CN208255271U - Probe - Google Patents
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- CN208255271U CN208255271U CN201820645167.7U CN201820645167U CN208255271U CN 208255271 U CN208255271 U CN 208255271U CN 201820645167 U CN201820645167 U CN 201820645167U CN 208255271 U CN208255271 U CN 208255271U
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Abstract
The utility model relates to piezoelectric material detection technique field more particularly to a kind of probes.The probe of the utility model includes the piezo chips and detection probe of insulation connection, the piezo chips include two opposite surfaces, one of surface earthing can detect the voltage signal generated respectively on the ungrounded surface of piezoelectricity membrane sample and the ungrounded surface of piezo chips when the detection probe touches piezoelectricity membrane sample.The probe of the utility model can a surface based on piezoelectric film go to carry out the detection of piezoelectric parameter, without piezoelectric film is destroyed, operate fairly simple, detection efficiency is high.
Description
[technical field]
The utility model relates to piezoelectric material detection technique field more particularly to a kind of probes.
[background technique]
Piezoelectric material is to be under pressure when acting on the crystalline material of voltage occur in both ends surface parts, and piezoelectric material is most heavy
The material parameter wanted is exactly piezoelectric parameter D33。
The mode of the piezoelectric parameter of existing measurement piezoelectric material is all by by piezoelectric film frustillatum, to small bulk
The upper and lower surface of piezoelectric film apply certain power, piezoelectricity is calculated by voltage that test piezoelectric film upper and lower surface generates
The piezoelectric parameter D of film33.Therefore, it requires to destroy piezoelectricity membrane sample when detecting every time, and has to the upper following table in piezoelectric film
Face simultaneously applied force, operating process is comparatively laborious, can only individually position is gone successively to detect one by one, piezoelectricity can not be directed to simultaneously
Multiple positions of film are detected, and detection efficiency is low, and testing result is not also very accurate.
[utility model content]
In view of the above-mentioned problems, the utility model provides a kind of probe.
The scheme that the utility model solves technical problem is to provide a kind of probe, after being used to test piezoelectricity membrane sample pressure
The voltage signal of generation, one surface earthing of piezoelectricity membrane sample, the probe include the piezo chips and detection probe of connection,
The piezo chips include two opposite surfaces, one of surface earthing, when the detection probe appoints piezoelectricity membrane sample
When one surface presses, reaction force produced by piezoelectric film, which is transmitted to piezo chips by detection probe, makes the ungrounded of piezoelectricity membrane sample
Voltage signal can be generated on surface and the ungrounded surface of piezo chips respectively and is detected by probe.
Preferably, the probe further comprises reference signal line and sample signal line, the sample signal line and piezoelectricity
The ungrounded surface of membrane sample connects, and the ungrounded surface of the reference signal line and piezo chips connects, the sample signal
Line and reference signal line are also used to connect with external data processing device.
Preferably, the probe further includes insulating layer, and the insulating layer is wrapped in reference signal line, piezo chips, detection
The periphery of probe and sample signal line, and connected between piezo chips and detection probe by insulating layer.
Preferably, the probe further comprises metal shell, and the metal shell is hollow structure, the piezoelectricity core
Piece, reference signal line, detection probe, insulating layer and sample signal line are at least partly housed in the hollow structure, and described exhausted
Tight between edge layer and metal shell, the metal shell with gearshift for connecting, a table of the piezo chips
Face is grounded by metal shell.
Preferably, surface and piezo chips of the piezoelectricity membrane sample far from detection probe connect close to the surface of detection probe
Ground setting, the sample signal line are connect with detection probe, the table of the reference signal line and piezo chips far from detection probe
Face connection.
Preferably, the detection probe ground connection is arranged and connect with piezo chips close to the surface of detection probe, the sample
Product signal wire is connect with piezoelectricity membrane sample far from the surface of detection probe, and the reference signal line and piezo chips are visited far from detection
The surface of needle connects.
Preferably, detection probe one end insulation, the opposite other end is conductive, one end of detection probe insulation and piezoelectricity
Chip is connected close to the surface of detection probe, and one end of detection probe conduction is arranged close to piezoelectricity membrane sample.
Preferably, the probe further comprises elasticity transition part, and elasticity transition part one end and piezo chips are close
The surface of detection probe connects, and the other end is connect with detection probe, and the elasticity transition part is isolation material.
Preferably, the probe further comprises connector, elastic component and fixing piece, and the fixing piece is used to fill with displacement
Connection is set, described elastic component one end is connect with fixing piece, and one end is connect with connector, and the connector is connect with metal shell.
Preferably, the probe includes multiple detection probes, and multiple detection probes are arranged in array or linearly arrange.
Compared with prior art, the probe of the utility model includes the piezo chips and detection probe of connection, the piezoelectricity
Chip includes two opposite surfaces, one of surface earthing, when the detection probe applies piezoelectricity membrane sample any surface
When pressure, reaction force produced by piezoelectric film by detection probe be transmitted to piezo chips make piezoelectricity membrane sample ungrounded surface and
Voltage signal can be generated on the ungrounded surface of piezo chips respectively and is detected by probe.The probe of the utility model can be based on
One surface of piezoelectric film is gone to carry out the detection of piezoelectric parameter, without piezoelectric film is destroyed, operates fairly simple, detection efficiency height.
[Detailed description of the invention]
Fig. 1 is the structural schematic diagram of the device of the test piezoelectric modulus of the utility model first embodiment.
Fig. 2 is the structural schematic diagram of the probe in Fig. 1 of the utility model first embodiment.
Fig. 3 is the schematic cross-sectional view of detector in Fig. 2 of the utility model first embodiment.
Fig. 4 is voltage when detector touches piezoelectric film in the utility model first embodiment on piezoelectric film and piezo chips
Change schematic diagram.
Fig. 5 is the schematic diagram that the detector in Fig. 2 of the utility model first embodiment detects piezoelectricity membrane sample.
Fig. 6 is a kind of change that the detector in Fig. 2 of the utility model first embodiment detects piezoelectricity membrane sample
The schematic diagram of shape.
Fig. 7 is that the execution process for the control program of device that piezoelectric modulus is tested in the first embodiment of the utility model is shown
It is intended to.
Fig. 8 is the flow diagram that the method for piezoelectric modulus is tested in the 3rd embodiment of the utility model.
Fig. 9 is in the 3rd embodiment of the utility model using the test pressure of the test piezoelectric modulus device of first embodiment
The flow diagram of electrostrictive coefficient method.
Description of symbols: 10, the device of piezoelectric modulus is tested；11, gearshift；13, it pops one's head in；15, sample stage；17,
Workbench；20, piezoelectricity membrane sample；21, piezoelectric film；22, substrate；131, detector；133, connector；135, fixing piece；137,
Elastic component；1311, metal shell；1312, reference signal line；1313, piezo chips；1315, insulating layer；1317, detection probe；
1319, sample signal line.
[specific embodiment]
In order to make the purpose of this utility model, technical solution and advantage are more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only to explain
The utility model is not used to limit the utility model.
Referring to FIG. 1, the utility model first embodiment provides a kind of device 10 for testing piezoelectric modulus, it is used to test
The piezoelectric modulus of piezoelectric material, particularly for testing the piezoelectric modulus of piezoelectric film, the device 10 of the test piezoelectric modulus includes
Workbench 17, sample stage 15, gearshift 11 and probe 13, the sample stage 15 is for carrying piezoelectricity membrane sample 20 to be detected
And ground connection setting, institute's displacement apparatus 11 and sample stage 15 are arranged on workbench 17, institute's displacement apparatus 11 and probe 13
It connects and probe 13 can be driven mobile relative to sample stage 15, the probe 13 is (not shown) even with external data processing device
It connects, the voltage signal on the ungrounded surface of piezoelectric film can be collected when probe 13 touches the piezoelectric film on piezoelectricity membrane sample 20 simultaneously
It is transmitted to external data processing device.Institute's displacement apparatus 11 can at least drive probe 13 perpendicular to piezoelectricity membrane sample 20
It is moved on direction, institute's displacement apparatus 11 is preferably three-dimensional moving device, it can drives probe 13 on three dimension directions
It is moved, convenient for the test scope of probe 13 is adjusted flexibly.The probe 13 can be under the drive of gearshift 11 towards close
The direction of piezoelectricity membrane sample 20 is mobile, and when probe 13 touches the piezoelectric film on piezoelectricity membrane sample 20, probe 13 be can detecte
The voltage signal that generates to the ungrounded surface of piezoelectric film is simultaneously transmitted to external data processing device, and external data processing device passes through
The piezoelectric modulus of the available piezoelectric film of further Data Analysis Services.(mentioned in the utility model up and down etc.
The noun of locality is only limitted to the relative position in given view, rather than absolute position, it will be understood that given view planar carries out
After 180 ° of rotations, position word "lower" can replace with position word "upper".) it is appreciated that being used as a kind of deformation, the sample stage
15 can be omitted, and piezoelectricity membrane sample 20 is directly placed on the workbench 17 of ground connection setting.It is appreciated that the external number
It can be oscillograph, computer or other data acquisition equipments according to processing unit.
Referring to FIG. 2, the probe 13 includes detector 131, connector 133, fixing piece 135 and elastic component 137, it is described
Fixing piece 135 with gearshift 11 for being fixedly connected, and described 137 one end of elastic component is connect with fixing piece 135, and opposite is another
End is connect with connector 133, and the connector 133 is connect with detector 131, and the detector 131 is also used to and external data
Processing unit connection, the detector 131 are used to touch piezoelectricity membrane sample 20 close to the surface of probe 13 and obtain piezoelectric film sample
The voltage signal that generates on the ungrounded surface of the piezoelectric film of product 20 and it is transmitted to external data processing device.It is appreciated that institute
Stating elastic component 137 is spring, and the connector 133 is linear bearing.
Please also refer to Fig. 2 and Fig. 3, the detector 131 includes metal shell 1311, reference signal line 1312, piezoelectricity
Chip 1313, insulating layer 1315, detection probe 1317 and sample signal line 1319.The metal shell 1311 and connector 133
One end far from elastic component 137 connects, and the metal shell 1311 is a hollow structure and ground connection setting, the piezo chips
1313, insulating layer 1315 is whole is housed in the hollow structure, the reference signal line 1312, detection probe 1317 and sample letter
Number 1319 partial receipt of line is in the hollow structure.Insulating layer 1315 is located in hollow structure, and be filled in piezo chips 1313,
Reference signal line 1312, detection probe 1317 and sample signal line 1319 are located at the periphery in 1311 hollow structure of metal shell,
Make detection probe 1317, reference signal line 1312, sample signal line 1319, piezo chips 1313 respectively and in metal shell 1311
Wall insulation, and separated between piezo chips 1313 and detection probe 1317 by insulating layer 1315.In addition, insulating layer 1315 and gold
Belong to and gap is not present between 1311 inner wall of shell, both prevents from occurring in the detection process occurring that detection is caused to be tied with respect to shaking
Fruit is not accurate.The piezo chips 1313 have two opposite surfaces, and a surface is connect with reference signal line 1312, another
A surface is connected to metal shell 1311 to be grounded by the metal shell 1311.Specifically, the reference signal line
1312 one end are connect with piezo chips 1313 far from the surface of detection probe 1317, and the other end is used for and external data processing device
It connects, the reference generated on available surface of the piezo chips 1313 far from detection probe 1317 of the reference signal line 1312
Voltage signal size is simultaneously transmitted to external data processing device.Described 1319 one end of sample signal line and detection probe 1317 connect
It connects, the other end is used to connect with external data processing device, the available piezoelectricity membrane sample 20 of the sample signal line 1319
The sample voltage signal magnitude of ungrounded surface generation is simultaneously transmitted to external data processing device.
It is appreciated that the detection probe 1317 is made of conductive material.It is appreciated that the material of the metal shell 1311
Of fine quality to be selected as stainless steel, the material of the insulating layer 1315 is preferably polystyrene.In addition, the insulating layer 1315 can save
Slightly, as long as ensuring to insulate between piezo chips 1313 and detection probe 1317, and piezo chips 1313, detection probe 1317 and gold
Belong to 1311 inner wall insulation of shell, for example is located in metal shell 1311 separately through positioning device.It is appreciated that described
Piezo chips 1313 can be benchmark piezoelectric film, and such as benchmark pvdf membrane, the benchmark piezoelectric film i.e. its piezoelectric modulus meets application
Demand, and its thickness and piezoelectric modulus are it is known that the amount of charge and power that the benchmark piezoelectric film after being under pressure, generates
Size is directly proportional.It is appreciated that the metal shell 1311 can be omitted, table of the piezo chips 1313 close to detection probe 1317
Face is connect by a signal wire independent grounding, the insulating layer 1315 with connector 133, and insulating layer 1315 is equivalent to one at this time
Insulation crust, piezo chips 1313 are whole to be housed in insulating layer 1315, the detection probe 1317,1312 and of reference signal line
1319 partial receipt of sample signal line is in insulating layer 1315.
When work, when detector 131 removes the piezoelectric film on touching piezoelectricity membrane sample 20, detection probe 1317 can be to piezoelectricity
Film applies a power, and since the piezoelectric effect of piezoelectric film itself can generate an electric field on piezoelectric film, and piezoelectric film is close
The surface earthing of sample stage 15 is arranged, therefore the surface that piezoelectric film is in contact with detection probe 1317 can generate sample voltage letter
Number, the sample signal line 1319 can detect the sample voltage signal and be transmitted to external data processing device.In addition, due to
The effect of active force and reaction force, detection probe 1317 will receive the reaction force of piezoelectricity membrane sample 20, and pass through insulating layer
1315 are applied to piezo chips 1313, since the piezoelectric effect of piezo chips 1313 can generate an electricity in piezo chips 1313
, in addition, the piezo chips 1313 are arranged close to the surface earthing of detection probe 1317, so can be remote in piezo chips 1313
A reference voltage signal is generated on surface from detection probe 1317, the reference signal line 1312 can detecte the reference
Voltage signal is simultaneously transmitted to external data processing device.External data processing device by collected reference voltage signal and
The piezoelectric modulus of the piezoelectric film on piezoelectricity membrane sample 20 can be obtained by further Data Analysis Services for sample voltage signal.
Referring to FIG. 4, it is appreciated that the device 10 of the test piezoelectric modulus of the utility model is carrying out piezoelectricity membrane sample 20
Actual measurement when, it will usually take the standard sample of a known piezoelectric modulus as reference, next specifically to calculate
Process to the Data Analysis Services of external data processing device is illustrated explanation.
The calculation formula of piezoelectric modulus are as follows: piezoelectric modulus D33=k*V1/V0, wherein V1Represent the generation of piezoelectricity membrane sample 20
Voltage signal size, V0The voltage signal size of the generation of piezo chips 1313 is represented, k represents a proportionality coefficient.To be measured
Piezoelectricity membrane sample 20 detected before, first to piezoelectric modulus D known to one33Standard piezoelectric membrane sample detected, thus
Obtain coefficient k, k=D33 marks* V0 mark/V1 mark, wherein V0 markAnd V1 markIt can be obtained by detection, D33 marksBelong to known parameters.
Piezoelectricity membrane sample 20 to be measured is detected to obtain V again1 sampleAnd V0 sample, V1 sampleRepresent piezoelectricity membrane sample 20 to be measured
On 21 surface of piezoelectric film voltage signal, V0 sampleWhen representative detects piezoelectric film sample 20 to be measured in piezo chips 1313
The voltage signal of generation obtains the piezoelectric modulus D of the piezoelectric film on piezoelectricity membrane sample 2033=(D33 marks* V0 mark* V1 sample)/(V1 mark*
V0 sample).It is appreciated that the coefficient k is known parameter after a debugging of standard piezoelectric membrane sample 20, that is, detecting
When the piezoelectric modulus of piezoelectricity membrane sample 20 to be measured, standard piezoelectric membrane sample 20 is not needed to reuse as reference, Ke Yizhi
It connects and piezoelectricity membrane sample 20 to be measured is detected.
It is appreciated that being used as a kind of deformation, the detector 131 be can be used alone, i.e., the described fixing piece 135, elasticity
Part 137 and connector 133 can be omitted.When detection probe 1317 removes touching piezoelectricity membrane sample 20, based on active force and anti-work
Principle firmly, the piezoelectricity membrane sample 20 can also be conducted to 1,317 1 reaction forces of detection probe and by insulating layer 1315
To piezo chips 1313, to generate a voltage signal respectively in piezo chips 1313 and piezoelectric film 21 simultaneously, reference is believed
Number line 1312 and sample signal line 1319 detect piezo chips 1313 and voltage signal on piezoelectric film 21 respectively and are transmitted to
External data processing device.
In addition, it is to be appreciated that deforming as another kind, the detection probe 1317 is with piezo chips 1313 close to detection
The surface of probe 1317 is connected by an elasticity transition part (not shown), and the elasticity transition part is isolation material, the piezoelectricity
The reaction force that membrane sample 20 is applied to detection probe 1317 can directly be conducted by elasticity transition part to piezo chips 1313
Close to the surface of detection probe 1317.It is further appreciated that directly will test probe 1317 be fabricated to one end insulate one end conduction, will
One end that detection probe 1317 insulate is connect with piezo chips 1313 close to the surface of detection probe 1317, and detection probe 1317 is led
Touching piezoelectricity membrane sample 20 is removed in one end of electricity.
As long as being appreciated that detection probe 1317 is connected with piezo chips 1313, and piezoelectricity membrane sample 20 and piezoelectricity core
Piece 1313 is uniform to flank ground, and the single-contact formula pressing detection to piezoelectricity membrane sample 20 of the utility model can be realized.Herein
Connection can be and be directly connected to, be also possible to be indirectly connected with, be carried out as long as detection probe 1317 is contacted with piezoelectricity membrane sample 20
Reaction force caused by active force when detection can exert a force to piezo chips 1313, can be detected.
Please also refer to Fig. 2 and Fig. 5, the piezoelectricity membrane sample 20 of the utility model refers to being formed in situ in substrate 22
PVDF (polyvinylidene fluoride, polyvinylidene fluoride) film 21, the pvdf membrane 21 are piezoelectric film 21, that is, are pressed
Electrolemma sample 20 includes substrate 22 and pvdf membrane 21 simultaneously.It is appreciated that described be formed in situ refers to leading to macromolecule membrane
It crosses the conventional approaches such as chemical vapor deposition, physical vapour deposition (PVD), coating and is formed in substrate surface, basic thickness can maintain 9 μ
M greatly improves resolution ratio hereinafter, the macromolecule membrane of very thin thickness therefore can be formed.And for many semiconductor essences
Close device, substrate 22 may be directly wafer etc., it may be considered that piezoelectricity membrane sample 20 is directly with this substrate 22 and piezoelectric film 21
Mode measure.It is further appreciated that the piezoelectricity membrane sample 20 is also possible to simple piezoelectric film, such as currently on the market
The piezoelectric polymer film product of existing sale, in general, the piezoelectric polymer film of this finished product, which needs first to be drawn high, has one
Stress is determined then again by being bonded in substrate, and the macromolecule membrane thickness that such method is formed is at 30 μm or more.
When specific test, when piezoelectricity membrane sample 20 is placed on sample stage 15, substrate 22 is arranged close to sample stage 15, by
Need to carry out electric signal conduction in substrate 22, the substrate 22 must be conductive material, preferably metal material.The substrate 22 is logical
The ground connection of sample stage 15 is crossed, when the detection probe 1317 removes touching pressing piezoelectric film 21, can be visited in piezoelectric film 21 close to detection
The surface of surface and piezo chips 1313 far from detection probe 1317 of needle 1317 all generates a voltage signal, wherein detection is visited
Needle 1317 connects with piezo chips 1313 is isolated between the earth's surface by insulating layer 1315.Sample signal line 1319 can pass through detection
Probe 1317 collects the sample voltage signal that piezoelectric film 21 generates on the surface of detection probe 1317 and is transmitted to outside
Data processing equipment, reference signal line 1312, which can collect, to be generated on surface of the piezo chips 1313 far from detection probe 1317
Reference voltage signal is simultaneously transmitted to external data processing device, and external data processing device compares two voltage signals and passes through number
The piezoelectric modulus of piezoelectric film 21 to be measured is obtained according to processing.The device 10 of the test piezoelectric modulus of the utility model can be based on pressure
The surface that electrolemma sample 20 is provided with piezoelectric film 21 is detected, realize single side detection, do not need by piezoelectric film 21 from
It is taken off in substrate 22 to being destroyed to piezoelectricity membrane sample 20, and existing test platform is required piezoelectric film 21 from base
It is detected simultaneously on two surfaces of piezoelectric film 21 to obtain the piezoelectric modulus of piezoelectric film 21, this reality again after being taken off on bottom 22
Have with the device 10 of novel test piezoelectric modulus easy to use, piezoelectricity membrane sample can not be destroyed especially such as fine chip sample
Product etc. and the high advantage of detection efficiency.
In addition, it is to be appreciated that the device 10 of the test piezoelectric modulus of the utility model is equally applicable to individual pressure
Electrolemma 21 is detected.Piezoelectric film 21 is placed on sample stage 15, the ground connection setting of sample stage 15, when detector 131 goes to touch
When piezoelectric film 21, a sample electricity can be generated respectively on the surface of detector 131 and piezo chips 1313 in piezoelectric film 21
Signal and reference voltage signal are pressed, reference signal line 1312 detects the reference voltage signal and is transmitted to external data processing dress
It sets, sample signal line 1319 detects the sample voltage signal and is transmitted to external data processing device, external data processing dress
Set the piezoelectric modulus that piezoelectric film 21 can be obtained by further Data Analysis Services.
Referring to FIG. 6, the sample signal line 1319 is also connect with sample stage 15 or substrate 22 as a kind of deformation, this
When sample stage 15 and substrate 22 it is earth-free, and will test the setting of the ground connection of probe 1317 and detection probe 1317 and piezo chips 1313
It is connected close to the surface of sample stage 15.When the detection probe 1317 goes touching piezoelectric film 21 close to the surface of detection probe 1317
When, detection probe 1317 is applied to 21 1 active forces of piezoelectric film, and piezoelectric film 21 can generate one due to the piezoelectric effect of itself
Electric field is arranged since detection probe 1317 is grounded, so the surface potential that piezoelectric film 21 is contacted with detection probe 1317 is zero, because
This can generate a voltage signal on surface of the piezoelectric film 21 far from detection probe 1317 namely produce close to 15 surface of sample stage
Raw sample voltage signal, the sample signal line 1319 are transmitted to external data processing dress after detecting the sample voltage signal
It sets.In addition, piezoelectric film 21 can give detection probe 1,317 1 reaction forces, thus to piezo chips 1313 close to detection probe
1317 surface applies a power, can equally generate an electric field in piezo chips 1313, due to piezo chips 1313 and detection
The surface earthing setting that probe 1317 contacts, therefore one can be generated on surface of the piezo chips 1313 far from detection probe 1317
A reference voltage signal, the reference signal line 1312 can detecte the reference voltage signal and be transmitted to external data processing
Device.The piezoelectric modulus of same available piezoelectric film 21 is analyzed by the comparison of external data processing device.
In addition, the device 10 of the test piezoelectric modulus still further comprises in the other embodiments of the utility model
Controller (not shown), the controller is connect with gearshift 11 and the running of controllable gearshift 11.It is appreciated that institute
It states and is provided with operation interface (not shown) on controller, user can go the control of setting gearshift 11 by the operation interface
Processing procedure sequence, to set movement travel and the track of gearshift 11.It needs to detect for example, user sets on the controller
After number and detection range, controller, that is, command displacement device 11 is scanned formula to piezoelectricity membrane sample 20 according to the program of setting
Detection can execute a secondary program and carry out point by point scanning test to piezoelectric film 21, and test result is more accurate, and testing efficiency is significant
It is promoted.Next exemplary illustrated to do with control program shown in fig. 7, it is not limited here.A certain position is set
It is set to origin, space three-dimensional (XYZ) coordinate system is established with origin, as shown in fig. 7, when starting to execute detection operation, controller
Command displacement device 11 drives probe 13 to be moved to origin, then controls the sweep starting point that probe 13 is moved to the direction XY, then controls
System probe 13 is moved to the initial point of Z-direction up stroke, then controls probe 13 and be moved at Z-direction maximum position.It is appreciated that
Probe 13 can be touched when probe 13 is moved at Z-direction maximum position with certain speed and piezoelectric film 21.Controller is again
The drive of command displacement device 11 probe 13 is moved to the initial point of Z-direction up stroke, so as to complete the detection debugging stage.Then
Setting detection number, spacing distance and detection range, the detection range refer to the direction XY in the operation interface of controller
On detection range.Subsequent controller command displacement device 11 drives probe 13 to carry out in X-direction according to preset interval distance
Point by point scanning detection, after the detection in X-direction is completed, controller control probe 13 is moved to origin, then execute Y-direction by
Spot scan detection, entire detection process terminates after the completion of the Scanning Detction in Y-direction.It is appreciated that the direction XY
It is parallel to the reference axis on 21 surface of piezoelectric film, Z-direction is perpendicular to the reference axis on 21 surface of piezoelectric film.
It is appreciated that gearshift 11 can also drive probe 13 to carry out sweeping in X-direction point by point according to preset interval distance
Detection is retouched, a line is scanned through and moves certain spacing distance in the Y direction again later, then executes the point by point scanning inspection in X-direction
It surveys, until completing whole scannings in detection range.It is further appreciated that specific detection stroke can by the controller come
It is set, it is numerous to list herein.
It is appreciated that being used as a kind of deformation, the device 10 of the test piezoelectric modulus may include multiple probes 13, work as survey
It, can be in the running of a Z-direction when device 10 of pressure testing electrostrictive coefficient is scanned formula test to piezoelectricity membrane sample 20
Piezoelectricity membrane sample 20 is completed to detect, or progressive scan detection can be carried out to piezoelectricity membrane sample 20, relative to single probe
13 point by point scanning formula detection greatly improves detection efficiency.It is deformed as another kind, the probe 13 includes that multiple detections are visited
Needle 1317, multiple detection probes 1317 are arranged in array or linearly arrange, when the device 10 of test piezoelectric modulus is to piezoelectric film
When sample 20 is scanned formula test, piezoelectricity membrane sample 20 can be completed to detect in the running of a Z-direction, or
Piezoelectricity membrane sample 20 can be detected line by line, the point by point scanning formula detection relative to single detection probe 1317 greatly promotes
Detection efficiency.
The utility model second embodiment also provides a kind of system for testing piezoelectric modulus comprising described in first embodiment
Test piezoelectric modulus device and data processing equipment (not shown), the probe 13 connect with data processing equipment signal,
The voltage signal on the ungrounded surface on the ungrounded surface and piezo chips of 13 acquisition piezoelectricity membrane sample of probe simultaneously sends data to
Processing unit, data processing equipment receives and ungrounded surface and piezo chips based on 13 collected piezoelectricity membrane samples of probe
The voltage signal on ungrounded surface analyze to obtain the piezoelectric modulus of piezoelectricity membrane sample.The signal connection can be wired company
It connects or is wirelessly connected, such as pass through Bluetooth transmission, wifi transmission or signal wire transmission etc..
Referring to FIG. 8, the utility model 3rd embodiment also provides a kind of method for testing piezoelectric modulus, the test pressure
The method of electrostrictive coefficient the following steps are included:
Detection probe and piezo chips are provided, wherein piezo chips have opposite two surfaces, and piezo chips and detection are visited
Needle connection and piezo chips wherein surface earthing setting；
Piezoelectricity membrane sample to be detected is provided and makes a surface earthing of piezoelectricity membrane sample；
By detection probe, to piezoelectricity membrane sample, wherein progress contact pressing detection in a surface obtains the piezoelectricity membrane sample
The reference voltage signal that the ungrounded surface of voltage signal and piezo chips that ungrounded surface generates generates；
The piezoelectric modulus of piezoelectricity membrane sample is obtained by two voltage signal.
It is appreciated that the above-mentioned detection to piezoelectricity membrane sample can be and directly detect to piezoelectric film itself merely,
It can be and the piezoelectric film product being formed in conductive substrates is detected together, as long as meeting makes one surface earthing of piezoelectric film i.e.
It can.When piezoelectricity membrane sample is simple piezoelectric film, pressing detection can be carried out based on any surface of piezoelectric film；Work as piezoelectric film
Sample be comprising conductive substrates and be formed in conductive substrates piezoelectric film when, be preferably based on pressing have piezoelectric film surface go
It is detected.
It is appreciated that when surface and piezo chips of the piezoelectricity membrane sample far from detection probe connect close to the surface of detection probe
When ground, detection probe is conductive material, can connect or pass through insulation between detection probe and piezo chips by insulating layer
Elasticity transition part connection with realize between the two insulation connection or detection probe one end insulation, the opposite other end
Conduction, and one end of detection probe conduction is for touching piezoelectricity membrane sample close to the surface of detection probe, one end of insulation with
Piezo chips connect, and the voltage signal generated on piezoelectricity membrane sample is then led to by piezoelectricity membrane sample close to the surface of detection probe
It crosses detection probe to pass, the voltage signal generated in piezo chips is transmitted by piezo chips far from the surface of detection probe
It goes out.When the detection probe is ground connection setting, described detection probe one end is connect with piezo chips, and opposite one end is gone to touch
The voltage signal that bruising electrolemma sample generates on the surface of detection probe, piezoelectricity membrane sample is by piezoelectricity membrane sample far from inspection
The surface of probing needle passes, and the voltage signal generated in piezo chips is passed by piezo chips far from the surface of detection probe
It passs away.
In the 3rd embodiment of the utility model, the calculation formula of piezoelectric modulus are as follows: piezoelectric modulus D33=k*V1/V0,
Wherein V1Represent the voltage signal size on 21 surface of piezoelectric film, V0Represent the voltage signal size of the generation of piezo chips 1313, k generation
One proportionality coefficient of table.Due to using standard piezoelectric membrane sample, so D33 marksFor known parameters, V0 markAnd V1 markBy this reality
It is obtained with the test of device 10 of the test piezoelectric modulus of novel first embodiment.It is, therefore, to be understood that the step S1 and S2
Purpose is proportionality coefficient k=D in order to obtain33 marks* V0 mark/V1 mark。
Referring to FIG. 9, specifically, using the device 10 of test piezoelectric modulus as described above, the test piezoelectric modulus
Device 10 include detection probe 1317, reference signal line 1312, piezo chips 1313 and sample signal line 1319, piezo chips
There are two opposite surface, one of surface earthing, another surfaces to connect with reference signal line for 1313 tools, the sample letter
Number line 1319 is by detection probe 1317 or directly connect with the ungrounded surface of piezoelectric film 21, when detection probe 1317 goes to touch
A voltage letter can be generated when piezoelectric film 21 is close to the surface of detection probe 1317 on piezoelectric film 21 and piezo chips 1313
Number.
It include following step to the method for piezoelectric film sample test piezoelectric modulus using the device 10 of above-mentioned test piezoelectric modulus
It is rapid:
Step S1: standard piezoelectric membrane sample is placed；
Step S2: standard piezoelectric membrane sample is detected；
Step S3: piezoelectricity membrane sample to be measured is placed；
Step S4: the detection range of detection probe is set according to the size of piezoelectricity membrane sample to be measured；And
Step S5: traveling probe is scanned formula detection so that exporting piezoelectricity to be measured simultaneously to piezoelectricity membrane sample to be measured
The voltage signal on membrane sample surface and piezo chips surface is to obtain the piezoelectric modulus of piezoelectricity membrane sample to be measured.
It is appreciated that the step S1 and step S2 can be omitted, the coefficient k passes through a standard piezoelectric membrane sample tune
It is then known parameter after examination, i.e., when detecting the piezoelectric modulus of piezoelectricity membrane sample to be measured, does not need to reuse standard pressure
Electrolemma sample can directly detect piezoelectricity membrane sample to be measured as reference.
It is appreciated that in the step S4, multiple test points and/or more can be set in the areal extent of piezoelectric film
A detection position, so that it is guaranteed that testing result is more accurate, detection efficiency is higher.
Single-point detection is carried out to piezoelectricity membrane sample it is appreciated that detection probe can also be moved in the step S5, together
The piezoelectric modulus of the available piezoelectricity membrane sample of sample.In addition, it is to be appreciated that after being scanned formula detection in the step S5
A series of testing result is obtained, can be calculated based on existing K mean cluster algorithm, weighted mean method or other algorithms
The average value of multiple testing results is obtained, so that testing result is more accurate.
Compared with prior art, the probe of the utility model includes the piezo chips and detection probe of connection, the piezoelectricity
Chip includes two opposite surfaces, one of surface earthing, when the detection probe applies piezoelectricity membrane sample any surface
When pressure, reaction force produced by piezoelectric film by detection probe be transmitted to piezo chips make piezoelectricity membrane sample ungrounded surface and
Voltage signal can be generated on the ungrounded surface of piezo chips respectively and is detected by probe.The probe of the utility model can be based on
One surface of piezoelectric film is gone to carry out the detection of piezoelectric parameter, without piezoelectric film is destroyed, operates fairly simple, detection efficiency height.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modification within the principle of utility model, equivalent replacement and improvement etc. should all include the protection scope of the utility model
Within.
Claims (10)
1. a kind of probe is used to test the voltage signal generated after piezoelectricity membrane sample pressure, one surface of piezoelectricity membrane sample
Ground connection, it is characterised in that: the probe includes the piezo chips and detection probe of connection, and the piezo chips include opposite two
A surface, one of surface earthing, when the detection probe presses to piezoelectricity membrane sample any surface, produced by piezoelectric film
Reaction force by detection probe be transmitted to piezo chips make piezoelectricity membrane sample ungrounded surface and piezo chips it is ungrounded
Voltage signal can be generated on surface respectively and is detected by probe.
2. probe as described in claim 1, it is characterised in that: the probe further comprises reference signal line and sample signal
Line, the sample signal line are connect with the ungrounded surface of piezoelectricity membrane sample, and the reference signal line and the non-of piezo chips connect
Ground surface connection, the sample signal line and reference signal line are also used to connect with external data processing device.
3. probe as claimed in claim 2, it is characterised in that: the probe further includes insulating layer, and the insulating layer is wrapped in
The periphery of reference signal line, piezo chips, detection probe and sample signal line, and by exhausted between piezo chips and detection probe
Edge layer connection.
4. probe as claimed in claim 3, it is characterised in that: the probe further comprises metal shell, outside the metal
Shell is hollow structure, and the piezo chips, reference signal line, detection probe, insulating layer and sample signal line at least partly accommodate
In the hollow structure, and tight between the insulating layer and metal shell, the metal shell are used to connect with gearshift
It connects, a surface of the piezo chips is grounded by metal shell.
5. probe as claimed in claim 2, it is characterised in that: surface and piezoelectricity of the piezoelectricity membrane sample far from detection probe
Chip is arranged close to the surface earthing of detection probe, and the sample signal line connect with detection probe, the reference signal line and
Piezo chips are connected far from the surface of detection probe.
6. probe as claimed in claim 2, it is characterised in that: the detection probe ground connection is arranged and with piezo chips close to inspection
The surface of probing needle connects, and the sample signal line is connect with piezoelectricity membrane sample far from the surface of detection probe, the reference letter
Number line and piezo chips are connected far from the surface of detection probe.
7. probe as described in claim 1, it is characterised in that: detection probe one end insulation, the opposite other end is conductive,
One end of detection probe insulation and piezo chips are connected close to the surface of detection probe, and one end of detection probe conduction is close to piezoelectricity
Membrane sample setting.
8. probe as described in claim 1, it is characterised in that: the probe further comprises elasticity transition part, the elasticity
Transition piece one end and piezo chips are connected close to the surface of detection probe, and the other end is connect with detection probe, the elasticity transition
Part is isolation material.
9. probe as claimed in claim 4, it is characterised in that: the probe further comprises connector, elastic component and fixation
Part, the fixing piece with gearshift for connecting, and described elastic component one end is connect with fixing piece, and one end is connect with connector,
The connector is connect with metal shell.
10. probe as described in claim 1, it is characterised in that: the probe includes multiple detection probes, multiple detection probes
It is arranged in array or linearly arranges.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111855548A (en) * | 2020-07-21 | 2020-10-30 | 中山大学 | Monitoring probe, system and method for corrosion damage of pressure pipeline |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111855548A (en) * | 2020-07-21 | 2020-10-30 | 中山大学 | Monitoring probe, system and method for corrosion damage of pressure pipeline |
| CN111855548B (en) * | 2020-07-21 | 2021-11-09 | 中山大学 | Monitoring probe, system and method for corrosion damage of pressure pipeline |
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Effective date of registration: 20200624 Address after: No.88, Yingbin Avenue, Shouan Town, Pujiang County, Chengdu City, Sichuan Province Patentee after: Chengdu Dachao Technology Co.,Ltd. Address before: 611600 Bajiao Village Group 5, Shou'an Town, Pujiang County, Chengdu City, Sichuan Province Patentee before: Fang Rong |