CN108318709A - A kind of atomic force microscope very-short-reach laser detector - Google Patents
A kind of atomic force microscope very-short-reach laser detector Download PDFInfo
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- CN108318709A CN108318709A CN201810373552.5A CN201810373552A CN108318709A CN 108318709 A CN108318709 A CN 108318709A CN 201810373552 A CN201810373552 A CN 201810373552A CN 108318709 A CN108318709 A CN 108318709A
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- laser
- object lens
- sliding blocks
- cavity
- atomic force
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- 239000000523 sample Substances 0.000 claims abstract description 76
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 230000003321 amplification Effects 0.000 claims abstract description 13
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 13
- 238000010276 construction Methods 0.000 claims description 12
- 208000002925 dental caries Diseases 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
Abstract
The invention discloses a kind of atomic force microscope very-short-reach laser detectors, including：Liar component；And the laser detection head immediately below the Liar component, the laser detection head include：The shell of inner hollow；And it is disposed in the housing the laser assembly in portion, probe carriage component and position sensing device assembly, wherein, the Liar component includes the object lens of rotating nosepiece and the multiple and different amplification factors being arranged in the rotating nosepiece circumferential direction, and the amplification factor of the object lens is 4~100 times.Atomic force microscope very-short-reach laser detector provided by the invention, it is not accurate enough with thoroughly solving the problems, such as that existing apparatus low power objective positions, arbitrarily switching amplification factor and optical field can be carried out according to sample actual conditions, the operability of atomic force microscope is greatly facilitated, the advantageous effect of sample areas to be measured can be easily found very much.
Description
Technical field
The present invention relates to fine measuring instrument field, more particularly to a kind of atomic force microscope very-short-reach laser detection dress
It sets.
Background technology
Atomic force microscope is faint between sample to be tested surface and a miniature force sensitive element by detecting
Interatomic interaction force studies the surface texture and property of substance.Micro-cantilever one end of a pair of miniature power extreme sensitivity is consolidated
Calmly, the small needle point of the other end will interact close to sample, at this moment needle point with sample, and active force will be so that shape occurs for micro-cantilever
Become or motion state changes.In order to obtain the information of sample surfaces, laser detection method, this corresponding device are generally utilized
Also referred to as laser detection probe.Laser beam is beaten at the probe cantilever back side, is then reflected on position sensor.When scanning,
Due to the interatomic interaction force of sample and probe tip, probe cantilever will bending fluctuation, reflection with sample surface morphology
Light beam will also deviate therewith, then by the variation of facula position on test position detector, can obtain sample surface shape
The information of looks.
The resolution ratio of atomic force microscope is very high, but scanning range but very little, usually only tens microns.And it is general
When using afm scan sample, sample characteristic region to be measured is not to be uniformly distributed, it usually needs in advance
It is positioned, first to find sample areas range to be measured.At this moment just need an optical observation positioning device as auxiliary, side
Atomic force microscope is helped to find the sample areas for wanting to survey.Currently marketed atomic force microscope generally can all configure optical observation
Positioning device, common mode are all one single channel optical imageries of increase on the laser detection probe of atomic force microscope
Device, but this body structure is extremely complex due to the laser detection probe of atomic force microscope, and also probe is in scanning
The bottom of head, the light path in optical system needs to beat across probe could be imaged in the lowermost probe and sample.And light
The multiple for learning object lens is bigger, and numerical aperture is bigger, and operating distance is with regard to smaller, since the structure of atomic force laser scanning head limits
System can only often use the Liar of low power to be positioned (being usually 10 times), this is just difficult to more small sample area
Positioning.In view of this, it is really necessary to develop a kind of atomic force microscope very-short-reach laser detector, to solve above-mentioned ask
Topic.
Invention content
For the shortcomings of the prior art, the object of the present invention is to provide a kind of atomic force microscope short distances
From laser detector, to solve existing laser detection probe since the limitation of structure leads to that high power light object cannot be used
The problems such as mirror is accurately positioned, is inconvenient for use.
In order to realize above-mentioned purpose according to the present invention and other advantages, a kind of atomic force microscope very-short-reach is provided
Laser detector, including：Liar component；And
Laser detection head immediately below the Liar component, the laser detection head include：Inner hollow
Shell；And it is disposed in the housing the laser assembly in portion, probe carriage component and position sensing device assembly,
Wherein, the Liar component include rotating nosepiece and be arranged in the rotating nosepiece circumferential direction it is multiple not
With the object lens of amplification factor, the amplification factor of the object lens is 4~100 times.
Preferably, there are five the object lens are set, respectively the first object lens, the second object lens, third object lens, the 4th object lens and
5th object lens, wherein first object lens, second object lens, the third object lens, the 4th object lens and the 5th object
The amplification factor of mirror is respectively 4 times, 10 times, 20 times, 50 times and 100 times.
Preferably, the shell includes set on the first cavity of the shell left part, the among the shell
The topmost of two cavitys and third cavity set on the shell right part, the shell is equipped with cover board.
Preferably, the laser assembly is set in first cavity, and the laser assembly includes：
Laser；
The laser X sliding blocks of inner hollow；And
The laser Y sliding blocks of inner hollow；
Wherein, the laser is passed through from the laser X sliding blocks and the laser Y sliding blocks middle, and is fixed on
On the laser X sliding blocks.
The adjusting screw rod of the laser X sliding blocks and the laser Y sliding blocks passes through first cavity, and by described
Adjusting screw rod is connected with first cavity.
Preferably, the probe carriage component is set in second cavity, and there are 45 ° of swallow in probe carriage component both sides
Stern notch is connected by the dovetail groove with second cavity.
Preferably, the probe carriage component includes：
Probe locating piece is fixed on the probe carriage component；
Probe is fixed on the front end of the probe locating piece；
Spring leaf is fixed on the probe carriage component and is clamped the probe using the elasticity of spring；And
Semi-transparent semi-reflecting lens hit exactly and are in the surface of the probe set on the probe carriage component, with the spy
Punch block component angle is 45 ° and is fixed on the probe carriage component.
Preferably, the position sensing device assembly is set in the third cavity, and the position sensing device assembly includes：
Position sensor；
The position sensor X sliding blocks of inner hollow；And
The position sensor Y sliding blocks of inner hollow；
Wherein, the position sensor is worn from the position sensor X sliding blocks and the position sensor Y sliding blocks middle
It crosses, and is fixed on the position sensor X sliding blocks.
The adjusting screw rod of the position sensor X sliding blocks and the position sensor Y sliding blocks passes through the third cavity, and
It is connected with the third cavity by the adjusting screw rod.
Preferably, first inside cavity set there are one with the cover board angle as 45 ° of girder constructions, the girder construction
On be fixed with nearside mirror.
Preferably, the third cavity set there are one with the cover board angle as 45 ° of girder constructions, it is solid in the girder construction
Surely there is right reflective mirror.
Preferably, second inside cavity is equipped with a circular hole, and angular adjustment bar passes through the circular hole and described second
Cavity is connected, and the end of the angular adjustment bar is fixed with a reflective mirror.
Compared with prior art, the present invention advantage is：
The present invention provides a kind of atomic force microscope very-short-reach laser detectors, are not influencing laser detection head just
Often in the case of work, it can be positioned simultaneously using 4 times, 10 times, 20 times, 50 times, 100 times of Liars, and various
It is not accurate enough not only can thoroughly to solve the problems, such as that existing apparatus low power objective positions with free switching between Liar,
Simultaneously because amplification factor and optical field can also arbitrarily be switched according to sample actual conditions, atom is greatly facilitated
The operability of force microscope can easily find sample areas to be measured very much.
Description of the drawings
Fig. 1 is a kind of contour structures of atomic force microscope very-short-reach laser detector described in the embodiment of the present invention
Figure；
Fig. 2 is a kind of light channel structure of atomic force microscope very-short-reach laser detector described in the embodiment of the present invention
Schematic diagram；
Fig. 3 is a kind of internal structure of atomic force microscope very-short-reach laser detector described in the embodiment of the present invention
Schematic diagram；
Specific implementation mode
Present invention will be described in further detail below with reference to the accompanying drawings, foregoing end other objects of the invention, feature, side
Face and advantage will be apparent, to enable those skilled in the art that can implement according to this with reference to specification word.In the accompanying drawings,
For clarity, shape and size can be amplified, and will be indicated using identical reference numeral in all figures identical
Or similar component.In the following description, such as center, thickness, height, length, front, back, rear portion, the left side, the right, top
The words such as portion, bottom, top, lower part are to be based on the orientation or positional relationship shown in the drawings.Particularly, " height " is equivalent to from top
Portion is to the size of bottom, and " width " is equivalent to size from left to right, and " depth " is equivalent to vertical size.These
Relative terms are to be not intended to for convenience and usually need specifically to be orientated.It is related to the term of attachment, connection etc.
(for example, " connection " and " attachment ") refer to these structures by intermediate structure is fixed directly or indirectly to one another or is attached relationship,
And movable or rigidly attached or relationship, unless otherwise clearly stating.
Referring to Fig.1, Fig. 2 and Fig. 3, atomic force microscope very-short-reach laser detector include：
Liar component 1；And
Laser detection head 2 immediately below the Liar component 1, the laser detection head 2 include：Inner hollow
Shell 21；And laser assembly 22, probe carriage component 23 and position sensing device assembly 24 inside the shell 21,
Wherein, the Liar component 1 includes rotating nosepiece 11 and is arranged in 11 circumferential direction of the rotating nosepiece
The amplification factor of the object lens of multiple and different amplification factors, the object lens is 4~100 times.
As one embodiment of the present invention, there are five the object lens are set, respectively the first object lens 12, the second object lens
13, third object lens 14, the 4th object lens and the 5th object lens, wherein first object lens 12, second object lens 13, the third
The amplification factor of object lens 14, the 4th object lens and the 5th object lens is respectively 4 times, 10 times, 20 times, 50 times and 100 times.
The shell 21 includes the set on the first cavity 211 of 21 left part of the shell, among the shell 21
The topmost of two cavitys 212 and third cavity 213 set on the shell right part, the shell 21 is equipped with cover board 29.
The laser assembly 22 is set in first cavity 211, and the laser assembly 22 includes：
Laser 221；
The laser X sliding blocks 222 of inner hollow；And
The laser Y sliding blocks 223 of inner hollow；
As one embodiment of the present invention, the laser 221 is from the laser X sliding blocks 222 and the laser
223 middle of device Y sliding blocks passes through, and is fixed on 222 on the laser X sliding blocks.
The adjusting screw rod of the laser X sliding blocks 222 and the laser Y sliding blocks 223 passes through first cavity 211,
And be connected with first cavity 211 by the adjusting screw rod, the adjusting screw rod is by controlling the laser X sliding blocks
222 and the laser Y sliding blocks 223 movement control the movement of the laser 221.
The probe carriage component 23 is set in second cavity 212, and there are 45 ° of dovetail in 23 both sides of probe carriage component
Slot is connected by the dovetail groove with second cavity 212.
The probe carriage component 23 includes：
Probe locating piece 231 is fixed on the probe carriage component 23；
Probe 232 is fixed on the front end of the probe locating piece 231；
Spring leaf 233 is fixed on the probe carriage component 23 and is pressed from both sides the probe 232 using the elasticity of spring
Firmly；And
Semi-transparent semi-reflecting lens 234 are set to the surface that the probe carriage component 23 hits exactly and is in the probe 232, with
It is 45 ° with 23 angle of probe carriage component to be fixed on the probe carriage component 23.
The position sensing device assembly 24 is set in the third cavity 213, and the position sensing device assembly 24 includes：
Position sensor 241；
The position sensor X sliding blocks 242 of inner hollow；And
The position sensor Y sliding blocks 243 of inner hollow；
As one embodiment of the present invention, the position sensor 241 is from 242 He of position sensor X sliding blocks
243 middle of position sensor Y sliding blocks passes through, and is fixed on 242 on the position sensor X sliding blocks.
The adjusting screw rod of the position sensor X sliding blocks 242 and the position sensor Y sliding blocks 243 passes through the third
Cavity 213, and be connected with the third cavity 213 by the adjusting screw rod, the adjusting screw rod is by controlling the position
Detector X sliding blocks 242 and the position sensor Y sliding blocks 243 move to control the movement of the position sensor 241.
It is 45 ° of girder constructions that first cavity 211, which is internally provided with one with 29 angle of the cover board, is consolidated in the girder construction
There are nearside mirror 25, the nearside mirror 25 to be used for the laser that reflection laser 221 projects surely.
The third cavity 213 set there are one with 29 angle of the cover board as 45 ° of girder constructions, be fixed in the girder construction
Right reflective mirror 26, the right reflective mirror 26 are used to reflect the laser that the reflection of reflective mirror 28 comes.
Second cavity 212 is internally provided with a circular hole, and angular adjustment bar 27 passes through the circular hole and second cavity
212 are connected, and the end of the angular adjustment bar 27 is fixed with a reflective mirror 28, and the angular adjustment bar 27 is adjusted described reflective
The reflection angle of mirror 28.
As one embodiment of the invention, the laser facula that the laser 221 is sent out is beaten on the nearside mirror 25,
It is beaten on the semi-transparent semi-reflecting lens 234 through the reflection of the nearside mirror 25, wherein 1/2 laser energy passes through the semi-transparent semi-reflecting lens
It 234 reflections and vertical beats on the cantilever of the probe 232.Adjust the laser X sliding blocks 222 and the laser Y
Sliding block 223 further adjusts the position of the laser 221 and hot spot is made to get on the cantilever of the probe 232, the laser
Hot spot is beaten by the cantilever reflection of the probe 232 on the reflective mirror 28 again, then is beaten in institute through the reflection of the reflective mirror 28
It states on right reflective mirror 26, is finally beaten on the position sensor 241 through the reflection of right reflective mirror 26.By adjusting the position
Detector X sliding blocks 242 and the position sensor Y sliding blocks 243 adjust the position of the position sensor 241, described in adjusting
Angular adjustment bar 27 can adjust the angle of the reflection of reflective mirror 28, finally so that hot spot is beaten in the position sensor 241
The heart.On the same focal plane, auxiliary optics passes through rotating nosepiece for the probe 232 and sample to be measured when work
Probe and sample optical imagery can be positioned simultaneously with 4~100 times of object lens, between various Liars can with free switching,
And the light path of laser detection head itself is not interfered with.
Number of devices and treatment scale described herein are the explanations for simplifying the present invention.To the present invention application,
Modifications and variations will be readily apparent to persons skilled in the art.
Although the embodiments of the present invention have been disclosed as above, but it is not limited in listed fortune in specification and embodiments
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily real
Now other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is not limited to
Specific details and legend shown and described herein.
Claims (10)
1. a kind of atomic force microscope very-short-reach laser detector, which is characterized in that including：
Liar component (1)；And
Laser detection head (2) immediately below Liar component (1), the laser detection head (2) include：The shell of inner hollow
Body (21)；And set on shell (21) internal laser assembly (22), probe carriage component (23) and position sensing device assembly
(24),
Wherein, Liar component (1) include rotating nosepiece (11) and be arranged in object lens sabot (11) circumferential direction it is multiple not
With the object lens of amplification factor, the amplification factor of the object lens is 4~100 times.
2. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that the object lens are set
There are five, respectively the first object lens (12), the second object lens (13), third object lens (14), the 4th object lens and the 5th object lens, wherein
First object lens (12), the second object lens (13), third object lens (14), the 4th object lens and the 5th object lens amplification factor be respectively 4 times,
10 times, 20 times, 50 times and 100 times.
3. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that shell (21) wraps
It includes the first cavity (211) set on shell (21) left part, be set to intermediate the second cavity (212) of shell (21) and set on the shell right side
The topmost of the third cavity (213) in portion, shell (21) is equipped with cover board (29).
4. the atomic force microscope very-short-reach laser detector as described in claim 1 and claim 3, feature exist
In laser assembly (22) is set in the first cavity (211), and laser assembly (22) includes：
Laser (221)
The laser X sliding blocks (222) of inner hollow；And
The laser Y sliding blocks (223) of inner hollow；
Wherein, laser (221) is passed through from laser X sliding blocks (222) and laser Y sliding blocks (223) middle, and is fixed on sharp
On light device X sliding blocks (222).
The adjusting screw rod of laser X sliding blocks (222) and laser Y sliding blocks (222) passes through the first cavity (211), and by described
Adjusting screw rod is connected with first cavity (211).
5. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that probe carriage component
(23) it is set in the second cavity (212), there are 45 ° of dovetail groove in probe carriage component (23) both sides, pass through the dovetail groove and the
Two cavitys (212) are connected.
6. atomic force microscope very-short-reach laser detector as claimed in claim 5, which is characterized in that probe carriage component
(23) include：
Probe locating piece (231) is fixed on probe carriage component (23)；
Probe (232), is fixed on the front end of probe locating piece (231)；
Spring leaf (233) is fixed on probe carriage component (23) and is clamped probe (232) using the elasticity of spring；And
Semi-transparent semi-reflecting lens (234), be set to probe carriage component (23) hit exactly and positioned at probe (232) surface, with probe
Frame component (23) angle is 45 ° and is fixed on probe carriage component (23).
7. atomic force microscope very-short-reach laser detector as described in claim 1, which is characterized in that position sensor
Component (24) is set in third cavity (213), and position sensing device assembly (24) includes：
Position sensor (241)
The position sensor X sliding blocks (242) of inner hollow；And
The position sensor Y sliding blocks (243) of inner hollow；
Wherein, position sensor (241) is worn from position sensor X sliding blocks (242) and position sensor Y sliding blocks (243) middle
It crosses, and is fixed on position sensor X sliding blocks (242).
The adjusting screw rod of position sensor X sliding blocks (242) and position sensor Y sliding blocks (242) passes through third cavity (213), and
It is connected with third cavity (213) by the adjusting screw rod.
8. atomic force microscope very-short-reach laser detector as claimed in claim 3, which is characterized in that the first cavity
(211) it is 45 ° of girder constructions to be internally provided with one with cover board (29) angle, and nearside mirror (25) is fixed in the girder construction.
9. atomic force microscope very-short-reach laser detector as claimed in claim 3, which is characterized in that third cavity
(213) there are one setting right reflective mirror (26) is fixed in the girder construction with cover board (29) angle as 45 ° of girder constructions.
10. atomic force microscope very-short-reach laser detector as claimed in claim 3, which is characterized in that the second cavity
(212) it is internally provided with a circular hole, angular adjustment bar (27) is connected by the circular hole with the second cavity (212), angular adjustment bar
(27) end is fixed with a reflective mirror (28).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810373552.5A CN108318709A (en) | 2018-04-24 | 2018-04-24 | A kind of atomic force microscope very-short-reach laser detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810373552.5A CN108318709A (en) | 2018-04-24 | 2018-04-24 | A kind of atomic force microscope very-short-reach laser detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108318709A true CN108318709A (en) | 2018-07-24 |
Family
ID=62895288
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810373552.5A Pending CN108318709A (en) | 2018-04-24 | 2018-04-24 | A kind of atomic force microscope very-short-reach laser detector |
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| US20100306884A1 (en) * | 2009-05-26 | 2010-12-02 | James Robert Massie | Scanning Probe Microscope having Improved Optical Access |
| CN204556662U (en) * | 2015-04-14 | 2015-08-12 | 苏州飞时曼精密仪器有限公司 | A kind of optics atomic force integral scanning probe microscope |
| US20160282383A1 (en) * | 2015-03-25 | 2016-09-29 | Hitachi High-Tech Science Corporation | Scanning probe microscope |
| CN106483337A (en) * | 2015-09-01 | 2017-03-08 | 日本株式会社日立高新技术科学 | Scanning probe microscopy and the optic axis adjusting method of scanning probe microscopy |
| CN207096275U (en) * | 2017-08-02 | 2018-03-13 | 苏州飞时曼精密仪器有限公司 | Optical observation positioner for AFM |
| CN208476958U (en) * | 2018-04-24 | 2019-02-05 | 苏州飞时曼精密仪器有限公司 | A kind of atomic force microscope very-short-reach laser detector |
-
2018
- 2018-04-24 CN CN201810373552.5A patent/CN108318709A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002310881A (en) * | 2001-04-16 | 2002-10-23 | Seiko Instruments Inc | Scanning near field microscope |
| CN1913043A (en) * | 2005-08-08 | 2007-02-14 | 中国科学院电工研究所 | Scanning probe of atomic force microscope |
| US20100306884A1 (en) * | 2009-05-26 | 2010-12-02 | James Robert Massie | Scanning Probe Microscope having Improved Optical Access |
| US20160282383A1 (en) * | 2015-03-25 | 2016-09-29 | Hitachi High-Tech Science Corporation | Scanning probe microscope |
| CN204556662U (en) * | 2015-04-14 | 2015-08-12 | 苏州飞时曼精密仪器有限公司 | A kind of optics atomic force integral scanning probe microscope |
| CN106483337A (en) * | 2015-09-01 | 2017-03-08 | 日本株式会社日立高新技术科学 | Scanning probe microscopy and the optic axis adjusting method of scanning probe microscopy |
| CN207096275U (en) * | 2017-08-02 | 2018-03-13 | 苏州飞时曼精密仪器有限公司 | Optical observation positioner for AFM |
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