CN208385388U - A kind of suction clamping device of chip integrated circuit material surface processing equipment - Google Patents

A kind of suction clamping device of chip integrated circuit material surface processing equipment Download PDF

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Publication number
CN208385388U
CN208385388U CN201820973564.7U CN201820973564U CN208385388U CN 208385388 U CN208385388 U CN 208385388U CN 201820973564 U CN201820973564 U CN 201820973564U CN 208385388 U CN208385388 U CN 208385388U
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China
Prior art keywords
suction
support frame
pair
integrated circuit
screw rod
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Active
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CN201820973564.7U
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Chinese (zh)
Inventor
苏骞
刘全胜
彭仕镇
孟敏
王磊
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Dongguan Allmerit Technology Co Ltd
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SHENZHEN ALLMERIT TECHNOLOGY Co Ltd
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Priority to CN201820973564.7U priority Critical patent/CN208385388U/en
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Abstract

The utility model relates to a kind of suction clamping devices of chip integrated circuit material surface processing equipment, and including rack and the material clamping robot that can be moved back and forth along first direction in the rack is arranged in;The material clamping robot includes the first support frame, be arranged on first support frame can be close to each other in a second direction or far from a pair of of material folding component to clamp or unclamp sheet stock.The material clamping robot of the chip integrated circuit material surface processing equipment inhaling clamping device and being moved back and forth on the rack along first direction by setting on the rack;And the material clamping robot can be close to each other in a second direction or far from a pair of of material folding component to clamp or unclamp sheet stock by being arranged on its first support frame;The material folding component can clamp sheet stock, and sheet stock is avoided to fall, to improve production efficiency.

Description

A kind of suction clamping device of chip integrated circuit material surface processing equipment
Technical field
The utility model relates to chip integrated circuit material technical field of surface, more specifically to a kind of The suction clamping device of formula integrated circuit material surface processing equipment.
Background technique
Currently, just being carried out in chip integrated circuit material surface treatment process to pieces such as circuit lead frames, one As need suction clamping device using chip integrated circuit material surface processing equipment to chip integrated circuit material surface Sheet stock after the completion of processing carries out blanking, the folder of the suction clamping device of existing chip integrated circuit material surface processing equipment Expect that manipulator generally includes a pair of folder hook that can clamp sheet stock, which is L shape, can drive and clamp by clamping piece, because being somebody's turn to do It is not provided with the fixing piece for fixing the sheet stock on folder hook, therefore it is easy to cause piece material clamping unstable, and then sheet stock is caused to hold It easily falls, to reduce production efficiency.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of improved chip integrated circuit material surface treatment The suction clamping device of equipment.
The technical scheme adopted by the utility model to solve the technical problem is as follows: constructing a kind of chip integrated circuit material table The suction clamping device of surface treatment equipment comprising what rack and be arranged in the rack can be moved back and forth along first direction Material clamping robot;
The material clamping robot can be leaned on mutually on first support frame in a second direction including the first support frame, setting Close or remote from a pair of of material folding component to clamp or unclamp sheet stock.
Preferably, each material folding component includes most clamp hands, most the first connectors, first connecting rod, the Two connectors;
The clamp hand includes that the first clamping jaw and first clamping jaw cooperate to clamp the second clamping jaw of sheet stock;Described first Clamping jaw is fixedly connected with first connector, and first clamping jaw is equipped with limit hole, and second clamping jaw is from the limit Hole wears out the detent that a clamping sheet stock is formed with first clamping jaw;
The most clamp hands connect one to one with most first connectors;
Most first connectors are disposed side by side on the first connecting rod, second connector and described the The connection of one connecting rod.
Preferably, the material folding component further includes the height for driving the second clamping jaw lifting to adjust the detent height Regulating part;The height adjusting part is arranged on first connector one end and connect with second clamping jaw.
Preferably, the material clamping robot further includes that the binder component being arranged on first support frame and setting exist The first regulating mechanism on first support frame;The pair of material folding component is separately positioned on the two of first regulating mechanism Side.
Preferably, first regulating mechanism includes actuator, adjustable plate, two guide posts, the first guidance set and a pair Second guidance set;
The actuator connect driving with the adjustable plate to drive the adjustable plate to move reciprocatingly along first direction;
First guidance set includes the first guide rail along first direction setting being arranged on first support frame And it is set in the first sliding block on first guide rail;
The adjustable plate is connect to slide on first guide rail with first sliding block, and the adjustable plate is equipped with two Guide groove;Two guide groove is in eight word arrangements;Two guide post is arranged in a one-to-one correspondence with two guide groove, and the guide post is led from described Slot is worn out to be connect with second connector, to drive the pair of material folding component close to each other in this second direction or It is separate;
The pair of second guidance set includes side by side and being disposed on first support frame both ends in a second direction Two the second guidance sets;Each second guidance set includes being arranged in first support frame bottom along described second Second guide rail of direction setting and the second sliding block being set on second guide rail;Distinguish at the both ends of second connector It is connect with second sliding block for being located at first support frame both ends.
It preferably, further include that the suction manipulator that can be moved back and forth along first direction in the rack is set;The suction Material manipulator includes the second support frame, be arranged on second support frame can a pair close to each other or separate in a second direction Suction component;
Each suction component includes most suckers, most third connectors, the second connecting rod and the 4th company Fitting;The most suckers and most a third connectors connect one to one;The most third connectors, It is disposed side by side on second connecting rod;Described 4th connector one end is connect with second connecting rod, and other end fixation is set It sets on second support frame.
Preferably, the suction manipulator further includes that setting drives the suction machinery on hand on second support frame Rise or the elevating mechanism of decline and be arranged on second support frame to drive the pair of suction component close to each other or The second separate regulating mechanism.
Preferably, second regulating mechanism includes a pair of of nut, the first movable screw rod of the pair of nut of connection, control It makes the control assembly of the described first movable screw rod rotation and is arranged in parallel with the described first movable screw rod to the suction group The third guidance set of part guiding;
The nut is threaded through in the 4th connector;The pair of nut and the first movable screw rod junction point It She You not forward screw thread and reverse thread;Described first movable screw rod is arranged along the second direction in second support frame On, and setting is passed through from the 4th connector to drive the pair of suction component phase in this second direction by rotation Mutually close to or far from.
Preferably, the control assembly includes that the second movable screw rod above the described first movable screw rod is arranged in, is arranged On the described first movable screw rod the first helical gear, be set on the described second movable screw rod the second helical gear, with it is described The lever of second movable screw rod one end connection;
Described second movable screw rod is vertically arranged with the described first movable screw rod, and first helical gear is oblique with described second Gear engagement;
The third guidance set includes that a pair of of the third being arranged on second support frame along the second direction is led Rail and the third sliding block being arranged on the third guide rail;The pair of third guide rail is separately positioned on the 4th connector Both ends;The third sliding block setting is fixedly connected below the 4th connector with the 4th connector.
Preferably, the elevating mechanism includes lifting cylinder.
The suction clamping device for implementing the chip integrated circuit material surface processing equipment of the utility model has with following Beneficial effect: the suction clamping device of the chip integrated circuit material surface processing equipment is by the way that setting can be on the rack on the rack The material clamping robot moved back and forth along first direction;And the material clamping robot can be along second by being arranged on its first support frame Direction is close to each other or far from a pair of of material folding component to clamp or unclamp sheet stock;The material folding component can clamp sheet stock, avoid piece Material is being fallen, to improve production efficiency.
Detailed description of the invention
Below in conjunction with accompanying drawings and embodiments, the utility model is described in further detail, in attached drawing:
Fig. 1 is the material clamping robot of the suction clamping device of the utility model chip integrated circuit material surface processing equipment Structural schematic diagram;
Fig. 2 is the suction manipulator of the suction clamping device of the utility model chip integrated circuit material surface processing equipment Structural schematic diagram;
Fig. 3 is the material clamping robot of the suction clamping device of the utility model chip integrated circuit material surface processing equipment The structural schematic diagram of clamp hand.
Specific embodiment
For a clearer understanding of the technical features, objectives and effects of the utility model, now control attached drawing is detailed Illustrate specific embodiment of the present utility model.
Fig. 1 to Fig. 3 shows the suction clamping device of the utility model chip integrated circuit material surface processing equipment One preferred embodiment.
The suction clamping device of the chip integrated circuit material surface processing equipment can be used for the pieces such as leads of IC frame Material carries out the surface treatment of chip integrated circuit material, the piece after can having handled chip integrated circuit material surface processing equipment Material carries out blanking, can be used for improving the automatization level of chip integrated circuit material surface treatment, and in its blanking process, Sheet stock can be steadily clamped, sheet stock is avoided to fall.
As shown in Figure 1, the suction clamping device of the chip integrated circuit material surface processing equipment includes rack, clamping machine Tool hand 10;In the present embodiment, the suction clamping device of the chip integrated circuit material surface processing equipment further includes Material sucking machine Tool hand 20;The rack can be used for installing the material clamping robot 10 and the suction manipulator 20;The material clamping robot 10 is arranged at this It can be moved back and forth along the first direction in rack, which can be used for blanking, provide the automatization level of blanking;It should Suction manipulator 20 is arranged in the rack, and can move back and forth along the first direction, can be used for feeding, sheet stock can be first by this 20 feeding of suction manipulator, then chip integrated circuit material surface treatment is carried out, after the surface treatment of chip integrated circuit material Sheet stock can be delivered to magazine by the material clamping robot 10.
As shown in Figures 1 and 2, which includes the first support frame 11, a pair of of material folding component 12;This first Support 11 can be used for supporting the material folding component 12;The material folding component 12 be arranged on first support frame 11, can along this second Direction is close to each other or separate, to clamp or unclamp sheet stock;The second direction can be the direction vertical with the first direction.
First support frame 11 may include the mounting plate 111 for installing the material folding component 12, and be arranged in the installation Several pillars 112 on plate 111;The mounting plate 111 can be used sheet metal and be made, and can be rectangle, several pillars 112 are arranged in four corners of the mounting plate 111, and lifting cylinder can also be arranged on several pillars 112, to drive the folder Expect that manipulator 10 is gone up and down.
A pair of material folding component 12 includes two material folding components being oppositely arranged;The two material folding components being oppositely arranged can With close to each other or separate along the second direction, so as to clamp or release sheet stock.Each material folding component includes most folders Hand 121, most the first connectors 122, first connecting rod 123, the second connectors 124;The majority clamp hand 121 and the majority A first connector 122 connects one to one;The clamp hand can be used for clamping sheet stock;The quantity of the clamp hand 121 can be two, three It is a or multiple;The majority the first connector 122 is disposed side by side on the first connecting rod 123, first can be connected by this Bar 123 drives, and moves reciprocatingly together along first direction, quantity is corresponding with the quantity of the clamp hand 121.Second connector 124 connect with the first connecting rod 123, and the first connecting rod 123 can be driven to move reciprocatingly along first direction.
In the present embodiment, which includes the first clamping jaw 1211, the second clamping jaw with first clamping jaw 1211 cooperation 1212;First clamping jaw 1211 and second clamping jaw 1212 cooperation can clamp sheet stock, and sheet stock is avoided to fall.First clamping jaw 1211 It is fixedly connected with first connector 122, bottom is equipped with the convex block protruded along side, and is additionally provided with limit hole thereon 1213;The limit hole 1213 is arranged on the side wall of first clamping jaw 1221, and longitudinally disposed, for second clamping jaw 1212 wear;Second clamping jaw 1212 can connect second clamping jaw 1212 with first connector 122 can be from the limit hole 1213 It wears out the detent for forming a clamping sheet stock with first clamping jaw 1211 and specifically protrudes the protrusion of the limit hole 1213 With the convex block on first clamping jaw 1211 cooperatively form can a detent, can be used for clamping sheet stock.
In the present embodiment, which further includes driving second clamping jaw 1212 lifting to adjust the detent 1214 The height adjusting part 1215 of height;In the present embodiment, which can be lifting cylinder, can be by the liter Sending down abnormally ascending cylinder is flexible to drive second clamping jaw 1212 lifting;The height adjusting part 1215 is arranged on first connector 122, with this First connector 122 is fixedly connected, and one end is connect with second clamping jaw 1212, to drive second clamping jaw 1212 to go up and down. It is to be appreciated that the height adjusting part 1215 can be not limited to cylinder in some other embodiment.
In the present embodiment, which further includes binder component 13 and the first regulating mechanism 14;The binder Component 13 is arranged on first support frame 11, which is located at the two sides of the binder component 13, the binder group Part 13 can be used for pressing to the sheet stock on mold, so that sheet stock is fixed with the mold alignment, avoids sheet stock mobile, leads to chip Integrated circuit material surface treatment liquid is sprayed onto other positions.First regulating mechanism 14 is arranged on first support frame 11, For adjusting the width between the material folding component 12, to be applicable in the sheet stock of different in width.
It can be rectangular-shape to the binder component 13, can be driven by connecting with lifting cylinder by lifting cylinder Lifting may make sheet stock to be close to mold, convenient for the progress of chip integrated circuit material surface treatment, and improve product matter Amount.
First regulating mechanism 14 include actuator 141, adjustable plate 142, two guide posts 143, the first guidance set 144 and A pair of second guidance set 145;The actuator 141 can drive the adjustable plate 142 to move on first guidance set 144, often One guide post 143 connect with one second connector 124 with driven when the adjustable plate 142 is mobile second connector 124 this It is moved back and forth on two guidance sets 145.
Specifically, which is arranged on first support frame 11, connect, can be used for the adjustable plate 142 The adjustable plate 142 is driven to move reciprocatingly along the first direction;In the present embodiment, which can be telescopic cylinder.
The adjustable plate 142 may be provided on first guidance set 144, can be oriented to by first guidance set 144, the tune It saves plate 142 and is equipped with two guide grooves 1421;The two guide grooves 1421 are arranged on the adjustable plate 142 in "eight" shape, and two guide grooves Spacing between 1421 is gradually increased from one end of 142 moving direction of adjustable plate to the other end, two guide post 143 and two guide groove 1421 are arranged in a one-to-one correspondence, and guide post 143 wears out from the guide groove 1421 and connect with second connector 124, in actuator When the 141 driving adjustable plate 142 movement, drive the pair of material folding component 12 close to each other or separate in a second direction, with The width for adjusting two material folding components 12 adapts to various sizes of sheet stock.
First guidance set 144 can be oriented to the adjustable plate 142 comprising be arranged on first support frame 11 along the First guide rail 1441 of one direction setting and the first sliding block 1442 being set on first guide rail 1441, first guide rail 1441 are located on the mounting plate 111, which connect with first sliding block 1442, when the actuator 141 drives the adjusting When plate 142 is mobile, which can be such that the adjustable plate 142 slides on first guide rail 1441;
Second guidance set 145 is arranged in one side opposite with first guide rail 1441 on the mounting plate 111, and this one It include side by side and being disposed on two second of 11 both ends of the first support frame guiding in a second direction to the second guidance set 145 Component 145;Each second guidance set 145 includes being arranged in 11 bottom of the first support frame is arranged in a second direction second Guide rail 1451 and the second sliding block 1452 being set on second guide rail 1451;The both ends of second connector 124 respectively with The second sliding block 1452 positioned at 11 both ends of the first support frame connects, to slide on second guide rail 1452, to realize the folder Expect the adjusting of 12 width of component.
In the present embodiment, which includes the second support frame 21, suction component 22, elevating mechanism 23, the Two regulating mechanisms 24;Second support frame 21 can be used for installing the suction component 22, elevating mechanism 23 and the second regulating mechanism 24;The suction component is arranged on second support frame 21, can be close to each other or separate along the second direction, to be suitable for not With the sheet stock feeding of size;The elevating mechanism 23 is arranged on second support frame 21, can drive on the suction manipulator 20 It rises or decline, second regulating mechanism is arranged on second support frame 21, a pair of suction component 22 can be driven mutually to lean on Close or remote to adjust the distance between two suction components 22, so that various sizes of sheet stock feeding can be used in it.
Further, if second support frame 21 includes the first mounting plate 211, above first mounting plate 211 Heavenly Stems and Earthly Branches dagger 212 and the second mounting plate 212 above several support columns 212;First mounting plate 211 and this Two mounting plates 212 can be used sheet metal and be made, and it all can be rectangular-shape;Several support columns 212 may be provided at Four corners of first mounting plate 211;One end is connect with first mounting plate 211, and the other end and second mounting plate 212 connect It connects.
A pair of suction component 22 include along first direction side by side, and two suction components 22 being provided separately;Each suction Expect that component 22 includes most suckers 221, most third connectors 222, the second connecting rod 223 and the 4th connectors 224;The majority sucker 221 connects one to one with the majority third connector 222;Each sucker 221 can be with another suction The sucker cooperation being arranged corresponding thereto on material component 22 is attracted sheet stock, to realize feeding;The third connector 222 can be by the sucker 221 are fixed in second connecting rod 223;The majority third connector 222 is disposed side by side in second connecting rod 223, It can be driven by second connecting rod 223 and be reciprocatingly moved in a second direction together;4th connector, 224 one end and this second Connecting rod 223 connects, and the other end is arranged on second support frame 21, can drive second connecting rod 223 in a second direction It reciprocatingly moves, specifically, the 4th connector 224 is pierced by from first mounting plate 211 and connect with second regulating mechanism 24, It is adjusted with being driven by second regulating mechanism 24.
In the present embodiment, which may be provided on second mounting plate 212, can drive entire Material sucking machine Tool hand rises or falls;To realize feeding;Specifically, which can be lifting cylinder, lifting cylinder setting On second mounting plate 212.
Second regulating mechanism 24 includes a pair of of nut 241, the first movable screw rod 242 for connecting a pair of nut 241, control Make the control assembly 243 and be arranged in parallel with the first movable screw rod 242 to give the suction that the first movable screw rod 242 rotates Expect the third guidance set 244 that component 22 is oriented to;A pair of nut 241 includes two nuts 241, each nut 241 and one the The connection of four connectors 224;The nut 241 is threaded through in the 4th connector 224, and the first movable screw rod 242 is in a second direction Be arranged on second support frame 21, wear in a pair of nut 241, and then from the 4th connector 224 pass through be arranged, It can drive a pair of suction component 22 close to each other or separate in the second direction by rotation.Specifically, first work Dynamic screw rod 242 is spirally connected with a pair of nut 241, and a pair of nut 241 and 242 junction of the first movable screw rod are respectively equipped with just To screw thread and reverse thread;The control assembly 243 is connect with the first movable screw rod 242, can control the nut 241 this It is rotated forward or backwards on one movable screw rod 242, and then drives the 4th connector 224 relatively close or separate, to realize Width adjusting, to adapt to various sizes of sheet stock.
Further, which includes the second movable screw rod 2431, the first helical gear 2432, the second helical gear 2433, lever 2434;The second movable setting of screw rod 2431 is above the first movable screw rod 242, with first movable wire Bar 242 is vertically arranged, which is arranged along the first direction;First helical gear 2432 is set in first activity On screw rod 242;Second helical gear 2433 is set on the second movable screw rod 2431;And it is nibbled with first helical gear 2432 It closes;One end of the second movable screw rod 2431 is arranged in the lever 2434, connect with the second movable screw rod 2431, specifically Ground is set on the second movable screw rod 2431, can drive the second movable screw rod 2431 by rotating the lever 2434 Rotation, and then second helical gear 2433 is driven to rotate, it is rotated by second helical gear 2433 and drives first helical gear 2432 Rotation so that the first movable screw rod 242 rotates so that a pair of 4th connector 224 do it is relatively close or separate.
In the present embodiment, which includes being arranged on second support frame 21 along the second direction A pair of of third guide rail 2441 and the third sliding block 2442 that is arranged on the third guide rail 2441;A pair of third guide rail 2441 It is arranged on first mounting plate 211, and its both ends for being located at the 4th connector 224, the third sliding block 2442 setting It is fixedly connected below the 4th connector 224 with the 4th connector 224, in order to which the 4th connector 224 is in the third It reciprocatingly slides on guide rail 2441.
It should be understood that above embodiments only express preferred embodiments of the present invention, describe more specific With it is detailed, but it should not be understood as limiting the scope of the patent of the utility model;It should be pointed out that for this field Those of ordinary skill for, without departing from the concept of the premise utility, can to above-mentioned technical characterstic carry out freely Combination, various modifications and improvements can be made, and these are all within the protection scope of the present invention;Therefore, all practical with this The equivalents and modification that novel scope of the claims is done, should belong to the covering scope of the utility model claims.

Claims (10)

1. a kind of suction clamping device of chip integrated circuit material surface processing equipment, which is characterized in that including rack and The material clamping robot (10) that can be moved back and forth along first direction in the rack is set;
The material clamping robot (10) can be along second party on first support frame (11) including the first support frame (11), setting To close to each other or separate a pair of of material folding component (12) to clamp or unclamp sheet stock.
2. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 1, feature exist In each material folding component (12) includes most clamp hands (121), most the first connectors (122), first connecting rod (123), the second connector (124);
The clamp hand (121) includes the first clamping jaw (1211) and first clamping jaw (1211) cooperation to clamp the second of sheet stock Clamping jaw (1212);First clamping jaw (1211) is fixedly connected with first connector (122), first clamping jaw (1211) It is equipped with limit hole (1213), second clamping jaw (1212) wears out and first clamping jaw from the limit hole (1213) (1211) detent (1214) of a clamping sheet stock is formed;
The most clamp hands (121) connect one to one with most first connectors (122);
Most first connectors (122) are disposed side by side on the first connecting rod (123), second connector (124) it is connect with the first connecting rod (123).
3. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 2, feature exist In the material folding component (12) further includes driving the second clamping jaw (1212) lifting to adjust the detent (1214) height Height adjusting part (1215);One end and described the is arranged on first connector (122) in the height adjusting part (1215) Two clamping jaws (1212) connection.
4. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 3, feature exist In the material clamping robot (10) further includes that the binder component (13) being arranged on first support frame (11) and setting exist The first regulating mechanism (14) on first support frame (11);The pair of material folding component (12) is separately positioned on described first The two sides of regulating mechanism (14).
5. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 4, feature exist In first regulating mechanism (14) includes actuator (141), adjustable plate (142), two guide posts (143), the first guidance set (144) and a pair of second guidance set (145);
The actuator (141) is connect to drive the adjustable plate (142) to do back and forth along first direction with the adjustable plate (142) Movement;
First guidance set (144) includes being arranged on first support frame (11) to lead along the first of first direction setting Rail (1441) and the first sliding block (1442) being set on first guide rail (1441);
The adjustable plate (142) is connect to slide on first guide rail (1441) with first sliding block (1442), described Adjustable plate (142) is equipped with two guide grooves (1421);Two guide groove (1421) is in eight word arrangements;Two guide post (143) and institute It states two guide grooves (1421) to be arranged in a one-to-one correspondence, the guide post (143) wears out from the guide groove (1421) to be connect with described second Part (124) connection, to drive the pair of material folding component (12) close to each other or separate in this second direction;
The pair of second guidance set (145) includes side by side and being disposed on first support frame (11) in a second direction Two second guidance sets (145) at both ends;Each second guidance set (145) includes being arranged in first support frame (11) bottom along the second guide rail (1451) that the second direction is arranged and be set on second guide rail (1451) Two sliding blocks (1452);The both ends of second connector (124) are respectively and positioned at the second of the first support frame (11) both ends Sliding block (1452) connection.
6. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 1, feature exist In further including that the suction manipulator (20) that can be moved back and forth along first direction is arranged in the rack;The suction manipulator (20) include the second support frame (21), setting can be close to each other or separate in a second direction on second support frame (21) A pair of of suction component (22);
Each suction component (22) includes most suckers (221), most third connectors (222), the second connecting rod (223) and the 4th connector (224);The most suckers (221) and the most third connectors (222) are one by one It is correspondingly connected with;Most third connectors (222) are disposed side by side on second connecting rod (223);4th connection Part (224) one end is connect with second connecting rod (223), and the other end is arranged on second support frame (21).
7. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 6, feature exist In the suction manipulator (20) further includes that setting is driven on second support frame (21) on the suction manipulator (20) The elevating mechanism (23) and setting of liter or decline are on second support frame (21) to drive the pair of suction component (22) the second regulating mechanism (24) close to each other or separate.
8. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 7, feature exist In second regulating mechanism (24) includes the first movable screw rod of a pair of of nut (241), the pair of nut (241) of connection (242), control control assembly (243) that the described first movable screw rod (242) rotates and with the described first movable screw rod (242) the third guidance set (244) to be oriented to the suction component (22) is arranged in parallel;
The nut (241) is threaded through in the 4th connector (224);The pair of nut (241) and first activity Screw rod (242) junction is respectively equipped with forward screw thread and reverse thread;Described first movable screw rod (242) is along the second direction Setting passes through setting by described in rotation drive on second support frame (21), and from the 4th connector (224) A pair of of suction component (22) is close to each other or separate in this second direction.
9. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 8, feature exist In, the control assembly (243) include second movable screw rod (2431) of the setting above the described first movable screw rod (242), The first helical gear (2432) for being set on the described first movable screw rod (242) is set in the described second movable screw rod (2431) On the second helical gear (2433), the lever (2434) that is connect with described second movable screw rod (2431) one end;
Described second movable screw rod (2431) is vertically arranged with the described first movable screw rod (242), first helical gear (2432) it is engaged with second helical gear (2433);
The third guidance set (244) includes a pair of the be arranged on second support frame (21) along the second direction Three guide rails (2441) and the third sliding block (2442) being arranged on the third guide rail (2441);The pair of third guide rail (2441) both ends of the 4th connector (224) are separately positioned on;Third sliding block (2442) setting connects the described 4th It is fixedly connected below fitting (224) with the 4th connector (224).
10. the suction clamping device of chip integrated circuit material surface processing equipment according to claim 7, feature exist In the elevating mechanism (23) includes lifting cylinder.
CN201820973564.7U 2018-06-22 2018-06-22 A kind of suction clamping device of chip integrated circuit material surface processing equipment Active CN208385388U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820973564.7U CN208385388U (en) 2018-06-22 2018-06-22 A kind of suction clamping device of chip integrated circuit material surface processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820973564.7U CN208385388U (en) 2018-06-22 2018-06-22 A kind of suction clamping device of chip integrated circuit material surface processing equipment

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Publication Number Publication Date
CN208385388U true CN208385388U (en) 2019-01-15

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CN201820973564.7U Active CN208385388U (en) 2018-06-22 2018-06-22 A kind of suction clamping device of chip integrated circuit material surface processing equipment

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118164256A (en) * 2024-05-15 2024-06-11 宁德时代新能源科技股份有限公司 Cushion transfer device, cushion mounting equipment and battery production system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118164256A (en) * 2024-05-15 2024-06-11 宁德时代新能源科技股份有限公司 Cushion transfer device, cushion mounting equipment and battery production system

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