CN208434158U - A kind of anode and plasma creating device for plasma creating device - Google Patents
A kind of anode and plasma creating device for plasma creating device Download PDFInfo
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- CN208434158U CN208434158U CN201820954704.6U CN201820954704U CN208434158U CN 208434158 U CN208434158 U CN 208434158U CN 201820954704 U CN201820954704 U CN 201820954704U CN 208434158 U CN208434158 U CN 208434158U
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- anode
- creating device
- connecting rod
- round tube
- cooling medium
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Abstract
The utility model relates to plasma technology field more particularly to a kind of anodes and plasma creating device for plasma creating device.Cooling medium can exchange heat to anode head in a manner of recycling and flowing through cooling chamber, so as to improve cooling effect.A kind of anode for plasma creating device, comprising: anode head, anode head inside are equipped with cooling chamber；The anode connecting rod connecting with anode head, the interior extending direction along anode connecting rod of anode connecting rod are provided with cooling medium runner, and cooling medium runner includes the cooling medium entrance channel being connected to respectively with cooling chamber and cooling medium outlet flow.The utility model embodiment is for cooling down the anode for plasma creating device.
Description
Technical field
The utility model relates to plasma technology field more particularly to a kind of anode for plasma creating device and
Plasma creating device.
Background technique
Anode in plasma creating device is typically installed at the center of ring cathode, under vacuum conditions, anode
Upper application DC high voltage is by gas ionization, to generate plasma, applying direct current source power is bigger, the plasma of generation
Body power is bigger, and plasma temperature is higher.Rotation status is presented under the action of externally-applied magnetic field in plasma.With it is equal from
The raising of daughter power can also be had very high temperature by the bombardment of ion under high temperature environment at anode.
Currently, anode material mainly uses metal resistant to high temperature, but bearing temperature highest is also in thousand measurement levels, in high temperature
Under plasma ambient, melts or decompose quickly.If it is intended to reaching hundred million measurement levels that fusion can occur, need using higher resistance to
The material or increase cooling system of temperature.
However, not being able to bear the material of hundred million measurement levels at present, and conventional cooling structure is all disposed within vacuum ring
The outside in border, cooling effect are unobvious.
Utility model content
The main purpose of the utility model is that providing a kind of anode for plasma creating device and plasma is raw
At device, cooling medium can exchange heat to anode head in a manner of recycling and flowing through cooling chamber, so as to improve cooling
Effect.
In order to achieve the above objectives, the utility model adopts the following technical solution:
On the one hand, the utility model embodiment provides a kind of anode for plasma creating device, comprising: anode head,
Cooling chamber is equipped with inside anode head；The anode connecting rod being connect with anode head, the interior extension along anode connecting rod of anode connecting rod
Direction is provided with cooling medium runner, and cooling medium runner includes the cooling medium entrance channel being connected to respectively with cooling chamber and cold
But media outlet runner.
Optionally, anode connecting rod is formed by connecting by the first round tube and the second round tube being disposed around around the first round tube, the
One round tube encloses cooling medium entrance channel, and the second round tube and the first round tube enclose cooling medium outlet flow.
Optionally, the diameter of the first round tube is 5-10mm, and the diameter of the second round tube is 15-25mm.
Optionally, the inner wall of the cooling chamber in anode head is arc-shaped.
Optionally, arc-shaped radius is 10-15mm.
Optionally, one end that the first round tube is connected to cooling chamber is protruded into cooling chamber, and the other end is cooling medium runner
Entrance.
Optionally, first round tube protrudes into the length in the cooling chamber greater than 0mm less than or equal to 10mm.
Optionally, which further includes the mounting base with the insulation connection of anode connecting rod,
Mounting base is connect with anode connecting rod by being looped around the insulation pipe insulation on the outside of anode connecting rod.
Optionally, insulation tube passes through one end far from anode head and connect with anode connecting rod, and insulation tube is far from anode head
End be bellows piece or screw thread pipeline section.
On the other hand, the utility model embodiment provides a kind of plasma creating device, comprising:
The anode as described above for being used for plasma creating device；Vacuum cavity；Anode for plasma creating device
Anode head protrude into vacuum cavity, pass through anode connecting rod and the cavity wall of vacuum cavity and connect.
The utility model embodiment provides a kind of anode and plasma creating device for plasma creating device, leads to
It crosses and cooling chamber is set inside anode head, and cooling medium runner is set in the anode connecting rod connecting with the anode head, by
Include the cooling medium entrance channel being connected to respectively with cooling chamber and cooling medium outlet flow in the cooling medium runner, passes through
Be passed through cooling medium into cooling medium entrance channel, can by cooling medium in a manner of recycling and flow through cooling chamber to anode head
It exchanges heat, so as to improve cooling effect.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of structural schematic diagram for plasma creating device provided by the embodiment of the utility model；
Fig. 2 is another structural schematic diagram for being used for plasma creating device provided by the embodiment of the utility model；
Fig. 3 is a kind of structural schematic diagram of plasma creating device provided by the embodiment of the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
In the description of the present invention, it should be understood that term " center ", "upper", "lower", "front", "rear",
The orientation or positional relationship of the instructions such as "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is based on attached drawing institute
The orientation or positional relationship shown, is merely for convenience of describing the present invention and simplifying the description, rather than indication or suggestion is signified
Device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to this is practical
Novel limitation.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.
On the one hand, the utility model embodiment provides a kind of anode for plasma creating device, referring to Fig. 1 and Fig. 2,
Include: anode head 1, cooling chamber 2 is equipped with inside the anode head 1；The anode connecting rod 3 being connect with the anode head 1, anode connecting rod
Extending directions in 3 along anode connecting rod 3 are provided with cooling medium runner 4, the cooling medium runner 4 include respectively with cooling chamber
The cooling medium entrance channel 41 and cooling medium outlet flow 42 of 2 connections.
The utility model embodiment provides a kind of anode for plasma creating device, by setting inside anode head 1
Cooling chamber 2 is set, and cooling medium runner 4 is set in the anode connecting rod 3 connecting with the anode head 1, due to the cooling medium
Runner 4 includes the cooling medium entrance channel 41 that is connected to respectively with cooling chamber 2 and cooling medium outlet flow 42, by cooling
Be passed through cooling medium in medium inlet runner 41, can by cooling medium in a manner of recycling and flow through cooling chamber 2 to anode head 1 into
Row heat exchange, so as to improve cooling effect.
Wherein, without limitation to the set-up mode of the cooling medium entrance channel 41 and cooling medium outlet flow 42, cold
But medium inlet runner 41 and cooling medium outlet flow 42 can be arranged side by side, and can also be looped around around another with one
It is configured.
In one embodiment of the utility model, the anode connecting rod 3 is by the first round tube 31 and is disposed around the first round tube 31 weeks
The second round tube 32 enclosed is formed by connecting, and the first round tube 31 encloses the cooling medium entrance channel 41, the second round tube 32 and first
Round tube 31 encloses the cooling medium outlet flow 41.
In the utility model embodiment, the flow resistance of cooling medium can be reduced using round tube, improve heat transfer effect.
Wherein, first round tube 31 and the second round tube 32 can be coaxially disposed, and the diameter of the second round tube 32 is greater than first
The diameter of round tube 31.
Illustratively, the diameter of the first round tube 31 can be 5-10mm, and the diameter of the second round tube 32 can be 15-25mm.
Preferably, the diameter of the first round tube 31 can be 6-8mm, and the diameter of the second round tube 32 can be 20-22mm.More into
One step is preferred, and the diameter of the first round tube 31 is 6mm, and the diameter of the second round tube 32 is 20mm.
Wherein, it should be noted that since the anode connecting rod 3 needs to connect power supply at work, first round tube
31 and second round tube 32 can using conductor material prepare.It such as can be metal material, it can be resistance in the case where realizing conductive
By high temperature.
Wherein, without limitation to the specific structure of the cooling chamber 2, the inner wall of the cooling chamber 2 can be rectangular, or
It is arc-shaped.
In one embodiment of the utility model, the inner wall of the cooling chamber 2 is arc-shaped.Inner wall with cooling chamber 2 is rectangular
It compares, the vortex of generation is smaller, and diversion effect is better, can take away the heat generated in anode head 1 in time, avoid due to vortex
Lead to local overheating, simultaneously, additionally it is possible to improve flow velocity, effectively improve the heat transfer effect of high temperature position.
Preferably, which is 10-15mm.Further preferably 12mm.
Wherein, when first round tube 31 and the second round tube 32 are connected to the cooling chamber 2, which is used as the sun
The part of the shell of pole connecting rod 3, the communication port periphery that the cooling chamber 2 can be located at the anode head 1 is connect, the first round tube 31
The one end being connected to the cooling chamber 2 can be set in the outside of the cooling chamber 2, can also protrude into the cooling chamber 2.
In one embodiment of the utility model, the cooling chamber 2 is protruded into one end which is connected to cooling chamber 2
Interior, the other end is the entrance of the cooling medium runner 4.Wherein, so, by being passed through cooling into cooling medium runner 4
Medium, the length that the first round tube 31 protrudes into the cooling chamber 2 is longer, then the vortex formed in process fluid flow is smaller, water conservancy diversion
Effect is better.
However, the length (length shown in d as shown in figure 1) that the first round tube 31 protrudes into the cooling chamber 2 is not more growing
It is good, it is unfavorable for the progress of heat exchange, a preferred embodiment of the utility model when built-in length influences the circulation area of fluid
In, which protrudes into the length in the cooling chamber 2 and is less than or equal to 10mm greater than 0mm.It in practical applications, can basis
The length of the cooling chamber 2 is rationally arranged, to improve heat transfer effect while guaranteeing diversion effect.
It is further preferred that it is 4-7mm that first round tube 31, which protrudes into the length in the cooling chamber 2,.Still more preferably it is
4.5mm。
Wherein, without limitation to the position of the outlet of the cooling medium runner 4, as long as can be realized the discharge of cooling medium
?.
In the another embodiment of the utility model, the outlet of the cooling medium runner 4 is multiple, and along second round tube 32
The circumferential uniformly arrangement of one end far from anode head 1.Cooling medium after heat exchange can be discharged in time.
When in use, in order to the anode for being used for plasma creating device to be connected to the cavity wall of vacuum chamber, it is preferred that
This further includes the mounting base 5 connected with the anode connecting rod 3 insulation, the mounting base 5 and the sun for plasma creating device
Pole connecting rod 3 is connected by being looped around the insulation of insulation tube 6 in 3 outside of anode connecting rod.The insulation tube 6 can connect the anode
Extension bar 3 plays the role of insulated enclosure.
Wherein, which can be mounting flange.
In one embodiment of the utility model, which passes through one end and the anode connecting rod 3 far from anode head 1
Connection, and end of the insulation tube 6 far from anode head 1 is bellows piece or screw thread pipeline section.
In the utility model embodiment, on the one hand, the insulation tube 6 expands after heated, bellows piece or screw thread pipeline section
Pressure after expansion can be slowed down, avoids rupturing, and on the other hand, the bellows piece or screw thread pipeline section can effectively increase the insulation
Effective insulated lengths of pipe 6 improve insulation effect.
On the other hand, the utility model embodiment provides a kind of plasma creating device, referring to Fig. 3, comprising:
The anode 01 as described above for being used for plasma creating device；Vacuum cavity 02；This is used for plasma creating device
The anode head of anode 01 protrude into vacuum cavity 02, connect by the anode connecting rod with the cavity wall of vacuum cavity 02.
The utility model embodiment provides a kind of plasma creating device, by the way that cooling chamber is arranged inside anode head, and
In the anode connecting rod being connect with the anode head be arranged cooling medium runner, due to the cooling medium runner include respectively with it is cold
But the cooling medium entrance channel and cooling medium outlet flow of chamber connection, at work, by cooling medium entrance channel
In be passed through cooling medium, cooling medium can exchange heat to anode head in a manner of recycling and flowing through cooling chamber, so as to
Improve cooling effect.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation
Or replacement, it should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with the power
Subject to the protection scope that benefit requires.
Claims (10)
1. a kind of anode for plasma creating device characterized by comprising
Anode head, the anode head inside are equipped with cooling chamber；
The anode connecting rod connecting with the anode head, the interior extending direction along the anode connecting rod of the anode connecting rod are set
Be equipped with cooling medium runner, the cooling medium runner include the cooling medium entrance channel being connected to respectively with the cooling chamber and
Cooling medium outlet flow.
2. the anode according to claim 1 for plasma creating device, which is characterized in that
The anode connecting rod is formed by connecting by the first round tube and the second round tube being disposed around around first round tube, and described
One round tube encloses the cooling medium entrance channel, and second round tube and first round tube enclose the cooling medium
Outlet flow.
3. the anode according to claim 2 for plasma creating device, which is characterized in that
The diameter of first round tube is 5-10mm, and the diameter of second round tube is 15-25mm.
4. the anode according to claim 2 for plasma creating device, which is characterized in that
The inner wall of cooling chamber in the anode head is arc-shaped.
5. the anode according to claim 4 for plasma creating device, which is characterized in that
The arc-shaped radius is 10-15mm.
6. according to the described in any item anodes for plasma creating device of claim 2-5, which is characterized in that
One end that first round tube is connected to the cooling chamber is protruded into the cooling chamber, and the other end is the cooling medium stream
The entrance in road.
7. the anode according to claim 6 for plasma creating device, which is characterized in that
First round tube protrudes into the length in the cooling chamber and is less than or equal to 10mm greater than 0mm.
8. the anode according to claim 1 for plasma creating device, which is characterized in that
It further include the mounting base with anode connecting rod insulation connection, the mounting base and the anode connecting rod are by surrounding
Insulation pipe insulation connection on the outside of the anode connecting rod.
9. the anode according to claim 8 for plasma creating device, which is characterized in that
The insulation tube passes through one end far from the anode head and connect with the anode connecting rod, and the insulation tube is far from institute
The end for stating anode head is bellows piece or screw thread pipeline section.
10. a kind of plasma creating device characterized by comprising
Such as the described in any item anodes for plasma creating device of claim 1-9；
Vacuum cavity；The anode head of the anode for plasma creating device protrudes into the vacuum cavity, by described
Anode connecting rod is connect with the cavity wall of the vacuum cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820954704.6U CN208434158U (en) | 2018-06-20 | 2018-06-20 | A kind of anode and plasma creating device for plasma creating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820954704.6U CN208434158U (en) | 2018-06-20 | 2018-06-20 | A kind of anode and plasma creating device for plasma creating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208434158U true CN208434158U (en) | 2019-01-25 |
Family
ID=65102218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820954704.6U Active CN208434158U (en) | 2018-06-20 | 2018-06-20 | A kind of anode and plasma creating device for plasma creating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208434158U (en) |
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2018
- 2018-06-20 CN CN201820954704.6U patent/CN208434158U/en active Active
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