CN208271850U - A kind of device using trip fixed cover and carrier ontology - Google Patents
A kind of device using trip fixed cover and carrier ontology Download PDFInfo
- Publication number
- CN208271850U CN208271850U CN201821003058.1U CN201821003058U CN208271850U CN 208271850 U CN208271850 U CN 208271850U CN 201821003058 U CN201821003058 U CN 201821003058U CN 208271850 U CN208271850 U CN 208271850U
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- CN
- China
- Prior art keywords
- trip
- hole
- carrier ontology
- carrier
- upper cover
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Abstract
The utility model discloses a kind of devices using trip fixed cover and carrier ontology, including carrier ontology and upper cover compatible with carrier ontology, crystal grain is distributed in rectangular array on carrier ontology, the both ends of carrier body length direction are symmetrically arranged with the first trip, and the both ends of width direction are symmetrically arranged with the second trip；The bottom of upper cover is equipped with the first groove being adapted to the first trip and the second groove being adapted to the second trip；Four angles of upper cover bottom are equipped with the first hole, and the top of the first hole is equipped with the first magnet, and the bottom of the first magnet is equipped with the stainless steel ball being fastened in the first hole；Four angles of carrier ontology are equipped with the second hole corresponding with the first hole, and the bottom of the second hole is equipped with the second magnet.The structure that the utility model is cooperated by trip and groove cooperates the actuation of magnet, and upper cover and carrier body cap close closely, and it is convenient to pick and place, it is therefore prevented that the significant displacement of crystal grain.
Description
Technical field
The utility model relates to semiconductor wet process apparatus fields, and in particular to a kind of to use trip fixed cover and hold
The device of load plate ontology.
Background technique
If crystal grain must carry out wet process processing after encapsulation cutting again, can only single single progress, can not automate batch
Amount processing, not only time-consuming is taken a lot of work and quality yield is bad.Therefore, the crystal grain of batch processeds a large amount of for needs, is usually adopted at present
Means are to add upper cover on the top of carrier, then carrier is transferred to specific carrier and carries out chemical microetch.But
Existing upper cover only covers on carrier, lacks the fixed structure to crystal grain, so that the fixation defective tightness of carrier, brilliant
Grain is easy to happen displacement, causes the yield of crystal grain in transfer or etching process lower.Therefore, it is necessary to consolidate to upper cover and carrier
Determine structure to be improved, prevents the significant displacement of crystal grain.
Utility model content
In order to solve the above technical problems, the purpose of this utility model is to provide it is a kind of using trip fixed cover with
The device of carrier ontology, the structure cooperated by trip and groove cooperate the actuation of magnet, and upper cover and carrier body cap close
Closely, it is convenient to pick and place, it is therefore prevented that the significant displacement of crystal grain.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of device using trip fixed cover and carrier ontology, including carrier ontology and with carrier ontology phase
The upper cover of adaptation, crystal grain is distributed in rectangular array on carrier ontology, and the both ends of the carrier body length direction are symmetrically set
There is the first trip, the both ends of width direction are symmetrically arranged with the second trip；The bottom of upper cover is equipped with first be adapted to the first trip
Groove and the second groove being adapted to the second trip；
Four angles of the upper cover bottom are equipped with the first hole, and the top of the first hole is equipped with the first magnet, the first magnetic
The bottom of iron is equipped with the stainless steel ball being fastened in the first hole；
Four angles of the carrier ontology are equipped with the second hole corresponding with the first hole, and the bottom of the second hole is equipped with
Second magnet.
As further program of the utility model, first trip and the first groove gap cooperate, second card
Tenon and the second groove gap cooperate.
As further program of the utility model, the depth of first hole is greater than the depth of the second hole.
As further program of the utility model, the diameter of first hole is 5-10mm, stainless steel ball it is straight
Diameter is 1-2mm smaller than the first hole.
As further program of the utility model, the limit for limiting to crystal grain is arranged in parallel on the upper lid
Plate is equipped with limiting slot between limit plate.
The utility model has the beneficial effects that
1, the device using trip fixed cover and carrier ontology of the utility model, when installation by the first trip with
The engaging of first groove, the second trip engage with the second groove, while the first magnet and the second magnet are round to stainless steel when covering conjunction
The actuation of pearl, so that upper cover and carrier body cap close closely, the crystal grain of rectangular array distribution is limited, upper cover and carrier
Ontology picks and places convenient, it is therefore prevented that the significant displacement of crystal grain.
2, the diameter of the first hole is greater than the diameter of stainless steel ball, so that stainless steel ball is accommodated in the first hole not
Can fall, by when upper cover and carrier body cap close the first magnet and the second magnet stainless steel ball is inhaled simultaneously
It closes, so that upper cover and the fixation of carrier ontology are even closer, only need to gently be extracted when taking out upper cover, make stainless steel ball and first
Magnet is attracted.
Detailed description of the invention
The utility model will be further described below with reference to the accompanying drawings.
Fig. 1 is structural schematic diagram when the utility model upper cover and carrier ontology are unassembled.
Fig. 2 is the top view of the utility model upper cover.
Fig. 3 is the bottom view of the utility model upper cover.
Fig. 4 is the top view of the utility model carrier ontology.
Fig. 5 is the cross section structure schematic diagram of the utility model the first hole and the second hole.
In figure: 1, carrier ontology, 2, upper cover, 3, crystal grain, the 11, first trip, the 12, second trip, the 13, second hole,
14, the second magnet, the 21, first groove, the 22, second groove, the 23, first hole, 24, stainless steel ball, 25, limit plate, 26, limit
Position slot, the 27, first magnet.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
All other embodiment obtained, fall within the protection scope of the utility model.
It please refers to shown in Fig. 1, Fig. 3, Fig. 4, present embodiments provides and a kind of use trip fixed cover and carrier ontology
Device, including carrier ontology 1 and upper cover 2 compatible with carrier ontology 1, rectangular array distribution on carrier ontology 1
There is crystal grain 3.Carrier ontology 1 is identical as the size of upper cover 2, length 330-350mm, width 140-150mm.Wherein, it holds
The both ends of 1 length direction of load plate ontology are symmetrically arranged with the first trip 11, and the both ends of width direction are symmetrically arranged with the second trip 12.On
The bottom of lid 2 is equipped with the first groove 21 being adapted to the first trip 11 and the second groove 22 being adapted to the second trip 12.The
21 clearance fit of one trip 11 and the first groove, 22 clearance fit of the second trip 12 and the second groove.
As shown in Figure 1, shown in Figure 5, four angles of 2 bottom of upper cover are equipped with the first hole 23, and the top of the first hole 23 is equipped with
First magnet 27, the bottom of the first magnet 27 are equipped with the stainless steel ball 24 being fastened in the first hole 23.Carrier ontology 1
Four angles are equipped with second hole 13 corresponding with the first hole 23, and the bottom of the second hole 13 is equipped with the second magnet 14.First hole
The depth in hole 23 is greater than the depth of the second hole 13.The diameter of first hole 23 is 5-10mm, the diameter ratio of stainless steel ball 25
The small 1-2mm of first hole 23.
As shown in Fig. 2, being arranged in parallel with the limit plate 25 for limiting to crystal grain 3 in upper cover 2, it is equipped between limit plate 25
Limiting slot 26.
The present embodiment carrier ontology 1 and the specific assembling process of upper cover 2 are as follows: by the first trip 11 and the first groove 21
Engaging, the second trip 12 engage with the second groove 22, while the first magnet 27 and the second magnet 14 are round to stainless steel when covering conjunction
Pearl 24, which be attracted, generates suction, so that upper cover 2 and the lid conjunction of carrier ontology 1 are close, the position of limit plate 25 is in rectangle battle array
The surface of the crystal grain 3 of column distribution, so that crystal grain 3 obtains the limit of limit plate 25；When needing to take out upper cover 2, only need to gently by
Upper cover 2 is extracted along the direction of the first trip 11, the second trip 12, is made 24 return of stainless steel ball and is inhaled with the first magnet 27
It closes.
Above content is only to the utility model structure example and explanation, the technology people of affiliated the art
Member makes various modifications or additions to the described embodiments or is substituted in a similar manner, without departing from reality
With novel structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (5)
1. a kind of device using trip fixed cover and carrier ontology, including carrier ontology (1) and with carrier ontology
(1) compatible upper cover (2), crystal grain (3) are distributed in rectangular array on carrier ontology (1), which is characterized in that the carrier
The both ends of ontology (1) length direction are symmetrically arranged with the first trip (11), and the both ends of width direction are symmetrically arranged with the second trip (12)；
The bottom of upper cover (2) is equipped with the first groove (21) being adapted to the first trip (11) and be adapted to the second trip (12) second
Groove (22)；
Four angles of upper cover (2) bottom are equipped with the first hole (23), and the top of the first hole (23) is equipped with the first magnet
(27), the bottom of the first magnet (27) is equipped with the stainless steel ball (24) being fastened in the first hole (23)；
Four angles of the carrier ontology (1) are equipped with the second hole (13) corresponding with the first hole (23), the second hole
(13) bottom is equipped with the second magnet (14).
2. the device according to claim 1 using trip fixed cover and carrier ontology, which is characterized in that described
One trip (11) and the first groove (21) clearance fit, second trip (12) and the second groove (22) clearance fit.
3. the device according to claim 1 using trip fixed cover and carrier ontology, which is characterized in that described
The depth of one hole (23) is greater than the depth of the second hole (13).
4. the device according to claim 1 using trip fixed cover and carrier ontology, which is characterized in that described
The diameter of one hole (23) is 5-10mm, and the diameter of stainless steel ball (24) is 1-2mm smaller than the first hole (23).
5. the device according to claim 1 using trip fixed cover and carrier ontology, which is characterized in that on described
It is arranged in parallel with the limit plate (25) for limiting to crystal grain (3) on lid (2), is equipped with limiting slot (26) between limit plate (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821003058.1U CN208271850U (en) | 2018-06-27 | 2018-06-27 | A kind of device using trip fixed cover and carrier ontology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821003058.1U CN208271850U (en) | 2018-06-27 | 2018-06-27 | A kind of device using trip fixed cover and carrier ontology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208271850U true CN208271850U (en) | 2018-12-21 |
Family
ID=64690250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821003058.1U Expired - Fee Related CN208271850U (en) | 2018-06-27 | 2018-06-27 | A kind of device using trip fixed cover and carrier ontology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208271850U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113682627A (en) * | 2021-08-25 | 2021-11-23 | 苏州长光华芯光电技术股份有限公司 | Storage device |
-
2018
- 2018-06-27 CN CN201821003058.1U patent/CN208271850U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113682627A (en) * | 2021-08-25 | 2021-11-23 | 苏州长光华芯光电技术股份有限公司 | Storage device |
| CN113682627B (en) * | 2021-08-25 | 2022-11-04 | 苏州长光华芯光电技术股份有限公司 | Storage device |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181221 Termination date: 20210627 |
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| CF01 | Termination of patent right due to non-payment of annual fee |