CN201532009U

CN201532009U - Gas heater

Info

Publication number: CN201532009U
Application number: CN2008201575576U
Authority: CN
Inventors: 李东升; 龚小雷
Original assignee: SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd; SHANGHAI ZHENGFAN SUPERCLEAN TECHNOLOGY Co Ltd
Current assignee: SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd; SHANGHAI ZHENGFAN SUPERCLEAN TECHNOLOGY Co Ltd
Priority date: 2008-12-22
Filing date: 2008-12-22
Publication date: 2010-07-21
Anticipated expiration: 2018-12-22

Abstract

The utility model relates to a gas heater, which is characterized by comprising diaphragm valves, temperature sensors, a pressure gauge, a flowmeter, heat-insulation material, a heating plate, gas coils, a control box, a pouring aluminum ingot and a box body, wherein the gas coils are arranged in the box body, intake pipes of the gas coils are respectively provided with a first diaphragm valve, a first temperature sensor, the pressure gauge and the flowmeter, an outlet pipeline is provided with a second diaphragm valve and a second temperature sensor, and the gas coils are respectively provided with a third temperature sensor and the heating plate, the heating plate is connected with the control box through a wire, the gas coils are fixed through the pouring aluminum ingot, and the heat-insulation material is arranged outside the box body. The gas heater has the advantages of high and stable heating efficiency, safety, reliability and wide use range.

Description

A kind of gas heater

Technical field

The utility model relates to a kind of gas heater, is used for the environment of the big flow gas of terminal delivery requirements, belongs to the gas heater technical field.

Background technology

The mode of heating that traditional special gas heating is mainly taked is modes such as source end (storage container) heating, the heating of transfer valve group and pipeline heating, the shortcoming of these ways is carries out because heating is a environment an opening, though taked certain insulation measure, because the face that heating relates to is very wide, very big of heat loss, be subjected to the restriction of environment also very big, often under the state of the terminal demand of big flow, still there is apparent in view Joule-Thomson effect, the situation that supply falls short of demand often occurs, promptly can't reach the flow of demand.

Summary of the invention

The purpose of this utility model provides and a kind ofly satisfies the big flow gas of terminal and carry requirement, avoids the gas heater of the throttling expansion effect that occurs in the fluid transmission process.

For realizing above purpose, the technical solution of the utility model provides a kind of gas heater, it is characterized in that, by diaphragm valve, temperature sensor, Pressure gauge, flowmeter, insulation material, heating plate, the gas coil pipe, control cabinet, pouring aluminium ingot and casing are formed, the gas coil pipe is located in the casing, be respectively equipped with first diaphragm valve on the inlet tube of gas coil pipe, first temperature sensor, Pressure gauge, flowmeter, outlet conduit is provided with second diaphragm valve and second temperature sensor, be respectively equipped with the three-temperature sensor heating plate at the gas coil pipe, heating plate is connected with control cabinet by electric wire, fix by pouring aluminium ingot between the gas coil pipe, casing is provided with insulation material outward.

The utility model has the advantages that:

1, the efficiency of heating surface is high and stable: apparatus of the present invention are when carrying out the nitrogen test, and are very fast by the gas heating speed of heater, under various pressure and flow rate condition, generally just can complete stability within 5 minutes at desired temperature.Also can confirm in experiment with the nitrogen test, gas is under the condition of various pressure and 0-300SLPM, 40 ℃ of heating-up temperatures, get two points for 50 ℃, it can guarantee the stable conveying of gas fully, and under the condition of high flow rate, heater can be stablized the temperature by its fluid rapidly, very fast making sets value and settles out by the temperature of its fluid is approaching, after starting working and reach design temperature, heater feeds gas again, its temperature that produces for heater is fallen and is controlled in 0.5 ℃, this also is that the good efficiency of heating surface of heater one of embodies, and do not have any dewfall frosting effect and take place, because the volume of heater very little (460mm*203mm*84mm) itself, so the heat loss for the external world is very little, the high-quality insulation material of choosing in addition also is control heater and the extraneous safeguard measure that heat exchange takes place, the mode that adds the control of thermal recovery PLC temperature controller of control module, make the design temperature that reaches that the heating plate of heater can be not only fast but also steady, actual heating-up temperature is no more than 0.1 ℃ with the deviation of design temperature under stable condition;

2, safe and reliable: the heating plate of heater is not directly with the gas contact, gas is by being cast in the Electrochemical polishing of stainless steel gas coil pipe of aluminium ingot the inside, and what the gas coil pipe adopted is seamless pipe, what interface adopted is the form of VCR face sealing, guarantee that gas does not have any leaking, can not play any reaction with heating plate yet, and heating plate itself is high temperature resistant, corrosion-resistant material, the good explosion-proof design of control module also is the assurance of security of system performance, and this designed system can be applied in the inflammable and explosive fluid delivery application fully;

3, the scope of application is wide: the present invention develops for the diversified demand that fluid in the semicon industry is carried, can satisfy the requirement that the big stability of flow of all gases is carried, also can use traditional industry in a large number, its appropriate design can make product adaptation all temps environment.

Description of drawings

Fig. 1 is a kind of gas heater structural representation;

Fig. 2 is the control cabinet structural representation.

The specific embodiment

The utility model is described in further detail below in conjunction with drawings and Examples.

Embodiment

As shown in Figure 1, be a kind of gas heater structural representation, described a kind of gas heater is made up of diaphragm valve 1, temperature sensor 2, Pressure gauge 3, flowmeter 4, insulation material 5, heating plate 6, gas coil pipe 7, control cabinet 8, pouring aluminium ingot 9 and casing 10.

Gas coil pipe 7 is located in the casing 10, be respectively equipped with first diaphragm valve 1, first temperature sensor 2, Pressure gauge 3, flowmeter 4 on the inlet tube of gas coil pipe 7, outlet conduit is provided with second diaphragm valve 11 and second temperature sensor 12, be respectively equipped with three-temperature sensor 13, heating plate 6 at gas coil pipe 7, heating plate 6 is connected with control cabinet 8 by electric wire, fixing by pouring aluminium ingot 9 between gas coil pipe 7, the pouring aluminium ingot 9 outer insulation materials 5 that are provided with.

Described control cabinet 8 is made up of PLC module, switch, power supply, temperature controller, buzzer, alarm lamp, digital displaying meter and output external terminal, and the PLC module is connected with switch, power supply, temperature controller, buzzer, alarm lamp, digital displaying meter and output external terminal respectively.

Described gas coil pipe 7 is an Electrochemical polishing of stainless steel gas coil pipe, and what gas coil pipe 7 adopted is that the pipeline of (EP) is handled in 316L electropolishing, mainly is at the harsh requirement of semicon industry for corrosion-resistant, high pressure resistant (213bar) and high-purity etc.; Pipeline is of a size of 1/2 " inch, mainly in order to satisfy big flow requirements; Coil pipe is divided into two groups, satisfies the demand of uninterrupted supply and makes the source end can not influence the supply of gas when switching; The connected mode of VCR face sealing is adopted at the two ends of coil pipe, and the design leak rate at utmost guarantees the sealing of system at 1*10-9mbar.l/s, makes it that phenomenon of any leakage not take place when some special gas of supply (inflammable, poisonous etc.).

What heating plate 6 adopted is the 5KW ceramic heating flake, its advantage is than traditional silicon rubber heating plate more high temperature resistant (heatproof is more than 900 ℃), the high temperature (700 ℃) that produces when adapting to aluminium ingot cast heating plate fully, the plane heating power density of ceramic heating flake is generally the (30w/cm more than 10 times of silicon rubber heating plate in addition ²), ceramic heating flake heat temperature raising speed is fast, and the uniformity of heating is fine, and the service life of this heating plate is very long.

It is PT100 RTD original paper that first temperature sensor 2, second temperature sensor 12 and three-temperature sensor 13 are all adopted, output 4-20mA analog signal is given the PLC of control module, the temperature-measuring range of temperature sensor is at-50～450 ℃, precision is 0.2%, satisfy fully for the accuracy control over temperature demand, and its thermal response time is very short, can obtain the value of reading of temperature quickly and accurately.

Pouring aluminium ingot is the lapping of gas coil pipe 7, heating plate 6, first temperature sensor 2, second temperature sensor 12 and three-temperature sensor 13, these parts are poured into the aluminium ingot the inside, adopting aluminium mainly is to consider the own good heat-conducting of aluminium (thermal conductivity coefficient of aluminium is 237W/m*k), directly to get well a lot (stainless thermal conductivity coefficient is 80W/m*k) than traditional with the way of heating material heating stainless steel pipes or container, the weight of heater be can significantly reduce in addition for heater integral body, transportation and on-the-spot the installation are convenient to.

What insulation material 5 adopted is the silicon rubber heat-preservation cotton, and thickness is 1cm, is attached to the aluminium ingot periphery, can play very excellent function of heat insulation.

Control cabinet 8 is necessary component of heater, it plays crucial effects for the performance and the embodiment of heater usefulness, control cabinet 8 outsourcings, adopt explosion-proof design, control cabinet 8 hardware components are by temperature control instrument, the PLC module, power supply, buzzer, warning lamp and switch are formed, the PLC module respectively with switch, power supply, temperature controller, buzzer, alarm lamp, digital displaying meter is connected with the output external terminal, as shown in Figure 2, be provided with Z-Purge (inert purge) mouthful at cabinet, software section is made of the PLC program, this control cabinet 8 adopts single channel 5KW power output, and, make and embody differential between the efficiency of heating surface and the set temperature value by PLC control, the relation of integration makes and can evenly control for heating-up temperature, and guarantee that by the temperature-compensating balance heating-up temperature can be stabilized in set point when reaching set point, do not produce skew.

Control cabinet 8 is installed near the heater nearby (comprises the connection of cable and TEMP lead-in wire), and need terminal that the power supply of 220V is provided.If fluid is a flammable explosive gas, control cabinet 8 need provide explosion-proof source purge gas, is generally drying nitrogen or dried compressed air, and it is connected to control module, and pressure is at 10-20mmH ₂O keeps the control module internal positive pressure.Open the power switch of control cabinet 8, the temperature value of required heating is set, the general recommendations heating-up temperature is 40 ℃ (but can not above 50 ℃), and heater promptly begins heating.The valve of opening accommodating fluid after actuator temperature to be heated is stable begins air feed.

Claims

1. gas heater, it is characterized in that, by diaphragm valve (1), temperature sensor (2), Pressure gauge (3), flowmeter (4), insulation material (5), heating plate (6), gas coil pipe (7), control cabinet (8), pouring aluminium ingot (9) and casing (10) are formed, gas coil pipe (7) is located in the casing (10), be respectively equipped with first diaphragm valve (1) on the inlet tube of gas coil pipe (7), first temperature sensor (2), Pressure gauge (3), flowmeter (4), outlet conduit is provided with second diaphragm valve (11) and second temperature sensor (12), be respectively equipped with three-temperature sensor (13) at gas coil pipe (7), heating plate (6), heating plate (6) is connected with control cabinet (8) by electric wire, fix by pouring aluminium ingot between gas coil pipe (7), casing is provided with insulation material (5) outward.

2. a kind of gas heater according to claim 1, it is characterized in that, described control cabinet (8) is made up of PLC module, switch, power supply, temperature controller, buzzer, alarm lamp, digital displaying meter and output external terminal, and the PLC module is connected with switch, power supply, temperature controller, buzzer, alarm lamp, digital displaying meter and output external terminal respectively.

3. a kind of gas heater according to claim 1 is characterized in that, described gas coil pipe (7) is an Electrochemical polishing of stainless steel gas coil pipe.