CN208271847U - A kind of silicon wafer loading frame - Google Patents
A kind of silicon wafer loading frame Download PDFInfo
- Publication number
- CN208271847U CN208271847U CN201820747970.1U CN201820747970U CN208271847U CN 208271847 U CN208271847 U CN 208271847U CN 201820747970 U CN201820747970 U CN 201820747970U CN 208271847 U CN208271847 U CN 208271847U
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- support rod
- fan
- annular groove
- support bar
- shaped annular
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Abstract
The utility model belongs to technical field of electronic components, is related to a kind of silicon wafer loading frame；Its structure includes connecting plate and support rod；Connecting plate is symmetrical set, and fan-shaped annular groove and rectangle card slot are symmetrically arranged on each connecting plate, and card slot is evenly distributed on fan-shaped annular groove；There are four support rods for setting between connecting plate；Support rod includes upper support bar and lower support bar；Upper support bar is applied in fan-shaped annular groove close to the side on top；Lower support bar is applied in fan-shaped annular groove close to the side of bottom end；The both ends of each support rod are provided with the fixture block used with pocket matches；Each support rod medial surface is evenly arranged with the triangle slot for inlay card chip；The loading frame realizes the loading of different wafer sizes, and support rod can position rapidly, guarantees that triangle slot is symmetrical above and below, the fixture block being detachably connected on support rod makes loading frame convenient to disassembly, and wafer-load amount can be adjusted according to actual needs, and it is easy to operate, have a wide range of application.
Description
Technical field
The utility model belongs to technical field of electronic components, is related to a kind of silicon wafer loading frame, especially a kind of to be applicable in
In the silicon wafer loading frame that circular wafer loads.
Background technique
Silicon wafer is the important materials for making integrated circuit, by carrying out the means such as photoetching, ion implanting to silicon wafer, can be made
At various semiconductor devices, there is surprising operational capability using chip made of silicon wafer, scientific and technical development constantly pushes
The development of the technologies such as semiconductor, automation and computer, silicon wafer is very widely used, is related to aerospace, industry, agricultural
With the multiple fields such as national defence.The complex manufacturing technology of silicon wafer is higher to its quality requirement, wherein wafer cleaning is production chip
One of important step, be the key that obtain high quality wafer, wafer-load frame is in cleaning process, for loading chip
Device.Currently, existing wafer-load frame is not easy to mount and dismount, it is inconvenient for use, and the chip of sizes cannot be placed.
Utility model content
The goal of the invention of the utility model is to overcome disadvantage of the existing technology, proposes to design a kind of silicon wafer loading
Frame facilitates adjusting and disassembly to solve the above problems, and can adapt to have a wide range of application in the loading of different wafer sizes.
The utility model relates to silicon wafer loading frame, main structure includes connecting plate and support rod；The connection
Plate is symmetrical set, and fan-shaped annular groove and rectangle card slot are symmetrically arranged on each connecting plate, and card slot is evenly distributed on sector
On annular groove；There are four support rods for setting between connecting plate；Support rod includes upper support bar and lower support bar；Upper support bar runs through
In fan-shaped annular groove close to the side on top；Lower support bar is applied in fan-shaped annular groove close to the side of bottom end；Each support rod
Both ends be provided with the fixture block used with pocket matches；Each support rod medial surface is evenly arranged with three for inlay card chip
Angle slot.
Further, the fixture block is provided with convex block close to the side of support boom end, when fixture block is buckled in card completely
When in slot, convex block is close to connecting plate lateral surface, for being positioned to fixture block, and convenient affected fixture block manually.
Further, described support rod one end and fixture block are fixedly installed, and the other end and fixture block detachable connection use
When, the fixture block being fixedly connected with support rod is buckled in card slot first, then the fixture block of the other end is buckled in card slot again,
Rapid positioning of the bar easy to support in fan-shaped annular groove, ensure that upper support bar with it is right above and below the triangle slot on lower support bar
Claim, is conducive to load chip, and the position with the fixture block of support rod detachable connection on support rod can be adjusted, to adjust
The distance between two connecting plates are saved, the chip of different number can be loaded as needed, using flexible is easy to operate.
Further, the upper support bar is two, and in same level；Lower support bar is two, and is located
In the firm placement in same level, being conducive to chip.
The utility model compared with prior art, has the advantage that being equipped with for fan-shaped annular groove and card slot, so that
Support rod facilitates installation and adjusting, realizes the loading of different wafer sizes；Fixture block and convex block of the fixed card buckle on support rod
Be equipped with, support rod is positioned rapidly, guarantee triangle slot it is symmetrical above and below, be detachably connected on support rod
Fixture block makes loading frame convenient to disassembly, and can adjust wafer-load amount according to actual needs；Its overall structure is simple, if
Rationally, application environment is good for meter.
Detailed description of the invention
Fig. 1 is the main view of the utility model；
Fig. 2 is the right view of the utility model；
Fig. 3 is the top view of the utility model；
Wherein, 1 connecting plate, 2 support rods, 3 fan-shaped annular grooves, 4 card slots, 5 fixture blocks, 6 triangle slots, 7 convex blocks, support on 21
Bar, 22 lower support bars.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.Therefore, below to attached
The detailed description of the embodiments of the present invention provided in figure is not intended to limit the range of claimed invention,
But it is merely representative of the selected embodiment of the utility model.Based on the embodiments of the present invention, ordinary skill people
Member's every other embodiment obtained without making creative work, belongs to the model of the utility model protection
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
Below by specific embodiment and in conjunction with attached drawing, the utility model is described in further detail.
Embodiment 1:
Silicon wafer loading frame described in the present embodiment, main structure include connecting plate 1 and support rod 2；The connection
Plate 1 is symmetrical set, and fan-shaped annular groove 3 and rectangle card slot 4 are symmetrically arranged on each connecting plate 1, and card slot 4 is evenly distributed on
On fan-shaped annular groove 3；There are four support rods 2 for setting between connecting plate 1；Support rod 2 includes upper support bar 21 and lower support bar 22；
Upper support bar 21 is applied in fan-shaped annular groove 3 close to the side on top；Lower support bar 22 is applied in fan-shaped annular groove 3 close to bottom end
Side；The both ends of each support rod 2 are provided with the fixture block 5 for matching and using with card slot 4；Each 2 medial surface of support rod is uniform
It is provided with the triangle slot 6 for inlay card silicon wafer.
Fixture block 5 described in the present embodiment is provided with convex block 7 close to the side of 2 end of support rod, when fixture block 5 is buckled in completely
When in card slot 4, convex block 7 is close to 1 lateral surface of connecting plate, for being positioned to fixture block 5, and convenient affected fixture block 5 manually.
2 one end of support rod described in the present embodiment and fixture block 5 are fixedly installed, and the other end and 5 detachable connection of fixture block make
The fixture block 5 being fixedly connected with support rod 2 is buckled in card slot 4 first, is then again buckled in the fixture block of the other end 5 by the used time
In card slot 4, rapid positioning of the bar 2 easy to support in fan-shaped annular groove 3 be ensure that on upper support bar 21 and lower support bar 22
Triangle slot 6 is symmetrical above and below, is conducive to load chip, and can adjust and support with the fixture block 5 of 2 detachable connection of support rod
Position on bar 2 can load the chip of different number as needed, use spirit to adjust the distance between two connecting plates 1
It is living, it is easy to operate.
Upper support bar 21 described in the present embodiment is two, and in same level；Lower support bar 22 is two, and
In same level, be conducive to the firm placement of chip.
When the present embodiment is in use, two upper support bars 21 are applied in fan-shaped annular groove 3, not according to wafer size
Together, the card slot 4 of different height is selected, then the fixture block 5 at each 21 both ends of upper support bar is buckled in respective card slot 4, it will be upper
21 position of support rod is fixed, so that two upper support bars 21 are in same level, will be located at two according to above-mentioned same step
Two lower support bars 22 of the lower section of a upper support bar 21 are fixed in fan-shaped annular groove 3；Chip is inserted in triangle slot 6 vertically
In, the setting of triangle slot 6 reduces the contact area of loading frame and chip, improves wafer cleaning effect, upper support bar 21
It can be fixed in the card slot 4 of different height according to the size of chip with lower support bar 22；It is easy to adjust, have a wide range of application.
Above-mentioned specific embodiment is only the specific case of the utility model, and the scope of patent protection of the utility model includes
But it is not limited to the product form and style of above-mentioned specific embodiment, it is any to meet the utility model claims book and any institute
Belong to the appropriate changes or modifications that the those of ordinary skill of technical field does it, should all fall into the patent protection of the utility model
Range.
Claims (4)
1. a kind of silicon wafer loading frame, main structure includes connecting plate (1) and support rod (2)；It is characterized by: the company
Fishplate bar (1) is symmetrical set, and is symmetrically arranged with fan-shaped annular groove (3) and rectangle card slot (4), card slot on each connecting plate (1)
(4) it is evenly distributed on fan-shaped annular groove (3)；There are four support rod (2) for setting between connecting plate (1)；Support rod (2) includes upper
Support rod (21) and lower support bar (22)；Upper support bar (21) is applied in the side of fan-shaped annular groove (3) close to top；Lower support
Bar (22) is applied in the side of fan-shaped annular groove (3) close to bottom end；The both ends of each support rod (2) are provided with and card slot (4)
Match the fixture block (5) used；Each support rod (2) medial surface is evenly arranged with the triangle slot (6) for inlay card silicon wafer.
2. silicon wafer loading frame according to claim 1, it is characterised in that: the fixture block (5) is held close to support rod (2)
The side in portion is provided with convex block (7).
3. silicon wafer loading frame according to claim 1, it is characterised in that: described support rod (2) one end and fixture block (5)
Fixed setting, the other end and fixture block (5) detachable connection.
4. silicon wafer loading frame according to claim 1, it is characterised in that: the upper support bar (21) is two, and
In same level；Lower support bar (22) is two, and in same level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820747970.1U CN208271847U (en) | 2018-05-19 | 2018-05-19 | A kind of silicon wafer loading frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820747970.1U CN208271847U (en) | 2018-05-19 | 2018-05-19 | A kind of silicon wafer loading frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208271847U true CN208271847U (en) | 2018-12-21 |
Family
ID=64684278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820747970.1U Active CN208271847U (en) | 2018-05-19 | 2018-05-19 | A kind of silicon wafer loading frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208271847U (en) |
-
2018
- 2018-05-19 CN CN201820747970.1U patent/CN208271847U/en active Active
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