CN203502575U - Integrated three dimensional Hall probe - Google Patents
Integrated three dimensional Hall probe Download PDFInfo
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- CN203502575U CN203502575U CN201320572942.8U CN201320572942U CN203502575U CN 203502575 U CN203502575 U CN 203502575U CN 201320572942 U CN201320572942 U CN 201320572942U CN 203502575 U CN203502575 U CN 203502575U
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- hall
- probe
- hall elements
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- 239000000523 sample Substances 0.000 title claims abstract description 34
- 239000011159 matrix material Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 241000218202 Coptis Species 0.000 claims description 3
- 235000002991 Coptis groenlandica Nutrition 0.000 claims description 3
- 238000009413 insulation Methods 0.000 abstract 1
- 230000006698 induction Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model discloses an integrated three dimensional Hall probe. The integrated three dimensional Hall probe includes a probe base body, and three Hall elements which are respectively mounted on three vertical surfaces of the probe base body, wherein the three Hall elements are pasted on the three vertical surfaces of the probe base body of an insulation cubic column, whose size is 0.02mm * 0.02mm *0.02 mm, and sizes of the three Hall elements are 0.015 mm * 0.015 mm * 0.015 mm. The integrated three dimensional Hall probe has advantages of being simple in structure, being convenient to install, and being capable of obtaining a space distribution of a vector magnetic field at the surface of a small magnet.
Description
Technical field
The utility model relates to magnetic flux fields of measurement, especially can accurately measure a three-dimensional hall probe for the vector actual value of tiny magnets Surface field, comprise three Hall elements of three the orthogonal lip-deep 0.015mm of being of a size of * 0.015mm * 0.015mm that are installed on the insulator cube rod probe matrix that is of a size of 0.02mm * 0.02mm * 0.02mm; These three Hall elements all comprise one for connect these three Hall elements and connect the constant current source wiring of peripheral constant-current circuit and two two limits vertical with constant current source wiring that are arranged at each Hall element on and for being connected the substrate lead-in wire of pin substrate.
Background technology
In the past, measure magnetic field instrument and be generally gaussmeter or teslameter.Its probe internally provided Hall element, probe is moved to magnetic field environment and rotates to appropriate location, on Hall element, can produce Hall voltage signal, by instrument built-in circuit and Single Chip Microcomputer (SCM) system, signal be carried out after Treatment Analysis, in the size that shows the magnetic induction density of screen display institute measuring magnetic field.But the gaussmeter of this type and teslameter can not be measured the direction of magnetic induction density, make troubles to application.
For solving above-mentioned technical matters, China Patent Publication No. is the patent of the micro-magnetic instrument probe of three-dimensional by name of 201716405U, the disclosed technical scheme of this patent is: the micro-magnetic instrument probe of a kind of three-dimensional, comprise three Hall elements and a probe matrix, described three Hall elements are arranged on respectively three orthogonal surfaces of probe matrix, Hall element is welded on circuit board, and circuit board is contained on probe matrix by interference fit.When external magnetic field is vertically passed Hall element sheet, if pass to steady current to Hall element, at the output pin of Hall element, can export Hall voltage signal.Hall voltage carries out calculus of differences with the voltage reference of making in advance, and each channel signal of gained is selected through multiway analog switch timesharing, by operational amplifier and A/D converter, enters Single Chip Microcomputer (SCM) system and carries out Treatment Analysis, calculates measurement result.This technical scheme simple in structure, easy for installation, makes micro-magnetic instrument can not only measure the size of the magnetic induction density in magnetic field, and can measure easily the direction in arbitrary small magnetic field, space.
Utility model content
The purpose of this utility model is to overcome prior art above shortcomings, and a kind of three-dimensional hall probe of integral type of measuring the vector value of small magnet Surface field is provided.
The utility model is achieved through the following technical solutions: the three-dimensional hall probe of a kind of integral type, comprise a probe matrix and be installed on three Hall elements in three vertical surface of this probe matrix, described three Hall elements are pasted on three orthogonal surfaces of the insulator cube rod probe matrix that is of a size of 0.02mm * 0.02mm * 0.02mm, and described three Hall elements are of a size of 0.015mm * 0.015mm * 0.015mm; Three described Hall elements all comprise one for connect these three Hall elements and connect the constant current source wiring of peripheral constant-current circuit and two two limits vertical with constant current source wiring that are arranged at each Hall element on and for being connected the substrate lead-in wire of pin substrate.
During enforcement, two described connecting lead wires are connected on described pin substrate by gold thread.
During enforcement, described Hall element is processed by GaAs wafer.
The beneficial effects of the utility model are: three Hall elements are integrated on GaAs wafer, realize the microminiaturization of hall probe, can accurately measure the space distribution of small magnet surface Vector Magnetic Field.The utility model is simple in structure, easy for installation.
Accompanying drawing explanation
Fig. 1 the utility model three-dimensional structure diagram;
In figure: 1 constant current source, 2 Hall elements, 3 probe matrixes.
Embodiment
Below in conjunction with specific embodiment and Figure of description, the utility model is further elaborated and is illustrated:
As shown in Figure 1: the three-dimensional hall probe of a kind of integral type, comprise a probe matrix 3 and be installed on three Hall elements 2 in three vertical surface of this probe matrix 3, described three Hall elements 2 are pasted on three orthogonal surfaces of the insulator cube rod probe matrix 3 that is of a size of 0.02mm * 0.02mm * 0.02mm, and described three Hall elements 2 are of a size of 0.015mm * 0.015mm * 0.015mm; Three described Hall elements 2 all comprise one for connect these three Hall elements and connect constant current source 1 wiring of peripheral constant-current circuit and two two limits vertical with constant current source 1 wiring that are arranged at each Hall element on and for being connected the substrate lead-in wire of pin substrate.
During enforcement, two described connecting lead wires are connected on described pin substrate by gold thread.
During enforcement, described Hall element is processed by GaAs wafer.
The announcement of book and instruction according to the above description, the utility model those skilled in the art can also change and revise above-mentioned embodiment.Therefore, the utility model is not limited to embodiment disclosed and described above, to modifications and changes more of the present utility model, also should fall in the protection domain of claim of the present utility model.In addition,, although used some specific terms in this instructions, these terms just for convenience of description, do not form any restriction to the utility model.
Claims (3)
1. the three-dimensional hall probe of an integral type, comprise a probe matrix and be installed on three Hall elements in three vertical surface of this probe matrix, it is characterized in that: described three Hall elements are pasted on three orthogonal surfaces of the insulator cube rod probe matrix that is of a size of 0.02mm * 0.02mm * 0.02mm, and described three Hall elements are of a size of 0.015mm * 0.015mm * 0.015mm;
Three described Hall elements all comprise one for connect these three Hall elements and connect the constant current source wiring of peripheral constant-current circuit and two two limits vertical with constant current source wiring that are arranged at each Hall element on and for being connected the substrate lead-in wire of pin substrate.
2. the three-dimensional hall probe of a kind of integral type as claimed in claim 1, is characterized in that: two described connecting lead wires are connected on described pin substrate by gold thread.
3. the three-dimensional hall probe of a kind of integral type as described in claim 1 to 2 any one, is characterized in that: described Hall element is processed by GaAs wafer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201320572942.8U CN203502575U (en) | 2013-09-12 | 2013-09-12 | Integrated three dimensional Hall probe |
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CN201320572942.8U CN203502575U (en) | 2013-09-12 | 2013-09-12 | Integrated three dimensional Hall probe |
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CN203502575U true CN203502575U (en) | 2014-03-26 |
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CN201320572942.8U Expired - Lifetime CN203502575U (en) | 2013-09-12 | 2013-09-12 | Integrated three dimensional Hall probe |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114624637A (en) * | 2022-04-21 | 2022-06-14 | 西南交通大学 | Permanent magnet track three-dimensional magnetic field scanning device and scanning method thereof |
-
2013
- 2013-09-12 CN CN201320572942.8U patent/CN203502575U/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114624637A (en) * | 2022-04-21 | 2022-06-14 | 西南交通大学 | Permanent magnet track three-dimensional magnetic field scanning device and scanning method thereof |
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Granted publication date: 20140326 |
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Addressee: MAGNET LAB ELECTRONIC (SHENZHEN) CO.,LTD. Person in charge of patentsThe principal of patent Document name: Notice of Termination of Patent Rights |
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DD01 | Delivery of document by public notice |