CN208476845U - The sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device - Google Patents

The sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device Download PDF

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Publication number
CN208476845U
CN208476845U CN201820973859.4U CN201820973859U CN208476845U CN 208476845 U CN208476845 U CN 208476845U CN 201820973859 U CN201820973859 U CN 201820973859U CN 208476845 U CN208476845 U CN 208476845U
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line
sampling
pipeline
hydrogen fluoride
quantitative pot
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CN201820973859.4U
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Inventor
刘平飞
胡柏铭
魏子贺
张伟潇
李蔚迪
于志远
王子萱
王立金
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SHANGHAI REAFLOW FLUID SYSTEM Co Ltd
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SHANGHAI REAFLOW FLUID SYSTEM Co Ltd
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Abstract

The utility model provides a kind of sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device, including feed liquid port pipeline, quantitative pot pipeline, material liquid outlet pipeline, pressure-equalizing line, sampling line, in-line analyzer and Volatile Gas absorption line, connection type therein are as follows: feed liquid port pipeline one end is connected with anhydrous hydrogen fluoride feed-line, the other end is connect with quantitative pot pipeline and sampling line respectively, the other end of quantitative pot pipeline is connect with material liquid outlet pipeline and pressure-equalizing line respectively, the other end of pressure-equalizing line is connected with Volatile Gas absorption line, the other end of material liquid outlet pipeline is connect with anhydrous hydrogen fluoride feed-line, in-line analyzer is connect by two platinum electrodes installed on quantitative pot with quantitative pot.The advantages that the utility model has corrosion-resistant, safety and environmental protection, and stability is good, is suitable for the sampling of toxic and volatile strong corrosive media and long service life, and realize sampling and on-line analysis integrated functionality.

Description

The sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device
Technical field
The utility model relates to a kind of liquid sampling and on-line analysis devices, and in particular to anhydrous to a kind of gravity Hydrogen fluoride liquid sampling and on-line analysis device.
Background technique
Fluorine chemical industry is that a product variety is more, have excellent performance, the wide important industry of application field.In the longer term from now on Interior, fluorine chemical industry also will be one of industry with the fastest developing speed in chemical field.
Fluorine chemical industry can be divided to inorganic fluorine chemical industry and the big industry of Organic fluoride chemical industry two again.Fluorine Chemical Manufacture is high because having medium The features such as the difficult biochemistry of burn into waste water, monomer explosion hazard, are faced with the pressure of environmental protection and safe operation.In fluorine Chemical Manufacture In, since sampling medium usually has the characteristics that high corrosion, high toxicity seriously affect the personal safety of sampling operation personnel.Therefore Then become the thorny problem in enterprise production process for the safety sampling of such medium.
Traditional sampling is mostly manual operations, is directly sampled by installing two pass valve on conveyance conduit, such Sampling method seriously threatens the personal safety of sampling personnel.There are two big disadvantages for this technique: first is that the person of operator Safety not can guarantee;Cause medium to volatilize second is that the relatively closed sampler space can not be formed when sampling, can not obtain with generation The sample of table.
Therefore existing sampler has greatly improved space.
Utility model content
In view of the foregoing drawbacks, the purpose of the utility model is to provide a kind of safe, reliable, environmentally friendly samplers, for height The volatile medium sampling of malicious high-risk, to solve the problems, such as that existing traditional sampler exists, and by on-line analysis function It is integrated into system, realizes the dual-purpose effect of a device.
To achieve the above object, the utility model uses the following technical solution:
A kind of sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device, including a feed liquid port pipeline, one Quantitative pot pipeline, a material liquid outlet pipeline, a pressure-equalizing line, a sampling line, an in-line analyzer and a Volatile Gas are inhaled Closed tube line, connection type therein are as follows: feed liquid port pipeline one end is connected with anhydrous hydrogen fluoride feed-line, the feed liquid The suction line other end is connect with the quantitative pot pipeline and the sampling line respectively, the other end point of the quantitative pot pipeline It is not connect with the material liquid outlet pipeline and pressure-equalizing line, the other end of the pressure-equalizing line and the volatilization aspiration The connection of closed tube line, the other end of the material liquid outlet pipeline connect with anhydrous hydrogen fluoride feed-line, the in-line analyzer with The connection of quantitative pot pipeline.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, the feed liquid port pipe Line includes an a stop valve MV01 and regulating valve NV01, connection type are as follows: the stop valve MV01 entrance and anhydrous hydrogen fluoride Feed-line connection, the outlet stop valve MV01 are connected with the entrance of the regulating valve NV01 with pipeline;The regulating valve The outlet of NV01 is connect with the quantitative pot pipeline and the sampling line respectively.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, the quantitative pot pipeline Including two PFA hoses, two quantitative pot reducer unions, two platinum electrodes and certain measuring tank, connection type therein is sequentially are as follows: PFA is soft Pipe, quantitative pot reducer union, quantitative pot, quantitative pot reducer union, PFA hose, the platinum electrode is mounted on quantitative pot, described PFA hose one end is connected with the feed liquid port pipeline, two platinum electrodes on the in-line analyzer connection quantitative pot.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, the pressure-equalizing pipe Line includes a stop valve MV03, wherein connection type are as follows: one end of the stop valve MV03 is connected with the quantitative pot pipeline, institute The other end for stating stop valve MV03 is connected with the Volatile Gas absorption line.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, the sampling line packet A stop valve MV02, a regulating valve NV02, a protective cover, a sample introduction probe and a sampling bottle are included, wherein connection type are as follows: described Stop valve MV02, regulating valve NV02 and sampling bottle sequentially connect, one end of the stop valve MV02 and the feed liquid port pipeline Connection, the protective cover are arranged outside the sampling bottle, and the protective cover connects the sample introduction probe.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, the volatilization aspiration Pipeline includes a Volatile Gas probe and a lye absorption bottle, wherein connection type are as follows: the Volatile Gas probe and lye absorption bottle It is sequentially connected with pipeline, the Volatile Gas probe is connect with pressure-equalizing line and lye absorption bottle respectively, and the protection is provide with It sets outside the sampling bottle, the protective cover connects the sample introduction probe and Volatile Gas probe.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, the platinum electrode pass through It is connect with in-line analyzer and measures dielectric conductance rate and then obtain sample micro-water content.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, further include cabinet air draft Fan and sampling cabinet, the sampling cabinet are glove box.
The sampling of anhydrous liquid hydrogen fluoride described in the application preferred embodiment and on-line analysis device, the material liquid outlet pipe Line includes an a stop valve MV04 and regulating valve NV03, connection type are as follows: the outlet stop valve MV04 and anhydrous hydrogen fluoride Feed-line connection, the stop valve MV04 entrance are connected with the outlet of the regulating valve NV03 with pipeline;The regulating valve The entrance of NV03 is connected with the quantitative pot pipeline, the pressure-equalizing line respectively.
In addition, the sampling bottle protective cover uses two-part buckle structure in terms of structural material, material is used PTFE, no observation pore structure, can be directly entered environment in this way to avoid volatilization gas.Moreover, the inlet/outlet pipeline is adopted It is remained using the pipeline that gravity flows through medium without medium with tilt layout.The sample introduction probe and Volatile Gas Probe is all made of monel metal material, has not only been suitable for the corrosion of HF but also can guarantee that syringe needle has enough intensity to be smoothly inserted into trash ice Bottom.In terms of arrangement, the stop valve MV03 in the pressure-equalizing line should take when arranging and be arranged vertically, and can keep away in this way Exempt from HF liquid inlet pressure equalizing main and then reduces the HF gas for entering Volatile Gas absorption line.
The design concept of the application is to design a kind of sampler for anhydrous hydrogen fluoride, the tradition sampling side of ratio Method has many advantages, such as environmentally friendly, safe.It takes and is arranged vertically, can control sample using gravity and slowly flow and reach filling for HF Divide dissolution, avoid HF liquid inlet pressure equalizing main and then reduce the HF gas for entering Volatile Gas absorption line, is allowed to obtain Stable analysis sample.
Due to the technical solution more than using so that the utility model compared with the prior art, have the following advantages that and Good effect:
The first, the application samples anhydrous hydrogen fluoride and on-line analysis device improves, and corrosion-resistant, stability is good, takes Sample is more environmentally-friendly, more representative;
The second, the anhydrous hydrogen fluoride sampling and on-line analysis equipment safety high reliablity of the application, process is succinct, uses the longevity It orders longer.
Third, the anhydrous hydrogen fluoride sampling of the application and on-line analysis device, realize the water of sample while sampling Divide the real time measure, realizes the dual-purpose function of a device.
Certainly, any one specific embodiment for implementing the content of the present invention, might not have all of the above simultaneously Technical effect.
Detailed description of the invention
Fig. 1 is the connection schematic diagram of the application;
Fig. 2 is the structure connection figure of the application.
Specific embodiment
Below in conjunction with attached drawing, the utility model is described in further detail.
Please refer to Fig. 1 and Fig. 2, a kind of gravity anhydrous liquid hydrogen fluoride sampling and on-line analysis device, including material Liquid suction line 32, material liquid outlet pipeline 31, sampling line 33, quantitative pot pipeline 35, pressure-equalizing line 34, in-line analyzer 38 and Volatile Gas absorption line 37, connection type therein are as follows: described 32 one end of feed liquid port pipeline and anhydrous hydrogen fluoride conveying Pipeline 36 connects, and 32 other end of feed liquid port pipeline connects with the quantitative pot pipeline 35 and the sampling line 33 respectively It connects, the method for connection can be connected by three-way connection with pipeline.The other end of the quantitative pot pipeline 35 respectively with the material Liquid outlet line 31 and pressure-equalizing line 34 connect, and the method for connection can be connected by three-way connection with pipeline;The pressure The other end of dynamic balance pipeline 34 is connected with the Volatile Gas absorption line 37 and sampling line 33 respectively, and the method for connection can To be connected by three-way connection with pipeline;The in-line analyzer 38 and quantitative pot pipeline 35 connect.In addition, the feed liquid goes out The other end of mouth pipeline 31 is connect with anhydrous hydrogen fluoride feed-line 36.
As shown in Fig. 2, the feed liquid port pipeline 32 includes an a stop valve MV01 and regulating valve NV01, connection type Are as follows: the stop valve MV01 entrance is connect with anhydrous hydrogen fluoride feed-line 36, the outlet stop valve MV01 and the adjusting The entrance of valve NV01 is connected with pipeline;The outlet of the regulating valve NV01 respectively with the quantitative pot pipeline 35 and the probe tube Line 33 connects, as described above, the method for connection is to be connected by three-way connection with pipeline.
As shown in Fig. 2, the quantitative pot pipeline 35 includes two PFA hoses 11, two quantitative pot reducer unions 12, certain measuring tank 6 and two platinum electrodes 7, connection type therein is sequentially are as follows: PFA hose 11, quantitative pot reducer union 12, quantitative pot 6, quantitative pot become Drive connector 12 and PFA hose 11;The PFA hose 11 wherein one end and the feed liquid port pipeline 32 connection positioned at two sides, Other end is connected with the material liquid outlet pipeline 31 and the pressure-equalizing line 34 with three-way connection;The on-line analysis Instrument 38 connects two platinum electrodes 7 on quantitative pot 6.In addition, the pressure-equalizing line 34 includes a stop valve MV03, wherein connecting Connect mode are as follows: one end of the stop valve MV03 is connected with the Volatile Gas absorption line 37 and sampling line 33 respectively, institute The other end for stating stop valve MV03 is connected with the material liquid outlet pipeline 31, quantitative pot pipeline 35 with three-way connection, stop valve MV03 should take when arranging and be arranged vertically, and to avoid HF liquid inlet pressure equalizing main and then can reduce in this way into Volatile Gas The HF gas of absorption line.The effect of pressure-equalizing line 34 is the quantitative balance when the sample of quantitative pot 6 is using flow by gravity Tank 6 pushes up, the pressure of bottom is to promote the sample in quantitative pot 6 that can flow completely out.
In addition, as shown in Fig. 2, the material liquid outlet pipeline 31 includes an a stop valve MV04 and regulating valve NV03, company Connect mode are as follows: the outlet stop valve MV04 is connect with anhydrous hydrogen fluoride feed-line 36, the stop valve MV04 entrance and institute The outlet for stating regulating valve NV03 is connected with pipeline;The entrance of the regulating valve NV03 respectively with the quantitative pot pipeline 35, described Pressure-equalizing line 34 connects, as described above, the method for connection is to be connected by three-way connection with pipeline.
As for sampling and Volatile Gas absorption aspects, the sampling line 33 include a stop valve MV02, a regulating valve NV02, One protective cover 18, a sample introduction probe, a sampling bottle 16, the Volatile Gas absorption line 37 include a Volatile Gas probe and a lye Absorption bottle 17, wherein connection type are as follows: the stop valve MV02, regulating valve NV02 and sampling bottle 16 sequentially connect, the sampling Bottle 16 and lye absorption bottle 17 connect, one end of the stop valve MV02 and the feed liquid port pipeline 32 connection, the protection Cover 18 is arranged outside the sampling bottle 16, and the protective cover 18 connects the sample introduction probe and Volatile Gas probe, protective cover are adopted With two-part buckle structure, material uses PTFE, and no observation pore structure can be directly entered environment in this way to avoid volatilization gas, Moreover, sample introduction probe and Volatile Gas probe are all made of monel metal material, the corrosion of HF not only it has been suitable for but also has can guarantee that syringe needle has Enough intensity is smoothly inserted into trash ice bottom.The lye absorption bottle 17 is connect by exhaust needle with the sampling bottle 16, is used for Absorb the Volatile Gas of the sampling bottle 16.
Preferably, quantitative sample can be obtained when the effect of the application quantitative pot 6 is for sampling;The quantitative pot 6 Including platinum electrode 7, platinum electrode 7 is used to measure the conductivity of anhydrous hydrogen fluoride sample, using portable instrument measuring medium conductance Rate can calculate the micro-moisture contained in sample in turn, realize the purpose of set of system multiple functions, in the present embodiment, platinum electricity Sample micro-water content is obtained and then pole 7 measures dielectric conductance rate by connecting with in-line analyzer 38.
It preferably, include ice water in herein described sampling bottle 16.It is carried out when systematic sampling using the principle of flow by gravity Sampling, sampling bottle 16 places quantitative ice water when anhydrous hydrogen fluoride samples so that sample when entering in sampling bottle 16 can with it is water-soluble Solution forms stable hydrofluoric acid solution, and it is abundant in favor of sample that flow by gravity sampling can make sample slowly enter sampling bottle 16 Dissolution.
Preferably, the application returning apparatus cabinet exhaust fan (not shown).Operator when in order to further ensure that sampling Personal safety, exhaust fan in sampling system replaces air in cabinet before sampling.
Preferably, the application returning apparatus sampling cabinet (not shown), the sampling cabinet are glove box.In order to completely cut off behaviour Make personnel to contact with the direct of hydrogen fluoride danger medium, sampling cabinet can be made glove box, passes through gloves when personnel operate and grasps Make the components such as valve, further ensures that personnel safety.Furthermore, it is contemplated that the corrosivity of hydrogen fluoride, selected accessory includes valve, pipe Road, quantitative pot 6, sampling bottle 16, lye absorption bottle 17, the components such as pipe fitting all select the material of hydrogen fluoride resistant corrosion such as PTFE, PFA, PVDF etc. or inside are lined with such material.
As shown, feed liquid port pipeline 32, material liquid outlet pipeline 31, sampling line 33 configure two pass in the application Valve is occurred with thoroughly avoiding valve failure system from being unable to operate normally or occur the fortuitous event leaked.
The content of present invention is illustrated below in conjunction with example.
This example is with 3~5bar of pressure, room temperature, and composition feed liquid is the sampling of HF (99.9wt%) anhydrous hydrogen fluoride as tool The sampler of body example exploitation.
Fig. 1 and Fig. 2 are please referred to, this sampler includes: feed liquid port pipeline 32, material liquid outlet pipeline 31, sampling line 33, quantitative pot pipeline 35, pressure-equalizing line 34.
Process flow:
Anhydrous hydrogen fluoride leads to sampling system by feed-line when sampling, into sampling system after first pass around stop valve MV01, regulating valve NV01.Can obtain representative real-time sample when before sampling needing that system is replaced to sample Product.When exchange system, stop valve MV04, regulating valve NV03 are opened, waiting system closes import stop valve after being sufficiently displaced from MV01, regulating valve NV01 and outlet stop valve MV04, regulating valve NV03.The nothing of required volume is had been filled in quantitative pot at this time Water hydrogen fluoride sample then successively opens regulating valve NV02 and stop valve MV02, then turns on stop valve MV03 (pressure-equalizing pipe Line 34 plays the role of 6 top of quantitative balance tank, sampling outlet pressure), sample can be entered by way of flow by gravity Sampling bottle 16 (has held quantitative ice water) in bottle.In addition sampling bottle 16 is mounted in protective cover 18,16 top of sampling bottle and lye Absorption bottle 17 connects, and can be used for further absorbing HF gas remaining in tail gas.
Furthermore sampling on the door of cabinet front can be set plexiglass window, and the valve location for needing to operate can be set Box gloves are operated.Quick coupling is assembled at 6 both ends of quantitative pot has self-locking function, once pulling out self-locking can avoid in pipe Remaining sample leakage.
Sampling system operating procedure is as follows:
1. being first turned on regulating valve NV01, regulating valve NV03, then stop valve MV01, stop valve MV04 are successively opened to system It is replaced.
2. successively closing stop valve MV01, stop valve MV04, regulating valve NV01, regulating valve NV03 after being sufficiently displaced from, at this time Sample is sampled needed for having been filled in quantitative pot 6.
3. being sampled the sampling of bottle 16, it is first turned on regulating valve NV02, adjusts to required aperture, then opens stop valve MV02, sample, from flowing in sampling bottle 16, have pre-installed quantitative ice water, anhydrous hydrogen fluoride can be mixed with ice water by self gravity in bottle Solvent forms stable hydrofluoric acid solution.After bottle 16 to be sampled reaches required liquid level, regulating valve NV02 and stop valve are successively closed MV02。
4. quantitative pot 6 samples, due to needing the moisture of on-line measurement sample, sample in quantitative pot 6 is also required that Flowing in real time.Step in the 1st, 2 is repeated at this time.
5. 16 top of sampling bottle is connected with lye absorption bottle 17, the remaining HF of tail gas is absorbed.
The work thought of the application is, it is ensured that the personal safety for sampling personnel and sample representativeness are as primary premise.No It only repeats to consider safety in process flow and increases maltilevel security measure in exterior.In addition to operation can It leans on, the unsuitable too complex of process flow.It is high that process excessively complexity will lead to economic cost.
In conclusion due to the technical solution more than using so that the utility model is compared with the prior art, have with Lower advantage and good effect:
The first, the application samples anhydrous hydrogen fluoride and on-line analysis device improves, and corrosion-resistant, stability is good, takes Sample is more environmentally-friendly, more representative;
The second, the anhydrous hydrogen fluoride sampling and on-line analysis equipment safety high reliablity of the application, process is succinct, uses the longevity It orders longer.
Third, the anhydrous hydrogen fluoride sampling of the application and on-line analysis device, realize the water of sample while sampling Divide the real time measure, realizes the dual-purpose function of a device.
Disclosed above is only the preferred embodiment of the utility model, but is not used to limit itself, any to be familiar with Those skilled in the art, without prejudice to the spirit of the present invention intension, the equivalent change and change that can be done, Should fall in the utility model and in protection scope.

Claims (9)

1. a kind of gravity anhydrous liquid hydrogen fluoride sampling and on-line analysis device, which is characterized in that enter including a feed liquid Mouth pipeline, certain measuring tank pipeline, a material liquid outlet pipeline, a pressure-equalizing line, a sampling line, an in-line analyzer and one Volatile Gas absorption line, connection type therein are as follows: feed liquid port pipeline one end is connected with anhydrous hydrogen fluoride feed-line, The feed liquid port pipeline other end is connect with the quantitative pot pipeline and the sampling line respectively, the quantitative pot pipeline The other end is connect with the material liquid outlet pipeline and pressure-equalizing line respectively, the other end of the pressure-equalizing line and described The connection of Volatile Gas absorption line, the other end of the material liquid outlet pipeline are connect with anhydrous hydrogen fluoride feed-line, described online Analyzer is connected with quantitative pot pipeline.
2. anhydrous liquid hydrogen fluoride sampling as described in claim 1 and on-line analysis device, which is characterized in that the feed liquid enters Mouth pipeline includes an a stop valve MV01 and regulating valve NV01, connection type are as follows: the stop valve MV01 entrance and anhydrous fluorine Change the connection of hydrogen feed-line, the outlet stop valve MV01 is connected with the entrance of the regulating valve NV01 with pipeline;The adjusting The outlet of valve NV01 is connect with the quantitative pot pipeline and the sampling line respectively.
3. anhydrous liquid hydrogen fluoride sampling as described in claim 1 and on-line analysis device, which is characterized in that the quantitative pot Pipeline includes two PFA hoses, two quantitative pot reducer unions, two platinum electrodes and certain measuring tank, and connection type therein is sequentially are as follows: PFA hose, quantitative pot reducer union, quantitative pot, quantitative pot reducer union, PFA hose, the platinum electrode are mounted on quantitative pot On, PFA hose one end is connected with the feed liquid port pipeline, two platinum electricity on the in-line analyzer connection quantitative pot Pole.
4. anhydrous liquid hydrogen fluoride sampling as described in claim 1 and on-line analysis device, which is characterized in that the pressure is flat The pipeline that weighs includes a stop valve MV03, wherein connection type are as follows: one end of the stop valve MV03 and the quantitative pot pipeline connect It connects, the other end of the stop valve MV03 is connected with the Volatile Gas absorption line.
5. anhydrous liquid hydrogen fluoride sampling as described in claim 1 and on-line analysis device, which is characterized in that the probe tube Line includes a stop valve MV02, a regulating valve NV02, a protective cover, a sample introduction probe and a sampling bottle, wherein connection type are as follows: The stop valve MV02, regulating valve NV02 and sampling bottle sequentially connect, one end of the stop valve MV02 and the feed liquid port Pipeline connection, the protective cover are arranged outside the sampling bottle, and the protective cover connects the sample introduction probe.
6. anhydrous liquid hydrogen fluoride sampling as claimed in claim 5 and on-line analysis device, which is characterized in that the Volatile Gas Absorption line includes a Volatile Gas probe and a lye absorption bottle, wherein connection type are as follows: the Volatile Gas probe and lye are inhaled It receives bottle sequentially to connect with pipeline, the Volatile Gas probe is connect with pressure-equalizing line and lye absorption bottle respectively, the protection It is provide with and sets outside the sampling bottle, the protective cover connects the sample introduction probe and Volatile Gas probe.
7. anhydrous liquid hydrogen fluoride sampling as claimed in claim 3 and on-line analysis device, which is characterized in that the platinum electrode Sample micro-water content is obtained and then measuring dielectric conductance rate by connecting with in-line analyzer.
8. anhydrous liquid hydrogen fluoride sampling as described in claim 1 and on-line analysis device, which is characterized in that further include cabinet Exhaust fan and sampling cabinet, the sampling cabinet are glove box.
9. anhydrous liquid hydrogen fluoride sampling as described in claim 1 and on-line analysis device, which is characterized in that the feed liquid goes out Mouth pipeline includes an a stop valve MV04 and regulating valve NV03, connection type are as follows: the outlet stop valve MV04 and anhydrous fluorine Change the connection of hydrogen feed-line, the stop valve MV04 entrance is connected with the outlet of the regulating valve NV03 with pipeline;The adjusting The entrance of valve NV03 is connected with the quantitative pot pipeline, the pressure-equalizing line respectively.
CN201820973859.4U 2018-06-25 2018-06-25 The sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device Active CN208476845U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108844998A (en) * 2018-06-25 2018-11-20 上海锐宇流体系统有限公司 The sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108844998A (en) * 2018-06-25 2018-11-20 上海锐宇流体系统有限公司 The sampling of gravity anhydrous liquid hydrogen fluoride and on-line analysis device

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