CN208400811U - A kind of wafer visual inspection machine - Google Patents
A kind of wafer visual inspection machine Download PDFInfo
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- CN208400811U CN208400811U CN201821069452.5U CN201821069452U CN208400811U CN 208400811 U CN208400811 U CN 208400811U CN 201821069452 U CN201821069452 U CN 201821069452U CN 208400811 U CN208400811 U CN 208400811U
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Abstract
The utility model discloses a kind of wafer visual inspection machines, including cleaning plant, the cleaning plant includes fixed station, pedestal, fixed plate, the gentle pump of drifting dust gun body, the upper surface of the fixed station is installed with fixed chute, the bottom end of the fixed plate is provided with fixed fixture block, the fixed plate and fixed station are by being connected together, the top of the fixed plate is provided with movable plate, the inside of the movable plate offers fixing groove, the side of the fixing groove is provided with drifting dust gun body, and the side of the drifting dust gun body is provided with installation fixture block；The utility model passes through installation air pump and dust blower, it is delivered gas in dust blower by the air of air pump compresses, to clear up monitor station, dust blower is by being fixed on movable plate, dust blower can be unloaded and be cleared up manually, installing and dismounting is more convenient, changes the cleaning direction of dust blower by rotation movable plate, so that cleaning effect is more preferable.
Description
Technical field
The utility model belongs to wafer detection technique field, and in particular to a kind of wafer visual inspection machine.
Background technique
Wafer refers to silicon chip used in silicon semiconductor production of integrated circuits, since its shape is circle, therefore referred to as wafer,
Wafer is generally made into 6 inches of diameter, 8 inches or 12 inches of cylindrical bar, when producing to wafer, in order to guarantee
The quality of production of wafer can detect wafer appearance by detection machine mostly.
Existing wafer detection machine when not in use, can occupy dust on monitor station, need to clear up monitor station, prevent
Dust adheres on the wafer surface, when detecting, will affect the effect of detection, existing detection machine is mostly installation cleaning dress
Set, when cleaning more troublesome problem, thus it is proposed that a kind of wafer visual inspection machine.
Utility model content
It is mentioned above in the background art to solve the purpose of this utility model is to provide a kind of wafer visual inspection machine
Existing wafer detection machine when not in use, can occupy dust on monitor station, need to clear up monitor station, prevent dust from adhering to
On the wafer surface, when detecting, it will affect the effect of detection, existing detection machine is mostly installation cleaning plant, when cleaning
More troublesome problem.
To achieve the above object, the utility model provides the following technical solutions: a kind of wafer visual inspection machine, including cleaning
Device, the cleaning plant include fixed station, pedestal, fixed plate, the gentle pump of drifting dust gun body, and the upper surface of the fixed station is opened
It is provided with fixed chute, the bottom end of the fixed plate is provided with fixed fixture block, and the fixed plate and fixed station, which pass through, to be connected together,
The top of the fixed plate is provided with movable plate, and the inside of the movable plate offers fixing groove, and the side of the fixing groove is set
It is equipped with drifting dust gun body, the side of the drifting dust gun body is provided with installation fixture block, and the other side of the drifting dust gun body is set
Dust blower pipette tips are equipped with, the upper surface of the pedestal is provided with air pump, and the air pump is connected with drifting dust gun body by tracheae.
Preferably, it is attached between the fixed station and pedestal by support column, the upper surface setting of the fixed station
There is fixed frame.
Preferably, the side of the fixed station is provided with support rod, and the outside of the support rod is provided with sliding sleeve, the cunning
The inside of set is provided through stretch rod, and the side of the stretch rod is provided with observation camera lens.
Preferably, the base upper surface middle position is provided with monitor station, and the monitor station and fixed frame are closely to connect
Binding structure.
Preferably, the movable plate and fixed plate are attached by bearing, and movable plate can freely revolve in fixed plate
Turn.
Compared with prior art, the utility model has the beneficial effects that the utility model passes through installation air pump and dust blower,
It is delivered gas in dust blower by the air of air pump compresses, to clear up monitor station, dust blower is solid by engaging
It is scheduled on movable plate, dust blower can be unloaded and be cleared up manually, installing and dismounting is more convenient, is changed by rotation movable plate
The cleaning direction for becoming dust blower, so that cleaning effect is more preferable.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the side structure schematic view of the utility model；
Fig. 3 is the fixed plate structure schematic diagram of the utility model；
Fig. 4 is the dust blower pipette tips structural schematic diagram of the utility model；
Fig. 5 is the dust blower pipette tips and fixed plate attachment structure schematic diagram of the utility model；
In figure: 1, stretch rod；2, fixed station；3, support column；4, pedestal；5, support rod；6, sliding sleeve；7, camera lens is observed；8,
Drifting dust gun body；9, fixed plate；10, fixed frame；11, monitor station；12, dust blower pipette tips；13, fixed chute；14, air pump；15,
Movable plate；16, fixing groove；17, fixed fixture block；18, fixture block is installed.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Embodiment 1
Fig. 1 to Fig. 5 is please referred to, the utility model provides a kind of technical solution: a kind of wafer visual inspection machine, including cleaning
Device, cleaning plant include fixed station 2, pedestal 4, fixed plate 9, drifting dust gun body 8 and air pump 14, and the upper surface of fixed station 2 is opened
It is provided with fixed chute 13, the bottom end of fixed plate 9 passes through card by being welded with fixed fixture block 17, fixed plate 9 and fixed station 2
Connection is closed, the top of fixed plate 9 is connected with movable plate 15 by shaft, and the inside of movable plate 15 offers fixing groove 16, fixed
Fixture block 18 is installed by being welded and fixed by the drifting dust gun body 8 that is connected together, the side of drifting dust gun body 8 in the side of slot 16, and
The other side of drifting dust gun body 8 is connected with dust blower pipette tips 12 by shaft, and the upper surface of pedestal 4 has been bolted air pump
14, air pump 14 is connected with drifting dust gun body 8 by tracheae.
In order to which wafer is fixed, in the present embodiment, it is preferred that between fixed station 2 and pedestal 4 by support column 3 into
There is fixed frame 10 in the upper surface of row connection, fixed station 2 by being connected together.
It is detected for convenience, in the present embodiment, it is preferred that the side of fixed station 2 has been bolted support rod
5, there is sliding sleeve 6 in the outside of support rod 5 by being connected together, and the inside of sliding sleeve 6 is provided through stretch rod 1, the side of stretch rod 1
It has been bolted observation camera lens 7.
In order to keep detection effect more preferable, in the present embodiment, it is preferred that 4 upper surface middle position of pedestal is bolted
There is monitor station 11, monitor station 11 and fixed frame 10 are tight connecting device.
Direction is cleared up in order to can control drifting dust gun body 8, in the present embodiment, it is preferred that movable plate 15 and fixed plate 9 are logical
It crosses bearing to be attached, movable plate 15 can rotate freely in fixed plate 9.
Embodiment 2
Fig. 1 to Fig. 5 is please referred to, the utility model provides a kind of technical solution: a kind of wafer visual inspection machine, including cleaning
Device, cleaning plant include fixed station 2, pedestal 4, fixed plate 9, drifting dust gun body 8 and air pump 14, and the upper surface of fixed station 2 is opened
It is provided with fixed chute 13, the bottom end of fixed plate 9 passes through card by being welded with fixed fixture block 17, fixed plate 9 and fixed station 2
Connection is closed, the top of fixed plate 9 is connected with movable plate 15 by shaft, and the inside of movable plate 15 offers fixing groove 16, fixed
Fixture block 18 is installed by being welded and fixed by the drifting dust gun body 8 that is connected together, the side of drifting dust gun body 8 in the side of slot 16, and
The other side of drifting dust gun body 8 is connected with dust blower pipette tips 12 by shaft, and the upper surface of pedestal 4 is by being welded with air pump
14, air pump 14 is connected with drifting dust gun body 8 by tracheae.
In order to which wafer is fixed, in the present embodiment, it is preferred that between fixed station 2 and pedestal 4 by support column 3 into
There is fixed frame 10 in the upper surface of row connection, fixed station 2 by being connected together.
It is detected for convenience, in the present embodiment, it is preferred that the side of fixed station 2 is by being welded with support rod
5, there is sliding sleeve 6 in the outside of support rod 5 by being connected together, and the inside of sliding sleeve 6 is provided through stretch rod 1, the side of stretch rod 1
By being welded with observation camera lens 7.
In order to keep detection effect more preferable, in the present embodiment, it is preferred that 4 upper surface middle position of pedestal is by being welded and fixed
There is monitor station 11, monitor station 11 and fixed frame 10 are tight connecting device.
Direction is cleared up in order to can control drifting dust gun body 8, in the present embodiment, it is preferred that movable plate 15 and fixed plate 9 are logical
It crosses bearing to be attached, movable plate 15 can rotate freely in fixed plate 9.
14 model FKY8006 of air pump in the utility model.
The working principle and process for using of the utility model: after device installation, before being detected to wafer, first to inspection
The surface of scaffold tower 11 is cleared up, prevent dust on monitor station 11 influence can wafer detection effect, when cleaning, open air pump
14, air pump 14 does not stop compressed air by electric power, generates air pressure, so that gas is transported in drifting dust gun body 8 by tracheae,
Drifting dust gun body 8 and movable plate 15 are by being connected together, and movable plate 15 is connected with fixed plate 9 by bearing, and rotation can be passed through
Movable plate 15 is turned a work to change the direction of the drifting dust of drifting dust gun body 8, fixed plate 9 horizontal can be slided in fixed station 2, can be with
Be adjusted, while drifting dust gun body 8 can also be unloaded according to position of the position of cleaning to fixed plate 9, by hand take pair
Monitor station 11 is cleared up, and is operated very convenient.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of wafer visual inspection machine, including cleaning plant, it is characterised in that: the cleaning plant includes fixed station (2), bottom
Seat (4), fixed plate (9), drifting dust gun body (8) and air pump (14), the upper surface of the fixed station (2) offer fixed chute
(13), the bottom end of the fixed plate (9) is provided with fixed fixture block (17), and the fixed plate (9) and fixed station (2) are connected by engaging
It connecing, the top of the fixed plate (9) is provided with movable plate (15), and the inside of the movable plate (15) offers fixing groove (16),
The side of the fixing groove (16) is provided with drifting dust gun body (8), and the side of the drifting dust gun body (8) is provided with installation fixture block
(18), and the other side of the drifting dust gun body (8) is provided with dust blower pipette tips (12), the upper surface setting of the pedestal (4)
Have air pump (14), the air pump (14) is connected with drifting dust gun body (8) by tracheae.
2. a kind of wafer visual inspection machine according to claim 1, it is characterised in that: the fixed station (2) and pedestal (4)
Between be attached by support column (3), the upper surface of the fixed station (2) is provided with fixed frame (10).
3. a kind of wafer visual inspection machine according to claim 2, it is characterised in that: the side of the fixed station (2) is set
It is equipped with support rod (5), the outside of the support rod (5) is provided with sliding sleeve (6), and the inside of the sliding sleeve (6) is provided through drawing
Boom (1), the side of the stretch rod (1) are provided with observation camera lens (7).
4. a kind of wafer visual inspection machine according to claim 2, it is characterised in that: among pedestal (4) upper surface
Position is provided with monitor station (11), and the monitor station (11) and fixed frame (10) are tight connecting device.
5. a kind of wafer visual inspection machine according to claim 1, it is characterised in that: the movable plate (15) and fixed plate
(9) it is attached by bearing, movable plate (15) can rotate freely on fixed plate (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821069452.5U CN208400811U (en) | 2018-07-06 | 2018-07-06 | A kind of wafer visual inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821069452.5U CN208400811U (en) | 2018-07-06 | 2018-07-06 | A kind of wafer visual inspection machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208400811U true CN208400811U (en) | 2019-01-18 |
Family
ID=65131140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821069452.5U Active CN208400811U (en) | 2018-07-06 | 2018-07-06 | A kind of wafer visual inspection machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208400811U (en) |
-
2018
- 2018-07-06 CN CN201821069452.5U patent/CN208400811U/en active Active
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