages, it is ultrashort to provide a kind of atomic force microscope
Apart from laser detector, comprising: Liar component；And
Laser detection head immediately below the Liar component, the laser detection head include: inner hollow
Shell；And it is disposed in the housing the laser assembly in portion, probe carriage component and position sensing device assembly,
Wherein, the Liar component include rotating nosepiece and be arranged in the rotating nosepiece circumferential direction it is multiple not
With the object lens of amplification factor, the amplification factor of the object lens is 4~100 times.
Preferably, there are five the object lens are set, respectively the first object lens, the second object lens, third object lens, the 4th object lens and
5th object lens, wherein first object lens, second object lens, the third object lens, the 4th object lens and the 5th object
The amplification factor of mirror is respectively 4 times, 10 times, 20 times, 50 times and 100 times.
Preferably, the shell includes set on the first cavity of the shell left part, the among the shell
The topmost of two cavitys and third cavity set on the shell right part, the shell is equipped with cover board.
Preferably, the laser assembly is set in first cavity, and the laser assembly includes:
Laser；
The laser X sliding block of inner hollow；And
The laser Y sliding block of inner hollow；
Wherein, the laser is passed through from the laser X sliding block and the laser Y sliding block middle, and is fixed on
On the laser X sliding block.
The adjusting screw rod of the laser X sliding block and the laser Y sliding block passes through first cavity, and by described
Adjusting screw rod is connected with first cavity.
Preferably, the probe carriage component is set in second cavity, and there are 45 ° of swallow in probe carriage component two sides
Stern notch is connected by the dovetail groove with second cavity.
Preferably, the probe carriage component includes:
Probe locating piece is fixed on the probe carriage component；
Probe is fixed on the front end of the probe locating piece；
Spring leaf is fixed on the probe carriage component and is clamped the probe using the elasticity of spring；And
Semi-transparent semi-reflecting lens, be set to the probe carriage component hit exactly and be in the surface of the probe, with the spy
Punch block component angle is 45 ° and is fixed on the probe carriage component.
Preferably, the position sensing device assembly is set in the third cavity, and the position sensing device assembly includes:
Position sensor；
The position sensor X sliding block of inner hollow；And
The position sensor Y sliding block of inner hollow；
Wherein, the position sensor is worn from the position sensor X sliding block and the position sensor Y sliding block middle
It crosses, and is fixed on the position sensor X sliding block.
The adjusting screw rod of the position sensor X sliding block and the position sensor Y sliding block passes through the third cavity, and
It is connected by the adjusting screw rod with the third cavity.
Preferably, it is 45 ° of girder constructions, the girder construction that first inside cavity, which is equipped with one with the cover board angle,
On be fixed with nearside mirror.
Preferably, it is 45 ° of girder constructions that the third cavity, which is equipped with one with the cover board angle, is consolidated in the girder construction
Surely there is right reflective mirror.
Preferably, second inside cavity is equipped with a circular hole, and angular adjustment bar passes through the circular hole and described second
Cavity is connected, and the end of the angular adjustment bar is fixed with a reflective mirror.
The utility model compared with prior art, the beneficial effect is that:
The utility model provides a kind of atomic force microscope very-short-reach laser detector, is not influencing laser detection
In the case that head works normally, it can be positioned simultaneously using 4 times, 10 times, 20 times, 50 times, 100 times of Liars, and
It not only can thoroughly solve existing apparatus low power objective with free switching between various Liars and position not accurate enough ask
Topic, simultaneously because amplification factor and optical field can also arbitrarily be switched according to sample actual conditions, greatly facilitates
The operability of atomic force microscope can easily find sample areas to be measured very much.
Detailed description of the invention
Fig. 1 is a kind of shape of atomic force microscope very-short-reach laser detector described in the utility model embodiment
Structure chart；
Fig. 2 is a kind of optical path of atomic force microscope very-short-reach laser detector described in the utility model embodiment
Structural schematic diagram；
Fig. 3 is a kind of inside of atomic force microscope very-short-reach laser detector described in the utility model embodiment
Structural schematic diagram；
Specific embodiment
The following describes the utility model in further detail with reference to the accompanying drawings, the aforementioned and other mesh of the utility model
, features, aspects and advantages will be apparent, to enable those skilled in the art's refer to the instruction text real accordingly
It applies.In the accompanying drawings, for clarity, shape and size can be amplified, and identical attached drawing mark will be used in all figures
Note is to indicate the same or similar component.In the following description, such as center, thickness, height, length, front, back, rear portion,
The words such as the left side, the right, top, bottom, top, lower part are to be based on the orientation or positional relationship shown in the drawings.Particularly, " high
Degree " is equivalent to size from the top to the bottom, and " width " is equivalent to size from left to right, and " depth " is equivalent to be arrived in the past
Size afterwards.These relative terms are to be not intended to need specifically to be orientated for convenience and usually.Be related to attachment,
Connection etc. term (for example, " connection " and " attachment ") refer to these structures pass through intermediate structure directly or indirectly to one another fixation or
The relationship of attachment and movable or rigidly attached or relationship, unless otherwise clearly stating.
Referring to Fig.1, Fig. 2 and Fig. 3, atomic force microscope very-short-reach laser detector include:
Liar component 1；And
Laser detection head 2 immediately below the Liar component 1, which includes: inner hollow
Shell 21；And laser assembly 22, probe carriage component 23 and position sensing device assembly 24 inside the shell 21,
Wherein, the Liar component 1 includes rotating nosepiece 11 and is arranged in 11 circumferential direction of rotating nosepiece
The object lens of multiple and different amplification factors, the amplification factor of the object lens are 4~100 times.
As a kind of embodiment of the utility model, there are five the object lens are set, respectively the first object lens 12, the second object
Mirror 13, third object lens 14, the 4th object lens and the 5th object lens, wherein first object lens 12, second object lens 13, described
The amplification factor of three object lens 14, the 4th object lens and the 5th object lens is respectively 4 times, 10 times, 20 times, 50 times and 100
Times.
The shell 21 includes the set on the first cavity 211 of 21 left part of shell, among the shell 21
The topmost of two cavitys 212 and third cavity 213 set on the shell right part, the shell 21 is equipped with cover board 29.
The laser assembly 22 is set in first cavity 211, and the laser assembly 22 includes:
Laser 221；
The laser X sliding block 222 of inner hollow；And
The laser Y sliding block 223 of inner hollow；
As a kind of embodiment of the utility model, the laser 221 is from the laser X sliding block 222 and described
223 middle of laser Y sliding block passes through, and is fixed on 222 on the laser X sliding block.
The adjusting screw rod of the laser X sliding block 222 and the laser Y sliding block 223 passes through first cavity 211,
And be connected by the adjusting screw rod with first cavity 211, the adjusting screw rod is by controlling the laser X sliding block
222 and the mobile movement to control the laser 221 of the laser Y sliding block 223.
The probe carriage component 23 is set in second cavity 212, and there are 45 ° of dovetail in 23 two sides of probe carriage component
Slot is connected by the dovetail groove with second cavity 212.
The probe carriage component 23 includes:
Probe locating piece 231 is fixed on the probe carriage component 23；
Probe 232 is fixed on the front end of the probe locating piece 231；
Spring leaf 233 is fixed on the probe carriage component 23 and is pressed from both sides the probe 232 using the elasticity of spring
Firmly；And
Semi-transparent semi-reflecting lens 234 are set to the surface that the probe carriage component 23 hits exactly and is in the probe 232, with
It is 45 ° with 23 angle of probe carriage component to be fixed on the probe carriage component 23.
The position sensing device assembly 24 is set in the third cavity 213, and the position sensing device assembly 24 includes:
Position sensor 241；
The position sensor X sliding block 242 of inner hollow；And
The position sensor Y sliding block 243 of inner hollow；
As a kind of embodiment of the utility model, the position sensor 241 is from the position sensor X sliding block
242 and 243 middle of position sensor Y sliding block pass through, and be fixed on 242 on the position sensor X sliding block.
The adjusting screw rod of the position sensor X sliding block 242 and the position sensor Y sliding block 243 passes through the third
Cavity 213, and be connected by the adjusting screw rod with the third cavity 213, the adjusting screw rod is by controlling the position
Detector X sliding block 242 and the mobile movement to control the position sensor 241 of the position sensor Y sliding block 243.
It is 45 ° of girder constructions that one is equipped with inside first cavity 211 with 29 angle of cover board, is consolidated in the girder construction
Surely there is nearside mirror 25, the nearside mirror 25 is used for the laser that reflection laser 221 projects.
It is 45 ° of girder constructions that the third cavity 213, which is equipped with one with 29 angle of cover board, is fixed in the girder construction
Right reflective mirror 26, the right reflective mirror 26 are used to reflect the laser that the reflection of reflective mirror 28 comes.
A circular hole is equipped with inside second cavity 212, angular adjustment bar 27 passes through the circular hole and second cavity
212 are connected, and the end of the angular adjustment bar 27 is fixed with a reflective mirror 28, and the angular adjustment bar 27 is adjusted described reflective
The reflection angle of mirror 28.
As an embodiment of the utility model, the laser facula that the laser 221 issues is beaten in the nearside mirror
It on 25, is beaten on the semi-transparent semi-reflecting lens 234 through the nearside mirror 25 reflection, wherein 1/2 laser energy is by described semi-transparent half
It the reflection of anti-mirror 234 and vertical beats on the cantilever of the probe 232.Adjust the laser X sliding block 222 and the laser
Device Y sliding block 223 further adjusts the position of the laser 221 and gets to hot spot on the cantilever of the probe 232, described to swash
Light hot spot is beaten on the reflective mirror 28 again by the cantilever reflection of the probe 232, then is beaten through the reflective mirror 28 reflection
On the right reflective mirror 26, finally beaten on the position sensor 241 through the reflection of right reflective mirror 26.By adjusting institute's rheme
Detector X sliding block 242 and the position sensor Y sliding block 243 are set to adjust the position of the position sensor 241, adjusts institute
The angle for stating the reflection of the adjustable reflective mirror 28 of angular adjustment bar 27, beats hot spot in the position sensor 241
Center.On the same focal plane, auxiliary optics is turned by object lens for the probe 232 and sample to be measured when work
Disk and 4~100 times of object lens can simultaneously position probe and sample optical imagery, can freely cut between various Liars
It changes, and will not influence the optical path of laser detection head itself.
Number of devices and treatment scale described herein are the explanations for simplifying the utility model.To the utility model
Application, modifications and variations will be readily apparent to persons skilled in the art.
Although the embodiments of the present invention have been disclosed as above, it is not limited in institute in specification and embodiments
Column use, it can be applied to various fields suitable for the present invention completely, for those skilled in the art, can
Easily realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, this is practical
It is novel to be not limited to specific details and legend shown and described herein.
Claims (10)
1. a kind of atomic force microscope very-short-reach laser detector characterized by comprising
Liar component (1)；And
Laser detection head (2) immediately below Liar component (1), the laser detection head (2) include: the shell of inner hollow
Body (21)；And it is set to shell (21) internal laser assembly (22), probe carriage component (23) and position sensing device assembly
(24),
Wherein, Liar component (1) include rotating nosepiece (11) and be arranged in rotating nosepiece (11) circumferential direction it is multiple not
With the object lens of amplification factor, the amplification factor of the object lens is 4~100 times.
2. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that the object lens are set
There are five, respectively the first object lens (12), the second object lens (13), third object lens (14), the 4th object lens and the 5th object lens, wherein
First object lens (12), the second object lens (13), third object lens (14), the 4th object lens and the 5th object lens amplification factor be respectively 4 times,
10 times, 20 times, 50 times and 100 times.
3. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that shell (21) packet
The first cavity (211) set on shell (21) left part is included, shell (21) intermediate second cavity (212) is set to and is set to shell is right
The topmost of the third cavity (213) in portion, shell (21) is equipped with cover board (29).
4. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that laser assembly
(22) it is set in the first cavity (211), laser assembly (22) includes:
Laser (221)
The laser X sliding block (222) of inner hollow；And
The laser Y sliding block (223) of inner hollow；
Wherein, laser (221) is passed through from laser X sliding block (222) and laser Y sliding block (223) middle, and is fixed on sharp
On light device X sliding block (222),
The adjusting screw rod of laser X sliding block (222) and laser Y sliding block (223) passes through the first cavity (211), and by described
Adjusting screw rod is connected with first cavity (211).
5. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that probe carriage component
(23) it is set in the second cavity (212), there are 45 ° of dovetail groove in probe carriage component (23) two sides, pass through the dovetail groove and the
Two cavitys (212) are connected.
6. atomic force microscope very-short-reach laser detector as claimed in claim 5, which is characterized in that probe carriage component
(23) include:
Probe locating piece (231) is fixed on probe carriage component (23)；
Probe (232), is fixed on the front end of probe locating piece (231)；
Spring leaf (233) is fixed on probe carriage component (23) and is clamped probe (232) using the elasticity of spring；And
Semi-transparent semi-reflecting lens (234), be set to probe carriage component (23) hit exactly and be located at probe (232) surface, with probe
Frame component (23) angle is 45 ° and is fixed on probe carriage component (23).
7. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that position sensor
Component (24) is set in third cavity (213), and position sensing device assembly (24) includes:
Position sensor (241)
The position sensor X sliding block (242) of inner hollow；And
The position sensor Y sliding block (243) of inner hollow；
Wherein, position sensor (241) is worn from position sensor X sliding block (242) and position sensor Y sliding block (243) middle
It crosses, and is fixed on position sensor X sliding block (242),
The adjusting screw rod of position sensor X sliding block (242) and position sensor Y sliding block (243) passes through third cavity (213), and
It is connected by the adjusting screw rod with third cavity (213).
8. atomic force microscope very-short-reach laser detector as claimed in claim 3, which is characterized in that the first cavity
(211) it is 45 ° of girder constructions that inside, which is equipped with one with cover board (29) angle, and nearside mirror (25) are fixed in the girder construction.
9. atomic force microscope very-short-reach laser detector as claimed in claim 3, which is characterized in that third cavity
(213) being equipped with one with cover board (29) angle is 45 ° of girder constructions, and right reflective mirror (26) are fixed in the girder construction.
10. atomic force microscope very-short-reach laser detector as claimed in claim 3, which is characterized in that the second cavity
(212) internal to be equipped with a circular hole, angular adjustment bar (27) is connected by the circular hole with the second cavity (212), angular adjustment bar
(27) end is fixed with a reflective mirror (28).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820591193.6U CN208476958U (en) | 2018-04-24 | 2018-04-24 | A kind of atomic force microscope very-short-reach laser detector |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820591193.6U CN208476958U (en) | 2018-04-24 | 2018-04-24 | A kind of atomic force microscope very-short-reach laser detector |
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| CN208476958U true CN208476958U (en) | 2019-02-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318709A (en) * | 2018-04-24 | 2018-07-24 | 苏州飞时曼精密仪器有限公司 | A kind of atomic force microscope very-short-reach laser detector |
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2018
- 2018-04-24 CN CN201820591193.6U patent/CN208476958U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318709A (en) * | 2018-04-24 | 2018-07-24 | 苏州飞时曼精密仪器有限公司 | A kind of atomic force microscope very-short-reach laser detector |
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