CN208275023U - A kind of stainless steel horizontal-type evaporator - Google Patents

Abstract

The utility model relates to vaporizer technology field, specifically a kind of stainless steel horizontal-type evaporator, which is characterized in that further include: heating device；Thermal insulation material fitting is arranged outside the heating device；Outer temperature sensor is arranged between the heating device and thermal insulation material；The bottom of pressure vessel is arranged in as slag-drip opening in inlet；Steam outlet, pressure sensor interface, interior temperature sensor interface open end be separately positioned on the top of pressure vessel；On the cover board for the flange that pressure vessel is arranged in its open end of liquid level sensor interface；The pressure sensor interface, interior temperature sensor interface install corresponding pressure sensor, built-in temperature sensor, liquid level sensor in liquid level sensor interface respectively.The utility model is compared with the existing technology, reasonable in design, facilitates thermostatic control, reduces purging cumbersome when more emat sensor, purification process, is convenient for accurate weighing, mentions high control precision, and later period on-line maintenance is convenient.

Description

A kind of stainless steel horizontal-type evaporator

Technical field

The utility model relates to vaporizer technology field, specifically a kind of stainless steel horizontal-type evaporator.

Background technique

In present optical fiber and semiconductor coated film or depositing operation, for the film plating layer or deposit for obtaining high-purity, production Technique generally requires to produce by chemical reaction, and the raw materials for production or doped raw material for participating in chemical reaction are mostly with halide mode In the presence of, and these halide are generally rendered as liquid at normal temperature, and the halide of liquid usually has corrosivity, toxicity or quick-fried Fried property, therefore, the needs based on technique, these halide need in a suitable manner, and safe is converted to gaseous state, this is just A kind of evaporator is needed to realize the liquid gas conversion of raw materials technology, in liquid gas conversion process, keeps holding for evaporimeter internal pressure Continuing constant is the key that evaporator design, meanwhile, in certain operation stages, evaporation capacity can continue with the different processes of technique Variation, needs external heater according to the variation of evaporation capacity, provides the external input heat to match with evaporation endothermic amount, To maintain the constant of evaporimeter internal pressure.

Evaporator is a core component of CVD technique, designs a flow and pressure is all satisfied process requirements, and have The evaporator for maintaining easily the vulnerable electronic components such as the matched heater of evaporator and sensor is optical fiber and semiconductor coated film etc. The major issue that the technical staff of CVD technique must solve.

Utility model content

The purpose of the utility model is to overcome the deficiencies in the prior art, it is more reasonable to provide a kind of design, heater heat transfer High-efficient, external heater is more easy to maintain, and liquid level sensor measuring rod and temperature sensor detection bar do not connect with steam Touching, facilitate the evaporator for carrying out on-line maintenance.

To achieve the above object, a kind of stainless steel horizontal-type evaporator, including pressure vessel, setting are designed on pressure vessel top The flange in portion, which is characterized in that further include:

Heating device fitting is arranged in outside the outer wall of the pressure vessel；

Thermal insulation material, fitting are arranged outside the heating device；

Outer temperature sensor is arranged between the heating device and thermal insulation material, for limiting the highest of heating device Operating temperature prevents overheated heater from damaging；

Inlet, is arranged in the bottom of pressure vessel, and the inlet doubles as slag-drip opening；

The top of the pressure vessel is arranged in steam outlet；

The top of pressure vessel is arranged in pressure sensor interface, open end；

The top of pressure vessel is arranged in interior temperature sensor interface, open end, and bottom end is in closed and is located at institute It states in pressure vessel；

Liquid level sensor interface, open end are arranged on the cover board of the flange of pressure vessel, and bottom end is in closed position In in the pressure vessel；

The pressure sensor interface, interior temperature sensor interface, the corresponding pressure of installation respectively in liquid level sensor interface Force snesor, built-in temperature sensor, liquid level sensor.

The interior temperature sensor interface uses the stainless steel tube of electrolyte polishing.

Using the fixed built-in temperature sensor of silica gel in the stainless steel tube.

The stainless steel tube is located at length >=10mm in pressure vessel.

The liquid level sensor interface uses another stainless steel tube, between the bottom in bottom and pressure vessel between Away from for 5~20mm.

The liquid level sensor uses analog or digital liquid level sensor.

The bottom of the pressure vessel is also successively arranged support plate, weighing sensor.

The inner wall of the pressure vessel uses electrolyte polishing treatment.

The steam quality flowmeter at heat preservation zone is arranged in the steam outlet connection.

The heating device uses heating blanket flexible, is coated on pressure appearance upwards from the bottom of pressure vessel to two sides On the outer wall of device.

The utility model is compared with the existing technology, reasonable in design, facilitates thermostatic control, reduces numerous when more emat sensor Trivial purging, purification process are convenient for accurate weighing, mention high control precision, and later period on-line maintenance is convenient.

Detailed description of the invention

FIG. 1 is a schematic structural view of the utility model.

Fig. 2 is the left view of Fig. 1.

Fig. 3 is the top view of Fig. 1.

Specific embodiment

Now in conjunction with attached drawing, the utility model is further described.

Referring to FIG. 1 to FIG. 3, a kind of stainless steel horizontal-type evaporator, including pressure vessel, the method being arranged at the top of pressure vessel Orchid 7, which is characterized in that further include:

Heating device uses flexible heating device in this case, the outer wall of the pressure vessel 1 is fitted tightly over by 3M glue Outside；

Using 25mm thickness insulating rubber plastic, fitting is arranged outside the heating device；Guarantor in certain the utility model Adiabator is also possible to one kind of the heat-barrier materials such as ceramic fibre；

Outer temperature sensor is arranged between the heating device and thermal insulation material；

The bottom of pressure vessel 1 is arranged in inlet 6, is not only used for feed liquor, but also be used for deslagging；

Steam outlet 2 is welded on the top of the pressure vessel 1, before being located at the top right of pressure vessel 1 in this example Side, technique end are connected by VCR connector with this evaporator；

Pressure sensor interface 3, open end are welded on the top of pressure vessel 1, the top of pressure vessel 1 are located in this example Portion's front left side；Pressure sensor is mounted on pressure vessel by the VCR connector of standard, play the security protection of pressure vessel/ Or the effect of Steam pressure control；The corresponding pressure sensor of installation in it；

Interior temperature sensor interface 4, open end are welded on the top of pressure vessel 1, are located at pressure vessel 1 in this example The left rear side at top, bottom end is in closed and is located in the pressure vessel 1, and closed end is mainly used for separating temperature probe With the direct contact of steam；Interior temperature sensor interface 4 described in this example is located at using the stainless steel tube of electrolyte polishing Length >=10mm in pressure vessel 1.Built-in temperature is answered come stationary phase using being filled with thermally conductive silica gel in the stainless steel tube Sensor, to achieve the purpose that vapor (steam) temperature in rapid detection pressure vessel 1, this method become the maintenance of temperature sensor It is very easy to, purging in cumbersome and very time-consuming discharge and tank, purification must be carried out by reducing replacement built-in temperature sensor Process；

Liquid level sensor interface 5, open end are welded on the cover board of the flange 7 of pressure vessel 1, and bottom end is in closing Shape is located in the pressure vessel 1；The liquid level sensor interface 5 uses another stainless steel tube, bottom and pressure vessel Spacing between interior bottom is 5~20mm；Its closed end is used to separate the measuring rod of liquid level sensor and directly connecing for steam Touching；Which solve the not high disadvantages of control of additive raw material precision outside existing evaporator.The utility model increases analog or digital The liquid level sensor of formula, comparison weighing sensor are influenced by evaporation tube piping drawing force, and liquid level sensor measures not by pressure The influence of container mounting means, measurement accuracy are also higher.So that the inlet amount in external liquids source is more accurate, external benefit is reduced Expect the interference controlled temperature in pressure vessel or pressure, so that temperature or the precision of pressure control in pressure vessel are improved, So that the steam of pressure vessel output is more stable.

High purity liquid is through being heated to a certain constant temperature for liquid by heating device in 6 injection pressure container 1 of inlet Degree, the temperature can be higher than or be lower than the boiling point of liquid, and liquid is evaporated to steam condition, and through 2 row of steam outlet Out.

Further, the bottom of the pressure vessel is also successively arranged support plate 8, weighing sensor, weighs in this example Sensor is influenced as security protection by evaporation tube piping drawing force, and the measurement of liquid level sensor is not pacified by evaporator The influence of dress mode, therefore it cooperates liquid level sensor collective effect to improve measurement accuracy.

Further, the inner wall of the pressure vessel 1 uses electrolyte polishing treatment, in favor of raw material in container 1 and The flowing of its steam.

Further, the steam outlet 2 connects the steam quality flowmeter being arranged at heat preservation zone, realizes to steam Flow is accurately controlled, and realizes the conversion of liquid vapour and conveying of the accurate quantification of high purity liquid.

Preferably, the heating device uses heating blanket flexible, and heating surface posts tenacity viscose, to ensure heating device It is fitted closely with pressure vessel 1, from the outer wall that the bottom of pressure vessel 1 is coated on pressure vessel 1 to two sides upwards.

Preferably, outer temperature sensor uses chip temperature sensor.

The utility model may also include a controller, and each signal end connects one to one the signal of each sensor in this case Output end.

Claims (10)

1. a kind of stainless steel horizontal-type evaporator, including pressure vessel, the flange being arranged at the top of pressure vessel (7), feature exists In, further includes:

Heating device fitting is arranged outside the outer wall of the pressure vessel (1)；

Thermal insulation material, fitting are arranged outside the heating device；

Outer temperature sensor is arranged between the heating device and thermal insulation material, and the highest for limiting heating device works Temperature prevents overheated heater from damaging；

Inlet (6), setting double as slag-drip opening in the bottom of pressure vessel (1), the inlet；

Steam outlet (2) is arranged at the top of the pressure vessel (1)；

Pressure sensor interface (3), open end are arranged at the top of pressure vessel (1)；

Interior temperature sensor interface (4), at the top of pressure vessel (1), bottom end is in closed and is located at for open end setting In the pressure vessel (1)；

Liquid level sensor interface (5), open end are arranged on the cover board of the flange (7) of pressure vessel (1), and bottom end is in closing Shape is located in the pressure vessel (1)；

The pressure sensor interface (3), interior temperature sensor interface (4), the interior installation respectively of liquid level sensor interface (5) are corresponding Pressure sensor, built-in temperature sensor, liquid level sensor.

2. a kind of stainless steel horizontal-type evaporator as described in claim 1, it is characterised in that: the interior temperature sensor interface (4) using the stainless steel tube of electrolyte polishing.

3. a kind of stainless steel horizontal-type evaporator as claimed in claim 2, it is characterised in that: use silicon in the stainless steel tube Glue fixes built-in temperature sensor.

4. a kind of stainless steel horizontal-type evaporator as claimed in claim 2, it is characterised in that: the stainless steel tube is located at pressure Length >=10mm in container (1).

5. a kind of stainless steel horizontal-type evaporator as described in claim 1, it is characterised in that: the liquid level sensor interface (5) another stainless steel tube is used, the spacing between bottom in bottom and pressure vessel is 5~20mm.

6. a kind of stainless steel horizontal-type evaporator as described in claim 1, it is characterised in that: the liquid level sensor uses mould Quasi- formula or digital liquid level sensor.

7. a kind of stainless steel horizontal-type evaporator as described in claim 1, it is characterised in that: the bottom of the pressure vessel is also It is successively arranged support plate (8), weighing sensor.

8. a kind of stainless steel horizontal-type evaporator as described in claim 1, it is characterised in that: the pressure vessel (1) it is interior Wall uses electrolyte polishing treatment.

9. a kind of stainless steel horizontal-type evaporator as described in claim 1, it is characterised in that: steam outlet (2) connection Steam quality flowmeter at heat preservation zone is set.

10. a kind of stainless steel horizontal-type evaporator as described in claim 1, it is characterised in that: the heating device is using flexible Heating blanket, from the outer wall that the bottom of pressure vessel (1) is coated on pressure vessel upwards to two sides.